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Title: Systems and methods for interferometric end point detection for a focused ion beam fabrication tool

Abstract

Various technologies for providing an operator of a focused ion beam (FIB) system with navigational and processing data are described herein. An exemplary system includes a broadband light source and a narrowband light source that emit light to a target of the FIB. An optical detector receives reflections of the broadband light from the target and outputs data that is used to generate two-dimensional images of the target in a region near a location of incidence of the FIB at the target. An interferometer receives reflections of the narrowband light from the target and outputs data indicative of an interference pattern of the narrowband reflections. A computing device computes a thickness of one or more material layers that make up the target based upon the interference pattern. A two-dimensional image of the target and an indication of the computed thickness are then displayed to the operator of the FIB.

Inventors:
; ; ;
Issue Date:
Research Org.:
National Technology & Engineering Solutions of Sandia, LLC, Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1600167
Patent Number(s):
10,446,369
Application Number:
15/623,239
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
DOE Contract Number:  
NA0003525
Resource Type:
Patent
Resource Relation:
Patent File Date: 06/14/2017
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Phillips, Brian Scott, Ball, Steven Norris, Salazar, Gregory Paul, and Shul, Randy J. Systems and methods for interferometric end point detection for a focused ion beam fabrication tool. United States: N. p., 2019. Web.
Phillips, Brian Scott, Ball, Steven Norris, Salazar, Gregory Paul, & Shul, Randy J. Systems and methods for interferometric end point detection for a focused ion beam fabrication tool. United States.
Phillips, Brian Scott, Ball, Steven Norris, Salazar, Gregory Paul, and Shul, Randy J. Tue . "Systems and methods for interferometric end point detection for a focused ion beam fabrication tool". United States. https://www.osti.gov/servlets/purl/1600167.
@article{osti_1600167,
title = {Systems and methods for interferometric end point detection for a focused ion beam fabrication tool},
author = {Phillips, Brian Scott and Ball, Steven Norris and Salazar, Gregory Paul and Shul, Randy J.},
abstractNote = {Various technologies for providing an operator of a focused ion beam (FIB) system with navigational and processing data are described herein. An exemplary system includes a broadband light source and a narrowband light source that emit light to a target of the FIB. An optical detector receives reflections of the broadband light from the target and outputs data that is used to generate two-dimensional images of the target in a region near a location of incidence of the FIB at the target. An interferometer receives reflections of the narrowband light from the target and outputs data indicative of an interference pattern of the narrowband reflections. A computing device computes a thickness of one or more material layers that make up the target based upon the interference pattern. A two-dimensional image of the target and an indication of the computed thickness are then displayed to the operator of the FIB.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {10}
}

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Works referenced in this record:

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Focused particle beam systems and methods using a tilt column
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