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Title: Method and apparatus for implementing ultra-high stability long-vertical travel stage

Abstract

A method and apparatus for implementing an ultra-high stability long-vertical travel stage are provided. The ultra-high stability long-vertical travel stage includes a first wedge supporting a second wedge, each wedge formed of a selected stable material having predefined rigidity and low thermal expansion coefficient, and integrated air bearings. A linear guiding mechanism includes a plurality of flexures. The first wedge is driven in a plane providing vertical motion on the second wedge with the integrated air bearings lifted and the flexures allowing for movement.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1576375
Patent Number(s):
10393242
Application Number:
15/253,092
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Classifications (CPCs):
F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16C - SHAFTS
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23Q - DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2016 Aug 31
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Preissner, Curt A., Vine, David, Jacobsen, Chris J., Maser, Jorg M., Lai, Barry, Roehrig, Christian, Schmidt, Oliver A., and Vogt, Franz Stefan. Method and apparatus for implementing ultra-high stability long-vertical travel stage. United States: N. p., 2019. Web.
Preissner, Curt A., Vine, David, Jacobsen, Chris J., Maser, Jorg M., Lai, Barry, Roehrig, Christian, Schmidt, Oliver A., & Vogt, Franz Stefan. Method and apparatus for implementing ultra-high stability long-vertical travel stage. United States.
Preissner, Curt A., Vine, David, Jacobsen, Chris J., Maser, Jorg M., Lai, Barry, Roehrig, Christian, Schmidt, Oliver A., and Vogt, Franz Stefan. Tue . "Method and apparatus for implementing ultra-high stability long-vertical travel stage". United States. https://www.osti.gov/servlets/purl/1576375.
@article{osti_1576375,
title = {Method and apparatus for implementing ultra-high stability long-vertical travel stage},
author = {Preissner, Curt A. and Vine, David and Jacobsen, Chris J. and Maser, Jorg M. and Lai, Barry and Roehrig, Christian and Schmidt, Oliver A. and Vogt, Franz Stefan},
abstractNote = {A method and apparatus for implementing an ultra-high stability long-vertical travel stage are provided. The ultra-high stability long-vertical travel stage includes a first wedge supporting a second wedge, each wedge formed of a selected stable material having predefined rigidity and low thermal expansion coefficient, and integrated air bearings. A linear guiding mechanism includes a plurality of flexures. The first wedge is driven in a plane providing vertical motion on the second wedge with the integrated air bearings lifted and the flexures allowing for movement.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {8}
}

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