Method and apparatus for implementing ultra-high stability long-vertical travel stage
Abstract
A method and apparatus for implementing an ultra-high stability long-vertical travel stage are provided. The ultra-high stability long-vertical travel stage includes a first wedge supporting a second wedge, each wedge formed of a selected stable material having predefined rigidity and low thermal expansion coefficient, and integrated air bearings. A linear guiding mechanism includes a plurality of flexures. The first wedge is driven in a plane providing vertical motion on the second wedge with the integrated air bearings lifted and the flexures allowing for movement.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1576375
- Patent Number(s):
- 10393242
- Application Number:
- 15/253,092
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16C - SHAFTS
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23Q - DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2016 Aug 31
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Preissner, Curt A., Vine, David, Jacobsen, Chris J., Maser, Jorg M., Lai, Barry, Roehrig, Christian, Schmidt, Oliver A., and Vogt, Franz Stefan. Method and apparatus for implementing ultra-high stability long-vertical travel stage. United States: N. p., 2019.
Web.
Preissner, Curt A., Vine, David, Jacobsen, Chris J., Maser, Jorg M., Lai, Barry, Roehrig, Christian, Schmidt, Oliver A., & Vogt, Franz Stefan. Method and apparatus for implementing ultra-high stability long-vertical travel stage. United States.
Preissner, Curt A., Vine, David, Jacobsen, Chris J., Maser, Jorg M., Lai, Barry, Roehrig, Christian, Schmidt, Oliver A., and Vogt, Franz Stefan. Tue .
"Method and apparatus for implementing ultra-high stability long-vertical travel stage". United States. https://www.osti.gov/servlets/purl/1576375.
@article{osti_1576375,
title = {Method and apparatus for implementing ultra-high stability long-vertical travel stage},
author = {Preissner, Curt A. and Vine, David and Jacobsen, Chris J. and Maser, Jorg M. and Lai, Barry and Roehrig, Christian and Schmidt, Oliver A. and Vogt, Franz Stefan},
abstractNote = {A method and apparatus for implementing an ultra-high stability long-vertical travel stage are provided. The ultra-high stability long-vertical travel stage includes a first wedge supporting a second wedge, each wedge formed of a selected stable material having predefined rigidity and low thermal expansion coefficient, and integrated air bearings. A linear guiding mechanism includes a plurality of flexures. The first wedge is driven in a plane providing vertical motion on the second wedge with the integrated air bearings lifted and the flexures allowing for movement.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {8}
}
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