Method and apparatus for implementing ultra-high stability long-vertical travel stage

Preissner, Curt A.; Vine, David; Jacobsen, Chris J.; Maser, Jorg M.; Lai, Barry; Roehrig, Christian; Schmidt, Oliver A.; Vogt, Franz Stefan

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A - human necessities
A01 - agriculture
A21 - baking
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Title: Method and apparatus for implementing ultra-high stability long-vertical travel stage

Abstract

A method and apparatus for implementing an ultra-high stability long-vertical travel stage are provided. The ultra-high stability long-vertical travel stage includes a first wedge supporting a second wedge, each wedge formed of a selected stable material having predefined rigidity and low thermal expansion coefficient, and integrated air bearings. A linear guiding mechanism includes a plurality of flexures. The first wedge is driven in a plane providing vertical motion on the second wedge with the integrated air bearings lifted and the flexures allowing for movement.

Inventors:: Preissner, Curt A.; Vine, David; Jacobsen, Chris J.; Maser, Jorg M.; Lai, Barry; Roehrig, Christian; Schmidt, Oliver A.; Vogt, Franz Stefan

Issue Date:: 2019-08-27

Research Org.:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1576375

Patent Number(s):: 10393242

Application Number:: 15/253,092

Assignee:: UChicago Argonne, LLC (Chicago, IL)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23Q - DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING

F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16C - SHAFTS

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B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23Q - DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING
B23Q1/015 - {Frames, beds, pillars}
B23Q1/25 - Movable or adjustable work or tool supports

F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16C - SHAFTS
F16C29/005 - {Guide rails or tracks for a linear bearing, i.e. adapted for movement of a carriage or bearing body there along}

F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16H - GEARING
F16H25/183 - {conveying only reciprocating motion, e.g. wedges}

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DOE Contract Number:: AC02-06CH11357

Resource Type:: Patent

Resource Relation:: Patent File Date: 2016 Aug 31

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Preissner, Curt A., Vine, David, Jacobsen, Chris J., Maser, Jorg M., Lai, Barry, Roehrig, Christian, Schmidt, Oliver A., and Vogt, Franz Stefan. Method and apparatus for implementing ultra-high stability long-vertical travel stage.  United States: N. p., 2019. 
        Web.

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                    Preissner, Curt A., Vine, David, Jacobsen, Chris J., Maser, Jorg M., Lai, Barry, Roehrig, Christian, Schmidt, Oliver A., & Vogt, Franz Stefan. Method and apparatus for implementing ultra-high stability long-vertical travel stage.  United States.

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                    Preissner, Curt A., Vine, David, Jacobsen, Chris J., Maser, Jorg M., Lai, Barry, Roehrig, Christian, Schmidt, Oliver A., and Vogt, Franz Stefan. Tue .  
        "Method and apparatus for implementing ultra-high stability long-vertical travel stage".  United States.  https://www.osti.gov/servlets/purl/1576375.

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@article{osti_1576375,

  title        = {Method and apparatus for implementing ultra-high stability long-vertical travel stage},

  author       = {Preissner, Curt A. and Vine, David and Jacobsen, Chris J. and Maser, Jorg M. and Lai, Barry and Roehrig, Christian and Schmidt, Oliver A. and Vogt, Franz Stefan},

  abstractNote = {A method and apparatus for implementing an ultra-high stability long-vertical travel stage are provided. The ultra-high stability long-vertical travel stage includes a first wedge supporting a second wedge, each wedge formed of a selected stable material having predefined rigidity and low thermal expansion coefficient, and integrated air bearings. A linear guiding mechanism includes a plurality of flexures. The first wedge is driven in a plane providing vertical motion on the second wedge with the integrated air bearings lifted and the flexures allowing for movement.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {8}

}

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Works referenced in this record:

Table device and conveyance device
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Article positioner and method
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Balan, Aviv
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Motor driven high stability brake for linear motion systems
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Rajaraman, Devarajan
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Chitayat, Anwar
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Aligner
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Small footprint vertical lift and rotation stage
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Title: Method and apparatus for implementing ultra-high stability long-vertical travel stage

Abstract

Citation Formats

Table device and conveyance device patent, January 2018

Article positioner and method patent, June 1989

Stage Apparatus for Semiconductor Inspection and Lithography Systems patent-application, June 2015

Workpiece positioning table with air bearing pads patent, July 1983

Linear motor driven vertical lift stage patent, March 1998

Motor driven high stability brake for linear motion systems patent, July 2003

Gib for Slides for Machine Tools and Other Mechanism patent, February 1924

Method for producing air bearing pads for positioning table patent, February 1986

Aligner patent, July 1941

Small footprint vertical lift and rotation stage patent, November 2002

Mounting for coordinate measuring machine arms and probes patent, May 1979

Table device and conveyance device
patent, January 2018

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patent, June 1989

Stage Apparatus for Semiconductor Inspection and Lithography Systems
patent-application, June 2015

Workpiece positioning table with air bearing pads
patent, July 1983

Linear motor driven vertical lift stage
patent, March 1998

Motor driven high stability brake for linear motion systems
patent, July 2003

Gib for Slides for Machine Tools and Other Mechanism
patent, February 1924

Method for producing air bearing pads for positioning table
patent, February 1986

Aligner
patent, July 1941

Small footprint vertical lift and rotation stage
patent, November 2002

Mounting for coordinate measuring machine arms and probes
patent, May 1979