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Title: Method of manufacturing image sensor including nanostructure color filter

Abstract

A method of manufacturing an image sensor includes: preparing a sensor substrate including: a sensor layer including a photosensitive cell; and a signal line layer including lines to receive electric signals from the photosensitive cell; forming a first material layer having a first refractive index on the sensor substrate; and forming a nanopattern layer on the first material layer, the nanopattern layer including a material having a second refractive index different from the first refractive index.

Inventors:
; ; ; ; ; ;
Issue Date:
Research Org.:
Samsung Electronics Co., Ltd., Suwon-si (Korea); California Institute of Technology (CalTech), Pasadena, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1576262
Patent Number(s):
10431624
Application Number:
15/193,229
Assignee:
Samsung Electronics Co., Ltd. (Suwon-si, KR); California Institute of Technology (Pasadena, CA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
SC0001293; W911NF-14-1-0345
Resource Type:
Patent
Resource Relation:
Patent File Date: 2016 Jun 27
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Han, Seunghoon, Kim, Yongsung, Kamali, Seyedeh Mahsa, Arbabi, Amir, Horie, Yu, Faraon, Andrei, and Hwang, Sungwoo. Method of manufacturing image sensor including nanostructure color filter. United States: N. p., 2019. Web.
Han, Seunghoon, Kim, Yongsung, Kamali, Seyedeh Mahsa, Arbabi, Amir, Horie, Yu, Faraon, Andrei, & Hwang, Sungwoo. Method of manufacturing image sensor including nanostructure color filter. United States.
Han, Seunghoon, Kim, Yongsung, Kamali, Seyedeh Mahsa, Arbabi, Amir, Horie, Yu, Faraon, Andrei, and Hwang, Sungwoo. Tue . "Method of manufacturing image sensor including nanostructure color filter". United States. https://www.osti.gov/servlets/purl/1576262.
@article{osti_1576262,
title = {Method of manufacturing image sensor including nanostructure color filter},
author = {Han, Seunghoon and Kim, Yongsung and Kamali, Seyedeh Mahsa and Arbabi, Amir and Horie, Yu and Faraon, Andrei and Hwang, Sungwoo},
abstractNote = {A method of manufacturing an image sensor includes: preparing a sensor substrate including: a sensor layer including a photosensitive cell; and a signal line layer including lines to receive electric signals from the photosensitive cell; forming a first material layer having a first refractive index on the sensor substrate; and forming a nanopattern layer on the first material layer, the nanopattern layer including a material having a second refractive index different from the first refractive index.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {10}
}

Works referenced in this record:

Optical Sensor
patent-application, March 2011


Image Sensor, Method of Manufacturing the Image Sensor, and Electronic Device Including the Image Sensor
patent-application, March 2016


Integrated Scintillator Grid with Photodiodes
patent-application, June 2016


View Angle Control Sheet and Display Device
patent-application, July 2007


Solid-state image sensor and imaging system
patent, June 2010


Method for Manufacturing Hetero-Bonded Wafer
patent-application, December 2010


Capacitive Touch Sensor Laminate for Display Panel Device
patent-application, October 2013


Solid-State Imaging Device, Method of Manufacturing the Same, and Electronic Apparatus
patent-application, March 2015


Nano-Electrode Multi-Well High-Gain Avalanche Rushing Photoconductor
patent-application, March 2016


Touch Screen Display Apparatus and Method of Manufacuring the Same
patent-application, June 2010


Touch Panel
patent-application, August 2013


Image Sensor Device and Fabricating Method Thereof
patent-application, June 2015


Image Sensing Device and Method for Fabricating the Same
patent-application, February 2016


Twin Sub-Wavelength Grating Optical Signal Processor
patent-application, August 2012


Solid-State Imaging Devices and Methods of Fabricating the Same
patent-application, September 2015


Vertical Plasmonic Mach-Zehnder Interferometer
patent-application, April 2011


Ridge Structure for Back Side Illuminated Image Sensor
patent-application, December 2011


Plasmonic Interferometer
patent-application, August 2014


Solid-State Imaging Device, Method of Manufacturing a Solid-State Imaging Device, and Electronic Apparatus
patent-application, March 2015


Touch Screen
patent-application, June 2013


Touch Sensor and Method of Manufacturing the Same
patent-application, December 2013


Photodiodes, image sensing devices and image sensors
patent, April 2012


Methods of Fabricating Large-Area, Semiconducting Nanoperforated Graphene Materials
patent-application, August 2011


Manufacturing Method of Semiconductor Device
patent-application, July 2015


Nano-Patterned Substrate And Epitaxial Structure
patent-application, February 2011


Image Sensor and Manufacturing Method Thereof
patent-application, January 2016


Plasmon Coupling Apparatus and Method
patent-application, August 2008


Lateral-Epitaxial-Overgrowth Thin-Film LED with Nanoscale-Roughened Structure and Method for Fabricating the Same
patent-application, November 2012


Conductive Optical Device, Information Input Apparatus, and Display Apparatus
patent-application, June 2012


Solid State Imaging Device
patent-application, July 2015


Apparatus and Method for Enhanced Optical Transmission through a Small Aperture, Using Radially Polarized Radiation
patent-application, October 2009


Image Sensor and Method for Fabricating the Same
patent-application, July 2015


3D High Resolution X-Ray Sensor with Integrated Scintillator Grid
patent-application, April 2016


Light Guide Array for an Image Sensor
patent-application, October 2010


Image Sensor and Method of Fabricating the Same
patent-application, May 2015


Method of Making Wafer Structure for Backside Illuminated Color Image Sensor
patent-application, November 2007


High-Efficiency Device for Focusing Light to Subwavelength Dimensions
patent-application, March 2011


Image Sensor and Method for Manufacturing the Same
patent-application, July 2008


Touch Window and Display with the Same
patent-application, January 2017


Image Sensor Having Improved Light Utilization Efficiency and Method of Manufacturing the Same
patent-application, February 2016