Method of manufacturing image sensor including nanostructure color filter
Abstract
A method of manufacturing an image sensor includes: preparing a sensor substrate including: a sensor layer including a photosensitive cell; and a signal line layer including lines to receive electric signals from the photosensitive cell; forming a first material layer having a first refractive index on the sensor substrate; and forming a nanopattern layer on the first material layer, the nanopattern layer including a material having a second refractive index different from the first refractive index.
- Inventors:
- Issue Date:
- Research Org.:
- Samsung Electronics Co., Ltd., Suwon-si (Korea); California Institute of Technology (CalTech), Pasadena, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1576262
- Patent Number(s):
- 10431624
- Application Number:
- 15/193,229
- Assignee:
- Samsung Electronics Co., Ltd. (Suwon-si, KR); California Institute of Technology (Pasadena, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- SC0001293; W911NF-14-1-0345
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2016 Jun 27
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Han, Seunghoon, Kim, Yongsung, Kamali, Seyedeh Mahsa, Arbabi, Amir, Horie, Yu, Faraon, Andrei, and Hwang, Sungwoo. Method of manufacturing image sensor including nanostructure color filter. United States: N. p., 2019.
Web.
Han, Seunghoon, Kim, Yongsung, Kamali, Seyedeh Mahsa, Arbabi, Amir, Horie, Yu, Faraon, Andrei, & Hwang, Sungwoo. Method of manufacturing image sensor including nanostructure color filter. United States.
Han, Seunghoon, Kim, Yongsung, Kamali, Seyedeh Mahsa, Arbabi, Amir, Horie, Yu, Faraon, Andrei, and Hwang, Sungwoo. Tue .
"Method of manufacturing image sensor including nanostructure color filter". United States. https://www.osti.gov/servlets/purl/1576262.
@article{osti_1576262,
title = {Method of manufacturing image sensor including nanostructure color filter},
author = {Han, Seunghoon and Kim, Yongsung and Kamali, Seyedeh Mahsa and Arbabi, Amir and Horie, Yu and Faraon, Andrei and Hwang, Sungwoo},
abstractNote = {A method of manufacturing an image sensor includes: preparing a sensor substrate including: a sensor layer including a photosensitive cell; and a signal line layer including lines to receive electric signals from the photosensitive cell; forming a first material layer having a first refractive index on the sensor substrate; and forming a nanopattern layer on the first material layer, the nanopattern layer including a material having a second refractive index different from the first refractive index.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {10}
}
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