Sparse sampling methods and probe systems for analytical instruments

Kovarik, Libor; Stevens, Andrew J.; Liyu, Andrey V.; Browning, Nigel D.

Title: Sparse sampling methods and probe systems for analytical instruments

Abstract

Sparse sampling approaches and probe systems for analytical instruments are disclosed providing for effective sub-sampling of a specimen and inpainting to reconstruct representations of actual information. The sub-sampling involves serial acquisition of contiguous measured values lying at positions along a scan path extending in a line toward a first direction and having random perturbations in a second direction. The perturbations are limited within a predetermined distance from the line. Inpainting techniques are utilized among the measured values to reconstruct a representation of actual information regarding the specimen.

Inventors:: Kovarik, Libor; Stevens, Andrew J.; Liyu, Andrey V.; Browning, Nigel D.

Issue Date:: 2019-10-01

Research Org.:: Pacific Northwest National Lab. (PNNL), Richland, WA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1576261

Patent Number(s):: 10431419

Application Number:: 15/643,862

Assignee:: Battelle Memorial Institute (Richland, WA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/226 - Image reconstruction
H01J37/222 - {Image processing arrangements associated with the tube
H01J2237/2802 - Transmission microscopes
H01J37/28 - with scanning beams
H01J2237/2852 - Auto-emission

G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
G01Q10/06 - Circuits or algorithms therefor

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/2809 - characterised by the imaging problems involved

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DOE Contract Number:: AC05-76RL01830

Resource Type:: Patent

Resource Relation:: Patent File Date: 2017 Jul 07

Country of Publication:: United States

Language:: English

Citation Formats


                    Kovarik, Libor, Stevens, Andrew J., Liyu, Andrey V., and Browning, Nigel D. Sparse sampling methods and probe systems for analytical instruments.  United States: N. p., 2019. 
        Web.

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                    Kovarik, Libor, Stevens, Andrew J., Liyu, Andrey V., & Browning, Nigel D. Sparse sampling methods and probe systems for analytical instruments.  United States.

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                    Kovarik, Libor, Stevens, Andrew J., Liyu, Andrey V., and Browning, Nigel D. Tue .  
        "Sparse sampling methods and probe systems for analytical instruments".  United States.  https://www.osti.gov/servlets/purl/1576261.

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@article{osti_1576261,

  title        = {Sparse sampling methods and probe systems for analytical instruments},

  author       = {Kovarik, Libor and Stevens, Andrew J. and Liyu, Andrey V. and Browning, Nigel D.},

  abstractNote = {Sparse sampling approaches and probe systems for analytical instruments are disclosed providing for effective sub-sampling of a specimen and inpainting to reconstruct representations of actual information. The sub-sampling involves serial acquisition of contiguous measured values lying at positions along a scan path extending in a line toward a first direction and having random perturbations in a second direction. The perturbations are limited within a predetermined distance from the line. Inpainting techniques are utilized among the measured values to reconstruct a representation of actual information regarding the specimen.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {10}

}

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Works referenced in this record:

System for locating a feature of a surface
patent, February 1999

Samsavar, Amin; Zhuang, Jian-Ping; Schneir, Jason
US Patent Document 5,866,806
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5866806

Probe scanning method
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Watanabe, Kazutoshi
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Method for measurement of pitch in metrology and imaging systems
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Askary, Farid
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Reed, Bryan W.
US Patent Document 8,933,401
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8933401

Sparse Sampling And Reconstruction For Electron And Scanning Probe Microscope Imaging
patent-application, March 2015

Anderson, Hyrum; Helms, Jovana; Wheeler, Jason
US Patent Application 14/482754; 20150069233
URL: http://appft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.html&r=1&f=G&l=50&s1=%2220150069233%22.PGNR.&OS=DN/20150069233&RS=DN/20150069233

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Title: Sparse sampling methods and probe systems for analytical instruments

Abstract

Citation Formats

System for locating a feature of a surface patent, February 1999

Probe scanning method patent, June 2003

Method for measurement of pitch in metrology and imaging systems patent, March 2005

System and method for compressive scanning electron microscopy patent, January 2015

Sparse Sampling And Reconstruction For Electron And Scanning Probe Microscope Imaging patent-application, March 2015

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patent, February 1999

Probe scanning method
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Method for measurement of pitch in metrology and imaging systems
patent, March 2005

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patent, January 2015

Sparse Sampling And Reconstruction For Electron And Scanning Probe Microscope Imaging
patent-application, March 2015