Frequency-based detection of chemical expansion dynamics in thin films
Abstract
Current techniques for measuring chemical expansion in thin film structures are too slow, too imprecise, or require synchrotrons. In contrast, nanoscale electrochemomechanical spectroscopy (NECS) can be used to make nanoscale measurements at time scales of seconds with simple contact or non-contact sensors. In a NECS measurement, a sample, such as thin-film oxide structure, is subjected to a temporally modulated stimulus, such as a sinusoidally alternating voltage. The stimulus causes the sample to expand, contract, deflect, or otherwise deform. A sensor, such as a contact probe or optical sensor, produces an electrical signal in response to this deformation that is correlated with the temporal modulation of the stimulus. Because the stimulus and deformation are correlated, the temporal modulation of the stimulus can be used to filter the deformation signal produced by the sensor, producing a precise, sensitive measurement of the deformation.
- Inventors:
- Issue Date:
- Research Org.:
- Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1576253
- Patent Number(s):
- 10429175
- Application Number:
- 15/829,022
- Assignee:
- Massachusetts Institute of Technology (Cambridge, MA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
- DOE Contract Number:
- SC0002633
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2017 Dec 01
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Citation Formats
Swallow, Jessica G., Van Vliet, Krystyn J., Tuller, Harry L., Bishop, Sean R., Kim, Jae Jin, and Smith, James F. Frequency-based detection of chemical expansion dynamics in thin films. United States: N. p., 2019.
Web.
Swallow, Jessica G., Van Vliet, Krystyn J., Tuller, Harry L., Bishop, Sean R., Kim, Jae Jin, & Smith, James F. Frequency-based detection of chemical expansion dynamics in thin films. United States.
Swallow, Jessica G., Van Vliet, Krystyn J., Tuller, Harry L., Bishop, Sean R., Kim, Jae Jin, and Smith, James F. Tue .
"Frequency-based detection of chemical expansion dynamics in thin films". United States. https://www.osti.gov/servlets/purl/1576253.
@article{osti_1576253,
title = {Frequency-based detection of chemical expansion dynamics in thin films},
author = {Swallow, Jessica G. and Van Vliet, Krystyn J. and Tuller, Harry L. and Bishop, Sean R. and Kim, Jae Jin and Smith, James F.},
abstractNote = {Current techniques for measuring chemical expansion in thin film structures are too slow, too imprecise, or require synchrotrons. In contrast, nanoscale electrochemomechanical spectroscopy (NECS) can be used to make nanoscale measurements at time scales of seconds with simple contact or non-contact sensors. In a NECS measurement, a sample, such as thin-film oxide structure, is subjected to a temporally modulated stimulus, such as a sinusoidally alternating voltage. The stimulus causes the sample to expand, contract, deflect, or otherwise deform. A sensor, such as a contact probe or optical sensor, produces an electrical signal in response to this deformation that is correlated with the temporal modulation of the stimulus. Because the stimulus and deformation are correlated, the temporal modulation of the stimulus can be used to filter the deformation signal produced by the sensor, producing a precise, sensitive measurement of the deformation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 01 00:00:00 EDT 2019},
month = {Tue Oct 01 00:00:00 EDT 2019}
}
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