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Title: Frequency-based detection of chemical expansion dynamics in thin films

Abstract

Current techniques for measuring chemical expansion in thin film structures are too slow, too imprecise, or require synchrotrons. In contrast, nanoscale electrochemomechanical spectroscopy (NECS) can be used to make nanoscale measurements at time scales of seconds with simple contact or non-contact sensors. In a NECS measurement, a sample, such as thin-film oxide structure, is subjected to a temporally modulated stimulus, such as a sinusoidally alternating voltage. The stimulus causes the sample to expand, contract, deflect, or otherwise deform. A sensor, such as a contact probe or optical sensor, produces an electrical signal in response to this deformation that is correlated with the temporal modulation of the stimulus. Because the stimulus and deformation are correlated, the temporal modulation of the stimulus can be used to filter the deformation signal produced by the sensor, producing a precise, sensitive measurement of the deformation.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1576253
Patent Number(s):
10429175
Application Number:
15/829,022
Assignee:
Massachusetts Institute of Technology (Cambridge, MA)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
DOE Contract Number:  
SC0002633
Resource Type:
Patent
Resource Relation:
Patent File Date: 2017 Dec 01
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Swallow, Jessica G., Van Vliet, Krystyn J., Tuller, Harry L., Bishop, Sean R., Kim, Jae Jin, and Smith, James F. Frequency-based detection of chemical expansion dynamics in thin films. United States: N. p., 2019. Web.
Swallow, Jessica G., Van Vliet, Krystyn J., Tuller, Harry L., Bishop, Sean R., Kim, Jae Jin, & Smith, James F. Frequency-based detection of chemical expansion dynamics in thin films. United States.
Swallow, Jessica G., Van Vliet, Krystyn J., Tuller, Harry L., Bishop, Sean R., Kim, Jae Jin, and Smith, James F. Tue . "Frequency-based detection of chemical expansion dynamics in thin films". United States. https://www.osti.gov/servlets/purl/1576253.
@article{osti_1576253,
title = {Frequency-based detection of chemical expansion dynamics in thin films},
author = {Swallow, Jessica G. and Van Vliet, Krystyn J. and Tuller, Harry L. and Bishop, Sean R. and Kim, Jae Jin and Smith, James F.},
abstractNote = {Current techniques for measuring chemical expansion in thin film structures are too slow, too imprecise, or require synchrotrons. In contrast, nanoscale electrochemomechanical spectroscopy (NECS) can be used to make nanoscale measurements at time scales of seconds with simple contact or non-contact sensors. In a NECS measurement, a sample, such as thin-film oxide structure, is subjected to a temporally modulated stimulus, such as a sinusoidally alternating voltage. The stimulus causes the sample to expand, contract, deflect, or otherwise deform. A sensor, such as a contact probe or optical sensor, produces an electrical signal in response to this deformation that is correlated with the temporal modulation of the stimulus. Because the stimulus and deformation are correlated, the temporal modulation of the stimulus can be used to filter the deformation signal produced by the sensor, producing a precise, sensitive measurement of the deformation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {10}
}

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