DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Silicon-based visible and near-infrared optoelectric devices

Abstract

In one aspect, the present invention provides a silicon photodetector having a surface layer that is doped with sulfur inclusions with an average concentration in a range of about 0.5 atom percent to about 1.5 atom percent. The surface layer forms a diode junction with an underlying portion of the substrate. A plurality of electrical contacts allow application of a reverse bias voltage to the junction in order to facilitate generation of an electrical signal, e.g., a photocurrent, in response to irradiation of the surface layer. The photodetector exhibits a responsivity greater than about 1 A/W for incident wavelengths in a range of about 250 nm to about 1050 nm, and a responsivity greater than about 0.1 A/W for longer wavelengths, e.g., up to about 3.5 microns.

Inventors:
;
Issue Date:
Research Org.:
Harvard Univ., Cambridge, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1568679
Patent Number(s):
10374109
Application Number:
15/784,756
Assignee:
President and Fellows of Harvard College (Cambridge, MA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
DOE Contract Number:  
FC36-016011051
Resource Type:
Patent
Resource Relation:
Patent File Date: 10/16/2017
Country of Publication:
United States
Language:
English

Citation Formats

Mazur, Eric, and Carey, James Edward. Silicon-based visible and near-infrared optoelectric devices. United States: N. p., 2019. Web.
Mazur, Eric, & Carey, James Edward. Silicon-based visible and near-infrared optoelectric devices. United States.
Mazur, Eric, and Carey, James Edward. Tue . "Silicon-based visible and near-infrared optoelectric devices". United States. https://www.osti.gov/servlets/purl/1568679.
@article{osti_1568679,
title = {Silicon-based visible and near-infrared optoelectric devices},
author = {Mazur, Eric and Carey, James Edward},
abstractNote = {In one aspect, the present invention provides a silicon photodetector having a surface layer that is doped with sulfur inclusions with an average concentration in a range of about 0.5 atom percent to about 1.5 atom percent. The surface layer forms a diode junction with an underlying portion of the substrate. A plurality of electrical contacts allow application of a reverse bias voltage to the junction in order to facilitate generation of an electrical signal, e.g., a photocurrent, in response to irradiation of the surface layer. The photodetector exhibits a responsivity greater than about 1 A/W for incident wavelengths in a range of about 250 nm to about 1050 nm, and a responsivity greater than about 0.1 A/W for longer wavelengths, e.g., up to about 3.5 microns.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {8}
}

Works referenced in this record:

Disk-Drive System Supporting Massively Parallel Video Streams and Method
patent-application, February 2007


Rotary position sensor with reference and grey scales
patent, June 1998


Solid-State Imaging Device, Manufacturing Method of the Same, and Imaging Apparatus
patent-application, May 2010


Exposure Control for Image Sensors
patent-application, September 2014


Method for processing silicon solar cells
patent, May 1997


Semiconductor Photodetecting Device and Method of Manufacturing the Same
patent-application, January 2006


Image Sensor Structure
patent-application, February 2009


CMOS Image Sensor and Method of Manufacturing Same
patent-application, November 2007


Photovoltaic Thin-Film Solar Cell and Method of Making the Same
patent-application, March 2009


P-Type Group II-VI Semiconductor Compounds
patent-application, May 2007


Next Generation Imaging Methods and Systems
patent-application, July 2014


Optical Device for Producing a Virtual Image
patent-application, August 2007


Anti-Reflection Structures for CMOS Image Sensors
patent-application, November 2009


Vertically integrated photosensor for CMOS imagers
patent, January 2006


Self-aligned antiblooming structure for charge-coupled devices
patent, June 1986


Method and Apparatus for Laser-Processing a Semiconductor Photovoltaic Apparatus
patent-application, June 2010


Manual and automatic probe calibration
patent, June 1998


Image Sensor Using Deep Trench Isolation
patent-application, August 2006


System for and Method of Synchronous Acquisition of Pulsed Source Light Performance of Monitoring Aircraft Flight Operation
patent-application, January 2009


Light Reflecting CMOA Image Sensor
patent-application, March 2010


Pixel Cell Having Grated Interface
patent-application, January 2006


System and method for glass processing and temperature sensing
patent, September 2004


Glass sealed silicon membrane solar cell
patent, June 1987


Image Sensor and Method of Manufacturing the Same
patent-application, February 2008


Solution-Based Fabrication of Photovoltaic Cell
patent-application, June 2008


Chirp compensation method and apparatus
patent-application, January 2003


Light trapping in thin film solar cells using textured photonic crystal
patent, January 2009


Sensor for dual wavelength bands
patent, July 2006


Passive infrared detector
patent, June 1987


Endoscope
patent, June 1986


Monolithic Assembly of Semiconductor Components Including a Fast Diode
patent-application, February 2002


Composite visible/thermal-infrared imaging system
patent, July 1987


Silicon-based visible and near-infrared optoelectric devices
patent-application, June 2005


Method of forming polycrystalline semiconductor film
patent, November 2002


Production method and device for hologram
patent-application, September 2002


Photosensitive Imaging Devices and Associated Methods
patent-application, September 2011


Pattering of Silicon Oxide Layers Using Pulsed Laser Ablation
patent-application, July 2012


Fabrication of polycrystalline thin films by pulsed laser processing
patent, February 1998


Surface passivated photovoltaic devices
patent, May 2008


Method for Manufacturing Semiconductor Device
patent-application, October 2008


Infrared radiation absorption device
patent, November 1996


OCT device
patent, November 2014


Method and apparatus for monitoring in-line copper contamination
patent, August 2003


Blue vertical cavity surface emitting laser
patent, December 2000


Semiconductor Device and Manufacturing Method Thereof
patent-application, July 2004


Dual band imager with visible or SWIR detectors combined with uncooled LWIR detectors
patent, December 2009


Iris imaging using reflection from the eye
patent-application, January 2008


Backside illumination of CMOS image sensor
patent, August 2002


Laser chemical fabrication of nanostructures
patent, March 2005


Silicon Thin Film Transistor and Solar Cells on Plastic Substrates
patent-application, May 2005


Laser texturing
patent, November 1992


Voltage Tunable Integrated Infrared Imager
patent-application, March 2007


Semiconductor surface modification
patent, June 2012


Glass-Based SOI Structures
patent-application, August 2010


System and Method for Eyeball Surface Topography as a Biometric Discriminator
patent-application, September 2006


Antireflective Surfaces, Methods of Manufacture Thereof and Articles Comprising the Same
patent-application, May 2007


Silicon-Based Visible and Near Infrared Optoelectric Devices
patent-application, October 2006


Solar cell with two-dimensional reflecting diffraction grating
patent, January 1985


Electron bombarded passive pixel sensor imaging
patent-application, August 2001


Self-frequency-doubler laser element
patent, February 1995


Method for the Production of Photovoltaic Cells
patent-application, May 2008


Zinc oxide multi-junction photovoltaic cells and optoelectronic devices
patent-application, February 2010


Capacitive bypass
patent, October 2009


Image sensors with optical trench
patent, January 2008


Method of Forming Silicon-Based Thin Film, Silicon-Based Thin Film and Photovoltaic Element
patent-application, March 2002


Multi-band focal plane array
patent, September 2009


Multiple gap photovoltaic device
patent, March 1981


Reinforcing Member for a Patient Interface
patent-application, December 2012


Quantum-Dot Infrared Photodetector
patent-application, June 2006


Method and Apparatus Providing Graded-Index Microlenses
patent-application, February 2007


Solar cell
patent, March 1992


Photodiode and photodiode array
patent, November 2015


Integrated infrared and color CMOS imager sensor
patent-application, April 2010


Photoelectric Conversion Device and Method for Manufacturing the Same
patent-application, October 2009


Passivation of material using ultra-fast pulsed laser
patent, September 2006


Light emitting diode and semiconductor laser
patent-application, July 2003


Large-area detector
patent-application, August 2006


CMOS Image Sensors Having Pixel Arrays with Uniform Light Sensitivity
patent-application, June 2006


Electromagnetic Radiation Detectors Having a Micromachined Electrostatic Chopper Device
patent-application, October 2002


Optical Transmission Improvement on Multi-Dielectric Structure in Advance CMOS Imager
patent-application, August 2008


Photosensitive Imagers Having Defined Textures for Light Trapping and Associated Methods
patent-application, December 2012


Stacked Photoelectric Conversion Device
patent-application, June 2003


Film Formation Apparatus, Method for Forming Film, and Method for Manufacturing Photoelectric Conversion Device
patent-application, May 2007


Systems and Methods of Laser Texturing of Material Surfaces and their Applications
patent-application, June 2010


Backside illuminated image sensor
patent-application, April 2010


Systems and methods for light absorption and field emission using microstructured silicon
patent-application, October 2008


Indirect back surface contact to semiconductor devices
patent, January 2003


Backside illuminated image sensor with negatively charged layer
patent-application, October 2013


Solar Cells
patent-application, May 2010


Diode
patent, November 2004


Method and means for passivation and isolation in semiconductor devices
patent, April 1977


CMOS Image Sensor and Method of Fabrication
patent-application, February 2009


Solid-State Imaging Device, Method of Manufacturing the Same, and Electronic Apparatus
patent-application, August 2010


Back reflector for use in photovoltaic device
patent-application, September 2008


Infrared Face Authenticating Apparatus, and Portable Terminal and Security Apparatus Including the Same
patent-application, August 2007


Method and apparatus for positioning a disk-shaped object
patent, January 2002


Integrated Devices With Optical and Electrical Isolation and Method for Making
patent-application, May 2005


Establishing a high phosphorus concentration in solar cells
patent-application, September 2009


Quantum Well Gap/SI Tandem Photovoltaic Cells
patent-application, April 2010


Back illuminated photodetector and method of fabricating the same
patent, March 2001


Method for making backside illuminated image sensor
patent, January 2001


Sculpted solar cell surfaces
patent, January 1992


Optical Pickup Apparatus and Laser Diode Chip
patent-application, September 2001


Method for Obtaining High Performance Thin Film Devices Deposited on Highly Textured Substrates
patent-application, December 2010


Optical Semiconductor Device
patent-application, December 2009


Selective decomposition of nitride semiconductors to enhance LED light extraction
patent, June 2013


Method to Make Electrical Contact to a Bonded Face of a Photovoltaic Cell
patent-application, September 2010


Method for manufacture of a solar cell
patent, September 1995


Face Imaging System for Recordal and Automated Identity Confirmation
patent-application, March 2005


Light sensor having undulating features for CMOS imager
patent, November 2008


Semiconductor light-detecting element
patent, August 2016


Image Sensor with Reduced Optical Crosstalk
patent-application, June 2012


Structure for implementation of back-illuminated CMOS or CCD imagers
patent, November 2009


High Dynamic Range Sensor with Blooming Drain
patent-application, January 2009


Integrated IR, visible and NIR sensor and methods of fabricating same
patent, September 1998


Solid-state imaging device and method of manufacturing the same
patent, December 2010


Semiconductor Device and Manufacturing Method Thereof
patent-application, June 2006


Biometric Authentication and Verification
patent-application, January 2010


Monolithic Dual Band Imager
patent-application, March 2010


Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method
patent-application, February 2005


Infrared imaging device
patent, April 1995


Laser texturing
patent, June 1994


Exposure System and Device Production Process
patent-application, April 2005


Image Sensor with Buried Self Aligned Focusing Element
patent-application, February 2010


Semiconductor devices, CMOS image sensors, and methods of manufacturing same
patent, September 2009


Systems and Processes for Forming Three-Dimensional Circuits
patent-application, June 2010


Systems and Methods for Laser Radar Imaging for the Blind and Visually Impaired
patent-application, December 2008


Three-Dimensional Imaging System Using a Single Lens System
patent-application, November 2012


Semiconductor Device Fabrication Method Using Ultra-Rapid Thermal Annealing
patent-application, October 2007


Methods for Manufacturing Photoelectrosynthetically Active Heterostructures
patent-application, May 2017


Method for Fabricating Sige-On-Insulator (SGOI) and Ge-On-Insulator (GOI) Substrates
patent-application, May 2005


Processes for producing low cost, high efficiency silicon solar cells
patent, June 1998


Method for manufacturing semiconductor device, and laser irradiation apparatus
patent, July 2007


Pixel Circuit for Global Electronic Shutter
patent-application, August 2009


Silicon avalanche photodiode array
patent, June 1991


Integrated Visible and Infrared Imager Devices and Associated Methods
patent-application, August 2013


Solid-State Imaging Element, Photo-Detector and Authentication System Using the Photo-Detector
patent-application, June 2008


Information Device
patent-application, December 2003


Combined RGB and IR Imaging Sensor
patent-application, November 2010


Imaging Device
patent-application, August 2008


Method for Fabricating Semiconductor Device
patent-application, January 2004


High-Efficiency Photovoltaic Back-Contact Solar Cell Structures and Manufacturing Methods Using Thin Planar Semiconductor Absorbers
patent-application, December 2012


Surface finishes on laser rods and slabs for laser peening systems
patent, June 2004


Image Sensor with Reduced Crosstalk
patent-application, June 2012


Solar cell structures, photovoltaic panels and corresponding processes
patent-application, August 2008


Method and Apparatus Providing Light Traps for Optical Crosstalk Reduction
patent-application, June 2009


Two-dimensional optoelectronic array module
patent, February 1997


Radiation Detector
patent-application, April 2010


Systems and Methods of Laser Texturing and Crystallization of Material Surfaces
patent-application, September 2010


Ion implantation apparatus
patent, June 1997


Non-Polar Light Emitting Diode Having Photonic Crystal Structure and Method of Fabricating the Same
patent-application, January 2013


Solid-State Imaging Device and Manufacturing Method Thereof
patent-application, January 2011


Methods for producing a semiconductor device having planarization films
patent, August 2011


Process for producing silicon semiconductor wafers with low defect density
patent, August 1999


Method of Fabricating Image Sensors Using a Thin Film Photodiode Above Active CMOS Circuitry
patent-application, March 2003


Manufacturing of TFT device by backside laser irradiation
patent, November 2002


Silicon-based visible and near-infrared optoelectric devices
patent, December 2011


Silicon-Based Visible and Near-Infrared Optoelectric Devices
patent-application, June 2009


Solid-State Imaging Device, Method for Producing Same, and Camera
patent-application, June 2012


Test Insert with Electrostatic Discharge Structures and Associated Methods
patent-application, March 2004


Image Sensor Having Curved Micro-Mirrors Over the Sensing Photodiode and Method for Fabricating
patent-application, May 2008


Vertically integrated photosensor for CMOS imagers
patent, August 2005


Surface Passivated Photovoltaic Devices
patent-application, November 2006


Overvoltage protection device
patent, October 2003


Multilayer Monolithic Electronic Device and Method for Producing Such a Device
patent-application, December 2004


Laser-beam annealing apparatus
patent, October 1995


Tantalum-aluminum oxide coatings for semiconductor devices
patent, September 1998


Isolation process for VLSI
patent, August 1993


Photovoltaic semi-conductor devices
patent, November 1976


Control of Thermal Donor Formation in high Resistivity Cz Silicon
patent-application, July 2005


Image Sensor and Pixel Having a Polysilicon Later Over the Photodiode
patent-application, June 2006


Field Effect Transistor with Amorphous Oxide Layer Containing Microcrystals
patent-application, July 2009


Long Distance Multimodal Biometric System and Method
patent-application, November 2010


Solid-State Imaging Device, Method of Manufacturing the Same, and Electronic Equipment
patent-application, October 2011


Reduced Crosstalk Sensor and Method of Formation
patent-application, August 2005


Backside illuminated imaging sensor with backside P+ doped layer
patent, June 2010


Large area, low voltage, high current photovoltaic modules and method of fabricating same
patent, September 1988


Method for Manufacturing Semiconductor Device
patent-application, January 2008


Pulse oximeter and method of operation
patent, October 2004


Image Sensor with Deep Trench Isolation Strucuture
patent-application, February 2012


Annealing methods of doping electrode surfaces using dopant gases
patent, August 1999


Solid State Imaging Device
patent-application, October 2007


Methods for Enhancing Quality of Pixel Sensor Image Frames for Global Shutter Imaging
patent-application, February 2012


Transparent Solar Cell and Method of Fabrication
patent-application, December 2002


Flexible photovoltaic device
patent, July 1992


Light sensing system with high pixel fill factor
patent, November 2002


Solar cell device
patent, July 2009


Jet Engine Device with a Bypass Duct
patent-application, September 2012


Image sensor with a capacitive storage node linked to transfer gate
patent, June 2009


Systems and methods for creating crystallographic-orientation controlled poly-Silicon films
patent-application, May 2006


Wideband Semiconducting Light Detector
patent-application, February 2010


Image sensors having gratings for color separation
patent-application, May 2010


Image Sensor Having Improved Sensitivity and Decreased Crosstalk and Method of Fabricating Same
patent-application, August 2007


Laser Doping of Solid Bodies Using a Linear-Focussed Laser Beam and Production of Solar-Cell Emitters Based on Said Method
patent-application, January 2008


Photodiode and photodiode array
patent, June 2014


Semiconductor devices having reduced substrate damage and associated methods
patent-application, January 2013


Monolithic antenna with integral pin diode tuning
patent, October 1988


Method and apparatus for manufacturing semiconductor element
patent, May 2003


Hybrid Imaging Sensor With Approximately Equal Potential Photodiodes
patent-application, October 2009


Optical Device for Use with a Lithography Method
patent-application, September 2004


Solid-State Imaging Device, Manufacturing Method of Solid-State Imaging Device, and Electronic Device
patent-application, February 2014


Optical detectors using nulling for high linearity and large dynamic range
patent, July 2002


Thin film solar cell and method for producing it
patent-application, February 2012


Apparatus and method for measuring biological information
patent, June 2010


Multi-junction solar cells and methods and apparatuses for forming the same
patent, September 2009


Method of forming silicon-based thin film, silicon-based thin film, and photovoltaic element
patent-application, October 2005


Photodiode manufacturing method and photodiodes
patent, October 2013


Imaging system with negative electron affinity photocathode
patent, June 2010


Photodiode Having a Plurality of PN Injections and Image Sensor Having the Same
patent-application, February 2003


Multi-Junction Semiconductor Photovoltaic Apparatus and Methods
patent-application, November 2012


Semiconductor Device and Method of Fabricating a LTPS Film
patent-application, March 2006


Infrared-radiation detector device
patent, January 1990


Photodetector
patent-application, August 2007


Multispectral Sensor
patent-application, August 2011


Photoelectric Conversion Device, Method of Manufacturing the Same and Photoelectric Conversion System
patent-application, April 2013


Back-Side Illuminated Image Sensor
patent-application, June 2010


Solar Cells
patent-application, April 2010


Color Image Sensor with Imaging Elements Imaging on Respective Regions of Sensor Elements
patent-application, June 2005


Dual bandwith bolometer
patent, August 2000


Method and apparatus for improved photoplethysmographic perfusion-index monitoring
patent, June 1998


Biometric Image Pickup Apparatus
patent-application, February 2009


Selective Emitter Solar Cell and Fabrication Method Thereof
patent-application, February 2010


Light Extraction Product for Semiconductor Light Emitting Device and Light Emitting Device
patent-application, March 2015


Three dimensional device integration method and integrated device
patent, October 2006


Solid-State Image Pickup Device and Electronic Apparatus
patent-application, November 2009


Ge Short Wavelength Infrared Imager
patent-application, May 2008


Solid-state imaging device and image capture apparatus
patent-application, August 2008


Photovoltaic device having incident radiation directing means for total internal reflection
patent, December 1983


Micro Concentrators Elastically Coupled With Spherical Photovoltaic Cells
patent-application, January 2009


Semiconductor laser manufacturing method
patent, February 1992


Multi-image acquisition apparatus
patent-application, May 2010


Two-stage auto-zero amplifier circuit for electro-optical arrays
patent, October 2004


Flexible illuminators for phototherapy
patent, September 2001


Semiconductor Devices Having an Enhanced Absorption Region and Associated Methods
patent-application, April 2011


Method and apparatus for laser annealing
patent, May 2007


Autofocus system for scanning laser inspector or writer
patent, December 1989


Composite back reflector for photovoltaic device
patent, March 1994


CMOS Image Sensor And Method Of Fabrication
patent-application, August 2004


Method of fabricating an optoelectronic device having a bulk heterojunction
patent-application, October 2005


Thin Film Solar Cell III
patent-application, February 2009


Method of making thin film solar cell array
patent, March 1991


Method of producing a thin-film photovoltaic device
patent, December 2002


Image sensor comprising isolated germanium photodetectors integrated with a silicon substrate and silicon circuitry
patent-application, February 2012


Overvoltage protection circuit
patent, June 2001


High Dynamic Range Image Sensor
patent-application, April 2006


Methods and Devices for Improved Charge Management for Three-Dimensional and Color Sensing
patent-application, June 2006


Ceramic, metal and composite materials having increased surface area
patent, June 1997


Manufacture of silicon-based devices having disordered sulfur-doped surface layers
patent-application, February 2008


Photovoltaic Devices and Associated Methods
patent-application, May 2012


Image Sensor with Backside Photodiode Implant
patent-application, May 2010


Backside illuminated image sensor
patent, December 2010


Polishing Apparatus
patent-application, November 2001


Fabrication method of semiconductor device using ion implantation
patent, April 2002


Method and System for Use of 3D Sensors in an Image Capture Device
patent-application, August 2007


Vertical Tri-Color Sensor
patent-application, August 2007


Image Sensor and Method of Manufacturing the Same
patent-application, December 2014


Automatically Capturing Information, Such as Capturing Information Using a Document-Aware Device
patent-application, February 2011


System and method for glass processing and temperature sensing
patent-application, February 2003


Picosecond Q-switched microlasers
patent, January 1995


Shallow trench isolation by atomic-level silicon reconstruction
patent, October 2008


Multicrystalline Laser-Crystallized Silicon Thin Layer Solar Cell Deposited on a Glass Substrate
patent-application, October 2003


Semiconductor photodiode and an optical receiver
patent, January 2004


Method and apparatus for dark current and hot pixel reduction in active pixel image sensors
patent-application, October 2008


Method of manufacturing a multi-wavelength semiconductor image sensor
patent, September 2004


Solid-state imaging device
patent-application, April 2006


Photosensitive imaging devices and associated methods
patent, March 2014


Photovoltaic Cell and Method of Fabricating the Same
patent-application, March 2005


Method for making defect-free zone by laser-annealing of doped silicon
patent, January 1980


Solar Cell and Method of Manufacturing the Same
patent-application, June 2004


Method for Producing Doped Regions in a Substrate, and Photovoltaic Cell
patent-application, March 2008


Flexible imager and digital imaging method
patent-application, January 2004


Semiconductor photodiode and an optical receiver
patent-application, May 2002


Tuning optical cavities
patent-application, February 2010


Multi-Junction Semiconductor Photovoltaic Apparatus and Methods
patent-application, September 2010


Optoelectronic device with lateral pin or pin junction
patent-application, March 2012


Semiconductor photodiode and method of manufacture thereof
patent-application, October 2009


Methods for manufacturing arrays for CMOS imagers
patent, September 2013


Method of producing thin film solar cell
patent, October 1999


Crystallization and doping of amorphous silicon on low temperature plastic
patent, September 1994


Semiconductor optical amplifying apparatus
patent, May 1994


Intersubband detector with avalanche multiplier region
patent-application, October 2004


Rolling Shutter for Prevention of Blooming
patent-application, October 2006


Near infrared/color image sensor
patent-application, April 2010


Backside illuminated imaging sensor with light attenuating layer
patent-application, August 2009


Image sensor reflector
patent-application, August 2009


Silicon-based visible and near-infrared optoelectric devices
patent-application, February 2012


Laser annealing method and laser annealing device
patent, June 2001


Method and apparatus Providing Imager Pixel Array with Grating Structure and Imager Device Containing the Same
patent-application, December 2007


Shallow trench textured regions and associated methods
patent, June 2017


Micro-texture media made by polishing of a selectively irradiated surface
patent, September 2000


Image sensors with blooming reduction mechanisms
patent-application, July 2008


Controlled reflectance solar cell
patent, June 1989


Isolation Structure for Image Sensor Device
patent-application, December 2008


Distance Sensor and Method for Detecting a Distance
patent-application, September 2006


System and method for a non-invasive medical sensor
patent-application, November 2008


Photovoltaic device
patent, December 1994


Thermal imaging devices
patent, November 1989


Low Lag Transfer Gate Device
patent-application, July 2009


Photosensitive imaging devices and associated methods
patent, July 2013


Semiconductor -on-Insulator Devices and Associated Methods
patent-application, July 2013


Light Sensor Having Undulating Features for CMOS Imager
patent-application, June 2007


Back-illuminated image sensors having both frontside and backside photodetectors
patent, December 2011


Thermal membrane sensor and method for the production thereof
patent, November 2004


Method of making backside illuminated image sensors
patent, September 1993


Photovoltaic device
patent, January 1998


Method for Forming Organic Semiconductor Layer and Organic Thin Film Transistor
patent-application, July 2006


Solar Cell and Manufacturing Method Thereof
patent-application, December 2007


By-Product Removal for Wafer Bonding Process
patent-application, August 2008


Cathode structure for field emission device and method of fabricating the same
patent-application, November 2001


Method of fabrication of an infrared radiation detector and infrared detector device
patent, February 2001


Solid State Imaging Device, Method of Manufacturing the Same, and Imaging Apparatus
patent-application, April 2009


Semiconductor devices having reduced substrate damage and associated methods
patent, April 2014


Solid-State Image Pickup Device
patent-application, November 2003


Selective laser annealing of semiconductor material
patent, October 2009


Backside Illuminated Imaging Sensor with Vertical Pixel Sensor
patent-application, August 2009


Backside Illuminated Image Sensor Having Deep Light Reflective Trenches
patent-application, August 2009


Image Sensor Having Curved Micro-Mirrors Over the Sensing Photodiode and Method for Fabricating
patent-application, June 2011


Integrated IR and visible detector
patent, December 1994


Photovoltaic Device and Process for Producing Same
patent-application, August 2008


Monolithic diode assay
patent, September 1996


Method for balancing cells in a battery pack
patent, October 2011


Laser curing of spin-on dielectric thin films
patent, September 2000


Light-sensing device
patent, April 2009


Solid-State Imaging Element, Method of Manufacturing the Same, Solid-State Imaging Apparatus, and Imaging Apparatus
patent-application, March 2012


Semiconductor photodetection element
patent, January 2014