Apparatus and methods for probing a material as a function of depth using depth-dependent second harmonic generation

Garnett, Joy; Krzyzanowska, Halina; Tolk, Norman H.

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Title: Apparatus and methods for probing a material as a function of depth using depth-dependent second harmonic generation

Abstract

A method for non-invasively probing at least one physics property of a solid material. In one embodiment, the method has the steps of splitting a photon beam into a first photon beam and a second photon beam, exposing the solid material to the first photon beam to generate a coherent acoustic phonon wave in the solid material at time t, and exposing the solid material to the second photon beam at a time t+Δt, where t+Δt≥t, to generate corresponding second harmonic generation signals, where from the corresponding second harmonic generation signals, the at least one physics property of the solid material is determinable.

Inventors:: Garnett, Joy; Krzyzanowska, Halina; Tolk, Norman H.

Issue Date:: 2019-08-06

Research Org.:: Vanderbilt Univ., Nashville, TN (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1568669

Patent Number(s):: 10371668

Application Number:: 15/324,100

Assignee:: Vanderbilt University (Nashville, TN)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N2021/8438 - {Mutilayers}
G01N2021/8477 - {Investigating crystals, e.g. liquid crystals}
G01N21/636 - {using an arrangement of pump beam and probe beam
G01N21/8422 - {Investigating thin films, e.g. matrix isolation method}
G01N21/9505 - {Wafer internal defects, e.g. microcracks}
G01N29/043 - {in the interior, e.g. by shear waves}
G01N29/2418 - {using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
G01N29/4454 - {Signal recognition, e.g. specific values or portions, signal events, signatures}

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DOE Contract Number:: FG02-99ER45781

Resource Type:: Patent

Resource Relation:: Patent File Date: 07/13/2015

Country of Publication:: United States

Language:: English

Citation Formats


                    Garnett, Joy, Krzyzanowska, Halina, and Tolk, Norman H. Apparatus and methods for probing a material as a function of depth using depth-dependent second harmonic generation.  United States: N. p., 2019. 
        Web.

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                    Garnett, Joy, Krzyzanowska, Halina, & Tolk, Norman H. Apparatus and methods for probing a material as a function of depth using depth-dependent second harmonic generation.  United States.

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                    Garnett, Joy, Krzyzanowska, Halina, and Tolk, Norman H. Tue .  
        "Apparatus and methods for probing a material as a function of depth using depth-dependent second harmonic generation".  United States.  https://www.osti.gov/servlets/purl/1568669.

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@article{osti_1568669,

  title        = {Apparatus and methods for probing a material as a function of depth using depth-dependent second harmonic generation},

  author       = {Garnett, Joy and Krzyzanowska, Halina and Tolk, Norman H.},

  abstractNote = {A method for non-invasively probing at least one physics property of a solid material. In one embodiment, the method has the steps of splitting a photon beam into a first photon beam and a second photon beam, exposing the solid material to the first photon beam to generate a coherent acoustic phonon wave in the solid material at time t, and exposing the solid material to the second photon beam at a time t+Δt, where t+Δt≥t, to generate corresponding second harmonic generation signals, where from the corresponding second harmonic generation signals, the at least one physics property of the solid material is determinable.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {8}

}

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Similar Records

Title: Apparatus and methods for probing a material as a function of depth using depth-dependent second harmonic generation

Abstract

Citation Formats

Apparatus and method for measurement of the mechanical properties and electromigration of thin films patent, February 2000

Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector patent, May 1998

Optical testing of a semiconductor patent, July 1980

Optical stress generator and detector patent, May 1998

Optical Stress Generator and Detector patent-application, October 2001

Optical Method for the Determination of Grain Orientation in Films patent-application, May 2002

Sample inspection system patent, March 2001

Lateral Carrier Injection Infrared Light Emitting Diode Structure, Method and Applications patent-application, January 2014

Method and apparatus for determining a material's characteristics by photoreflectance using improved computer control patent, December 1993

Nonlinear Imaging Using Passive Pulse Splitters patent-application, August 2011

Apparatus and Methods of Using Second Harmonic Generation as a Non-Invasive Optical Probe for Interface Properties in Layered Structures patent-application, March 2006

Opto-Acoustic Methods and Apparatus for Performing High Resolution Acoustic Imaging and Other Sample Probing and Modification Operations patent-application, December 2006

Optical Technique for Detecting Buried Defects in Opaque Films patent-application, November 2003

Opto-Acoustic Methods and Apparatus for Performing High Resolution Acoustic Imaging and Other Sample Probing and Modification Operations patent-application, December 2006

Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure patent, July 2001

Metrology system with spectroscopic ellipsometer and photoacoustic measurements patent, February 2006

Optical generator and detector of stress pulses patent, December 1987

Apparatus and method for the determination of grain size in thin films patent, March 2000

System for inspecting surface defects of a specimen and a method thereof patent, February 2014

Method and Apparatus for Decreasing Thermal Loading and Roughness Sensitivity in a Photoacoustic Film Thickness Measurement System patent-application, September 2002

Optical method for the characterization of the electrical properties of semiconductors and insulating films patent, December 1999

Measurement of material properties with optically induced phonons patent, May 1997

Ultrafast optical technique for the characterization of altered materials patent, January 1998

Optical method for determining the mechanical properties of a material patent, December 1998

Picosecond ultrasonic system incorporating an optical cavity patent, September 2013

Optical harmonic generator patent, April 2000

Apparatus and method for measurement of the mechanical properties and electromigration of thin films
patent, February 2000

Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector
patent, May 1998

Optical testing of a semiconductor
patent, July 1980

Optical stress generator and detector
patent, May 1998

Optical Stress Generator and Detector
patent-application, October 2001

Optical Method for the Determination of Grain Orientation in Films
patent-application, May 2002

Sample inspection system
patent, March 2001

Lateral Carrier Injection Infrared Light Emitting Diode Structure, Method and Applications
patent-application, January 2014

Method and apparatus for determining a material's characteristics by photoreflectance using improved computer control
patent, December 1993

Nonlinear Imaging Using Passive Pulse Splitters
patent-application, August 2011

Apparatus and Methods of Using Second Harmonic Generation as a Non-Invasive Optical Probe for Interface Properties in Layered Structures
patent-application, March 2006

Opto-Acoustic Methods and Apparatus for Performing High Resolution Acoustic Imaging and Other Sample Probing and Modification Operations
patent-application, December 2006

Optical Technique for Detecting Buried Defects in Opaque Films
patent-application, November 2003

Opto-Acoustic Methods and Apparatus for Performing High Resolution Acoustic Imaging and Other Sample Probing and Modification Operations
patent-application, December 2006

Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure
patent, July 2001

Metrology system with spectroscopic ellipsometer and photoacoustic measurements
patent, February 2006

Optical generator and detector of stress pulses
patent, December 1987

Apparatus and method for the determination of grain size in thin films
patent, March 2000

System for inspecting surface defects of a specimen and a method thereof
patent, February 2014

Method and Apparatus for Decreasing Thermal Loading and Roughness Sensitivity in a Photoacoustic Film Thickness Measurement System
patent-application, September 2002

Optical method for the characterization of the electrical properties of semiconductors and insulating films
patent, December 1999

Measurement of material properties with optically induced phonons
patent, May 1997

Ultrafast optical technique for the characterization of altered materials
patent, January 1998

Optical method for determining the mechanical properties of a material
patent, December 1998

Picosecond ultrasonic system incorporating an optical cavity
patent, September 2013

Optical harmonic generator
patent, April 2000