DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate


The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.

Issue Date:
Research Org.:
Harvard Univ., Cambridge, MA (United States)
Sponsoring Org.:
OSTI Identifier:
Patent Number(s):
Application Number:
President and Fellows of Harvard College (Cambridge, MA)
Patent Classifications (CPCs):
DOE Contract Number:  
Resource Type:
Resource Relation:
Patent File Date: 08/26/2015
Country of Publication:
United States

Citation Formats

Mazur, Eric, and Shen, Mengyan. Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate. United States: N. p., 2019. Web.
Mazur, Eric, & Shen, Mengyan. Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate. United States.
Mazur, Eric, and Shen, Mengyan. Tue . "Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate". United States.
title = {Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate},
author = {Mazur, Eric and Shen, Mengyan},
abstractNote = {The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {7}

Works referenced in this record:

Image sensor with pixel isolation system and manufacturing method therefor
patent, July 2004

Surface passivated photovoltaic devices
patent, May 2008

Light sensor having undulating features for CMOS imager
patent, November 2008

Passive infrared detector
patent, June 1987

Diode and power converting apparatus
patent, January 1999

Method of producing thin film solar cell
patent, October 1999

Production method and device for hologram
patent-application, September 2002

Composite back reflector for photovoltaic device
patent, March 1994

Composite visible/thermal-infrared imaging system
patent, July 1987

Method for making backside illuminated image sensor
patent, January 2001

Laser annealing method and laser annealing device
patent, June 2001

Infrared imaging device
patent, April 1995

patent, June 1986

Imaging system with negative electron affinity photocathode
patent, June 2010

Photovoltaic device having incident radiation directing means for total internal reflection
patent, December 1983

Shallow trench isolation by atomic-level silicon reconstruction
patent, October 2008

Light trapping in thin film solar cells using textured photonic crystal
patent, January 2009

Vertically integrated photosensor for CMOS imagers
patent, January 2006

Crystallization and doping of amorphous silicon on low temperature plastic
patent, September 1994

Manual and automatic probe calibration
patent, June 1998

Method for making defect-free zone by laser-annealing of doped silicon
patent, January 1980

Silicon-based visible and near-infrared optoelectric devices
patent-application, June 2005

Image pick-up apparatus with high resolution and anti-bloom characteristics
patent, March 1990

Light emitting diode and semiconductor laser
patent-application, July 2003

Passivation of material using ultra-fast pulsed laser
patent, September 2006

Dual band imager with visible or SWIR detectors combined with uncooled LWIR detectors
patent, December 2009

Monolithic diode assay
patent, September 1996

Image sensors with optical trench
patent, January 2008

Printing master comprising strain gauges
patent, October 2000

Screen printing method and screen printing apparatus
patent, October 2000

Apparatus and method for measuring biological information
patent, June 2010

Semiconductor surface modification
patent, June 2012

Back-illuminated image sensors having both frontside and backside photodetectors
patent, December 2011

Laser peening process and apparatus with uniform pressure pulse confinement
patent, April 2000

Optical detectors using nulling for high linearity and large dynamic range
patent, July 2002

Method of making backside illuminated image sensors
patent, September 1993

Self-frequency-doubler laser element
patent, February 1995

Light sensitive semiconductor component
patent, July 2003

Method of forming polycrystalline semiconductor film
patent, November 2002

Flexible photovoltaic device
patent, July 1992

Multi-band focal plane array
patent, September 2009

Semiconductor optical amplifying apparatus
patent, May 1994

Method for processing silicon solar cells
patent, May 1997

Semiconductor devices by laser enhanced diffusion
patent, August 1982

Thermal imaging devices
patent, November 1989

Photovoltaic device
patent, December 1994

Patterned epitaxial regrowth using overlapping pulsed irradiation
patent, November 1980

Fabrication method of semiconductor device using ion implantation
patent, April 2002

Highly-depleted laser doped semiconductor volume
patent, June 2010

Freight-carrying platforms
patent, October 1985

Method of forming polycrystalline semiconductor film
patent-application, March 2002

Laser chemical fabrication of nanostructures
patent, March 2005

Blocked impurity band detectors
patent, February 1986

Glass-Based SOI Structures
patent-application, August 2010

Sculpted solar cell surfaces
patent, January 1992

Solar cell
patent, March 1992

Infrared radiation absorption device
patent, November 1996

patent, November 2004

Method and means for passivation and isolation in semiconductor devices
patent, April 1977

Blue vertical cavity surface emitting laser
patent, December 2000

Proximity laser doping technique for electronic materials
patent, February 1999

Indirect back surface contact to semiconductor devices
patent, January 2003

Solar Cell and Its Spectrum Convertor
patent-application, June 2009

Three-dimensional island pixel photo-sensor
patent, May 2006

Chip module for complete power train
patent, January 2011

Integrated IR, visible and NIR sensor and methods of fabricating same
patent, September 1998

Coarse and fine motion positioning mechanism
patent, February 1988

Integrated optical head
patent, December 1989

Phototonic device with strain-induced three dimensional growth morphology
patent, December 2001

Semiconductor devices, CMOS image sensors, and methods of manufacturing same
patent, September 2009

Process for preparing low defect density silicon using high growth rates
patent, February 2004

Method for fabricating silicon cells
patent, August 1998

Solid-state imaging device and method of manufacturing the same
patent, December 2010

CMOS image sensors including backside illumination structure
patent, April 2012

Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method
patent-application, February 2005

Multiple color detection elevated pin photo diode active pixel sensor
patent, August 2000

Systems and methods for light absorption and field emission using microstructured silicon
patent-application, February 2003

Laser texturing
patent, June 1994

Method of making thin film solar cell array
patent, March 1991

Methods for producing a semiconductor device having planarization films
patent, August 2011

Vertically integrated photosensor for CMOS imagers
patent, August 2005

Laser-induced structuring of substrate surfaces
patent, October 2010

Femtosecond laser processing system with process parameters, controls and feedback
patent-application, October 2005

Flexible illuminators for phototherapy
patent, September 2001

Client-server architecture using internet and public switched networks
patent, November 1999

Overvoltage protection device
patent, October 2003

Method and apparatus for positioning a disk-shaped object
patent, January 2002

System and a method for a smart surveillance system
patent, April 2008

Light-sensing device
patent, April 2009

Two-dimensional optoelectronic array module
patent, February 1997

Method of fabricating backside illuminated image sensor
patent, January 2010

Integrated optical device having integral photodetector
patent, November 1987

Peel-apart photosensitive element
patent, August 1993

Optical properties of solar cells using tilted geometrical features
patent, January 1992

Process for producing silicon semiconductor wafers with low defect density
patent, August 1999

Isolation process for VLSI
patent, August 1993

Laser-beam annealing apparatus
patent, October 1995

Tantalum-aluminum oxide coatings for semiconductor devices
patent, September 1998

Photovoltaic semi-conductor devices
patent, November 1976

Processes for producing low cost, high efficiency silicon solar cells
patent, June 1998

Method for manufacturing semiconductor device, and laser irradiation apparatus
patent, July 2007

Biometric detection using spatial, temporal, and/or spectral techniques
patent, January 2013

Low temperature texturing layer to enhance adhesion of subsequent layers
patent, January 2008

High-capacitance photodiode
patent, January 2004

Monocrystalline three-dimensional integrated-circuit technology
patent, February 2002

Manufacturing method of thin film device substrate
patent, August 2007

Controlled reflectance solar cell
patent, June 1989

Manufacturing of TFT device by backside laser irradiation
patent, November 2002

Laser texturing
patent, November 1992

Image sensor for stabilizing a black level
patent, May 2014

Wideband semiconducting light detector
patent, December 2010

Integrated infrared and visible image sensors
patent, August 2000

Infrared-radiation detector device
patent, January 1990

Method of producing a thin-film photovoltaic device
patent, December 2002

Photovoltaic device
patent, January 1998

Multi-junction solar cells and methods and apparatuses for forming the same
patent, September 2009

Capacitive bypass
patent, October 2009

Semiconductor texturing process
patent, November 2010

Backside illumination of CMOS image sensor
patent, August 2002

High performance ultraviolet imager for operation at room temperature
patent, November 2002

Composite laminate circuit structure and methods of interconnecting the same
patent, November 2002

Fabrication of polycrystalline thin films by pulsed laser processing
patent, February 1998

Light sensing system with high pixel fill factor
patent, November 2002

Methods for manufacturing arrays for CMOS imagers
patent, September 2013

Solid-state imaging device
patent, May 2013

Semiconductor laser manufacturing method
patent, February 1992

Method and apparatus for manufacturing semiconductor element
patent, May 2003

Semiconductor surface modification
patent, August 2014

Annealing methods of doping electrode surfaces using dopant gases
patent, August 1999

Solar cell device
patent, July 2009

Dual bandwith bolometer
patent, August 2000

Ion implantation apparatus
patent, June 1997

Picosecond Q-switched microlasers
patent, January 1995

Laser annealing apparatus
patent, July 2007

Materials, systems and methods for optoelectronic devices
patent, April 2011

Low-capacitance bidirectional protection device
patent, July 2005

Semiconductor photodiode and an optical receiver
patent, January 2004

Tandem solar cell
patent, June 1991

Wide spectral range hybrid image detector
patent, November 2011

Method for modifying wiring of semiconductor device
patent, January 1993

Backside illuminated image sensor
patent, December 2010

Image sensor
patent, March 1990

Underwater laser processing device including chamber with partitioning wall
patent, November 1999

Systems and methods for creating crystallographic-orientation controlled poly-Silicon films
patent-application, May 2006

Security check provision
patent, June 2005

Patterned roller for the micro-replication of complex lenses
patent, June 2003

Ceramic, metal and composite materials having increased surface area
patent, June 1997

Backside illuminated image sensor having deep light reflective trenches
patent, September 2010

Semiconductor laser structures
patent, October 1990

Overvoltage protection circuit
patent, June 2001

Monolithic antenna with integral pin diode tuning
patent, October 1988

Method and apparatus for laser annealing
patent, May 2007

Autofocus system for scanning laser inspector or writer
patent, December 1989

Three dimensional device integration method and integrated device
patent, October 2006