DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate

Abstract

The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.

Inventors:
;
Issue Date:
Research Org.:
Harvard Univ., Cambridge, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1568634
Patent Number(s):
10361083
Application Number:
14/836,609
Assignee:
President and Fellows of Harvard College (Cambridge, MA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
DOE Contract Number:  
FG36-01GO11053
Resource Type:
Patent
Resource Relation:
Patent File Date: 08/26/2015
Country of Publication:
United States
Language:
English

Citation Formats

Mazur, Eric, and Shen, Mengyan. Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate. United States: N. p., 2019. Web.
Mazur, Eric, & Shen, Mengyan. Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate. United States.
Mazur, Eric, and Shen, Mengyan. Tue . "Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate". United States. https://www.osti.gov/servlets/purl/1568634.
@article{osti_1568634,
title = {Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate},
author = {Mazur, Eric and Shen, Mengyan},
abstractNote = {The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {7}
}

Works referenced in this record:

Image sensor with pixel isolation system and manufacturing method therefor
patent, July 2004


Surface passivated photovoltaic devices
patent, May 2008


Light sensor having undulating features for CMOS imager
patent, November 2008


Passive infrared detector
patent, June 1987


Diode and power converting apparatus
patent, January 1999


Method of producing thin film solar cell
patent, October 1999


Production method and device for hologram
patent-application, September 2002


Composite back reflector for photovoltaic device
patent, March 1994


Composite visible/thermal-infrared imaging system
patent, July 1987


Method for making backside illuminated image sensor
patent, January 2001


Laser annealing method and laser annealing device
patent, June 2001


Infrared imaging device
patent, April 1995


Endoscope
patent, June 1986


Imaging system with negative electron affinity photocathode
patent, June 2010


Photovoltaic device having incident radiation directing means for total internal reflection
patent, December 1983


Shallow trench isolation by atomic-level silicon reconstruction
patent, October 2008


Light trapping in thin film solar cells using textured photonic crystal
patent, January 2009


Vertically integrated photosensor for CMOS imagers
patent, January 2006


Crystallization and doping of amorphous silicon on low temperature plastic
patent, September 1994


Manual and automatic probe calibration
patent, June 1998


Method for making defect-free zone by laser-annealing of doped silicon
patent, January 1980


Silicon-based visible and near-infrared optoelectric devices
patent-application, June 2005


Image pick-up apparatus with high resolution and anti-bloom characteristics
patent, March 1990


Light emitting diode and semiconductor laser
patent-application, July 2003


Passivation of material using ultra-fast pulsed laser
patent, September 2006


Dual band imager with visible or SWIR detectors combined with uncooled LWIR detectors
patent, December 2009


Monolithic diode assay
patent, September 1996


Image sensors with optical trench
patent, January 2008


Printing master comprising strain gauges
patent, October 2000


Screen printing method and screen printing apparatus
patent, October 2000


Apparatus and method for measuring biological information
patent, June 2010


Semiconductor surface modification
patent, June 2012


Back-illuminated image sensors having both frontside and backside photodetectors
patent, December 2011


Laser peening process and apparatus with uniform pressure pulse confinement
patent, April 2000


Optical detectors using nulling for high linearity and large dynamic range
patent, July 2002


Method of making backside illuminated image sensors
patent, September 1993


Self-frequency-doubler laser element
patent, February 1995


Light sensitive semiconductor component
patent, July 2003


Method of forming polycrystalline semiconductor film
patent, November 2002


Flexible photovoltaic device
patent, July 1992


Multi-band focal plane array
patent, September 2009


Semiconductor optical amplifying apparatus
patent, May 1994


Method for processing silicon solar cells
patent, May 1997


Semiconductor devices by laser enhanced diffusion
patent, August 1982


Thermal imaging devices
patent, November 1989


Photovoltaic device
patent, December 1994


Patterned epitaxial regrowth using overlapping pulsed irradiation
patent, November 1980


Fabrication method of semiconductor device using ion implantation
patent, April 2002


Highly-depleted laser doped semiconductor volume
patent, June 2010


Freight-carrying platforms
patent, October 1985


Method of forming polycrystalline semiconductor film
patent-application, March 2002


Laser chemical fabrication of nanostructures
patent, March 2005


Blocked impurity band detectors
patent, February 1986


Glass-Based SOI Structures
patent-application, August 2010


Sculpted solar cell surfaces
patent, January 1992


Solar cell
patent, March 1992


Infrared radiation absorption device
patent, November 1996


Diode
patent, November 2004


Method and means for passivation and isolation in semiconductor devices
patent, April 1977


Blue vertical cavity surface emitting laser
patent, December 2000


Proximity laser doping technique for electronic materials
patent, February 1999


Indirect back surface contact to semiconductor devices
patent, January 2003


Solar Cell and Its Spectrum Convertor
patent-application, June 2009


Three-dimensional island pixel photo-sensor
patent, May 2006


Chip module for complete power train
patent, January 2011


Integrated IR, visible and NIR sensor and methods of fabricating same
patent, September 1998


Coarse and fine motion positioning mechanism
patent, February 1988


Integrated optical head
patent, December 1989


Phototonic device with strain-induced three dimensional growth morphology
patent, December 2001


Semiconductor devices, CMOS image sensors, and methods of manufacturing same
patent, September 2009


Process for preparing low defect density silicon using high growth rates
patent, February 2004


Method for fabricating silicon cells
patent, August 1998


Solid-state imaging device and method of manufacturing the same
patent, December 2010


CMOS image sensors including backside illumination structure
patent, April 2012


Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method
patent-application, February 2005


Multiple color detection elevated pin photo diode active pixel sensor
patent, August 2000


Systems and methods for light absorption and field emission using microstructured silicon
patent-application, February 2003


Laser texturing
patent, June 1994


Method of making thin film solar cell array
patent, March 1991


Methods for producing a semiconductor device having planarization films
patent, August 2011


Vertically integrated photosensor for CMOS imagers
patent, August 2005


Laser-induced structuring of substrate surfaces
patent, October 2010


Femtosecond laser processing system with process parameters, controls and feedback
patent-application, October 2005


Flexible illuminators for phototherapy
patent, September 2001


Client-server architecture using internet and public switched networks
patent, November 1999


Overvoltage protection device
patent, October 2003


Method and apparatus for positioning a disk-shaped object
patent, January 2002


System and a method for a smart surveillance system
patent, April 2008


Light-sensing device
patent, April 2009


Two-dimensional optoelectronic array module
patent, February 1997


Method of fabricating backside illuminated image sensor
patent, January 2010


Integrated optical device having integral photodetector
patent, November 1987


Peel-apart photosensitive element
patent, August 1993


Optical properties of solar cells using tilted geometrical features
patent, January 1992


Process for producing silicon semiconductor wafers with low defect density
patent, August 1999


Isolation process for VLSI
patent, August 1993


Laser-beam annealing apparatus
patent, October 1995


Tantalum-aluminum oxide coatings for semiconductor devices
patent, September 1998


Photovoltaic semi-conductor devices
patent, November 1976


Processes for producing low cost, high efficiency silicon solar cells
patent, June 1998


Method for manufacturing semiconductor device, and laser irradiation apparatus
patent, July 2007


Biometric detection using spatial, temporal, and/or spectral techniques
patent, January 2013


Low temperature texturing layer to enhance adhesion of subsequent layers
patent, January 2008


High-capacitance photodiode
patent, January 2004


Monocrystalline three-dimensional integrated-circuit technology
patent, February 2002


Manufacturing method of thin film device substrate
patent, August 2007


Controlled reflectance solar cell
patent, June 1989


Manufacturing of TFT device by backside laser irradiation
patent, November 2002


Laser texturing
patent, November 1992


Image sensor for stabilizing a black level
patent, May 2014


Wideband semiconducting light detector
patent, December 2010


Integrated infrared and visible image sensors
patent, August 2000


Infrared-radiation detector device
patent, January 1990


Method of producing a thin-film photovoltaic device
patent, December 2002


Photovoltaic device
patent, January 1998


Multi-junction solar cells and methods and apparatuses for forming the same
patent, September 2009


Capacitive bypass
patent, October 2009


Semiconductor texturing process
patent, November 2010


Backside illumination of CMOS image sensor
patent, August 2002


High performance ultraviolet imager for operation at room temperature
patent, November 2002


Composite laminate circuit structure and methods of interconnecting the same
patent, November 2002


Fabrication of polycrystalline thin films by pulsed laser processing
patent, February 1998


Light sensing system with high pixel fill factor
patent, November 2002


Methods for manufacturing arrays for CMOS imagers
patent, September 2013


Solid-state imaging device
patent, May 2013


Semiconductor laser manufacturing method
patent, February 1992


Method and apparatus for manufacturing semiconductor element
patent, May 2003


Semiconductor surface modification
patent, August 2014


Annealing methods of doping electrode surfaces using dopant gases
patent, August 1999


Solar cell device
patent, July 2009


Dual bandwith bolometer
patent, August 2000


Ion implantation apparatus
patent, June 1997


Picosecond Q-switched microlasers
patent, January 1995


Laser annealing apparatus
patent, July 2007


Materials, systems and methods for optoelectronic devices
patent, April 2011


Low-capacitance bidirectional protection device
patent, July 2005


Semiconductor photodiode and an optical receiver
patent, January 2004


Tandem solar cell
patent, June 1991


Wide spectral range hybrid image detector
patent, November 2011


Method for modifying wiring of semiconductor device
patent, January 1993


Backside illuminated image sensor
patent, December 2010


Image sensor
patent, March 1990


Underwater laser processing device including chamber with partitioning wall
patent, November 1999


Systems and methods for creating crystallographic-orientation controlled poly-Silicon films
patent-application, May 2006


Security check provision
patent, June 2005


Patterned roller for the micro-replication of complex lenses
patent, June 2003


Ceramic, metal and composite materials having increased surface area
patent, June 1997


Backside illuminated image sensor having deep light reflective trenches
patent, September 2010


Semiconductor laser structures
patent, October 1990


Overvoltage protection circuit
patent, June 2001


Monolithic antenna with integral pin diode tuning
patent, October 1988


Method and apparatus for laser annealing
patent, May 2007


Autofocus system for scanning laser inspector or writer
patent, December 1989


Three dimensional device integration method and integrated device
patent, October 2006