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Title: Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics

Abstract

In an aspect, the present invention provides stretchable, and optionally printable, components such as semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed, and related methods of making or tuning such stretchable components. Stretchable semiconductors and electronic circuits preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention are adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

Inventors:
; ; ; ; ; ; ; ; ; ; ; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1568613
Patent Number(s):
10355113
Application Number:
15/084,112
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05K - PRINTED CIRCUITS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Resource Relation:
Patent File Date: 03/29/2016
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats

Rogers, John A., Meitl, Matthew, Sun, Yugang, Ko, Heung Cho, Carlson, Andrew, Choi, Won Mook, Stoykovich, Mark, Jiang, Hanqing, Huang, Yonggang, Nuzzo, Ralph G., Zhu, Zhengtao, Menard, Etienne, and Khang, Dahl-Young. Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics. United States: N. p., 2019. Web.
Rogers, John A., Meitl, Matthew, Sun, Yugang, Ko, Heung Cho, Carlson, Andrew, Choi, Won Mook, Stoykovich, Mark, Jiang, Hanqing, Huang, Yonggang, Nuzzo, Ralph G., Zhu, Zhengtao, Menard, Etienne, & Khang, Dahl-Young. Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics. United States.
Rogers, John A., Meitl, Matthew, Sun, Yugang, Ko, Heung Cho, Carlson, Andrew, Choi, Won Mook, Stoykovich, Mark, Jiang, Hanqing, Huang, Yonggang, Nuzzo, Ralph G., Zhu, Zhengtao, Menard, Etienne, and Khang, Dahl-Young. Tue . "Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics". United States. https://www.osti.gov/servlets/purl/1568613.
@article{osti_1568613,
title = {Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics},
author = {Rogers, John A. and Meitl, Matthew and Sun, Yugang and Ko, Heung Cho and Carlson, Andrew and Choi, Won Mook and Stoykovich, Mark and Jiang, Hanqing and Huang, Yonggang and Nuzzo, Ralph G. and Zhu, Zhengtao and Menard, Etienne and Khang, Dahl-Young},
abstractNote = {In an aspect, the present invention provides stretchable, and optionally printable, components such as semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed, and related methods of making or tuning such stretchable components. Stretchable semiconductors and electronic circuits preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention are adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {7}
}

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Works referenced in this record:

Methods for forming assemblies
patent, August 2001


Electronic devices with small functional elements supported on a carrier
patent, November 2004


Stretchable form of single crystal silicon for high performance electronics on rubber substrates
patent, August 2015


Mold release layer transferring film and laminate film
patent, August 2007


Methods of making spatially aligned nanotubes and nanotube arrays
patent, February 2013


Apparatuses and methods used in forming assemblies
patent, August 2001


High resolution electrohydrodynamic jet printing for manufacturing systems
patent, June 2015


Web process interconnect in electronic assemblies
patent, October 2002


Methods of positioning and/or orienting nanostructures
patent, March 2005


Method and apparatus for fabricating self-assembling microstructures
patent, October 1998


Methods and apparatus for fluidic self assembly
patent, September 2003


Printable semiconductor structures and related methods of making and assembling
patent, March 2013


Flexible interconnect structures for electrical devices and light sources incorporating the same
patent, September 2007


Method of utilizing a contact printing stamp
patent, May 2008


Disposing method for semiconductor elements
patent, April 2004


Methods and devices for fabricating and assembling printable semiconductor elements
patent, March 2014


Multispectral plasmonic crystal sensors
patent, April 2010


Functionally symmetric integrated circuit die
patent, September 2001


Implantable biomedical devices on bioresorbable substrates
patent, March 2014


Method and apparatus for transferring blocks
patent, May 2004


Optical systems fabricated by printing-based assembly
patent, August 2015


Web fabrication of devices
patent, January 2004


Printable semiconductor structures and related methods of making and assembling
patent, October 2011


Methods and devices for fabricating and assembling printable semiconductor elements
patent, May 2013


Method for fabricating self-assembling microstructures
patent, August 1996


Apparatuses and methods for flexible displays
patent, February 2005


Single crystal silicon arrayed devices with optical shield between transistor and substrate
patent, November 2001


Organic species that facilitate charge transfer to or from nanostructures
patent, September 2005


Stretchable and foldable electronic devices
patent, October 2013


Release strategies for making transferable semiconductor structures, devices and device components
patent, November 2014


Electrical contacts for flexible displays
patent, March 2005


Optical systems fabricated by printing-based assembly
patent, May 2014


Semiconductor wafer having a thin die and tethers and methods of making the same
patent, August 2003


Composite patterning devices for soft lithography
patent, March 2007


Conformable actively multiplexed high-density surface electrode array for brain interfacing
patent, January 2015


Methods for creating elements of predetermined shape and apparatus using these elements
patent, July 2003


Methods and devices for fabricating and assembling printable semiconductor elements
patent, July 2011


Apparatus relating to block configurations and fluidic self-assembly processes
patent, December 2003


Methods and apparatuses for improved flow in performing fluidic self assembly
patent, March 2003


Arrays of ultrathin silicon solar microcells
patent, August 2015


Methods to fabricate thin film transistors and circuits
patent, May 2001


Methods and devices for fabricating and assembling printable semiconductor elements
patent, November 2009


Full panel electronic packaging structure and method of making same
patent, August 1988


Testing integrated circuit dice
patent, April 2002


Curve-conforming sensor array pad and method of measuring saddle pressures on a horse
patent, December 1994


Conductor geometry for electronic circuits fabricated on flexible substrates
patent, December 2009


Arrays of ultrathin silicon solar microcells
patent, March 2014


Flexible conductive tape connection
patent, November 2001


Large area solar cell extended life interconnect
patent, November 2000


Surface mountable flexible interconnect
patent, July 1999


Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp
patent, May 2011


Apparatus for fabricating self-assembling microstructures
patent, May 1999


Angular displacement sensors
patent, February 1992


Preferred methods for producing electrical circuit elements used to control an electronic display
patent, July 2002


Methods for transferring elements from a template to a substrate
patent, April 2003


Pixel integrated circuit
patent, August 2003


Nanoimprint lithography
patent, June 1998


Mountable microstructure and optical transmission apparatus
patent, May 2004


Methods of forming two-sided HDMI interconnect structures
patent, November 1997


System and method of transferring dies using an adhesive surface
patent, February 2005


Methods for creating elements of predetermined shape and apparatuses using these elements
patent, July 2002


Printable, flexible and stretchable diamond for thermal management
patent, June 2013


Apparatuses and methods for forming electronic assemblies
patent, March 2005


High resolution printing of charge
patent, June 2015


Apparatuses and methods for forming electronic assemblies
patent, December 2003


High resolution sensing and control of electrohydrodynamic jet printing
patent, October 2013


Methods for fabricating a multiple modular assembly
patent, November 2001


Stretchable semiconductor elements and stretchable electrical circuits
patent, July 2009


Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates
patent, February 2015


Multi-feature-size electronic structures
patent, August 2003


Method for fabricating self-assembling microstructures
patent, July 1998


Attachment method for assembly of high density multiple interconnect structures
patent, December 1999


MOS transistor with a deformable gate
patent, December 2007


Optical systems fabricated by printing-based assembly
patent, July 2011


Stamp for a lithographic process
patent, October 1998


Alpha-particle protection of semiconductor devices
patent, August 1988


Interconnect structure for electronic devices
patent, February 2004


Nanostructure and nanocomposite based compositions and photovoltaic devices
patent, April 2005


Nanocomposites
patent-application, May 2004


Stretchable interconnects using stress gradient films
patent, June 2004


Double-metal background driven displays
patent, July 2003


Methods and devices for fabricating three-dimensional nanoscale structures
patent, April 2010


Printable semiconductor structures and related methods of making and assembling
patent, September 2010


Mechanical resistance of a single-crystal silicon wafer
patent, June 2003


Method of making thin silicon sheets for solar cells
patent, January 2007