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Title: Depositing bulk or micro-scale electrodes

Abstract

Thicker electrodes are provided on microelectronic device using thermo-compression bonding. A thin-film electrical conducting layer forms electrical conduits and bulk depositing provides an electrode layer on the thin-film electrical conducting layer. An insulating polymer layer encapsulates the electrically thin-film electrical conducting layer and the electrode layer. Some of the insulating layer is removed to expose the electrode layer.

Inventors:
; ; ; ; ; ;
Issue Date:
Research Org.:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1568540
Patent Number(s):
10342128
Application Number:
15/274,363
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA)
Patent Classifications (CPCs):
A - HUMAN NECESSITIES A61 - MEDICAL OR VETERINARY SCIENCE A61N - ELECTROTHERAPY
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05K - PRINTED CIRCUITS
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Patent
Resource Relation:
Patent File Date: 09/23/2016
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 36 MATERIALS SCIENCE

Citation Formats

Shah, Kedar G., Pannu, Satinderpall S., Tolosa, Vanessa, Tooker, Angela C., Sheth, Heeral J., Felix, Sarah H., and Delima, Terri L. Depositing bulk or micro-scale electrodes. United States: N. p., 2019. Web.
Shah, Kedar G., Pannu, Satinderpall S., Tolosa, Vanessa, Tooker, Angela C., Sheth, Heeral J., Felix, Sarah H., & Delima, Terri L. Depositing bulk or micro-scale electrodes. United States.
Shah, Kedar G., Pannu, Satinderpall S., Tolosa, Vanessa, Tooker, Angela C., Sheth, Heeral J., Felix, Sarah H., and Delima, Terri L. Tue . "Depositing bulk or micro-scale electrodes". United States. https://www.osti.gov/servlets/purl/1568540.
@article{osti_1568540,
title = {Depositing bulk or micro-scale electrodes},
author = {Shah, Kedar G. and Pannu, Satinderpall S. and Tolosa, Vanessa and Tooker, Angela C. and Sheth, Heeral J. and Felix, Sarah H. and Delima, Terri L.},
abstractNote = {Thicker electrodes are provided on microelectronic device using thermo-compression bonding. A thin-film electrical conducting layer forms electrical conduits and bulk depositing provides an electrode layer on the thin-film electrical conducting layer. An insulating polymer layer encapsulates the electrically thin-film electrical conducting layer and the electrode layer. Some of the insulating layer is removed to expose the electrode layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {7}
}

Works referenced in this record:

Wound Dressing with Impedance Sensor
patent-application, July 2012


Ink Jet Printing of Implantable Electrodes
patent-application, December 2010


Insulated Implantable Electrical Circuit
patent-application, October 2006


Biosensor
patent-application, July 2004


Rigid Spine Reinforced Polymer Microelectrode Array Probe and Method of Fabrication
patent-application, December 2010


Thermo-Compression Bonding of Metal to Semiconductors and the Like
patent, October 1961


Methods of Bonding Microelectronic Elements
patent-application, October 2002


Analyte Sensor and Fabrication Methods
patent-application, August 2010