Method of creating boron comprising layer
Abstract
A method for forming boron (B) containing Al2O3 composite layers includes (a) reacting a substrate surface with an aluminum-containing precursor to form a first monolayer, (b) purging excess aluminum-containing precursor and reaction by-product, (c) reacting the first monolayer with a second precursor, and (d) purging excess second precursor and reaction by-product, such that steps (a) to (d) constitute one cycle, the composite layers being formed after a plurality of cycles, and the resultant composite layers have a chemical formula of BxAl2−xO3, where x varies in the range of 0 and 2.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1568366
- Patent Number(s):
- 10294564
- Application Number:
- 15/688,653
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 08/28/2017
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Citation Formats
Mane, Anil U., and Elam, Jeffrey W. Method of creating boron comprising layer. United States: N. p., 2019.
Web.
Mane, Anil U., & Elam, Jeffrey W. Method of creating boron comprising layer. United States.
Mane, Anil U., and Elam, Jeffrey W. Tue .
"Method of creating boron comprising layer". United States. https://www.osti.gov/servlets/purl/1568366.
@article{osti_1568366,
title = {Method of creating boron comprising layer},
author = {Mane, Anil U. and Elam, Jeffrey W.},
abstractNote = {A method for forming boron (B) containing Al2O3 composite layers includes (a) reacting a substrate surface with an aluminum-containing precursor to form a first monolayer, (b) purging excess aluminum-containing precursor and reaction by-product, (c) reacting the first monolayer with a second precursor, and (d) purging excess second precursor and reaction by-product, such that steps (a) to (d) constitute one cycle, the composite layers being formed after a plurality of cycles, and the resultant composite layers have a chemical formula of BxAl2−xO3, where x varies in the range of 0 and 2.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {5}
}
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