Title: Direct write sensors

Abstract

A method of making an acoustic wave sensor includes the steps of providing a piezoelectric substrate layer and printing on the substrate layer a sensor layer comprising a first interdigitated acoustic wave transducer, a sensing film, and positioned on an opposing side of the sensing film from the first interdigitated acoustic wave transducer at least one selected from the group consisting of a second interdigitated acoustic wave transducer and a Bragg reflector. An insulation layer can be printed. An antenna can be printed in an antenna layer, and the insulation layer can be interposed between the antenna layer and the sensor layer. An electrical connection can be printed between the antenna and the first interdigitated acoustic wave transducer. An acoustic wave sensor is also disclosed.

Inventors:

McIntyre, Timothy J.

Issue Date:

2019-05-14

Research Org.:

Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1568350

Patent Number(s):

10291199

Application Number:

15/246,907

Assignee:

UT-Battelle, LLC (Oak Ridge, TN)

Patent Classifications (CPCs):

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N2291/0255 -

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS

H03H9/02275 - {Comb electrodes}

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N29/022 - {Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
G01N2291/0256 - Adsorption, desorption, surface mass change, e.g. on biosensors

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L41/314 - by depositing piezo-electric or electrostrictive layers, e.g. aerosol or screen printing

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS

H03H9/02007 - {of bulk acoustic wave devices}
H03H9/02535 - {of surface acoustic wave devices}

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N29/22 - Details {, e.g. general constructional or apparatus details}
G01N2291/0426 - Bulk waves, e.g. quartz crystal microbalance, torsional waves
G01N2291/0423 - Surface waves, e.g. Rayleigh waves, Love waves

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DOE Contract Number:  

AC05-00OR22725

Resource Type:

Patent

Resource Relation:

Patent File Date: 08/25/2016

Country of Publication:

United States

Language:

English

Subject:

42 ENGINEERING