Bottom emitting vertical-cavity surface-emitting lasers
Abstract
A bottom-emitting vertical-cavity surface-emitting laser (VCSEL) structure includes a first substrate permitting the passage of light therethrough, an n-doped distributed Bragg reflector (nDBR), a p-doped distributed Bragg reflector (pDBR), one or more active layers, at least one of a high contrast grating mirror and a dielectric-enhanced metal mirror, and a plurality of layers, where the VCSEL structure is configured to be flip chipped to a second substrate. The pDBR and the nDBR define a laser cavity extending vertically therebetween and containing the one or more active layers. The at least one of a high contrast grating mirror and a dielectric-enhanced metal mirror may be disposed over the pDBR. The plurality of layers may be disposed over the at least one of the high contrast grating mirror and the dielectric-enhanced metal mirror to optically and hermetically seal the laser cavity.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1568348
- Patent Number(s):
- 10290996
- Application Number:
- 15/962,649
- Assignee:
- Hewlett-Packard Enterprise Development LP (Houston, TX)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01S - DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT
- DOE Contract Number:
- AC52-07NA27344
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 04/25/2018
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 42 ENGINEERING
Citation Formats
Mathai, Sagi Varghese, Cheung, Stanley, Sorin, Wayne V., and Tan, Michael Renne Ty. Bottom emitting vertical-cavity surface-emitting lasers. United States: N. p., 2019.
Web.
Mathai, Sagi Varghese, Cheung, Stanley, Sorin, Wayne V., & Tan, Michael Renne Ty. Bottom emitting vertical-cavity surface-emitting lasers. United States.
Mathai, Sagi Varghese, Cheung, Stanley, Sorin, Wayne V., and Tan, Michael Renne Ty. Tue .
"Bottom emitting vertical-cavity surface-emitting lasers". United States. https://www.osti.gov/servlets/purl/1568348.
@article{osti_1568348,
title = {Bottom emitting vertical-cavity surface-emitting lasers},
author = {Mathai, Sagi Varghese and Cheung, Stanley and Sorin, Wayne V. and Tan, Michael Renne Ty},
abstractNote = {A bottom-emitting vertical-cavity surface-emitting laser (VCSEL) structure includes a first substrate permitting the passage of light therethrough, an n-doped distributed Bragg reflector (nDBR), a p-doped distributed Bragg reflector (pDBR), one or more active layers, at least one of a high contrast grating mirror and a dielectric-enhanced metal mirror, and a plurality of layers, where the VCSEL structure is configured to be flip chipped to a second substrate. The pDBR and the nDBR define a laser cavity extending vertically therebetween and containing the one or more active layers. The at least one of a high contrast grating mirror and a dielectric-enhanced metal mirror may be disposed over the pDBR. The plurality of layers may be disposed over the at least one of the high contrast grating mirror and the dielectric-enhanced metal mirror to optically and hermetically seal the laser cavity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {5}
}