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Title: Bottom emitting vertical-cavity surface-emitting lasers

Abstract

A bottom-emitting vertical-cavity surface-emitting laser (VCSEL) structure includes a first substrate permitting the passage of light therethrough, an n-doped distributed Bragg reflector (nDBR), a p-doped distributed Bragg reflector (pDBR), one or more active layers, at least one of a high contrast grating mirror and a dielectric-enhanced metal mirror, and a plurality of layers, where the VCSEL structure is configured to be flip chipped to a second substrate. The pDBR and the nDBR define a laser cavity extending vertically therebetween and containing the one or more active layers. The at least one of a high contrast grating mirror and a dielectric-enhanced metal mirror may be disposed over the pDBR. The plurality of layers may be disposed over the at least one of the high contrast grating mirror and the dielectric-enhanced metal mirror to optically and hermetically seal the laser cavity.

Inventors:
; ; ;
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1568348
Patent Number(s):
10,290,996
Application Number:
15/962,649
Assignee:
Hewlett-Packard Enterprise Development LP (Houston, TX)
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Patent
Resource Relation:
Patent File Date: 04/25/2018
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 42 ENGINEERING

Citation Formats

Mathai, Sagi Varghese, Cheung, Stanley, Sorin, Wayne V., and Tan, Michael Renne Ty. Bottom emitting vertical-cavity surface-emitting lasers. United States: N. p., 2019. Web.
Mathai, Sagi Varghese, Cheung, Stanley, Sorin, Wayne V., & Tan, Michael Renne Ty. Bottom emitting vertical-cavity surface-emitting lasers. United States.
Mathai, Sagi Varghese, Cheung, Stanley, Sorin, Wayne V., and Tan, Michael Renne Ty. Tue . "Bottom emitting vertical-cavity surface-emitting lasers". United States. https://www.osti.gov/servlets/purl/1568348.
@article{osti_1568348,
title = {Bottom emitting vertical-cavity surface-emitting lasers},
author = {Mathai, Sagi Varghese and Cheung, Stanley and Sorin, Wayne V. and Tan, Michael Renne Ty},
abstractNote = {A bottom-emitting vertical-cavity surface-emitting laser (VCSEL) structure includes a first substrate permitting the passage of light therethrough, an n-doped distributed Bragg reflector (nDBR), a p-doped distributed Bragg reflector (pDBR), one or more active layers, at least one of a high contrast grating mirror and a dielectric-enhanced metal mirror, and a plurality of layers, where the VCSEL structure is configured to be flip chipped to a second substrate. The pDBR and the nDBR define a laser cavity extending vertically therebetween and containing the one or more active layers. The at least one of a high contrast grating mirror and a dielectric-enhanced metal mirror may be disposed over the pDBR. The plurality of layers may be disposed over the at least one of the high contrast grating mirror and the dielectric-enhanced metal mirror to optically and hermetically seal the laser cavity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {5}
}

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