Microfabricated magnetostrictive resonator

Title: Microfabricated magnetostrictive resonator

Abstract

A microfabricated magnetic resonator is provided. The microfabricated magnetic resonator has one or more resonator portions, each of which is a magnetoelastic resonating structure having a maximum circumference or maximum linear dimension in at least one direction that is less than 1000 μm. At least one of the resonator portions comprises an electrodeposited material comprising at least a cobalt constituent and an iron constituent.

Inventors:: Pillars, Jamin Ryan; Langlois, Eric; Arrington, Christian Lew; Monson, Todd

Issue Date:: 2019-04-16

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1568201

Patent Number(s):: 10260969

Application Number:: 16/156,555

Assignee:: National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

Patent Classifications (CPCs):: C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS

G - PHYSICS G01 - MEASURING G01L - MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE

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C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS
C25D1/003 - {3D structures, e.g. superposed patterned layers}

G - PHYSICS G01 - MEASURING G01L - MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
G01L1/125 - {by using magnetostrictive means

G - PHYSICS G01 - MEASURING G01M - TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES
G01M5/0066 - {by exciting or detecting vibration or acceleration

C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS
C25D5/022 - {using masking means
C25D5/18 - Electroplating using modulated, pulsed or reversing current

G - PHYSICS G01 - MEASURING G01K - MEASURING TEMPERATURE
G01K7/36 - using magnetic elements, e.g. magnets, coils

G - PHYSICS G01 - MEASURING G01L - MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
G01L1/106 - {Constructional details}

C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS
C25D3/562 - {containing more than 50% by weight of iron or nickel or cobalt
C25D7/00 - Electroplating characterised by the article coated
C25D5/02 - Electroplating of selected surface areas

G - PHYSICS G01 - MEASURING G01M - TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES
G01M5/0041 - {by determining deflection or stress}

Show less

DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 10/10/2018

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 42 ENGINEERING; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats


                    Pillars, Jamin Ryan, Langlois, Eric, Arrington, Christian Lew, and Monson, Todd. Microfabricated magnetostrictive resonator.  United States: N. p., 2019. 
        Web.

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                    Pillars, Jamin Ryan, Langlois, Eric, Arrington, Christian Lew, & Monson, Todd. Microfabricated magnetostrictive resonator.  United States.

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                    Pillars, Jamin Ryan, Langlois, Eric, Arrington, Christian Lew, and Monson, Todd. Tue .  
        "Microfabricated magnetostrictive resonator".  United States.  https://www.osti.gov/servlets/purl/1568201.

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@article{osti_1568201,

  title        = {Microfabricated magnetostrictive resonator},

  author       = {Pillars, Jamin Ryan and Langlois, Eric and Arrington, Christian Lew and Monson, Todd},

  abstractNote = {A microfabricated magnetic resonator is provided. The microfabricated magnetic resonator has one or more resonator portions, each of which is a magnetoelastic resonating structure having a maximum circumference or maximum linear dimension in at least one direction that is less than 1000 μm. At least one of the resonator portions comprises an electrodeposited material comprising at least a cobalt constituent and an iron constituent.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {4}

}

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Title: Microfabricated magnetostrictive resonator

Abstract

Citation Formats

Electrodeposition processes for magnetostrictive resonators patent, November 2018

Method and device in magnetostrictive motion systems patent, May 1994

Method and device for remote sensing of objects patent, November 1996

Method for measuring position and angle patent, September 1996

MEMS sprung cantilever tunable capacitors and methods patent, October 2013

Method in detecting magnetic elements patent, April 1998

Precision electrostatic actuation and positioning patent, December 2001

Marker for remote detection of articles patent, July 2006

Device for non-contact measuring of stresses in a bar-shaped body patent, June 1991

Electrically-programmable diffraction grating patent, May 1998

Label including amorphous tape with improved properties patent, November 1999

Electrodeposition of high moment cobalt iron patent, July 1988

Method of detecting labels with amorphous magneto-elastical tapes patent, October 1999

Method and device for coding electronic labels patent, January 2000

Attenuation of spurious responses in electromechanical filters patent, April 2018

Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode patent, August 2014

Optically transduced MEMS magnetometer patent, March 2014

Gallium beam lithography for superconductive structure formation patent, January 2018

Article surveillance system patent, October 2000

Device for improved response when measuring vibration frequency of a vibrating object patent, October 2012

Method for excitation and detection of magnetic elements by a mechanical resonance patent, June 1998

Electroplating of nickel, cobalt, nickel-cobalt, nickel-iron, cobalt-iron and nickel-iron-cobalt deposits patent, October 1977

Method for differentiation of substances patent, April 2013

Micro-electromechanical voltage tunable capacitor and and filter devices patent, April 2011

Non-volatile MEMS micro-relays using magnetic actuators patent, September 2000

CoFe alloy film and process of making same patent, February 2005

Microfabricated particle focusing device patent, April 2013

Methods for suppressing spurious modes in microresonators patent, June 2018

Strain detector patent, May 1994

Optically transduced MEMS gyro device patent, May 2014

Lightweight torquemeter and torque-measuring method patent, June 1985

Method and apparatus for switching optical signals using rotatable optically transmissive microstructure patent, February 2004

Sensor, a method and a system for remote detection of objects patent, July 2002

High-yield synthesis of brookite TiO2 nanoparticles patent, May 2011

Method and device for electronic identification patent, September 1996

Continuously tunable RF MEMS capacitor with ultra-wide tuning range patent, March 2008

Magnetoelastic stress sensor patent, March 1994

Sensor for remote detection of objects patent, May 2001

Label for marking and remote detection of objects patent, April 2001

Mechanical resonator patent, May 2007

Micromachined force-balance feedback accelerometer with optical displacement detection patent, July 2014

EMI shielding structure to enable heat spreading and low cost assembly patent, September 2017

Optomechanical force sensors, cantilevers, and systems thereof patent, July 2018

Method of plating an iron-cobalt alloy on a substrate patent, June 1980

Sensor and method for remote detection of objects patent, May 2001

Anti-theft device with a thermally controllable locking mechanism patent, September 2001

Process for fabricating improved iron-cobalt magnetostrictive alloy and article comprising alloy patent, November 2000

Electrodeposition processes for magnetostrictive resonators
patent, November 2018

Method and device in magnetostrictive motion systems
patent, May 1994

Method and device for remote sensing of objects
patent, November 1996

Method for measuring position and angle
patent, September 1996

MEMS sprung cantilever tunable capacitors and methods
patent, October 2013

Method in detecting magnetic elements
patent, April 1998

Precision electrostatic actuation and positioning
patent, December 2001

Marker for remote detection of articles
patent, July 2006

Device for non-contact measuring of stresses in a bar-shaped body
patent, June 1991

Electrically-programmable diffraction grating
patent, May 1998

Label including amorphous tape with improved properties
patent, November 1999

Electrodeposition of high moment cobalt iron
patent, July 1988

Method of detecting labels with amorphous magneto-elastical tapes
patent, October 1999

Method and device for coding electronic labels
patent, January 2000

Attenuation of spurious responses in electromechanical filters
patent, April 2018

Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode
patent, August 2014

Optically transduced MEMS magnetometer
patent, March 2014

Gallium beam lithography for superconductive structure formation
patent, January 2018

Article surveillance system
patent, October 2000

Device for improved response when measuring vibration frequency of a vibrating object
patent, October 2012

Method for excitation and detection of magnetic elements by a mechanical resonance
patent, June 1998

Electroplating of nickel, cobalt, nickel-cobalt, nickel-iron, cobalt-iron and nickel-iron-cobalt deposits
patent, October 1977

Method for differentiation of substances
patent, April 2013

Micro-electromechanical voltage tunable capacitor and and filter devices
patent, April 2011

Non-volatile MEMS micro-relays using magnetic actuators
patent, September 2000

CoFe alloy film and process of making same
patent, February 2005

Microfabricated particle focusing device
patent, April 2013

Methods for suppressing spurious modes in microresonators
patent, June 2018

Strain detector
patent, May 1994

Optically transduced MEMS gyro device
patent, May 2014

Lightweight torquemeter and torque-measuring method
patent, June 1985

Method and apparatus for switching optical signals using rotatable optically transmissive microstructure
patent, February 2004

Sensor, a method and a system for remote detection of objects
patent, July 2002

High-yield synthesis of brookite TiO2 nanoparticles
patent, May 2011

Method and device for electronic identification
patent, September 1996

Continuously tunable RF MEMS capacitor with ultra-wide tuning range
patent, March 2008

Magnetoelastic stress sensor
patent, March 1994

Sensor for remote detection of objects
patent, May 2001

Label for marking and remote detection of objects
patent, April 2001

Mechanical resonator
patent, May 2007

Micromachined force-balance feedback accelerometer with optical displacement detection
patent, July 2014

EMI shielding structure to enable heat spreading and low cost assembly
patent, September 2017

Optomechanical force sensors, cantilevers, and systems thereof
patent, July 2018

Method of plating an iron-cobalt alloy on a substrate
patent, June 1980

Sensor and method for remote detection of objects
patent, May 2001

Anti-theft device with a thermally controllable locking mechanism
patent, September 2001

Process for fabricating improved iron-cobalt magnetostrictive alloy and article comprising alloy
patent, November 2000