Microfabricated magnetostrictive resonator

Title: Microfabricated magnetostrictive resonator

Abstract

A microfabricated magnetic resonator is provided. The microfabricated magnetic resonator has one or more resonator portions, each of which is a magnetoelastic resonating structure having a maximum circumference or maximum linear dimension in at least one direction that is less than 1000 μm. At least one of the resonator portions comprises an electrodeposited material comprising at least a cobalt constituent and an iron constituent.

Inventors:: Pillars, Jamin Ryan; Langlois, Eric; Arrington, Christian Lew; Monson, Todd

Issue Date:: 2019-04-16

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1568201

Patent Number(s):: 10,260,969

Application Number:: 16/156,555

Assignee:: National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 10/10/2018

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 42 ENGINEERING; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats


                    Pillars, Jamin Ryan, Langlois, Eric, Arrington, Christian Lew, and Monson, Todd. Microfabricated magnetostrictive resonator.  United States: N. p., 2019. 
        Web.

Copy to clipboard


                    Pillars, Jamin Ryan, Langlois, Eric, Arrington, Christian Lew, & Monson, Todd. Microfabricated magnetostrictive resonator.  United States.

Copy to clipboard


                    Pillars, Jamin Ryan, Langlois, Eric, Arrington, Christian Lew, and Monson, Todd. Tue .  
        "Microfabricated magnetostrictive resonator".  United States.  https://www.osti.gov/servlets/purl/1568201.

Copy to clipboard


                    
@article{osti_1568201,

  title        = {Microfabricated magnetostrictive resonator},

  author       = {Pillars, Jamin Ryan and Langlois, Eric and Arrington, Christian Lew and Monson, Todd},

  abstractNote = {A microfabricated magnetic resonator is provided. The microfabricated magnetic resonator has one or more resonator portions, each of which is a magnetoelastic resonating structure having a maximum circumference or maximum linear dimension in at least one direction that is less than 1000 μm. At least one of the resonator portions comprises an electrodeposited material comprising at least a cobalt constituent and an iron constituent.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {4}

}

Copy to clipboard

Patent:

View Patent

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Electrodeposition processes for magnetostrictive resonators
patent, November 2018

Pillars, Jamin Ryan; Langlois, Eric; Arrington, Christian Lew
US Patent Document 10,132,699
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=10132699

Method and device in magnetostrictive motion systems
patent, May 1994

Kiesewetter, Lothar E.; Olsson, Fredy; Tyren, Carl H.
US Patent Document 5,317,223
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5317223

Method and device for remote sensing of objects
patent, November 1996

Tyren, Carl H.; Persson, Leif A.
US Patent Document 5,576,693
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5576693

Method for measuring position and angle
patent, September 1996

Tyren, Carl H.; Persson, Leif A.
US Patent Document 5,551,158
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5551158

MEMS sprung cantilever tunable capacitors and methods
patent, October 2013

DeReus, Dana Richard
US Patent Document 8,570,705
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8570705

Method in detecting magnetic elements
patent, April 1998

Tyren, Carl H.
US Patent Document 5,739,752
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5739752

Precision electrostatic actuation and positioning
patent, December 2001

Hung, Elmer S.; Deutsch, Erik R.; Senturia, Stephen D.
US Patent Document 6,329,738
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6329738

Marker for remote detection of articles
patent, July 2006

Tyren, Carl H.; Lunau, Helge
US Patent Document 7,075,439
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7075439

Device for non-contact measuring of stresses in a bar-shaped body
patent, June 1991

Hesthamer, Tore; Tyren, Carl H.
US Patent Document 5,020,378
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5020378

Electrically-programmable diffraction grating
patent, May 1998

Ricco, Antonio J.; Butler, Michael A.; Sinclair, Michael B.
US Patent Document 5,757,536
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5757536

Label including amorphous tape with improved properties
patent, November 1999

Tyren, Carl H.
US Patent Document 5,990,792
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5990792

Electrodeposition of high moment cobalt iron
patent, July 1988

Liao, Simon H.; Tolman, Charles H.
US Patent Document 4,756,816
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=4756816

Method of detecting labels with amorphous magneto-elastical tapes
patent, October 1999

Tyren, Carl H.
US Patent Document 5,969,610
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5969610

Method and device for coding electronic labels
patent, January 2000

Tyren, Carl H.
US Patent Document 6,018,297
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6018297

Attenuation of spurious responses in electromechanical filters
patent, April 2018

Olsson, III, Roy H.; Hietala, Vincent
US Patent Document 9,941,857
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=9941857

Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode
patent, August 2014

Resnick, Paul J.; Langlois, Eric
US Patent Document 8,814,622
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8814622

Optically transduced MEMS magnetometer
patent, March 2014

Nielson, Gregory N.; Langlois, Eric
US Patent Document 8,674,689
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8674689

Gallium beam lithography for superconductive structure formation
patent, January 2018

Henry, Michael; Lewis, Rupert M.
US Patent Document 9,882,113
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=9882113

Article surveillance system
patent, October 2000

Tyren, Carl H.
US Patent Document 6,137,411
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6137411

Device for improved response when measuring vibration frequency of a vibrating object
patent, October 2012

Tyren, Carl H.
US Patent Document 8,276,451
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8276451

Method for excitation and detection of magnetic elements by a mechanical resonance
patent, June 1998

Tyren, Carl H.
US Patent Document 5,760,580
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5760580

Electroplating of nickel, cobalt, nickel-cobalt, nickel-iron, cobalt-iron and nickel-iron-cobalt deposits
patent, October 1977

McMullen, Warren H.; Mooney, Thomas J.
US Patent Document 4,053,373
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=4053373

Method for differentiation of substances
patent, April 2013

Tyren, Carl H.; Ahlmen, Jarl
US Patent Document 8,414,772
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8414772

Micro-electromechanical voltage tunable capacitor and and filter devices
patent, April 2011

Ayazi, Farrokh; Raieszadeh, Mina
US Patent Document 7,933,112
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7933112

Non-volatile MEMS micro-relays using magnetic actuators
patent, September 2000

Bishop, David John; Jin, Sungho; Kim, Jungsang
US Patent Document 6,124,650
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6124650

CoFe alloy film and process of making same
patent, February 2005

Cooper, Emanuel Israel; Dinan, Jr., Thomas; Romankiw, Lubomyr T.
US Patent Document 6,855,240
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6855240

Microfabricated particle focusing device
patent, April 2013

Ravula, Surendra K.; Arrington, Christian Lew; Sigman, Jennifer K.
US Patent Document 8,425,749
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8425749

Methods for suppressing spurious modes in microresonators
patent, June 2018

Branch, Darren W.; Olsson, III, Roy H.
US Patent Document 10,009,002
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=10009002

Strain detector
patent, May 1994

Hayashi, Kiyoshi; Ootera, Susumu; Sato, Hiroshi
US Patent Document 5,313,845
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5313845

Optically transduced MEMS gyro device
patent, May 2014

Nielson, Gregory N.; Bogart, Gregory R.; Langlois, Eric
US Patent Document 8,726,730
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8726730

Lightweight torquemeter and torque-measuring method
patent, June 1985

Barkhoudarian, Sarkis
US Patent Document 4,523,482
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=4523482

Method and apparatus for switching optical signals using rotatable optically transmissive microstructure
patent, February 2004

Hsu, Ying Wen
US Patent Document 6,694,071
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6694071

Sensor, a method and a system for remote detection of objects
patent, July 2002

Tyrn, Carl
US Patent Document 6,417,771
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6417771

High-yield synthesis of brookite TiO2 nanoparticles
patent, May 2011

Huber, Dale L.; Monson, Todd C.
US Patent Document 7,943,116
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7943116

Method and device for electronic identification
patent, September 1996

Tyren, Carl H.; Persson, Leif A.
US Patent Document 5,557,085
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5557085

Continuously tunable RF MEMS capacitor with ultra-wide tuning range
patent, March 2008

Hsu, Tsung-Yuan; Chang, David
US Patent Document 7,345,866
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7345866

Magnetoelastic stress sensor
patent, March 1994

Tyren, Carl H.; Lord, Donald G.
US Patent Document 5,297,439
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5297439

Sensor for remote detection of objects
patent, May 2001

Tyren, Carl H.; Quinones, Christian
US Patent Document 6,225,905
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6225905

Label for marking and remote detection of objects
patent, April 2001

Kiesewetter, Lothar E.; Zillessen, Harald; Tyren, Carl H.
US Patent Document 6,218,944
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6218944

Mechanical resonator
patent, May 2007

Kolosov, Oleg V.; Matsiev, Leonid F.; Padowitz, David
US Patent Document 7,210,332
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7210332

Micromachined force-balance feedback accelerometer with optical displacement detection
patent, July 2014

Nielson, Gregory N.; Langlois, Eric; Baker, Michael
US Patent Document 8,783,106
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8783106

EMI shielding structure to enable heat spreading and low cost assembly
patent, September 2017

Nishi, Yoshifumi Yoshi
US Patent Document 9,769,966
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=9769966

Optomechanical force sensors, cantilevers, and systems thereof
patent, July 2018

Douglas, Erica Ann; Eichenfield, Matt; Jones, Adam
US Patent Document 10,031,158
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=10031158

Method of plating an iron-cobalt alloy on a substrate
patent, June 1980

Mitsumoto, Norio; Ichioka, Satoshi; Takeuchi, Shinjiro
US Patent Document 4,208,254
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=4208254

Sensor and method for remote detection of objects
patent, May 2001

Tyren, Carl H.
US Patent Document 6,232,879
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6232879

Anti-theft device with a thermally controllable locking mechanism
patent, September 2001

Tyren, Carl H.; Quinones, Christian
US Patent Document 6,285,286
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6285286

Process for fabricating improved iron-cobalt magnetostrictive alloy and article comprising alloy
patent, November 2000

Chen, Li-Han; Jin, Sungho; Klemmer, Timothy J.
US Patent Document 6,153,020
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6153020

Similar records in DOE Patents and OSTI.GOV collections:

Method For Chemical Sensing Using A Microfabricated Teeter-Totter Resonator

Patent Adkins, Douglas Ray (Albuquerque, NM); Heller, Edwin J. (Albuquerque, NM); Shul, Randy J. (Albuquerque, NM)

A method for sensing a chemical analyte in a fluid stream comprises providing a microfabricated teeter-totter resonator that relies upon a Lorentz force to cause oscillation in a paddle, applying a static magnetic field substantially aligned in-plane with the paddle, energizing a current conductor line on a surface of the paddle with an alternating electrical current to generate the Lorentz force, exposing the resonator to the analyte, and detecting the response of the oscillatory motion of the paddle to the chemical analyte. Preferably, a chemically sensitive coating is disposed on at least one surface of the paddle to enhance themore »« less
Full Text Available
Microfabricated teeter-totter resonator

Patent Adkins, Douglas Ray; Heller, Edwin J.; Shul, Randy J.

A microfabricated teeter-totter resonator comprises a frame, a paddle pivotably anchored to the frame by pivot arms that define an axis of rotation, a current conductor line on a surface of the paddle, means for applying a static magnetic field substantially perpendicular to the rotational axis and in the plane of the paddle, and means for energizing the current conductor line with an alternating current. A Lorentz force is generated by the interaction of the magnetic field with the current flowing in the conductor line, causing the paddle to oscillate about the axis of rotation. The teeter-totter resonator can bemore »« less
Full Text Available
Sintered rare earth-iron Laves phase magnetostrictive alloy product and preparation thereof

Patent Malekzadeh, Manoochehr (Oakland, CA); Pickus, Milton R. (Oakland, CA)

A sintered rare earth-iron Laves phase magnetostrictive alloy product characterized by a grain oriented morphology. The grain oriented morphology is obtained by magnetically aligning powder particles of the magnetostrictive alloy prior to sintering. Specifically disclosed are grain oriented sintered compacts of Tb.sub.x Dy.sub.1-x Fe.sub.2 and their method of preparation. The present sintered products have enhanced magnetostrictive properties.
Full Text Available
Rare earth-iron magnetostrictive materials and devices using these materials

Patent Savage, Howard T. (Greenbelt, MD); Clark, Arthur E. (Adelphi, MD); McMasters, O. Dale (Ames, IA)

Grain-oriented polycrystalline or single crystal magnetostrictive materials n the general formula Tb.sub.x Dy.sub.1-x Fe.sub.2-w, Tb.sub.x Ho.sub.1-x Fe.sub.2-w, Sm.sub.x Dy.sub.1-x Fe.sub.x-w, Sm.sub.x Ho.sub.1-x Fe.sub.2-w, Tb.sub.x Ho.sub.y Dy.sub.z Fe.sub.2-w, or Sm.sub.x Ho.sub.y Dy.sub.z Fe.sub.2-w, wherein O.ltoreq.w.ltoreq.0.20, and x+y+z=1. X, y, and z are selected to maximize the magnetostrictive effect and the magnetomechanical coupling coefficient K.sub.33. These material may be used in magnetostrictive transducers, delay lines, variable frequency resonators, and filters.
Full Text Available
Method of forming magnetostrictive rods from rare earth-iron alloys

Patent McMasters, O. Dale (Ames, IA)

Rods of magnetrostructive alloys of iron with rare earth elements are formed by flowing a body of rare earth-iron alloy in a crucible enclosed in a chamber maintained under an inert gas atmosphere, forcing such molten rare-earth-iron alloy into a hollow mold tube of refractory material positioned with its lower end portion within the molten body by means of a pressure differential between the chamber and mold tube and maintaining a portion of the molten alloy in the crucible extending to a level above the lower end of the mold tube so that solid particles of higher melting impurities presentmore »« less
Full Text Available

Similar Records

Title: Microfabricated magnetostrictive resonator

Abstract

Citation Formats

Electrodeposition processes for magnetostrictive resonators patent, November 2018

Method and device in magnetostrictive motion systems patent, May 1994

Method and device for remote sensing of objects patent, November 1996

Method for measuring position and angle patent, September 1996

MEMS sprung cantilever tunable capacitors and methods patent, October 2013

Method in detecting magnetic elements patent, April 1998

Precision electrostatic actuation and positioning patent, December 2001

Marker for remote detection of articles patent, July 2006

Device for non-contact measuring of stresses in a bar-shaped body patent, June 1991

Electrically-programmable diffraction grating patent, May 1998

Label including amorphous tape with improved properties patent, November 1999

Electrodeposition of high moment cobalt iron patent, July 1988

Method of detecting labels with amorphous magneto-elastical tapes patent, October 1999

Method and device for coding electronic labels patent, January 2000

Attenuation of spurious responses in electromechanical filters patent, April 2018

Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode patent, August 2014

Optically transduced MEMS magnetometer patent, March 2014

Gallium beam lithography for superconductive structure formation patent, January 2018

Article surveillance system patent, October 2000

Device for improved response when measuring vibration frequency of a vibrating object patent, October 2012

Method for excitation and detection of magnetic elements by a mechanical resonance patent, June 1998

Electroplating of nickel, cobalt, nickel-cobalt, nickel-iron, cobalt-iron and nickel-iron-cobalt deposits patent, October 1977

Method for differentiation of substances patent, April 2013

Micro-electromechanical voltage tunable capacitor and and filter devices patent, April 2011

Non-volatile MEMS micro-relays using magnetic actuators patent, September 2000

CoFe alloy film and process of making same patent, February 2005

Microfabricated particle focusing device patent, April 2013

Methods for suppressing spurious modes in microresonators patent, June 2018

Strain detector patent, May 1994

Optically transduced MEMS gyro device patent, May 2014

Lightweight torquemeter and torque-measuring method patent, June 1985

Method and apparatus for switching optical signals using rotatable optically transmissive microstructure patent, February 2004

Sensor, a method and a system for remote detection of objects patent, July 2002

High-yield synthesis of brookite TiO2 nanoparticles patent, May 2011

Method and device for electronic identification patent, September 1996

Continuously tunable RF MEMS capacitor with ultra-wide tuning range patent, March 2008

Magnetoelastic stress sensor patent, March 1994

Sensor for remote detection of objects patent, May 2001

Label for marking and remote detection of objects patent, April 2001

Mechanical resonator patent, May 2007

Micromachined force-balance feedback accelerometer with optical displacement detection patent, July 2014

EMI shielding structure to enable heat spreading and low cost assembly patent, September 2017

Optomechanical force sensors, cantilevers, and systems thereof patent, July 2018

Method of plating an iron-cobalt alloy on a substrate patent, June 1980

Sensor and method for remote detection of objects patent, May 2001

Anti-theft device with a thermally controllable locking mechanism patent, September 2001

Process for fabricating improved iron-cobalt magnetostrictive alloy and article comprising alloy patent, November 2000

Electrodeposition processes for magnetostrictive resonators
patent, November 2018

Method and device in magnetostrictive motion systems
patent, May 1994

Method and device for remote sensing of objects
patent, November 1996

Method for measuring position and angle
patent, September 1996

MEMS sprung cantilever tunable capacitors and methods
patent, October 2013

Method in detecting magnetic elements
patent, April 1998

Precision electrostatic actuation and positioning
patent, December 2001

Marker for remote detection of articles
patent, July 2006

Device for non-contact measuring of stresses in a bar-shaped body
patent, June 1991

Electrically-programmable diffraction grating
patent, May 1998

Label including amorphous tape with improved properties
patent, November 1999

Electrodeposition of high moment cobalt iron
patent, July 1988

Method of detecting labels with amorphous magneto-elastical tapes
patent, October 1999

Method and device for coding electronic labels
patent, January 2000

Attenuation of spurious responses in electromechanical filters
patent, April 2018

Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode
patent, August 2014

Optically transduced MEMS magnetometer
patent, March 2014

Gallium beam lithography for superconductive structure formation
patent, January 2018

Article surveillance system
patent, October 2000

Device for improved response when measuring vibration frequency of a vibrating object
patent, October 2012

Method for excitation and detection of magnetic elements by a mechanical resonance
patent, June 1998

Electroplating of nickel, cobalt, nickel-cobalt, nickel-iron, cobalt-iron and nickel-iron-cobalt deposits
patent, October 1977

Method for differentiation of substances
patent, April 2013

Micro-electromechanical voltage tunable capacitor and and filter devices
patent, April 2011

Non-volatile MEMS micro-relays using magnetic actuators
patent, September 2000

CoFe alloy film and process of making same
patent, February 2005

Microfabricated particle focusing device
patent, April 2013

Methods for suppressing spurious modes in microresonators
patent, June 2018

Strain detector
patent, May 1994

Optically transduced MEMS gyro device
patent, May 2014

Lightweight torquemeter and torque-measuring method
patent, June 1985

Method and apparatus for switching optical signals using rotatable optically transmissive microstructure
patent, February 2004

Sensor, a method and a system for remote detection of objects
patent, July 2002

High-yield synthesis of brookite TiO2 nanoparticles
patent, May 2011

Method and device for electronic identification
patent, September 1996

Continuously tunable RF MEMS capacitor with ultra-wide tuning range
patent, March 2008

Magnetoelastic stress sensor
patent, March 1994

Sensor for remote detection of objects
patent, May 2001

Label for marking and remote detection of objects
patent, April 2001

Mechanical resonator
patent, May 2007

Micromachined force-balance feedback accelerometer with optical displacement detection
patent, July 2014

EMI shielding structure to enable heat spreading and low cost assembly
patent, September 2017

Optomechanical force sensors, cantilevers, and systems thereof
patent, July 2018

Method of plating an iron-cobalt alloy on a substrate
patent, June 1980

Sensor and method for remote detection of objects
patent, May 2001

Anti-theft device with a thermally controllable locking mechanism
patent, September 2001

Process for fabricating improved iron-cobalt magnetostrictive alloy and article comprising alloy
patent, November 2000