Structures for nitride vertical transistors

Title: Structures for nitride vertical transistors

Abstract

A vertical semiconductor transistor and a method of forming the same. A vertical semiconductor transistor has at least one semiconductor region, a source, and at least one gate region. The at least one semiconductor region includes a III-nitride semiconductor material. The source is formed over the at least one semiconductor region. The at least one gate region is formed around at least a portion of the at least one semiconductor region.

Inventors:: Sun, Min; Palacios, Tomas Apostol

Issue Date:: 2019-04-09

Research Org.:: Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1568188

Patent Number(s):: 10256352

Application Number:: 15/388,963

Assignee:: Massachusetts Institute of Technology (Cambridge, MA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L29/2003 - {Nitride compounds}
H01L29/0649 - {Dielectric regions, e.g. SiO2 regions, air gaps}
H01L29/66666 - {Vertical transistors
H01L29/8122 - {Vertical transistors
H01L29/7813 - {with trench gate electrode, e.g. UMOS transistors
H01L29/0676 - {oriented perpendicular or at an angle to a substrate}
H01L29/0657 - {characterised by the shape of the body}
H01L29/8083 - {Vertical transistors
H01L29/7827 - {Vertical transistors
H01L21/0254 - {Nitrides}

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DOE Contract Number:: AR0000452

Resource Type:: Patent

Resource Relation:: Patent File Date: 12/22/2016

Country of Publication:: United States

Language:: English

Citation Formats


                    Sun, Min, and Palacios, Tomas Apostol. Structures for nitride vertical transistors.  United States: N. p., 2019. 
        Web.

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                    Sun, Min, & Palacios, Tomas Apostol. Structures for nitride vertical transistors.  United States.

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                    Sun, Min, and Palacios, Tomas Apostol. Tue .  
        "Structures for nitride vertical transistors".  United States.  https://www.osti.gov/servlets/purl/1568188.

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@article{osti_1568188,

  title        = {Structures for nitride vertical transistors},

  author       = {Sun, Min and Palacios, Tomas Apostol},

  abstractNote = {A vertical semiconductor transistor and a method of forming the same. A vertical semiconductor transistor has at least one semiconductor region, a source, and at least one gate region. The at least one semiconductor region includes a III-nitride semiconductor material. The source is formed over the at least one semiconductor region. The at least one gate region is formed around at least a portion of the at least one semiconductor region.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {4}

}

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Works referenced in this record:

Normally-off field effect transistor using III-nitride semiconductor and method for manufacturing such transistor
patent, January 2012

Niiyama, Yuki; Ootomo, Shinya; Shinagawa, Tatsuyuki
US Patent Document 8,093,626
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8093626

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Title: Structures for nitride vertical transistors

Abstract

Citation Formats

Normally-off field effect transistor using III-nitride semiconductor and method for manufacturing such transistor patent, January 2012

Normally-off field effect transistor using III-nitride semiconductor and method for manufacturing such transistor
patent, January 2012