Optimized sub-sampling in an electron microscope
Abstract
Disclosed are methods for optimized sub-sampling in an electron microscope. With regard at least to utilization of electron dose budgets, of time for acquisition of measurements, and of computing/processing capabilities, very high efficiencies can be achieved by informing and/or adapting subsequent sub-sampling measurements according to one or more earlier-acquired sparse datasets and/or according to analyzes thereof.
- Inventors:
- Issue Date:
- Research Org.:
- Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1568184
- Patent Number(s):
- 10256072
- Application Number:
- 15/666,159
- Assignee:
- Battelle Memorial Institute (Richland, WA)
- Patent Classifications (CPCs):
-
G - PHYSICS G06 - COMPUTING G06T - IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC05-76RL01830
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 08/01/2017
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Stevens, Andrew J., Kovarik, Libor, Liyu, Andrey V., and Browning, Nigel D. Optimized sub-sampling in an electron microscope. United States: N. p., 2019.
Web.
Stevens, Andrew J., Kovarik, Libor, Liyu, Andrey V., & Browning, Nigel D. Optimized sub-sampling in an electron microscope. United States.
Stevens, Andrew J., Kovarik, Libor, Liyu, Andrey V., and Browning, Nigel D. Tue .
"Optimized sub-sampling in an electron microscope". United States. https://www.osti.gov/servlets/purl/1568184.
@article{osti_1568184,
title = {Optimized sub-sampling in an electron microscope},
author = {Stevens, Andrew J. and Kovarik, Libor and Liyu, Andrey V. and Browning, Nigel D.},
abstractNote = {Disclosed are methods for optimized sub-sampling in an electron microscope. With regard at least to utilization of electron dose budgets, of time for acquisition of measurements, and of computing/processing capabilities, very high efficiencies can be achieved by informing and/or adapting subsequent sub-sampling measurements according to one or more earlier-acquired sparse datasets and/or according to analyzes thereof.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {4}
}
Works referenced in this record:
Mathematical image assembly in a scanning-type microscope
patent, April 2017
- Poto{hacek over (c.)}ek, Pavel; Kooijman, Cornelis Sander; Slingerland, Hendrik Nicolaas
- US Patent Document 9,620,330
Efficient Method for Selecting Representative Elementary Volume in Digital Representations of Porous Media
patent-application, October 2013
- De Prisco, Giuseppe; Toelke, Jonas
- US Patent Application 13/546053; 20130262068
Mathmatical Image Assembly in a Scanning-Type Microscope
patent-application, December 2015
- Potocek, Pavel; Kooijman, Cornelis Sander; Slingerland, Hendrik Nicolaas
- US Patent Application 14/743780; 20150371815
Digital Rock Physics-Based Trend Determination and Usage for Upscaling
patent-application, January 2017
- Sungkorn, Radompon; Toelke, Jonas; Mu, Yaoming
- US Patent 15/300759; 20170018073
Sparse Sampling And Reconstruction For Electron And Scanning Probe Microscope Imaging
patent-application, March 2015
- Anderson, Hyrum; Helms, Jovana; Wheeler, Jason
- US Patent Application 14/482754; 20150069233
Method for measurement of pitch in metrology and imaging systems
patent, March 2005
- Askary, Farid
- US Patent Document 6,873,747