Systems and methods for quality control of a periodic structure
Abstract
Quality control of a periodic structure is performed using the damping rate of acoustic waves generated in the periodic structure. In this technique, an excitation light beam illuminates the first layer in the periodic structure to excite an acoustic wave. Possible irregularities in the periodic structure can scatter the acoustic wave, thereby increasing the damping rate of the acoustic wave. A sequence of probe light beams illuminates the periodic structure to measure the acoustic wave as a function of time to generated a temporal signal representing the damping rate of the acoustic signal. The acquired damping rate is employed to evaluate the quality of the periodic structure.
- Inventors:
- Issue Date:
- Research Org.:
- Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1568118
- Patent Number(s):
- 10241058
- Application Number:
- 15/641,724
- Assignee:
- Massachusetts Institute of Technology (Cambridge, MA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G - PHYSICS G10 - MUSICAL INSTRUMENTS G10K - SOUND-PRODUCING DEVICES
- DOE Contract Number:
- SC0001299
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 07/05/2017
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Maznev, Alexei, Nelson, Keith A., Bensaoula, Abdelhak, Gandhi, Jateen S., Stokes, Donna Washington, Forrest, Rebecca Lynne, and Shin, Hyun Doug. Systems and methods for quality control of a periodic structure. United States: N. p., 2019.
Web.
Maznev, Alexei, Nelson, Keith A., Bensaoula, Abdelhak, Gandhi, Jateen S., Stokes, Donna Washington, Forrest, Rebecca Lynne, & Shin, Hyun Doug. Systems and methods for quality control of a periodic structure. United States.
Maznev, Alexei, Nelson, Keith A., Bensaoula, Abdelhak, Gandhi, Jateen S., Stokes, Donna Washington, Forrest, Rebecca Lynne, and Shin, Hyun Doug. Tue .
"Systems and methods for quality control of a periodic structure". United States. https://www.osti.gov/servlets/purl/1568118.
@article{osti_1568118,
title = {Systems and methods for quality control of a periodic structure},
author = {Maznev, Alexei and Nelson, Keith A. and Bensaoula, Abdelhak and Gandhi, Jateen S. and Stokes, Donna Washington and Forrest, Rebecca Lynne and Shin, Hyun Doug},
abstractNote = {Quality control of a periodic structure is performed using the damping rate of acoustic waves generated in the periodic structure. In this technique, an excitation light beam illuminates the first layer in the periodic structure to excite an acoustic wave. Possible irregularities in the periodic structure can scatter the acoustic wave, thereby increasing the damping rate of the acoustic wave. A sequence of probe light beams illuminates the periodic structure to measure the acoustic wave as a function of time to generated a temporal signal representing the damping rate of the acoustic signal. The acquired damping rate is employed to evaluate the quality of the periodic structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {3}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Optical generator and detector of stress pulses
patent, December 1987
- Tauc, Jan; Maris, Humphrey J.; Thomsen, Christian Peter
- US Patent Document 4,710,030
Optical stress generator and detector
patent, May 1998
- Maris, Humphrey J.; Stoner, Robert J.
- US Patent Document 5,748,318
System of compressing the tail of a sparse log stream of a computer system
patent, September 1999
- Clark, Carl E.; Greenspan, Steven Jay
- US Patent Document 5,956,735
Apparatus and method for the determination of grain size in thin films
patent, March 2000
- Maris, Humphrey J.
- US Patent Document 6,038,026
Optical stress generator and detector
patent, January 2001
- Maris, Humphrey J.; Stoner, Robert J.
- US Patent Document 6,175,416
Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure
patent, July 2001
- Banet, Matthew; Fuchs, Martin; Rogers, John A.
- US Patent Document 6,256,100
Optical method for the characterization of laterally-patterned samples in integrated circuits
patent, November 2001
- Maris, Humphrey J.
- US Patent Document 6,321,601
Method and device for measuring the thickness of opaque and transparent films
patent, February 2002
- Nelson, Keith A.; Rogers, John A.; Banet, Matthew
- US Patent Document 6,348,967
Method and device for simultaneously measuring multiple properties of multilayer films
patent, May 2002
- Banet, Matthew; Sacco, Robin Anne
- US Patent Document 6,393,915
Optical stress generator and detector
patent, June 2002
- Maris, Humphrey J.; Stoner, Robert J.
- US Patent Document 6,400,449
Method for determining ion concentration and energy of shallow junction implants
patent, March 2003
- Hovinen, Minna; Opsal, Jon
- US Patent Document 6,532,070
Method of determining properties of patterned thin film metal structures using transient thermal response
patent, April 2008
- Gostein, Michael; Maznev, Alexei
- US Patent Document 7,365,864
Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations
patent, October 2013
- Maris, Humphrey J.; Nurmikko, Arto V.
- US Patent Document 8,567,253