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Title: Systems and methods for quality control of a periodic structure

Abstract

Quality control of a periodic structure is performed using the damping rate of acoustic waves generated in the periodic structure. In this technique, an excitation light beam illuminates the first layer in the periodic structure to excite an acoustic wave. Possible irregularities in the periodic structure can scatter the acoustic wave, thereby increasing the damping rate of the acoustic wave. A sequence of probe light beams illuminates the periodic structure to measure the acoustic wave as a function of time to generated a temporal signal representing the damping rate of the acoustic signal. The acquired damping rate is employed to evaluate the quality of the periodic structure.

Inventors:
; ; ; ; ; ;
Issue Date:
Research Org.:
Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1568118
Patent Number(s):
10,241,058
Application Number:
15/641,724
Assignee:
Massachusetts Institute of Technology (Cambridge, MA)
DOE Contract Number:  
SC0001299
Resource Type:
Patent
Resource Relation:
Patent File Date: 07/05/2017
Country of Publication:
United States
Language:
English

Citation Formats

Maznev, Alexei, Nelson, Keith A., Bensaoula, Abdelhak, Gandhi, Jateen S., Stokes, Donna Washington, Forrest, Rebecca Lynne, and Shin, Hyun Doug. Systems and methods for quality control of a periodic structure. United States: N. p., 2019. Web.
Maznev, Alexei, Nelson, Keith A., Bensaoula, Abdelhak, Gandhi, Jateen S., Stokes, Donna Washington, Forrest, Rebecca Lynne, & Shin, Hyun Doug. Systems and methods for quality control of a periodic structure. United States.
Maznev, Alexei, Nelson, Keith A., Bensaoula, Abdelhak, Gandhi, Jateen S., Stokes, Donna Washington, Forrest, Rebecca Lynne, and Shin, Hyun Doug. Tue . "Systems and methods for quality control of a periodic structure". United States. https://www.osti.gov/servlets/purl/1568118.
@article{osti_1568118,
title = {Systems and methods for quality control of a periodic structure},
author = {Maznev, Alexei and Nelson, Keith A. and Bensaoula, Abdelhak and Gandhi, Jateen S. and Stokes, Donna Washington and Forrest, Rebecca Lynne and Shin, Hyun Doug},
abstractNote = {Quality control of a periodic structure is performed using the damping rate of acoustic waves generated in the periodic structure. In this technique, an excitation light beam illuminates the first layer in the periodic structure to excite an acoustic wave. Possible irregularities in the periodic structure can scatter the acoustic wave, thereby increasing the damping rate of the acoustic wave. A sequence of probe light beams illuminates the periodic structure to measure the acoustic wave as a function of time to generated a temporal signal representing the damping rate of the acoustic signal. The acquired damping rate is employed to evaluate the quality of the periodic structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {3}
}

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