High quality group-III metal nitride crystals, methods of making, and methods of use
Abstract
High quality ammonothermal group III metal nitride crystals having a pattern of locally-approximately-linear arrays of threading dislocations, methods of manufacturing high quality ammonothermal group III metal nitride crystals, and methods of using such crystals are disclosed. The crystals are useful for seed bulk crystal growth and as substrates for light emitting diodes, laser diodes, transistors, photodetectors, solar cells, and for photoelectrochemical water splitting for hydrogen generation devices.
- Inventors:
- Issue Date:
- Research Org.:
- Soraa, Inc., Fremont, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531978
- Patent Number(s):
- 9589792
- Application Number:
- 14/089,281
- Assignee:
- Soraa, Inc. (Fremont, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AR0000020
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2013-11-25
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Citation Formats
Jiang, Wenkan, D'Evelyn, Mark P., Kamber, Derrick S., Ehrentraut, Dirk, and Krames, Michael. High quality group-III metal nitride crystals, methods of making, and methods of use. United States: N. p., 2017.
Web.
Jiang, Wenkan, D'Evelyn, Mark P., Kamber, Derrick S., Ehrentraut, Dirk, & Krames, Michael. High quality group-III metal nitride crystals, methods of making, and methods of use. United States.
Jiang, Wenkan, D'Evelyn, Mark P., Kamber, Derrick S., Ehrentraut, Dirk, and Krames, Michael. Tue .
"High quality group-III metal nitride crystals, methods of making, and methods of use". United States. https://www.osti.gov/servlets/purl/1531978.
@article{osti_1531978,
title = {High quality group-III metal nitride crystals, methods of making, and methods of use},
author = {Jiang, Wenkan and D'Evelyn, Mark P. and Kamber, Derrick S. and Ehrentraut, Dirk and Krames, Michael},
abstractNote = {High quality ammonothermal group III metal nitride crystals having a pattern of locally-approximately-linear arrays of threading dislocations, methods of manufacturing high quality ammonothermal group III metal nitride crystals, and methods of using such crystals are disclosed. The crystals are useful for seed bulk crystal growth and as substrates for light emitting diodes, laser diodes, transistors, photodetectors, solar cells, and for photoelectrochemical water splitting for hydrogen generation devices.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {3}
}
Works referenced in this record:
Method of hydrothermally growing quartz
patent, June 1977
- Hornig, Carl F.; Kroupa, Kenneth M.; Simpson, Earle E.
- US Patent Document 4,030,966
Molding system with integrated film heaters and sensors
patent, July 2004
- Godwin, Harold; Olaru, George; Whiffen, David
- US Patent Document 6,764,297
Flip-chip light emitting diode
patent, October 2006
- Stokes, Edward Brittain; D'Evelyn, Mark P.; Weaver, Stanton Earl
- US Patent Document 7,119,372
Method for Synthesis of High Quality Large Area Bulk Gallium Based Crystals
patent-application, October 2011
- D'Evelyn, Mark P.
- US Patent Application 12/988772; 20110256693
Bulk nitride mono-crystal including substrate for epitaxy
patent, September 2008
- Dwilinski, Robert; Doradzinski, Roman; Garczynski, Jerzy
- US Patent Document 7,420,261
Large-area bulk gallium nitride wafer and method of manufacture
patent, November 2011
- Poblenz, Christiane; Schmidt, Mathew C.; Kamber, Derrick S.
- US Patent Document 8,048,225
High Temperature High Pressure Capsule for Processing Materials in Supercritical Fluids
patent-application, July 2005
- D'Evelyn, Mark Philip; Narang, Kristi Jean; Giddings, Robert Arthur
- US Patent Application 11/010139; 20050152820
Large-Area Seed for Ammonothermal Growth of Bulk Gallium Nitride and Method of Manufacture
patent-application, March 2010
- Poblenz, Christiane; Speck, James S.
- US Patent Application 12/556558; 20100075175
High temperature high pressure capsule for processing materials in supercritical fluids
patent, December 2009
- D'Evelyn, Mark P.; Narang, Kristi Jean; Giddings, Robert Arthur
- US Patent Document 7,625,446
Process and apparatus for the growth of nitride materials
patent, June 2002
- Harris, Meckie T.; Suscavage, Michael J.; Bliss, David F.
- US Patent Document 6,406,540
High Light Extraction Efficiency Nitride Based Light Emitting Diode by Surface Roughening
patent-application, May 2012
- Zhong, Hong; Tyagi, Anurag; Vampola, Kenneth J.
- US Patent Application 13/349342; 20120104412
Method and apparatus for zinc oxide single crystal boule growth
patent, October 2007
- Wang, Shaoping
- US Patent Document 7,279,040
Techniques of forming Ohmic contacts on GaN light emitting diodes
patent, April 2012
- Felker, Andrew; Vickers, Nicholas Andrew
- US Patent Document 8,148,180
Light Emitting Diode and Fabricating Method Thereof
patent-application, May 2013
- Fu, Yi-Keng; Jiang, Ren-Hao; Fang, Yen-Hsiang
- US Patent Application 13/365217; 20130112987
Method for preparing lithographic printing plate
patent-application, July 2003
- Nagase, Hiroyuki
- US Patent Application 10/222903; 20030138732
Nitride Semiconductor Light Emitting Device and Method of Fabricating Nitride Semiconductor Laser Device
patent-application, September 2009
- Kamikawa, Takeshi; Kawaguchi, Yoshinobu
- US Patent Application 12/382530; 20090218593
Apparatus for Making Crystalline Composition
patent-application, July 2007
- Park, Dong-Sil; D'Evelyn, Mark Philip; Peterson, II, Myles Standish
- US Patent Application 11/313442; 20070151509
Gallum Nitride Crystals and Wafers and Method of Making
patent-application, July 2007
- D'Evelyn, Mark Philip; Park, Dong-Sil; LeBoeuf, Steven Francis
- US Patent Application 11/559146; 20070158785
High Pressure Apparatus and Method for Nitride Crystal Growth
patent-application, July 2011
- D'Evelyn, Mark P.
- US Patent Application 13/013697; 20110183498
Metal Nitrides and Process for Production Thereof
patent-application, August 2008
- Tsuji, Hideto
- US Patent Application 11/573412; 20080193363
Methods of Forming Layers of Semiconductor Material Having Reduced Lattice Strain, Semiconductor Structures, Devices and Engineered Substrates Including Same
patent-application, May 2010
- Arena, Chantel
- US Patent Application 12/576116; 20100109126
Method of Making Bulk InGaN Substrates and Devices Thereon
patent-application, April 2012
- Krames, Mike; D'Evelyn, Mark; Pakalapati, Rajeev
- US Patent Application 13/272981; 20120091465
Method for Fabrication of Semipolar (Al, In, Ga, B)N Based Light Emitting Diodes
patent-application, October 2009
- Sato, Hitoshi; Hirasawa, Hirohiko; Chung, Roy B.
- US Patent Application 12/419119; 20090250686
High Quality Large Area Bulk Non-Polar or Semipolar Gallium Based Substrates and Methods
patent-application, January 2010
- D'Evelyn, Mark P.
- US Patent Application 12/497969; 20100003492
Polycrystalline group III metal nitride with getter and method of making
patent, June 2013
- D'Evelyn, Mark P.
- US Patent Document 8,461,071
Polycrystalline Group III Metal Nitride with Getter and Method of Making
patent-application, September 2013
- D'Evelyn, Mark P.; Kamber, Derrick S.
- US Patent Application 13/894220; 20130251615
Process for Large-Scale Ammonothermal Manufacturing of Semipolar Gallium Nitride Boules
patent-application, December 2013
- D'Evelyn, Mark P.; Ehrentraut, Dirk; Kamber, Derrick S.
- US Patent Application 13/908836; 20130323490
Low oxygen cubic boron nitride and its production
patent, February 2006
- Zimmerman, Michael H.; Einset, Erik O.
- US Patent Document 7,001,577
Large Area Nitride Crystal and Method for Making It
patent-application, January 2012
- D'Evelyn, Mark P.; Speck, James S.
- US Patent Application 13/160307; 20120000415
Light Emitting Diodes with Zinc Oxide Current Spreading and Light Extraction Layers Deposited From Low Temperature Aqueous Solutions
patent-application, May 2011
- Thompson, Daniel R.; Richardson, Jacob J.; DenBaars, Steven P.
- US Patent Application 12/939044; 20110101414
Gallium nitride crystal and method of making same
patent, August 2006
- D'Evelyn, Mark P.; Park, Dong-Sil; LeBoeuf, Steven Francis
- US Patent Document 7,098,487
Method for Making Crystalline Composition
patent-application, June 2007
- Park, Dong-Sil; D'Evelyn, Mark Philip; Peterson, II, Myles Standish
- US Patent Application 11/313528; 20070141819
Hexagonal Wurtzite Type Single Crystal, Process for Producing the Same, and Hexagonal Wurtzite Type Single Crystal Substrate
patent-application, March 2008
- Yoshioka, Kenji; Yoneyama, Hiroshi; Maeda, Katsumi
- US Patent Application 11/576408; 20080056984
Heater, apparatus, and associated method
patent, April 2010
- Giddings, Robert Arthur; D'Evelyn, Mark P.; Dey, Subhrajit
- US Patent Document 7,705,276
Gallium nitride crystals and wafers and method of making
patent, July 2006
- D'Evelyn, Mark P.; Park, Dong-Sil; LeBoeuf, Steven Francis
- US Patent Document 7,078,731
Selective Area Epitaxy Growth Method and Structure for Multi-Colored Devices
patent-application, December 2009
- Raring, James W.; Feezell, Daniel F.; Nakamura, Shuji
- US Patent Application 12/484924; 20090309110
Apparatus for growing homogeneous crystals
patent, March 1992
- Engel, Günter; Enko, Alfred; Krempl, Peter W.
- US Patent Document 5,098,673
Apparatus for the Evaporation of Aqueous Organic Liquids and the Production of Powder Pre-Forms in Flame Hydrolysis Processes
patent-application, September 2005
- Giddings, Robert Arthur; Ayala, Raul Eduardo
- US Patent Application 10/801250; 20050205215
Method for Manufacturing Free-Standing Substrate and Free-Standing Light-Emitting Device
patent-application, May 2011
- Chang, Chun-Yen
- US Patent Application 12/788518; 20110124139
Group-III Nitride Semiconductor Laser Device, and Method of Fabricating Group-III Nitride Semiconductor Laser Device
patent-application, June 2011
- Yoshizumi, Yusuke; Takagi, Shimpei; Ikegami, Takatoshi
- US Patent Application 12/837184; 20110158275
Crystal Production Process Using Supercritical Solvent, Crystal Growth Apparatus, Crystal and Device
patent-application, April 2009
- Kawabata, Shinichiro; Yoshikawa, Akira; Kagamitani, Yuji
- US Patent Application 11/913195; 20090092536
Method for Reducing Defect Concentration in Crystals
patent-application, May 2006
- D'Evelyn, Mark Philip; Anthony, Thomas Richard; Arthur, Stephen Daley
- US Patent Application 11/300660; 20060096521
High-temperature resistant molded catalysts and process for their production
patent, September 1989
- Gasper, Bertram; Neuschaffer, Karlheinz; Spielau, Paul
- US Patent Document 4,870,045
Apparatus and method for seed crystal utilization in large-scale manufacturing of gallium nitride
patent, April 2013
- D'Evelyn, Mark P.
- US Patent Document 8,430,958
High Pressure Apparatus and Method for Nitride Crystal Growth
patent-application, May 2012
- D'Evelyn, Mark P.
- US Patent Application 13/343563; 20120118223
Nitride crystal with removable surface layer and methods of manufacture
patent, April 2012
- D'Evelyn, Mark P.
- US Patent Document 8,148,801
High pressure apparatus and method for nitride crystal growth
patent, November 2012
- D'Evelyn, Mark P.
- US Patent Document 8,303,710
Oxygen Doping Method to Gallium Nitride Single Crystal Substrate and Oxygen-Doped N-Type Gallium Nitride Freestanding Single Crystal Substrate
patent-application, December 2002
- Motoki, Kensaku; Ueno, Masaki
- US Patent Application 10/098501; 20020189532
Large-Area Bulk Gallium Nitride Wafer and Method of Manufacture
patent-application, July 2010
- Poblenz, Christiane; Schmidt, Mathew C.; Kamber, Derrick S.
- US Patent Application 12/556562; 20100189981
Group III nitride compositions
patent, August 2009
- Spencer, Michael; DiSalvo, Francis J.; Wu, Huaqiang
- US Patent Document 7,569,206
Saw Filter Manufactured by Using GAN Single Crystal Thin Film and Manufacturing Method Thereof
patent-application, August 2001
- Lee, Yong Hyun; Lee, Jung Hee; Lee, Suk Hun
- US Patent Application 09/752064; 20010011935
Process and apparatus for large-scale manufacturing of bulk monocrystalline gallium-containing nitride
patent, September 2011
- D'Evelyn, Mark P.
- US Patent Document 8,021,481
Temperature control method and apparatus
patent, January 1978
- Witkin, Donald E.; Bowles, Arnold G.
- US Patent Document 4,066,868
Gallium Nitride Crystals and Wafers and Method of Making
patent-application, May 2005
- D'Evelyn, Mark Philip; Park, Dong-Sil; LeBoeuf, Steven Francis
- US Patent Application 11/010507; 20050098095
Large area nonpolar or semipolar gallium and nitrogen containing substrate and resulting devices
patent, July 2013
- D'Evelyn, Mark P.; Speck, James S.; Houck, William D.
- US Patent Document 8,492,185
Semiconductor laser device and method of fabricating the same
patent-application, November 2007
- Takeuchi, Kunio; Hiroyama, Ryoji; Inoue, Daijiro
- US Patent Application 11/878331; 20070274359
Method for forming nitride crystals
patent, January 2010
- Tysoe, Steven Alfred; Park, Dong-Sil; Leman, John Thomas
- US Patent Document 7,642,122
Single Crystal and Quasi-Single Crystal, Composition, Apparatus, and Associated Method
patent-application, February 2006
- D'Evelyn, Mark Philip; Park, Dong-Sil; Lou, Victor Lienkong
- US Patent Application 11/249872; 20060037529
White Light Devices Using Non-Polar or Semipolar Gallium Containing Materials and Phosphors
patent-application, February 2010
- Raring, James W.; Hall, Eric M.; D'Evelyn, Mark P.
- US Patent Application 12/534829; 20100025656
Method for Producing Nitride Semiconductor, Crystal Growth Rate Increasing Agent, Single Crystal Nitride, Wafer and Device
patent-application, April 2010
- Kawabata, Shinichiro; Itoh, Hirohisa; Ehrentraut, Dirk
- US Patent Application 12/444847; 20100104495
Pressure Vessel
patent-application, July 2003
- D'Evelyn, Mark Philip; Narang, Kristi Jean; Giddings, Robert Arthur
- US Patent Application 09/683658; 20030140845
High pressure apparatus and method for nitride crystal growth
patent, January 2012
- D'Evelyn, Mark P.
- US Patent Document 8,097,081
Substrate for the epitaxial growth of gallium nitride
patent, October 2012
- Mattmann, Eric; Reutler, Pascal; Lienhart, Fabien
- US Patent Document 8,278,656
Nitride Semiconductor Device and Manufacturing Method Thereof
patent-application, October 2007
- Kanamoto, Kyozo; Shiozawa, Katsuomi; Kawasaki, Kazushige
- US Patent Application 11/691049; 20070231978
Basket Process and Apparatus for Crystalline Gallium-Containing Nitride
patent-application, February 2010
- D'Evelyn, Mark P.
- US Patent Application 12/534848; 20100031873
Crystal growth apparatus and process
patent, December 1992
- Young, Morris S.; Zhang, Shanxiang
- US Patent Document 5,169,486
High pressure apparatus with stackable rings
patent, May 2013
- D'Evelyn, Mark P.; Kapp, Joseph A.; Lawrenson, John C.
- US Patent Document 8,435,347
Superluminescent Diode
patent-application, February 2014
- Ohno, Hiroshi; Yamanaka, Kazuhiko; Orita, Kenji
- US Patent Application 14/065519; 20140050244
Substrate Processing Apparatus and Related Systems and Methods
patent-application, December 2003
- Dickinson, C. John; Jansen, Frank; Murphy, Daimhin P.
- US Patent Application 10/170578; 20030232512
Loop Antenna Input Circuit for AM and AM Radio Receiver Using the Same
patent-application, January 2010
- Ikeda, Takeshi; Miyagi, Hiroshi
- US Patent Application 12/442846; 20100003942
Methods for Producing Improved Crystallinity Group III-Nitride Crystals from Initial Group III-Nitride Seed by Ammonothermal Growth
patent-application, December 2009
- Letts, Edward; Hashimoto, Tadao; Ikari, Masanori
- US Patent Application 12/455760; 20090309105
Process for Large-Scale Ammonothermal Manufacturing of Gallium Nitride Boules
patent-application, February 2010
- D'Evelyn, Mark P.
- US Patent Application 12/534844; 20100031875
Semiconductor Layer Structure with Superlattice
patent-application, January 2008
- Eichler, Christoph; Lell, Alfred
- US Patent Application 11/780512; 20080025360
Surface impurity-enriched diamond and method of making
patent, May 2005
- D'Evelyn, Mark P.; Park, Dong-Sil; Anthony, Thomas R.
- US Patent Document 6,887,144
Low Sulfur Coal Additive for Improved Furnace Operation
patent-application, February 2003
- Johnson, Stephen Allen; Wurster, John; Comer, John Philip
- US Patent Application 10/209089; 20030027014
III-Phospide and III-Arsenide flip chip light-emitting devices
patent, August 2004
- Camras, Michael D.; Steigerwald, Daniel A.; Steranka, Frank M.
- US Patent Document 6,784,463
Oxidized low density lipoprotein sensing device for gallium nitride process
patent, July 2010
- Chiu, Hsien-Chin; Lai, Chao-Sung; Hong, Bing-Shan
- US Patent Document 7,759,710
Nitride Semiconductor Component and Process for Its Production
patent-application, August 2007
- Dadgar, Armin; Krost, Alois
- US Patent Application 11/643632; 20070197004
Semiconductor device, semiconductor device production method, and substrate for the semiconductor device
patent-application, April 2006
- Kohda, Shinichi
- US Patent Application 11/231822; 20060084245
Semiconductor Device
patent-application, March 2007
- Kano, Takashi; Hata, Masayuki; Nomura, Yasuhiko
- US Patent Application 11/518235; 20070057337
Apparatus for and method of handling crystals from crystal-growing furnaces
patent, September 1982
- Helgeland, Walter; Teverovsky, Alex; Kerwin, II, Kenneth H.
- US Patent Document 4,350,560
Microcavity light emitting diode method of manufacture
patent, January 2013
- D'Evelyn, Mark P.; Sharma, Rajat
- US Patent Document 8,354,679
Method of fabrication of highly resistive GaN bulk crystals
patent, August 2001
- Porowski, Sylwester; Bockowski, Michal; Grzegory, Izabella
- US Patent Document 6,273,948
Process for the continuous production of aligned carbon nanotubes
patent, January 2007
- Jacques, David N.; Andrews, Rodney
- US Patent Document 7,160,531
Plant and Method for Large-Scale Ammonothermal Manufacturing of Gallium Nitride Boules
patent-application, May 2011
- D'Evelyn, Marl P.
- US Patent Application 12/697171; 20110100291
Ammonothermal method for growth of bulk gallium nitride
patent, June 2013
- Poblenz, Christiane; Speck, James S.; Kamber, Derrick S.
- US Patent Document 8,465,588
Chemical mechanical polishing slurry, its preparation method, and use for the same
patent-application, April 2003
- Hou, Hui-Fang; Liu, Wen-Cheng; Chen, Yen-Liang
- US Patent Application 11/892720; 20080096470
Capsule for High Pressure Processing and Method of Use for Supercritical Fluids
patent-application, December 2009
- D'Evelyn, Mark P.
- US Patent Application 12/133365; 20090301388
Singulation Method and Resulting Device of Thick Gallium and Nitrogen Containing Substrates
patent-application, December 2011
- Sharma, Rajat; Katona, Thomas M.; Felker, Andrew
- US Patent Application 13/163498; 20110309373
Process and apparatus for large-scale manufacturing of bulk monocrystalline gallium-containing nitride
patent, May 2013
- D'Evelyn, Mark P.
- US Patent Document 8,444,765
Light Emitting Device, Manufacturing Method Thereof, Light Emitting Device Package, and Lighting System
patent-application, October 2011
- Kim, Sun Kyung
- US Patent Application 13/092287; 20110260189
Method and Apparatus for Manufacturing Group III Nitride Crystals
patent-application, September 2007
- Imaeda, Minoru; Kondo, Yoshimasa; Okazaki, Ichiro
- US Patent Application 11/685933; 20070215033
Methods for reducing contamination of semiconductor substrates
patent, March 2003
- Chebi, Robert; Hemker, David
- US Patent Document 6,528,427
III Nitride Crystal Substrate, and Light-Emitting Device and Method of Its Manufacture
patent-application, June 2009
- Fujiwara, Shinsuke; Yoshida, Hiroaki
- US Patent Application 12/324897; 20090140287
Method for Growth of Semipolar (Al, In, Ga, B)N Optoelectronic Devices
patent-application, November 2007
- Zhong, Hong; Kaeding, John F.; Sharma, Rajat
- US Patent Application 11/676999; 20070252164
Group III-Nitride Based Resonant Cavity Light Emitting Devices Fabricated on Single Crystal Gallium Nitride Substrates
patent-application, April 2005
- D'Evelyn, Mark Philip; Cao, Xian-An; Zhang, Anping
- US Patent Application 10/693803; 20050087753
GaN Single Crystal Substrate and Method of Making the Same
patent-application, May 2007
- Motoki, Kensaku; Okahisa, Takuji; Matsumoto, Naoki
- US Patent Application 11/643875; 20070105351
Method of fabricating ohmic contact on n-type gallium nitride (GaN) of room temperature by plasma surface treatment
patent-application, October 2002
- Lee, Jong Lam; Jang, Ho Won; Kim, Jong Kyu
- US Patent Application 10/103523; 20020155691
Contacts for an n-type gallium and nitrogen substrate for optical devices
patent, August 2014
- Cich, Michael J.; Thomson, Kenneth John
- US Patent Document 8,802,471
System and High Pressure, High Temperature Apparatus for Producing Synthetic Diamonds
patent-application, December 2006
- Chodelka, Robert; Zhu, Hexiang; Novikov, Alexander
- US Patent Application 11/165542; 20060288927
Light-Emitting Crystal Structures
patent-application, January 2008
- Ng, Hock Min
- US Patent Application 11/456428; 20080006831
III-V nitride substrate boule and method of making and using the same
patent, July 2003
- Vaudo, Robert P.; Flynn, Jeffrey S.; Brandes, George R.
- US Patent Document 6,596,079
Semiconductor Array Tester
patent-application, June 2005
- Hall, Benjamin L.; Hu, Martin; White, Mike J.
- US Patent Application 10/733903; 20050128469
Crystals for a Semiconductor Radiation Detector and Method for Making the Crystals
patent-application, August 2007
- D'Evelyn, Mark Philip; Park, Dong-Sil; Leman, John Thomas
- US Patent Application 11/734012; 20070181056
Method for Improved Growth of Semipolar (Al,In,Ga,B)N
patent-application, September 2007
- Kaeding, John F.; Lee, Dong-Seon; Iza, Michael
- US Patent Application 11/655573; 20070218703
Light Emitting Diodes (LEDS) with Improved Light Extraction by Roughening
patent-application, May 2011
- Chu, Chen-Fu; Cheng, Hao-Chun; Fan, Feng-Hsu
- US Patent Application 12/986946; 20110101400
High temperature high pressure capsule for processing materials in supercritical fluids
patent, October 2006
- D'Evelyn, Mark P.; Narang, Kristi Jean; Giddings, Robert Arthur
- US Patent Document 7,125,453
Apparatus for Processing Materials in Supercritical Fluids and Methods Thereof
patent-application, August 2006
- D'Evelyn, Mark Philip; Giddings, Robert Arthur; Sharifi, Fred
- US Patent Application 11/042858; 20060177362
Layered substrates for epitaxial processing, and device
patent, April 2007
- Ueda, Tetsuzo
- US Patent Document 7,198,671
Method of Fabricating Optical Devices Using Laser Treatment of Contact Regions of Gallium and Nitrogen Containing Material
patent-application, May 2012
- Felker, Andrew; Vickers, Nicholas A.; Aldaz, Rafael
- US Patent Application 13/291922; 20120104359
Method of Manufacturing Vertical Gallium Nitride-Based Light Emitting Diode
patent-application, November 2007
- Choi, Pun Jae; Lee, Jong-Ho
- US Patent Application 11/697537; 20070264733
Semi-Insulating Group III Metal Nitride and Method of Manufacture
patent-application, September 2011
- D'Evelyn, Mark P.
- US Patent Application 13/041199; 20110220912
Light emitting device and method for making same
patent, September 2006
- Picard, Emmanuel; Hadji, Emmanuel; Zanatta, Jean-Paul
- US Patent Document 7,112,829
Surface Heating Element and Method for Producing a Surface Heating Element
patent-application, September 2007
- Maurer, Christoph; Katzenbach, Peter; Strotz, Marcel
- US Patent Application 11/677711; 20070210074
Crystals for a semiconductor radiation detector and method for making the crystals
patent, January 2008
- D'Evelyn, Mark P.; Park, Dong-Sil; Leman, John Thomas
- US Patent Document 7,316,746
High Pressure Apparatuses with Stackable Rings
patent-application, June 2012
- D'Evelyn, Mark P.; Kapp, Joseph A.; Lawrenson, John C.
- US Patent Application 12/891668; 20120137966
Method for Reducing Defect Concentrations in Crystals
patent-application, January 2004
- D'Evelyn, Mark Philip; Anthony, Thomas Richard; Arthur, Stephen Daley
- US Patent Application 10/455007; 20040000266
Process and apparatus for obtaining bulk monocrystalline gallium-containing nitride
patent, August 2007
- Dwilinski, Robert; Doradzinski, Roman; Sierzfutowski, Leszek Piotr
- US Patent Document 7,252,712
Crystals for a Semiconductor Radiation Detector and Method for Making the Crystals
patent-application, September 2006
- D'Evelyn, Mark Philip; Park, Dong-Sil; Leman, John Thomas
- US Patent Application 11/082846; 20060207497
Crystalline gallium nitride and method for forming crystalline gallium nitride
patent, June 2002
- D'Evelyn, Mark P.; Narang, Kristi Jean
- US Patent Document 6,398,867
Large-area seed for ammonothermal growth of bulk gallium nitride and method of manufacture
patent, July 2011
- Poblenz, Christiane; Speck, James S.; Kamber, Derrick S.
- US Patent Document 7,976,630
Optoelectronic Device Based on Non-Polar and Semi-Polar Aluminum Indium Nitride and Aluminum Indium Gallium Nitride Alloys
patent-application, May 2010
- Chung, Roy B.; Chen, Zhen; Speck, James S.
- US Patent Application 12/610945; 20100108985
Nitride crystal with removable surface layer and methods of manufacture
patent, December 2012
- D'Evelyn, Mark P.
- US Patent Document 8,329,511
Process for Obtaining of Bulk Monocrystalline Gallium-Containing Nitride
patent-application, February 2006
- Dwilinski, Robert; Doradzinski, Roman; Garczynski, Jerzy
- US Patent Application 10/519141; 20060032428
Bulk monocrystalline gallium nitride
patent, December 2003
- Dwiliński, Robert Tomasz; Doradziński, Roman Marek; Garczyński, Jerzy
- US Patent Document 6,656,615
Method for Forming Nitride Crystals
patent-application, April 2008
- Tysoe, Steven Alfred; Park, Dong-Sil; Leman, John Thomas
- US Patent Application 11/973182; 20080087919
Crystalline Composition, Device, and Associated Method
patent-application, June 2007
- Park, Dong-Sil; D'Evelyn, Mark Philip; Peterson, II, Myles Standish
- US Patent Application 11/313451; 20070142204
Semipolar Nitride-Based Devices on Partially or Fully Relaxed Alloys with Misfit Dislocations at the Heterointerface
patent-application, March 2011
- Ohta, Hiroaki; Wu, Feng; Tyagi, Anurag
- US Patent Application 12/861532; 20110064103
Semiconductor Light Emitting Element
patent-application, May 2013
- Isozaki, Akihiro; Inoue, Akira; Yamada, Atsushi
- US Patent Application 13/813792; 20130126902
Nitride semiconductor light-emitting chip, method of manufacture thereof, and semiconductor optical device
patent-application, September 2010
- Kamikawa, Takeshi; Ohta, Masataka
- US Patent Application 12/659911; 20100243988
High Pressure Apparatus and Method for Nitride Crystal Growth
patent-application, June 2010
- D'Evelyn, Mark P.
- US Patent Application 12/334418; 20100147210
Nitride semiconductor light emitting device
patent, February 2004
- Takahira, Yoshiyuki
- US Patent Document 6,686,608
Homoepitaxial gallium-nitride-based light emitting device and method for producing
patent, May 2006
- D'Evelyn, Mark P.; Evers, Nicole; LeBoeuf, Steven Francis
- US Patent Document 7,053,413
Process for the synthesis of diamond
patent, October 2000
- Satoh, Shuichi; Sumiya, Hitoshi; Tsuji, Kazuwo
- US Patent Document 6,129,900
High pressure high temperature growth of crystalline group III metal nitrides
patent, June 2006
- D'Evelyn, Mark P.; Webb, Steven W.; Vagarali, Suresh
- US Patent Document 7,063,741
Method of making Group III nitrides
patent, June 2008
- Spencer, Michael; DiSalvo, Francis J.; Wu, Huaqiang
- US Patent Document 7,381,391
High Pressure Apparatus and Method for Nitride Crystal Growth
patent-application, December 2009
- D'Evelyn, Mark P.
- US Patent Application 12/133364; 20090301387
Process for Obtaining Bulk Mono-Crystalline Gallium-Containing Nitride
patent-application, February 2006
- Dwilinski, Robert; Doradzinski, Roman; Garczynski, Jerzy
- US Patent Application 10/537804; 20060037530
Nitride-Based Semiconductor Light Emitting Device, Method for Manufacturing Nitride-Based Semiconductor Light Emitting Device, and Light Emitting Apparatus
patent-application, August 2011
- Enya, Yohei; Yoshizumi, Yusuke; Kyono, Takashi
- US Patent Application 13/085684; 20110186860
Bulk single crystal gallium nitride and method of making same
patent, July 2004
- Tischler, Michael A.; Kuech, Thomas F.; Vaudo, Robert P.
- US Patent Document 6,765,240
Apparatus to prevent damage to probe card
patent-application, July 2003
- Byrd, Phillip E.
- US Patent Application 10/327469; 20030128041
Heater, Apparatus, and Associated Method
patent-application, April 2008
- Giddings, Robert Arthur; D'Evelyn, Mark Philip; Dey, Subhrajit
- US Patent Application 11/521034; 20080083741
High Pressure High Temperature Growth of Crystalline Group III Metal Nitrides
patent-application, October 2003
- D'Evelyn, Mark Philip; Webb, Steven William; Vagarali, Suresh Shankarappa
- US Patent Application 10/063164; 20030183155
Light emitting device with blue light LED and phosphor components
patent, April 2006
- Shimizu, Yoshinori; Sakano, Kensho; Noguchi, Yasunobu
- US Patent Document 7,026,756
Zinc Oxide Single Crystal
patent-application, June 2006
- Yoshioka, Kenji; Yoneyama, Hiroshi; Maeda, Katsumi
- US Patent Application 11/239214; 20060124051
Ammonothermal Process for Bulk Synthesis and Growth of Cubic GaN
patent-application, November 2003
- Purdy, Andrew P.
- US Patent Application 10/142800; 20030209191
Forming Indium Nitride (InN) and Indium Gallium Nitride (InGaN) Quantum Dots Grown by Metal-Organic-Vapor-Phase-Epitaxy (MOCVD)
patent-application, February 2004
- Chua, Soo Jin; Li, Peng; Hao, Maosheng
- US Patent Application 10/633652; 20040023427
Process and apparatus for growing a crystalline gallium-containing nitride using an azide mineralizer
patent, December 2012
- D'Evelyn, Mark P.
- US Patent Document 8,323,405
Anisotropic Strain Control in Semipolar Nitride Quantum Wells by Partially or Fully Relaxed Aluminum Indium Gallium Nitride Layers with Misfit Dislocations
patent-application, March 2011
- Ohta, Hiroaki; Wu, Feng; Tyagi, Anurag
- US Patent Application 12/861652; 20110062415
Copacking Configurations for Nonpolar GaN and/or Semipolar GaN LEDs
patent-application, January 2010
- Raring, James W.; Feezell, Daniel F.; D'Evelyn, Mark P.
- US Patent Application 12/491176; 20100001300
Large Area, Low-Defect Gallium-Containing Nitride Crystals, Method of Making and Method of Use
patent-application, March 2014
- D'Evelyn, Mark P.; Ehrentaut, Dirk; Jiang, Wenkan
- US Patent Application 13/600191; 20140065360
Apparatus for producing single crystal and quasi-single crystal, and associated method
patent, May 2008
- D'Evelyn, Mark P.; Park, Dong-Sil; Lou, Victor Lienkong
- US Patent Document 7,368,015
Apparatus and Method for Seed Crystal Utilization in Large-Scale Manufacturing of Gallium Nitride
patent-application, February 2010
- D'Evelyn, Mark P.
- US Patent Application 12/534843; 20100031872
Method for growth of indium-containing nitride films
patent, July 2013
- D'Evelyn, Mark P.; Poblenz, Christiane; Krames, Michael R.
- US Patent Document 8,482,104
Method for reducing defect concentrations in crystals
patent, February 2007
- D'Evelyn, Mark P.; Anthony, Thomas R.; Arthur, Stephen Daley
- US Patent Document 7,175,704
Polycrystalline Group III Metal Nitride with Getter and Method of Making
patent-application, June 2010
- D'Evelyn, Mark P.
- US Patent Application 12/634665; 20100151194
Singulation method and resulting device of thick gallium and nitrogen containing substrates
patent, November 2012
- Sharma, Rajat; Katona, Thomas M.; Felker, Andrew
- US Patent Document 8,313,964
Nitride Single Crystal Seeded Growth in Supercritical Ammonia with Alkali Metal Ion
patent-application, July 2008
- Dwilinki, Robert; Doradzinski, Roman; Garczynski, Jerzy
- US Patent Application 11/791716; 20080156254
Proces and Apparatus fore Growing a Crystalline Gallium-Containing Nitride Using an Azide Mineralizer
patent-application, February 2010
- D'Evelyn, Mark P.
- US Patent Application 12/534849; 20100031874
Nitride semiconductor light emitting device
patent, December 2008
- Lee, Jae-Hoon; Lee, Jeong-wook; Kim, Hyun Kyung
- US Patent Document 7,470,938
Process and Apparatus for Large-Scale Manufacturing of Bulk Monocrystalline Gallium-Containing Nitride
patent-application, February 2010
- D'Evelyn, Mark P.
- US Patent Application 12/534857; 20100031876
Crystals for a Semiconductor Radiation Detector and Method for Making the Crystals
patent-application, August 2007
- D'Evelyn, Mark Philip; Park, Dong-Sil; Leman, John Thomas
- US Patent Application 11/734042; 20070178039
Group-III nitride semiconductor light-emitting device and production method thereof
patent, September 2004
- Udagawa, Takashi
- US Patent Document 6,787,814
Cubic (Zinc-Blende) Aluminum Nitride and Method of Making Same
patent-application, August 2003
- Thompson, Margarita P.; Auner, Gregory W.
- US Patent Application 10/364811; 20030145784
Large Area Nitride Crystal and Method for Making It
patent-application, May 2013
- D'Evelyn, Mark P.; Speck, James S.; Kamber, Derrick S.
- US Patent Application 13/731453; 20130119401
Method for Forming a Semiconductor Device Using Selective Epitaxy of Group III-Nitride
patent-application, May 2012
- Su, Jie
- US Patent Application 13/286097; 20120119218
Sintered polycrystalline gallium nitride and its production
patent, March 2005
- D'Evelyn, Mark P.; Pender, David Charles; Vagarali, Suresh
- US Patent Document 6,861,130
Method and materials for growing III-nitride semiconductor compounds containing aluminum
patent-application, April 2008
- Kamber, Derrick S.; Haskell, Benjamin A.; Nakamura, Shuji
- US Patent Application 11/801053; 20080083970
Apparatus for processing materials in supercritical fluids and methods thereof
patent, April 2010
- D'Evelyn, Mark P.; Giddings, Robert Arthur; Sharifi, Fred
- US Patent Document 7,704,324
Semi-insulating GaN and method of making the same
patent, January 2007
- Vaudo, Robert P.; Xu, Xueping; Brandes, George R.
- US Patent Document 7,170,095
High indium containing InGaN substrates for long wavelength optical devices
patent, November 2012
- Schmidt, Mathew C.; D'Evelyn, Mark P.
- US Patent Document 8,306,081
High surface quality GaN wafer and method of fabricating same
patent-application, July 2003
- Xu, Xueping; Vaudo, Robert P.
- US Patent Application 10/272761; 20030127041
Heater Device and Method for High Pressure Processing of Crystalline Materials
patent-application, December 2009
- D'Evelyn, Mark P.; Speck, James S.; Coulter, Michael T.
- US Patent Application 12/484095; 20090320745
Apparatus for Producing Single Crystal and Quasi-Single Crystal, and Associated Method
patent-application, March 2006
- D'Evelyn, Mark Philip; Park, Dong-Sil; Lou, Victor Lienkong
- US Patent Application 11/249896; 20060048699