skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Micropores and methods of making and using thereof

Abstract

Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2× a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.

Inventors:
; ;
Issue Date:
Research Org.:
Sandia Corp., Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531885
Patent Number(s):
8,585,916
Application Number:
12/812,986
Assignee:
Sandia Corporation (Albuquerque, NM)
Resource Type:
Patent
Resource Relation:
Patent File Date: 2009-01-21
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 59 BASIC BIOLOGICAL SCIENCES

Citation Formats

Perroud, Thomas D., Patel, Kamlesh D., and Meagher, Robert J. Micropores and methods of making and using thereof. United States: N. p., 2013. Web.
Perroud, Thomas D., Patel, Kamlesh D., & Meagher, Robert J. Micropores and methods of making and using thereof. United States.
Perroud, Thomas D., Patel, Kamlesh D., and Meagher, Robert J. Tue . "Micropores and methods of making and using thereof". United States. https://www.osti.gov/servlets/purl/1531885.
@article{osti_1531885,
title = {Micropores and methods of making and using thereof},
author = {Perroud, Thomas D. and Patel, Kamlesh D. and Meagher, Robert J.},
abstractNote = {Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2× a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {11}
}

Patent:

Save / Share:

Works referenced in this record:

Fabrication of ultra-shallow channels for microfluidic devices and systems
patent, February 2007


Apparatus and method for trapping bead based reagents within microfluidic analysis systems
patent, December 2007


Particle packing of microdevice
patent, July 2006


Adjustable nanopore, nanotome, and nanotweezer
patent, March 2004


Integrated system with modular microfluidic components
patent, July 2007


Particulate processing system
patent, May 2007


Microfluidic devices comprising biochannels
patent, April 2005


Method and apparatus for separation of particles in a microfluidic device
patent, August 2006


Microfluidic system and methods of use
patent, October 2003


Apparatus and method for trapping bead based reagents within microfluidic analysis systems
patent, August 2002


Polymorphic markers of the LSR gene
patent, October 2006


Composite polymer microfluidic control device
patent, November 2007


Microfabrication process for enclosed microstructures
patent, July 2000


Method for sorting particles
patent, December 2004


Microfluidic flow control device
patent, October 2003


Method for etching vertical contact holes without substrate damage caused by directional etching
patent, August 1997


Microfluidic system and methods of use
patent, May 2005


Method and apparatus for sorting particles
patent, January 2007


    Works referencing / citing this record:

    Micropores and methods of making and using thereof
    patent, August 2016