Structures of and methods for forming vertically aligned Si wire arrays
Abstract
A structure consisting of vertically aligned wire arrays on a Si substrate and a method for producing such wire arrays. The wire arrays are fabricated and positioned on a substrate with an orientation and density particularly adapted for conversion of received light to energy. A patterned oxide layer is used to provide for wire arrays that exhibit narrow diameter and length distribution and provide for controlled wire position.
- Inventors:
- Issue Date:
- Research Org.:
- California Institute of Technology (CalTech), Pasadena, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531871
- Patent Number(s):
- 8530338
- Application Number:
- 12/176,099
- Assignee:
- California Institute of Technology (Pasadena, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- FG02-03ER15483
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2008-07-18
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Kayes, Brendan M., Filler, Michael A., Lewis, Nathan S., and Atwater, Jr., Harry A. Structures of and methods for forming vertically aligned Si wire arrays. United States: N. p., 2013.
Web.
Kayes, Brendan M., Filler, Michael A., Lewis, Nathan S., & Atwater, Jr., Harry A. Structures of and methods for forming vertically aligned Si wire arrays. United States.
Kayes, Brendan M., Filler, Michael A., Lewis, Nathan S., and Atwater, Jr., Harry A. Tue .
"Structures of and methods for forming vertically aligned Si wire arrays". United States. https://www.osti.gov/servlets/purl/1531871.
@article{osti_1531871,
title = {Structures of and methods for forming vertically aligned Si wire arrays},
author = {Kayes, Brendan M. and Filler, Michael A. and Lewis, Nathan S. and Atwater, Jr., Harry A.},
abstractNote = {A structure consisting of vertically aligned wire arrays on a Si substrate and a method for producing such wire arrays. The wire arrays are fabricated and positioned on a substrate with an orientation and density particularly adapted for conversion of received light to energy. A patterned oxide layer is used to provide for wire arrays that exhibit narrow diameter and length distribution and provide for controlled wire position.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {9}
}
Works referenced in this record:
Properties of gold in silicon
journal, February 1966
- Bullis, W. M.
- Solid-State Electronics, Vol. 9, Issue 2, p. 143-168
n-Type silicon photoelectrochemistry in methanol: Design of a 10.1% efficient semiconductor/liquid junction solar cell
journal, February 1983
- Gronet, C. M.; Lewis, N. S.; Cogan, G.
- Proceedings of the National Academy of Sciences, Vol. 80, Issue 4, p. 1152-1156
Semiconductor Nanowires: From Self-Organization to Patterned Growth
journal, April 2006
- Fan, Hong Jin; Werner, Peter; Zacharias, Margit
- Small, Vol. 2, Issue 6, p. 700-717
Epitaxial core–shell and core–multishell nanowire heterostructures
journal, November 2002
- Lauhon, Lincoln J.; Gudiksen, Mark S.; Wang, Deli
- Nature, Vol. 420, Issue 6911, p. 57-61
Nanoimprint Lithography: Methods and Material Requirements
journal, February 2007
- Guo, L. J.
- Advanced Materials, Vol. 19, Issue 4, p. 495-513
Use of sacrificial layers in the manufacture of high performance systems on tailored substrates
patent, December 2007
- Fonash, Stephen J.; Li, Handong; Lee, Youngchul
- US Patent Document 7,309,620
Solubility and Diffusivity of Gold, Iron, and Copper in Silicon
journal, December 1956
- Struthers, J. D.
- Journal of Applied Physics, Vol. 27, Issue 12, p. 1560-1560
Impurities in silicon solar cells
journal, April 1980
- Davis, J.R.; Rohatgi, A.; Hopkins, R.H.
- IEEE Transactions on Electron Devices, Vol. 27, Issue 4, p. 677-687
Experimental Observation of an Extremely Dark Material Made By a Low-Density Nanotube Array
journal, January 2008
- Yang, Zu-Po; Ci, Lijie; Bur, James A.
- Nano Letters, Vol. 8, Issue 2, p. 446-451
Nanostructure-reinforced composite articles and methods
patent-application, March 2008
- Wardle, Brian L.; Hart, Anastasios John; Garcia, Enrique J.
- US Patent Document 11/895621; 20080075954
High‐efficiency electrodeposited cadmium telluride solar cells
journal, February 1982
- Fulop, G.; Doty, M.; Meyers, P.
- Applied Physics Letters, Vol. 40, Issue 4, p. 327-328
High Density Germanium Nanowire Assemblies: Contact Challenges and Electrical Characterization
journal, January 2006
- Erts, Donats; Polyakov, Boris; Daly, Brian
- The Journal of Physical Chemistry B, Vol. 110, Issue 2, p. 820-826
Highly Anisotropic Crystals
book, January 1987
- Givargizov, E. I.
- Materials Science of Minerals and Rocks (MSMR)
Method and apparatus for growing oriented whisker arrays
patent, October 2001
- Givargizov, Evgeny Invievich
- US Patent Document 6,306,734
Si nanowires synthesized with Cu catalyst
journal, January 2007
- Yao, Y.; Fan, S.
- Materials Letters, Vol. 61, Issue 1, p. 177-181
Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells
journal, June 2005
- Kayes, Brendan M.; Atwater, Harry A.; Lewis, Nathan S.
- Journal of Applied Physics, Vol. 97, Issue 11, Article No. 114302
Impurity effects in silicon for high efficiency solar cells
journal, May 1986
- Hopkins, R. H.; Rohatgi, A.
- Journal of Crystal Growth, Vol. 75, Issue 1, p. 67-79
Fabrication and properties of ultrasmall Si wire arrays with circuits by vapor–liquid–solid growth
journal, April 2002
- Kawano, Takeshi; Kato, Yoshiko; Futagawa, Masato
- Sensors and Actuators A: Physical, Vol. 97-98, p. 709-715
Strong broadband optical absorption in silicon nanowire films
journal, July 2007
- Tsakalakos, Loucas; Balch, Joleyn E.; Fronheiser, Jody
- Journal of Nanophotonics, Vol. 1, Issue 1, Article No. 013552
Stretchable and Foldable Silicon Integrated Circuits
journal, April 2008
- Kim, D.-H.; Ahn, J.-H.; Choi, W. M.
- Science, Vol. 320, Issue 5875, p. 507-511
Controlled growth of highly uniform, axial/radial direction-defined, individually addressable InP nanowire arrays
journal, October 2005
- Mohan, Premila; Motohisa, Junichi; Fukui, Takashi
- Nanotechnology, Vol. 16, Issue 12, p. 2903-2907
Method of making silicon quantum wires on a substrate
patent, November 1999
- Westwater, Jonathan; Gosain, Dharam Pal; Nakagoe, Miyako
- US Patent Document 5,976,957
Macroporous Silicon as a Model for Silicon Wire Array Solar Cells
journal, April 2008
- Maiolo, James R.; Atwater, Harry A.; Lewis, Nathan S.
- The Journal of Physical Chemistry C, Vol. 112, Issue 15, p. 6194-6201
Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
patent-application, November 2002
- Majumdar, Arun; Shakouri, Ali; Sands, Timothy D.
- US Patent Document 10/112698; 20020172820
Controlled Growth of Si Nanowire Arrays for Device Integration
journal, March 2005
- Hochbaum, Allon I.; Fan, Rong; He, Rongrui
- Nano Letters, Vol. 5, Issue 3, p. 457-460
Silicon nanowire solar cells
journal, December 2007
- Tsakalakos, L.; Balch, J.; Fronheiser, J.
- Applied Physics Letters, Vol. 91, Issue 23, 233117
Vertically Oriented Germanium Nanowires Grown from Gold Colloids on Silicon Substrates and Subsequent Gold Removal
journal, June 2007
- Woodruff, Jacob H.; Ratchford, Joshua B.; Goldthorpe, Irene A.
- Nano Letters, Vol. 7, Issue 6, p. 1637-1642
Spectroscopic ellipsometry investigation of optical and interface properties of CdTe films deposited on metal foils
journal, May 2004
- Paulson, P. D.; Mathew, Xavier
- Solar Energy Materials and Solar Cells, Vol. 82, Issue 1-2, p. 279-290
Poly(dimethylsiloxane) as a Material for Fabricating Microfluidic Devices
journal, April 2002
- McDonald, J. Cooper; Whitesides, George M.
- Accounts of Chemical Research, Vol. 35, Issue 7, p. 491-499
Synthesis of High Density, Size-Controlled Si Nanowire Arrays via Porous Anodic Alumina Mask
journal, January 2006
- Lombardi, Ilaria; Hochbaum, Allon I.; Yang, Peidong
- Chemistry of Materials, Vol. 18, Issue 4, p. 988-991
Synthesis of stoichiometric cadmium selenide films via sequential monolayer electrodeposition
journal, November 1991
- Kressin, Ann M.; Doan, Vincent V.; Klein, Jonathan D.
- Chemistry of Materials, Vol. 3, Issue 6, p. 1015-1020
Electrochemical fabrication of cadmium chalcogenide microdiode arrays
journal, July 1993
- Klein, Jonathan D.; Herrick, Robert D.; Palmer, Dean
- Chemistry of Materials, Vol. 5, Issue 7, p. 902-904
Nanowire dye-sensitized solar cells
journal, May 2005
- Law, Matt; Greene, Lori E.; Johnson, Justin C.
- Nature Materials, Vol. 4, Issue 6, p. 455-459
Electrical Characteristics and Chemical Stability of Non-Oxidized, Methyl-Terminated Silicon Nanowires
journal, June 2006
- Haick, Hossam; Hurley, Patrick T.; Hochbaum, Allon I.
- Journal of the American Chemical Society, Vol. 128, Issue 28, p. 8990-8991
Electrodeposition of CdTe Thin Films
journal, January 1984
- Bhattacharya, R. N.; Rajeshwar, K.
- Journal of The Electrochemical Society, Vol. 131, Issue 9, p. 2032-2037
"Ideal" behavior of the open circuit voltage of semiconductor/liquid junctions
journal, May 1989
- Rosenbluth, Mary L.; Lewis, Nathan S.
- The Journal of Physical Chemistry, Vol. 93, Issue 9, p. 3735-3740
High‐efficiency electroplated heterojunction solar cell
journal, January 1984
- Basol, Bulent M.
- Journal of Applied Physics, Vol. 55, Issue 2, p. 601-603
Large-area blown bubble films of aligned nanowires and carbon nanotubes
journal, May 2007
- Yu, Guihua; Cao, Anyuan; Lieber, Charles M.
- Nature Nanotechnology, Vol. 2, Issue 6, p. 372-377
Growth of vertically aligned Si wire arrays over large areas (>1cm2) with Au and Cu catalysts
journal, September 2007
- Kayes, Brendan M.; Filler, Michael A.; Putnam, Morgan C.
- Applied Physics Letters, Vol. 91, Issue 10, 103110
Controlled partial embedding of carbon nanotubes within flexible transparent layers
journal, December 2007
- Sansom, Elijah B.; Rinderknecht, Derek; Gharib, Morteza
- Nanotechnology, Vol. 19, Issue 3, Article No. 035302
A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water
journal, July 1986
- Wu, Xian-Ping; Wu, Quin-Hai; Ko, Wen H.
- Sensors and Actuators, Vol. 9, Issue 4, p. 333-343
Hybrid solar cells with vertically aligned CdTe nanorods and a conjugated polymer
journal, March 2005
- Kang, Yoonmook; Park, Nam-Gyu; Kim, Donghwan
- Applied Physics Letters, Vol. 86, Issue 11, 113101
Semiconductor Nanowire Array: Potential Substrates for Photocatalysis and Photovoltaics
journal, January 2002
- Wu, Yijing; Yan, Haoquan; Yang, Peidong
- Topics in Catalysis, Vol. 19, Issue 2, p. 197-202
Thermal interface material with carbon nanotubes
patent, August 2007
- Huang, Hua; Liu, Chang-Hong; Fan, Shou-Shan
- US Patent Document 7,253,442
Aligned Single-Crystalline Si Nanowire Arrays for Photovoltaic Applications
journal, September 2005
- Peng, Kuiqing; Xu, Ying; Wu, Yin
- Small, Vol. 1, Issue 11, p. 1062-1067
Nanowire vias
patent-application, December 2008
- Weber, Walter M.; Kreupl, Franz; Unger, Eugen
- US Patent Document 11/767066; 20080315430
Silicon Nanowire Array Photoelectrochemical Cells
journal, September 2007
- Goodey, Adrian P.; Eichfeld, Sarah M.; Lew, Kok-Keong
- Journal of the American Chemical Society, Vol. 129, Issue 41, p. 12344-12345
Kinetic studies of carrier transport and recombination at the n-silicon methanol interface
journal, August 1986
- Rosenbluth, Mary L.; Lewis, Nathan S.
- Journal of the American Chemical Society, Vol. 108, Issue 16, p. 4689-4695
630‐mV open circuit voltage, 12% efficient n ‐Si liquid junction
journal, August 1984
- Rosenbluth, Mary L.; Lieber, Charles M.; Lewis, Nathan S.
- Applied Physics Letters, Vol. 45, Issue 4, p. 423-425
Rare Earth Elements—Critical Resources for High Technology
report, November 2002
- Haxel, Gordon B.; Hedrick, James B.; Orris, Greta J.
- U.S. Geological Survey
Systems and methods for nanowire growth and harvesting
patent, September 2006
- Pan, Yaoling; Duan, Xiangfeng; Dubrow, Robert S.
- US Patent Document 7,105,428
Quantitative Measurement of the Electron and Hole Mobility−Lifetime Products in Semiconductor Nanowires
journal, April 2006
- Gu, Yi; Romankiewicz, John P.; David, John K.
- Nano Letters, Vol. 6, Issue 5, p. 948-952
Synthesis of Vertical High-Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template
journal, April 2007
- Shimizu, T.; Xie, T.; Nishikawa, J.
- Advanced Materials, Vol. 19, Issue 7, p. 917-920
Fabrication of Large-Area Silicon Nanowire p–n Junction Diode Arrays
journal, January 2004
- Q. Peng, K.; P. Huang, Z.; Zhu, J.
- Advanced Materials, Vol. 16, Issue 1, p. 73-76
Thermal interface material and method for manufacturing same
patent-application, June 2006
- Leu, Charles; Yu, Tai-Cheng; Chen, Ga-Lane
- US Patent Document 11/021923; 20060118791
Method of manufacturing silicon nanowires using porous glass template and device comprising silicon nanowires formed by the same
patent-application, October 2007
- Lee, Eun Kyung; Choi, Byoung Lyong; Kwon, Soon Jae
- US Patent Document 11/444115; 20070232028
Flexible energy storage devices based on nanocomposite paper
journal, August 2007
- Pushparaj, Victor L.; Shaijumon, Manikoth M.; Kumar, Ashavani
- Proceedings of the National Academy of Sciences, Vol. 104, Issue 34, p. 13574-13577
Diameter-Controlled Synthesis of Silicon Nanowires Using Nanoporous Alumina Membranes
journal, January 2005
- Bogart, T. E.; Dey, S.; Lew, K.-K.
- Advanced Materials, Vol. 17, Issue 1, p. 114-117
Microwave assisted patterning of vertically aligned carbon nanotubes onto polymer substrates
journal, January 2006
- Sunden, Erik; Moon, Jack K.; Wong, C. P.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 4, p. 1947-1950
Semiconducting Cadmium Telluride
journal, December 1954
- Jenny, Dietrich A.; Bube, Richard H.
- Physical Review, Vol. 96, Issue 5, p. 1190-1191
Nanoscale coherent optical components
patent-application, October 2004
- Lieber, Charles M.; Duan, Xiangfeng; Huang, Yu
- US Patent Document 10/734086; 20040213307
Semiconductors for Photoelectrolysis
journal, August 1978
- Harris, L. A.; Wilson, R. H.
- Annual Review of Materials Science, Vol. 8, Issue 1, p. 99-134
Biomimetic Assembly of Zinc Oxide Nanorods onto Flexible Polymers
journal, October 2007
- Morin, Stephen A.; Amos, Fairland F.; Jin, Song
- Journal of the American Chemical Society, Vol. 129, Issue 45, p. 13776-13777
Electrochemical Fabrication of CdS Nanowire Arrays in Porous Anodic Aluminum Oxide Templates
journal, January 1996
- Routkevitch, Dmitri; Bigioni, Terry; Moskovits, Martin
- The Journal of Physical Chemistry, Vol. 100, Issue 33, p. 14037-14047
Efficient photoinduced charge transfer in TiO2 nanorod/conjugated polymer hybrid materials
journal, November 2006
- Lin, Yu-Ting; Zeng, Tsung-Wei; Lai, Wei-Zong
- Nanotechnology, Vol. 17, Issue 23, p. 5781-5785
Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices
journal, October 2003
- Lee, Jessamine Ng; Park, Cheolmin; Whitesides, George M.
- Analytical Chemistry, Vol. 75, Issue 23, p. 6544-6554
Fabrication of individually seeded nanowire arrays by vapour–liquid–solid growth
journal, October 2003
- Mårtensson, T; Borgström, M; Seifert, W
- Nanotechnology, Vol. 14, Issue 12, p. 1255-1258
Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells
journal, February 2008
- Kelzenberg, Michael D.; Turner-Evans, Daniel B.; Kayes, Brendan M.
- Nano Letters, Vol. 8, Issue 2, p. 710-714
Hybrid Nanorod-Polymer Solar Cells
journal, March 2002
- Huynh, W. U.; Dittmer, Janke J.; Alivisatos, A. Paul
- Science, Vol. 295, Issue 5564, p. 2425-2427
Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique
journal, October 1997
- Westwater, Jonathan; Gosain, Dharam Pal; Usui, Setsuo
- Japanese Journal of Applied Physics, Vol. 36, Issue Part 1, No. 10, p. 6204-6209
Photoelectric conversion device and method of production thereof
patent, November 2003
- Den, Tohru; Okura, Hiroshi
- US Patent Document 6,649,824
Photoconverters based on silicon-crystal whiskers
journal, April 1978
- Shchetinin, A. A.; Drozhzhin, A. I.; Sedykh, N. K.
- Measurement Techniques, Vol. 21, Issue 4, p. 502-504
Diameter-Dependent Growth Direction of Epitaxial Silicon Nanowires
journal, April 2005
- Schmidt, Volker; Senz, Stephan; Gösele, Ulrich
- Nano Letters, Vol. 5, Issue 5, p. 931-935
Cadmium Telluride Solar Cells
book, April 2003
- McCandless, Brian E.; Sites, James R.; Luque, Antonio
- Handbook of Photovoltaic Science and Engineering: Luque/Photovoltaic Science and Engineering
Well-ordered ZnO nanowire arrays on GaN substrate fabricated via nanosphere lithography
journal, January 2006
- Fan, Hong Jin; Fuhrmann, Bodo; Scholz, Roland
- Journal of Crystal Growth, Vol. 287, Issue 1, p. 34-38
Nanochannel apparatus and method of fabricating
patent-application, May 2007
- Li, Zhiyong; Islam, M. Saif; Wang, Shih-Yuan
- US Patent Application 11/291019; 20070122313
Aligned Carbon Nanotube−Polymer Hybrid Architectures for Diverse Flexible Electronic Applications
journal, February 2006
- Jung, Yung Joon; Kar, Swastik; Talapatra, Saikat
- Nano Letters, Vol. 6, Issue 3, p. 413-418
Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density
journal, March 2007
- Huang, Z.; Fang, H.; Zhu, J.
- Advanced Materials, Vol. 19, Issue 5, p. 744-748
Fabrication of densely packed, well-ordered, high-aspect-ratio silicon nanopillars over large areas using block copolymer lithography
journal, August 2006
- Gowrishankar, Vignesh; Miller, Nathaniel; McGehee, Michael D.
- Thin Solid Films, Vol. 513, Issue 1-2, p. 289-294
SEMICONDUCTOR NANOWIRES AND NANOTUBES
journal, August 2004
- Law, Matt; Goldberger, Joshua; Yang, Peidong
- Annual Review of Materials Research, Vol. 34, Issue 1, p. 83-122
A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires
journal, January 1998
- Morales, Alfredo M.; Lieber, Charles M.
- Science, Vol. 279, Issue 5348, p. 208-211
Light-induced generation of hydrogen at CdS-monograin membranes
journal, March 1983
- Meissner, D.; Memming, R.; Kastening, B.
- Chemical Physics Letters, Vol. 96, Issue 1, p. 34-37
Silicon Nanowires: Preparation, Device Fabrication, and Transport Properties
journal, December 2000
- Yu, Jae-Young; Chung, Sung-Wook; Heath, James R.
- The Journal of Physical Chemistry B, Vol. 104, Issue 50, p. 11864-11870
Effects of Interfacial Energetics on the Effective Surface Recombination Velocity of Si/Liquid Contacts
journal, March 2002
- Gstrein, Florian; Michalak, David J.; Royea, William J.
- The Journal of Physical Chemistry B, Vol. 106, Issue 11, p. 2950-2961
Method for the controlled growth of crystal whiskers and application thereof to the making of tip microcathodes
patent, May 1994
- Pribat, Didier; Leclerc, Pierre; Legagneux, Pierre
- US Patent Document 5,314,569
High Aspect Ratio Silicon Wire Array Photoelectrochemical Cells
journal, October 2007
- Maiolo, James R.; Kayes, Brendan M.; Filler, Michael A.
- Journal of the American Chemical Society, Vol. 129, Issue 41, p. 12346-12347
Nanostructured imaging transfer element
patent, October 1994
- Debe, Mark K.; Kam, Kam K.; Poirier, Richard J.
- US Patent Document 5,352,651
Synthesis of Molybdenum Nanowires with Millimeter-Scale Lengths Using Electrochemical Step Edge Decoration
journal, June 2002
- Zach, M. P.; Inazu, K.; Ng, K. H.
- Chemistry of Materials, Vol. 14, Issue 7, p. 3206-3216
A 14% efficient nonaqueous semiconductor/liquid junction solar cell
journal, November 1984
- Gibbons, James F.; Cogan, George W.; Gronet, Chris M.
- Applied Physics Letters, Vol. 45, Issue 10, p. 1095-1097
Embedded Carbon-Nanotube-Stiffened Polymer Surfaces
journal, January 2005
- Raravikar, Nachiket R.; Vijayaraghavan, Aravind S.; Keblinski, Pawel
- Small, Vol. 1, Issue 3, p. 317-320
Vapor-liquid-solid mechanism of single crystal growth
journal, March 1964
- Wagner, R. S.; Ellis, W. C.
- Applied Physics Letters, Vol. 4, Issue 5, p. 89-90
A review of some charge transport properties of silicon
journal, February 1977
- Jacoboni, C.; Canali, C.; Ottaviani, G.
- Solid-State Electronics, Vol. 20, Issue 2, p. 77-89
New Facets of CdTe Electrodeposition in Acidic Solutions with Higher Tellurium Concentrations
journal, January 2004
- Lepiller, Catherine; Lincot, Daniel
- Journal of The Electrochemical Society, Vol. 151, Issue 5, p. C348-C357
One-Dimensional Nanostructures: Synthesis, Characterization, and Applications
journal, March 2003
- Xia, Y.; Yang, P.; Sun, Y.
- Advanced Materials, Vol. 15, Issue 5, p. 353-389