Structures of and methods for forming vertically aligned Si wire arrays

Kayes, Brendan M.; Filler, Michael A.; Lewis, Nathan S.; Atwater, Harry A.

Title: Structures of and methods for forming vertically aligned Si wire arrays

Abstract

A structure consisting of vertically aligned wire arrays on a Si substrate and a method for producing such wire arrays. The wire arrays are fabricated and positioned on a substrate with an orientation and density particularly adapted for conversion of received light to energy. A patterned oxide layer is used to provide for wire arrays that exhibit narrow diameter and length distribution and provide for controlled wire position.

Inventors:: Kayes, Brendan M.; Filler, Michael A.; Lewis, Nathan S.; Atwater, Jr., Harry A.

Issue Date:: Tue Sep 10 00:00:00 EDT 2013

Research Org.:: California Institute of Technology (CalTech), Pasadena, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531871

Patent Number(s):: 8530338

Application Number:: 12/176,099

Assignee:: California Institute of Technology (Pasadena, CA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y30/00 - Nanotechnology for materials or surface science, e.g. nanocomposites

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/02381 - {Silicon, silicon germanium, germanium}
H01L21/02532 - {Silicon, silicon germanium, germanium}
H01L21/02603 - {Nanowires}
H01L21/0262 - {Reduction or decomposition of gaseous compounds, e.g. CVD}
H01L21/02639 - {Preparation of substrate for selective deposition}
H01L21/02645 - {Seed materials}
H01L21/02653 - {Vapour-liquid-solid growth}
H01L27/1446 - {in a repetitive configuration}
H01L31/035272 - {characterised by at least one potential jump barrier or surface barrier}
H01L31/04 - adapted as photovoltaic [PV] conversion devices
H01L31/1804 - {comprising only elements of Group IV of the Periodic System}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/547 - Monocrystalline silicon PV cells

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
Y02P70/50 - Manufacturing or production processes characterised by the final manufactured product

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DOE Contract Number:: FG02-03ER15483

Resource Type:: Patent

Resource Relation:: Patent File Date: 2008-07-18

Country of Publication:: United States

Language:: English

Citation Formats


                    Kayes, Brendan M., Filler, Michael A., Lewis, Nathan S., and Atwater, Jr., Harry A. Structures of and methods for forming vertically aligned Si wire arrays.  United States: N. p., 2013. 
        Web.

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                    Kayes, Brendan M., Filler, Michael A., Lewis, Nathan S., & Atwater, Jr., Harry A. Structures of and methods for forming vertically aligned Si wire arrays.  United States.

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                    Kayes, Brendan M., Filler, Michael A., Lewis, Nathan S., and Atwater, Jr., Harry A. Tue .  
        "Structures of and methods for forming vertically aligned Si wire arrays".  United States.  https://www.osti.gov/servlets/purl/1531871.

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@article{osti_1531871,

  title        = {Structures of and methods for forming vertically aligned Si wire arrays},

  author       = {Kayes, Brendan M. and Filler, Michael A. and Lewis, Nathan S. and Atwater, Jr., Harry A.},

  abstractNote = {A structure consisting of vertically aligned wire arrays on a Si substrate and a method for producing such wire arrays. The wire arrays are fabricated and positioned on a substrate with an orientation and density particularly adapted for conversion of received light to energy. A patterned oxide layer is used to provide for wire arrays that exhibit narrow diameter and length distribution and provide for controlled wire position.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Sep 10 00:00:00 EDT 2013},

  month        = {Tue Sep 10 00:00:00 EDT 2013}

}

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Effects of Interfacial Energetics on the Effective Surface Recombination Velocity of Si/Liquid Contacts
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Gstrein, Florian; Michalak, David J.; Royea, William J.
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Method for the controlled growth of crystal whiskers and application thereof to the making of tip microcathodes
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Pribat, Didier; Leclerc, Pierre; Legagneux, Pierre
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High Aspect Ratio Silicon Wire Array Photoelectrochemical Cells
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Synthesis of Molybdenum Nanowires with Millimeter-Scale Lengths Using Electrochemical Step Edge Decoration
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Title: Structures of and methods for forming vertically aligned Si wire arrays

Abstract

Citation Formats

Properties of gold in silicon journal, February 1966

n-Type silicon photoelectrochemistry in methanol: Design of a 10.1% efficient semiconductor/liquid junction solar cell journal, February 1983

Semiconductor Nanowires: From Self-Organization to Patterned Growth journal, April 2006

Epitaxial core–shell and core–multishell nanowire heterostructures journal, November 2002

Nanoimprint Lithography: Methods and Material Requirements journal, February 2007

Use of sacrificial layers in the manufacture of high performance systems on tailored substrates patent, December 2007

Solubility and Diffusivity of Gold, Iron, and Copper in Silicon journal, December 1956

Impurities in silicon solar cells journal, April 1980

Experimental Observation of an Extremely Dark Material Made By a Low-Density Nanotube Array journal, January 2008

Nanostructure-reinforced composite articles and methods patent-application, March 2008

High‐efficiency electrodeposited cadmium telluride solar cells journal, February 1982

High Density Germanium Nanowire Assemblies: Contact Challenges and Electrical Characterization journal, January 2006

Highly Anisotropic Crystals book, January 1987

Method and apparatus for growing oriented whisker arrays patent, October 2001

Si nanowires synthesized with Cu catalyst journal, January 2007

Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells journal, June 2005

Impurity effects in silicon for high efficiency solar cells journal, May 1986

Fabrication and properties of ultrasmall Si wire arrays with circuits by vapor–liquid–solid growth journal, April 2002

Strong broadband optical absorption in silicon nanowire films journal, July 2007

Stretchable and Foldable Silicon Integrated Circuits journal, April 2008

Controlled growth of highly uniform, axial/radial direction-defined, individually addressable InP nanowire arrays journal, October 2005

Method of making silicon quantum wires on a substrate patent, November 1999

Macroporous Silicon as a Model for Silicon Wire Array Solar Cells journal, April 2008

Methods of fabricating nanostructures and nanowires and devices fabricated therefrom patent-application, November 2002

Controlled Growth of Si Nanowire Arrays for Device Integration journal, March 2005

Silicon nanowire solar cells journal, December 2007

Vertically Oriented Germanium Nanowires Grown from Gold Colloids on Silicon Substrates and Subsequent Gold Removal journal, June 2007

Spectroscopic ellipsometry investigation of optical and interface properties of CdTe films deposited on metal foils journal, May 2004

Poly(dimethylsiloxane) as a Material for Fabricating Microfluidic Devices journal, April 2002

Synthesis of High Density, Size-Controlled Si Nanowire Arrays via Porous Anodic Alumina Mask journal, January 2006

Synthesis of stoichiometric cadmium selenide films via sequential monolayer electrodeposition journal, November 1991

Electrochemical fabrication of cadmium chalcogenide microdiode arrays journal, July 1993

Nanowire dye-sensitized solar cells journal, May 2005

Electrical Characteristics and Chemical Stability of Non-Oxidized, Methyl-Terminated Silicon Nanowires journal, June 2006

Electrodeposition of CdTe Thin Films journal, January 1984

"Ideal" behavior of the open circuit voltage of semiconductor/liquid junctions journal, May 1989

High‐efficiency electroplated heterojunction solar cell journal, January 1984

Large-area blown bubble films of aligned nanowires and carbon nanotubes journal, May 2007

Growth of vertically aligned Si wire arrays over large areas (>1cm2) with Au and Cu catalysts journal, September 2007

Controlled partial embedding of carbon nanotubes within flexible transparent layers journal, December 2007

A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water journal, July 1986

Hybrid solar cells with vertically aligned CdTe nanorods and a conjugated polymer journal, March 2005

Semiconductor Nanowire Array: Potential Substrates for Photocatalysis and Photovoltaics journal, January 2002

Thermal interface material with carbon nanotubes patent, August 2007

Aligned Single-Crystalline Si Nanowire Arrays for Photovoltaic Applications journal, September 2005

Nanowire vias patent-application, December 2008

Silicon Nanowire Array Photoelectrochemical Cells journal, September 2007

Kinetic studies of carrier transport and recombination at the n-silicon methanol interface journal, August 1986

630‐mV open circuit voltage, 12% efficient n ‐Si liquid junction journal, August 1984

Rare Earth Elements—Critical Resources for High Technology report, November 2002

Systems and methods for nanowire growth and harvesting patent, September 2006

Quantitative Measurement of the Electron and Hole Mobility−Lifetime Products in Semiconductor Nanowires journal, April 2006

Synthesis of Vertical High-Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template journal, April 2007

Fabrication of Large-Area Silicon Nanowire p–n Junction Diode Arrays journal, January 2004

Thermal interface material and method for manufacturing same patent-application, June 2006

Method of manufacturing silicon nanowires using porous glass template and device comprising silicon nanowires formed by the same patent-application, October 2007

Flexible energy storage devices based on nanocomposite paper journal, August 2007

Diameter-Controlled Synthesis of Silicon Nanowires Using Nanoporous Alumina Membranes journal, January 2005

Microwave assisted patterning of vertically aligned carbon nanotubes onto polymer substrates journal, January 2006

Semiconducting Cadmium Telluride journal, December 1954

Nanoscale coherent optical components patent-application, October 2004

Semiconductors for Photoelectrolysis journal, August 1978

Biomimetic Assembly of Zinc Oxide Nanorods onto Flexible Polymers journal, October 2007

Electrochemical Fabrication of CdS Nanowire Arrays in Porous Anodic Aluminum Oxide Templates journal, January 1996

Efficient photoinduced charge transfer in TiO2 nanorod/conjugated polymer hybrid materials journal, November 2006

Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices journal, October 2003

Fabrication of individually seeded nanowire arrays by vapour–liquid–solid growth journal, October 2003

Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells journal, February 2008

Hybrid Nanorod-Polymer Solar Cells journal, March 2002

Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique journal, October 1997

Photoelectric conversion device and method of production thereof patent, November 2003

Photoconverters based on silicon-crystal whiskers journal, April 1978

Diameter-Dependent Growth Direction of Epitaxial Silicon Nanowires journal, April 2005

Cadmium Telluride Solar Cells book, April 2003

Well-ordered ZnO nanowire arrays on GaN substrate fabricated via nanosphere lithography journal, January 2006

Nanochannel apparatus and method of fabricating patent-application, May 2007

Aligned Carbon Nanotube−Polymer Hybrid Architectures for Diverse Flexible Electronic Applications journal, February 2006

Properties of gold in silicon
journal, February 1966

n-Type silicon photoelectrochemistry in methanol: Design of a 10.1% efficient semiconductor/liquid junction solar cell
journal, February 1983

Semiconductor Nanowires: From Self-Organization to Patterned Growth
journal, April 2006

Epitaxial core–shell and core–multishell nanowire heterostructures
journal, November 2002

Nanoimprint Lithography: Methods and Material Requirements
journal, February 2007

Use of sacrificial layers in the manufacture of high performance systems on tailored substrates
patent, December 2007

Solubility and Diffusivity of Gold, Iron, and Copper in Silicon
journal, December 1956

Impurities in silicon solar cells
journal, April 1980

Experimental Observation of an Extremely Dark Material Made By a Low-Density Nanotube Array
journal, January 2008

Nanostructure-reinforced composite articles and methods
patent-application, March 2008

High‐efficiency electrodeposited cadmium telluride solar cells
journal, February 1982

High Density Germanium Nanowire Assemblies: Contact Challenges and Electrical Characterization
journal, January 2006

Highly Anisotropic Crystals
book, January 1987

Method and apparatus for growing oriented whisker arrays
patent, October 2001

Si nanowires synthesized with Cu catalyst
journal, January 2007

Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells
journal, June 2005

Impurity effects in silicon for high efficiency solar cells
journal, May 1986

Fabrication and properties of ultrasmall Si wire arrays with circuits by vapor–liquid–solid growth
journal, April 2002

Strong broadband optical absorption in silicon nanowire films
journal, July 2007

Stretchable and Foldable Silicon Integrated Circuits
journal, April 2008

Controlled growth of highly uniform, axial/radial direction-defined, individually addressable InP nanowire arrays
journal, October 2005

Method of making silicon quantum wires on a substrate
patent, November 1999

Macroporous Silicon as a Model for Silicon Wire Array Solar Cells
journal, April 2008

Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
patent-application, November 2002

Controlled Growth of Si Nanowire Arrays for Device Integration
journal, March 2005

Silicon nanowire solar cells
journal, December 2007

Vertically Oriented Germanium Nanowires Grown from Gold Colloids on Silicon Substrates and Subsequent Gold Removal
journal, June 2007

Spectroscopic ellipsometry investigation of optical and interface properties of CdTe films deposited on metal foils
journal, May 2004

Poly(dimethylsiloxane) as a Material for Fabricating Microfluidic Devices
journal, April 2002

Synthesis of High Density, Size-Controlled Si Nanowire Arrays via Porous Anodic Alumina Mask
journal, January 2006

Synthesis of stoichiometric cadmium selenide films via sequential monolayer electrodeposition
journal, November 1991

Electrochemical fabrication of cadmium chalcogenide microdiode arrays
journal, July 1993

Nanowire dye-sensitized solar cells
journal, May 2005

Electrical Characteristics and Chemical Stability of Non-Oxidized, Methyl-Terminated Silicon Nanowires
journal, June 2006

Electrodeposition of CdTe Thin Films
journal, January 1984

"Ideal" behavior of the open circuit voltage of semiconductor/liquid junctions
journal, May 1989

High‐efficiency electroplated heterojunction solar cell
journal, January 1984

Large-area blown bubble films of aligned nanowires and carbon nanotubes
journal, May 2007

Growth of vertically aligned Si wire arrays over large areas (>1cm²) with Au and Cu catalysts
journal, September 2007

Controlled partial embedding of carbon nanotubes within flexible transparent layers
journal, December 2007

A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water
journal, July 1986

Hybrid solar cells with vertically aligned CdTe nanorods and a conjugated polymer
journal, March 2005

Semiconductor Nanowire Array: Potential Substrates for Photocatalysis and Photovoltaics
journal, January 2002

Thermal interface material with carbon nanotubes
patent, August 2007

Aligned Single-Crystalline Si Nanowire Arrays for Photovoltaic Applications
journal, September 2005

Nanowire vias
patent-application, December 2008

Silicon Nanowire Array Photoelectrochemical Cells
journal, September 2007

Kinetic studies of carrier transport and recombination at the n-silicon methanol interface
journal, August 1986

630‐mV open circuit voltage, 12% efficient n ‐Si liquid junction
journal, August 1984

Rare Earth Elements—Critical Resources for High Technology
report, November 2002

Systems and methods for nanowire growth and harvesting
patent, September 2006

Quantitative Measurement of the Electron and Hole Mobility−Lifetime Products in Semiconductor Nanowires
journal, April 2006

Synthesis of Vertical High-Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template
journal, April 2007

Fabrication of Large-Area Silicon Nanowire p–n Junction Diode Arrays
journal, January 2004

Thermal interface material and method for manufacturing same
patent-application, June 2006

Method of manufacturing silicon nanowires using porous glass template and device comprising silicon nanowires formed by the same
patent-application, October 2007

Flexible energy storage devices based on nanocomposite paper
journal, August 2007

Diameter-Controlled Synthesis of Silicon Nanowires Using Nanoporous Alumina Membranes
journal, January 2005

Microwave assisted patterning of vertically aligned carbon nanotubes onto polymer substrates
journal, January 2006

Semiconducting Cadmium Telluride
journal, December 1954

Nanoscale coherent optical components
patent-application, October 2004

Semiconductors for Photoelectrolysis
journal, August 1978

Biomimetic Assembly of Zinc Oxide Nanorods onto Flexible Polymers
journal, October 2007

Electrochemical Fabrication of CdS Nanowire Arrays in Porous Anodic Aluminum Oxide Templates
journal, January 1996

Efficient photoinduced charge transfer in TiO₂ nanorod/conjugated polymer hybrid materials
journal, November 2006

Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices
journal, October 2003

Fabrication of individually seeded nanowire arrays by vapour–liquid–solid growth
journal, October 2003

Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells
journal, February 2008

Hybrid Nanorod-Polymer Solar Cells
journal, March 2002

Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique
journal, October 1997

Photoelectric conversion device and method of production thereof
patent, November 2003

Photoconverters based on silicon-crystal whiskers
journal, April 1978

Diameter-Dependent Growth Direction of Epitaxial Silicon Nanowires
journal, April 2005

Cadmium Telluride Solar Cells
book, April 2003

Well-ordered ZnO nanowire arrays on GaN substrate fabricated via nanosphere lithography
journal, January 2006

Nanochannel apparatus and method of fabricating
patent-application, May 2007

Aligned Carbon Nanotube−Polymer Hybrid Architectures for Diverse Flexible Electronic Applications
journal, February 2006

Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density
journal, March 2007

Fabrication of densely packed, well-ordered, high-aspect-ratio silicon nanopillars over large areas using block copolymer lithography
journal, August 2006

SEMICONDUCTOR NANOWIRES AND NANOTUBES
journal, August 2004