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Title: Structures of and methods for forming vertically aligned Si wire arrays

Abstract

A structure consisting of vertically aligned wire arrays on a Si substrate and a method for producing such wire arrays. The wire arrays are fabricated and positioned on a substrate with an orientation and density particularly adapted for conversion of received light to energy. A patterned oxide layer is used to provide for wire arrays that exhibit narrow diameter and length distribution and provide for controlled wire position.

Inventors:
; ; ;
Issue Date:
Research Org.:
California Institute of Technology (CalTech), Pasadena, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531871
Patent Number(s):
8530338
Application Number:
12/176,099
Assignee:
California Institute of Technology (Pasadena, CA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
DOE Contract Number:  
FG02-03ER15483
Resource Type:
Patent
Resource Relation:
Patent File Date: 2008-07-18
Country of Publication:
United States
Language:
English

Citation Formats

Kayes, Brendan M., Filler, Michael A., Lewis, Nathan S., and Atwater, Jr., Harry A. Structures of and methods for forming vertically aligned Si wire arrays. United States: N. p., 2013. Web.
Kayes, Brendan M., Filler, Michael A., Lewis, Nathan S., & Atwater, Jr., Harry A. Structures of and methods for forming vertically aligned Si wire arrays. United States.
Kayes, Brendan M., Filler, Michael A., Lewis, Nathan S., and Atwater, Jr., Harry A. Tue . "Structures of and methods for forming vertically aligned Si wire arrays". United States. https://www.osti.gov/servlets/purl/1531871.
@article{osti_1531871,
title = {Structures of and methods for forming vertically aligned Si wire arrays},
author = {Kayes, Brendan M. and Filler, Michael A. and Lewis, Nathan S. and Atwater, Jr., Harry A.},
abstractNote = {A structure consisting of vertically aligned wire arrays on a Si substrate and a method for producing such wire arrays. The wire arrays are fabricated and positioned on a substrate with an orientation and density particularly adapted for conversion of received light to energy. A patterned oxide layer is used to provide for wire arrays that exhibit narrow diameter and length distribution and provide for controlled wire position.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {9}
}

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Works referenced in this record:

Nanostructured imaging transfer element
patent, October 1994


Method of making silicon quantum wires on a substrate
patent, November 1999


Method and apparatus for growing oriented whisker arrays
patent, October 2001


Photoelectric conversion device and method of production thereof
patent, November 2003


Systems and methods for nanowire growth and harvesting
patent, September 2006


Thermal interface material with carbon nanotubes
patent, August 2007


Use of sacrificial layers in the manufacture of high performance systems on tailored substrates
patent, December 2007