Semiconductor-based detection and decontamination system
Abstract
A system and method for identifying and making quantitative determinations of different deposits on a portion thereof, determining that the deposit is a contaminant and decontaminating at least the portion of the system is disclosed. The system comprises a controller, a sensing portion and a decontamination portion. The controller contains information about at least one noncontaminant. The sensing portion communicates with at least the controller and the portion of the system and is adapted to detect the deposit. The decontaminating portion communicates with at least the controller and is adapted to decontaminate the portion of the system.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531841
- Patent Number(s):
- 8309020
- Application Number:
- 13/046,478
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- W-31-109-39-ENG
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011-03-11
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Skubal, Laura R., and McArthur, Alan L. Semiconductor-based detection and decontamination system. United States: N. p., 2012.
Web.
Skubal, Laura R., & McArthur, Alan L. Semiconductor-based detection and decontamination system. United States.
Skubal, Laura R., and McArthur, Alan L. Tue .
"Semiconductor-based detection and decontamination system". United States. https://www.osti.gov/servlets/purl/1531841.
@article{osti_1531841,
title = {Semiconductor-based detection and decontamination system},
author = {Skubal, Laura R. and McArthur, Alan L.},
abstractNote = {A system and method for identifying and making quantitative determinations of different deposits on a portion thereof, determining that the deposit is a contaminant and decontaminating at least the portion of the system is disclosed. The system comprises a controller, a sensing portion and a decontamination portion. The controller contains information about at least one noncontaminant. The sensing portion communicates with at least the controller and the portion of the system and is adapted to detect the deposit. The decontaminating portion communicates with at least the controller and is adapted to decontaminate the portion of the system.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 13 00:00:00 EST 2012},
month = {Tue Nov 13 00:00:00 EST 2012}
}
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