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Title: Method for reuse of wafers for growth of vertically-aligned wire arrays

Abstract

Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.

Inventors:
; ; ;
Issue Date:
Research Org.:
California Inst. of Technology, Pasadena, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531833
Patent Number(s):
7,910,461
Application Number:
12/176,100
Assignee:
California Institute of Technology (Pasadena, CA)
DOE Contract Number:  
FG02-03ER15483
Resource Type:
Patent
Resource Relation:
Patent File Date: 2008-07-18
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Spurgeon, Joshua M., Plass, Katherine E., Lewis, Nathan S., and Atwater, Harry A. Method for reuse of wafers for growth of vertically-aligned wire arrays. United States: N. p., 2011. Web.
Spurgeon, Joshua M., Plass, Katherine E., Lewis, Nathan S., & Atwater, Harry A. Method for reuse of wafers for growth of vertically-aligned wire arrays. United States.
Spurgeon, Joshua M., Plass, Katherine E., Lewis, Nathan S., and Atwater, Harry A. Tue . "Method for reuse of wafers for growth of vertically-aligned wire arrays". United States. https://www.osti.gov/servlets/purl/1531833.
@article{osti_1531833,
title = {Method for reuse of wafers for growth of vertically-aligned wire arrays},
author = {Spurgeon, Joshua M. and Plass, Katherine E. and Lewis, Nathan S. and Atwater, Harry A.},
abstractNote = {Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {3}
}

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Works referenced in this record:

Nanofiber surface based capacitors
patent, June 2006


Growth of single crystal nanowires
patent, February 2008


Systems and methods for nanowire growth and harvesting
patent, September 2006


Use of sacrificial layers in the manufacture of high performance systems on tailored substrates
patent, December 2007


Nanofiber surface based capacitors
patent, October 2006


Nanowire horizontal growth and substrate removal
patent, July 2009


Method and apparatus for growing oriented whisker arrays
patent, October 2001


Photoelectric conversion device and method of production thereof
patent, November 2003


Method of making silicon quantum wires on a substrate
patent, November 1999


Nanostructured imaging transfer element
patent, October 1994


Thermal interface material with carbon nanotubes
patent, August 2007


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