Method for forming diffusion regions in a silicon substrate
Abstract
A method of manufacturing solar cells is disclosed. The method comprises depositing an etch-resistant dopant material on a silicon substrate, the etch-resistant dopant material comprising a dopant source, forming a cross-linked matrix in the etch-resistant dopant material using a non-thermal cure of the etch-resistant dopant material, and heating the silicon substrate and the etch-resistant dopant material to a temperature sufficient to cause the dopant source to diffuse into the silicon substrate.
- Inventors:
- Issue Date:
- Research Org.:
- SunPower Corp., San Jose, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531803
- Patent Number(s):
- 9018033
- Application Number:
- 14/061,422
- Assignee:
- SunPower Corporation (San Jose, CA)
- Patent Classifications (CPCs):
-
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- FC36-07GO17043
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2013-10-23
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 14 SOLAR ENERGY; 42 ENGINEERING
Citation Formats
Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, and Molesa, Steven Edward. Method for forming diffusion regions in a silicon substrate. United States: N. p., 2015.
Web.
Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, & Molesa, Steven Edward. Method for forming diffusion regions in a silicon substrate. United States.
Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, and Molesa, Steven Edward. Tue .
"Method for forming diffusion regions in a silicon substrate". United States. https://www.osti.gov/servlets/purl/1531803.
@article{osti_1531803,
title = {Method for forming diffusion regions in a silicon substrate},
author = {Wu, Kahn C. and Kraft, Steven M. and Loscutoff, Paul and Molesa, Steven Edward},
abstractNote = {A method of manufacturing solar cells is disclosed. The method comprises depositing an etch-resistant dopant material on a silicon substrate, the etch-resistant dopant material comprising a dopant source, forming a cross-linked matrix in the etch-resistant dopant material using a non-thermal cure of the etch-resistant dopant material, and heating the silicon substrate and the etch-resistant dopant material to a temperature sufficient to cause the dopant source to diffuse into the silicon substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {4}
}
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