Method for forming diffusion regions in a silicon substrate

Title: Method for forming diffusion regions in a silicon substrate

Abstract

A method of manufacturing solar cells is disclosed. The method comprises depositing an etch-resistant dopant material on a silicon substrate, the etch-resistant dopant material comprising a dopant source, forming a cross-linked matrix in the etch-resistant dopant material using a non-thermal cure of the etch-resistant dopant material, and heating the silicon substrate and the etch-resistant dopant material to a temperature sufficient to cause the dopant source to diffuse into the silicon substrate.

Inventors:: Wu, Kahn C.; Kraft, Steven M.; Loscutoff, Paul; Molesa, Steven Edward

Issue Date:: 2015-04-28

Research Org.:: SunPower Corp., San Jose, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531803

Patent Number(s):: 9,018,033

Application Number:: 14/061,422

Assignee:: SunPower Corporation (San Jose, CA)

DOE Contract Number:: FC36-07GO17043

Resource Type:: Patent

Resource Relation:: Patent File Date: 2013-10-23

Country of Publication:: United States

Language:: English

Subject:: 14 SOLAR ENERGY; 42 ENGINEERING

Citation Formats


                    Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, and Molesa, Steven Edward. Method for forming diffusion regions in a silicon substrate.  United States: N. p., 2015. 
        Web.

Copy to clipboard


                    Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, & Molesa, Steven Edward. Method for forming diffusion regions in a silicon substrate.  United States.

Copy to clipboard


                    Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, and Molesa, Steven Edward. Tue .  
        "Method for forming diffusion regions in a silicon substrate".  United States.  https://www.osti.gov/servlets/purl/1531803.

Copy to clipboard


                    
@article{osti_1531803,

  title        = {Method for forming diffusion regions in a silicon substrate},

  author       = {Wu, Kahn C. and Kraft, Steven M. and Loscutoff, Paul and Molesa, Steven Edward},

  abstractNote = {A method of manufacturing solar cells is disclosed. The method comprises depositing an etch-resistant dopant material on a silicon substrate, the etch-resistant dopant material comprising a dopant source, forming a cross-linked matrix in the etch-resistant dopant material using a non-thermal cure of the etch-resistant dopant material, and heating the silicon substrate and the etch-resistant dopant material to a temperature sufficient to cause the dopant source to diffuse into the silicon substrate.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2015},

  month        = {4}

}

Copy to clipboard

Patent:

View Patent

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Method for the Contact Separation of Electrically-Conducting Layers on the Back Contacts of Solar Cells and Corresponding Solar Cells
patent-application, February 2008

Teppe, Andreas; Engelhart, Peter; Muller, Jorg
US Patent Document 11/665318; 20080035198
URL: http://appft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.html&r=1&f=G&l=50&s1=%2220080035198%22.PGNR.&OS=DN/20080035198&RS=DN/20080035198

Integrated Photodiode for Semiconductor Substrates
patent-application, April 2010

Steinbrueck, Gary; Vickers, James S.; Pelella, Mario M.
US Patent Document 12/547463; 20100084729
URL: http://appft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.html&r=1&f=G&l=50&s1=%2220100084729%22.PGNR.&OS=DN/20100084729&RS=DN/20100084729

Method of fabricating polysilicon emitters for solar cells
patent, October 1991

Swanson, Richard M.; Gan, Jon-Yiew
US Patent Document 5,057,439
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5057439

Radiation resistant passivation of silicon solar cells
patent, July 1991

Swanson, Richard M.; Gan, Jon-Yiew; Gruenbaum, Peter E.
US Patent Document 5,030,295
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5030295

Printed non-volatile memory
patent, May 2010

Kamath, Arvind; Smith, Patrick; Cleeves, James
US Patent Document 7,709,307
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7709307

Silicon/germanium oxide particle inks and processes for forming solar cell components and for forming optical components
patent, March 2013

Hieslmair, Henry; Chiruvolu, Shivkumar; Du, Hui Bj
US Patent Document 8,399,878
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8399878