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Title: Method for forming diffusion regions in a silicon substrate

Abstract

A method of manufacturing solar cells is disclosed. The method comprises depositing an etch-resistant dopant material on a silicon substrate, the etch-resistant dopant material comprising a dopant source, forming a cross-linked matrix in the etch-resistant dopant material using a non-thermal cure of the etch-resistant dopant material, and heating the silicon substrate and the etch-resistant dopant material to a temperature sufficient to cause the dopant source to diffuse into the silicon substrate.

Inventors:
; ; ;
Issue Date:
Research Org.:
SunPower Corp., San Jose, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531803
Patent Number(s):
9018033
Application Number:
14/061,422
Assignee:
SunPower Corporation (San Jose, CA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
DOE Contract Number:  
FC36-07GO17043
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013-10-23
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY; 42 ENGINEERING

Citation Formats

Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, and Molesa, Steven Edward. Method for forming diffusion regions in a silicon substrate. United States: N. p., 2015. Web.
Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, & Molesa, Steven Edward. Method for forming diffusion regions in a silicon substrate. United States.
Wu, Kahn C., Kraft, Steven M., Loscutoff, Paul, and Molesa, Steven Edward. Tue . "Method for forming diffusion regions in a silicon substrate". United States. https://www.osti.gov/servlets/purl/1531803.
@article{osti_1531803,
title = {Method for forming diffusion regions in a silicon substrate},
author = {Wu, Kahn C. and Kraft, Steven M. and Loscutoff, Paul and Molesa, Steven Edward},
abstractNote = {A method of manufacturing solar cells is disclosed. The method comprises depositing an etch-resistant dopant material on a silicon substrate, the etch-resistant dopant material comprising a dopant source, forming a cross-linked matrix in the etch-resistant dopant material using a non-thermal cure of the etch-resistant dopant material, and heating the silicon substrate and the etch-resistant dopant material to a temperature sufficient to cause the dopant source to diffuse into the silicon substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {4}
}

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