Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas
Abstract
Embodiments of the invention generally relate to apparatus and methods for cleaning chamber components using a cleaning plate. The cleaning plate is adapted to be positioned on a substrate support during a cleaning process, and includes a plurality of turbulence-inducing structures. The turbulence-inducing structures induce a turbulent flow of cleaning gas while the cleaning plate is rotated during a cleaning process. The cleaning plate increases the retention time of the cleaning gas near the showerhead during cleaning. Additionally, the cleaning plate reduces concentration gradients within the cleaning plate to provide a more effective clean. The method includes positioning a cleaning plate adjacent to a showerhead, and introducing cleaning gas to the space between the showerhead and the cleaning plate. A material deposited on the surface of the showerhead is then heated and vaporized in the presence of the cleaning gas, and then exhausted from the processing chamber.
- Inventors:
- Issue Date:
- Research Org.:
- Applied Materials, Inc., Santa Clara, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531781
- Patent Number(s):
- 8910644
- Application Number:
- 13/041,230
- Assignee:
- Applied Materials, Inc. (Santa Clara, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B08 - CLEANING B08B - CLEANING IN GENERAL
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- EE0003331
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011-03-04
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 47 OTHER INSTRUMENTATION
Citation Formats
Chung, Hua, Dong, Xizi, Maung, Kyawwin Jason, Hanawa, Hiroji, Kang, Sang Won, Quach, David H., Olgado, Donald J. K., Bour, David, Hsu, Wei-Yung, Tam, Alexander, Chang, Anzhong, and Acharya, Sumedh. Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas. United States: N. p., 2014.
Web.
Chung, Hua, Dong, Xizi, Maung, Kyawwin Jason, Hanawa, Hiroji, Kang, Sang Won, Quach, David H., Olgado, Donald J. K., Bour, David, Hsu, Wei-Yung, Tam, Alexander, Chang, Anzhong, & Acharya, Sumedh. Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas. United States.
Chung, Hua, Dong, Xizi, Maung, Kyawwin Jason, Hanawa, Hiroji, Kang, Sang Won, Quach, David H., Olgado, Donald J. K., Bour, David, Hsu, Wei-Yung, Tam, Alexander, Chang, Anzhong, and Acharya, Sumedh. Tue .
"Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas". United States. https://www.osti.gov/servlets/purl/1531781.
@article{osti_1531781,
title = {Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas},
author = {Chung, Hua and Dong, Xizi and Maung, Kyawwin Jason and Hanawa, Hiroji and Kang, Sang Won and Quach, David H. and Olgado, Donald J. K. and Bour, David and Hsu, Wei-Yung and Tam, Alexander and Chang, Anzhong and Acharya, Sumedh},
abstractNote = {Embodiments of the invention generally relate to apparatus and methods for cleaning chamber components using a cleaning plate. The cleaning plate is adapted to be positioned on a substrate support during a cleaning process, and includes a plurality of turbulence-inducing structures. The turbulence-inducing structures induce a turbulent flow of cleaning gas while the cleaning plate is rotated during a cleaning process. The cleaning plate increases the retention time of the cleaning gas near the showerhead during cleaning. Additionally, the cleaning plate reduces concentration gradients within the cleaning plate to provide a more effective clean. The method includes positioning a cleaning plate adjacent to a showerhead, and introducing cleaning gas to the space between the showerhead and the cleaning plate. A material deposited on the surface of the showerhead is then heated and vaporized in the presence of the cleaning gas, and then exhausted from the processing chamber.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {12}
}
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