Method for reuse of wafers for growth of vertically-aligned wire arrays
Abstract
Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.
- Inventors:
- Issue Date:
- Research Org.:
- California Institute of Technology (CalTech), Pasadena, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531745
- Patent Number(s):
- 8222123
- Application Number:
- 13/053,090
- Assignee:
- California Institute of Technology (Pasadena, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- FG02-03ER15483
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011-03-21
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Spurgeon, Joshua M., Plass, Katherine E., Lewis, Nathan S., and Atwater, Harry A. Method for reuse of wafers for growth of vertically-aligned wire arrays. United States: N. p., 2012.
Web.
Spurgeon, Joshua M., Plass, Katherine E., Lewis, Nathan S., & Atwater, Harry A. Method for reuse of wafers for growth of vertically-aligned wire arrays. United States.
Spurgeon, Joshua M., Plass, Katherine E., Lewis, Nathan S., and Atwater, Harry A. Tue .
"Method for reuse of wafers for growth of vertically-aligned wire arrays". United States. https://www.osti.gov/servlets/purl/1531745.
@article{osti_1531745,
title = {Method for reuse of wafers for growth of vertically-aligned wire arrays},
author = {Spurgeon, Joshua M. and Plass, Katherine E. and Lewis, Nathan S. and Atwater, Harry A.},
abstractNote = {Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 17 00:00:00 EDT 2012},
month = {Tue Jul 17 00:00:00 EDT 2012}
}
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Works referenced in this record:
Techniques for use of nanotechnology in photovoltaics
patent, August 2011
- Guha, Supratik; Hamann, Hendrik F.; Tutuc, Emanuel
- US Patent Document 7,998,788
Works referencing / citing this record:
Light emitting diodes and substrates
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- Kitai, Adrian; Shen, Huaxiang
- US Patent Document 9,257,601