Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution
Abstract
An enhanced mechanical design for laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution is provided. A multiple parallelogram weak-link structure includes a predefined pattern of a plurality of perpendicularly arranged groups of connecting links, each link having at least one pair of weak-link connections. Each of the plurality of perpendicularly arranged groups includes a terminal for mounting to a fixed base. The multiple parallelogram weak-link structure includes a moving part for mounting on a carriage, providing precisely controlled movement with stability in one direction. A two-dimensional (2D) ultra-precision scanning stages assembly for x-ray nanoprobe applications includes multiple redundantly constrained weak-link structures, a vertical ultra-precision positioning stage, and a horizontal ultra-precision positioning stage.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531691
- Patent Number(s):
- 7994688
- Application Number:
- 12/233,228
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16H - GEARING
H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- DOE Contract Number:
- AC02-06CH11357; W-31-109-ENG-38
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2008-09-18
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Shu, Deming, and Maser, Jorg M. Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution. United States: N. p., 2011.
Web.
Shu, Deming, & Maser, Jorg M. Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution. United States.
Shu, Deming, and Maser, Jorg M. Tue .
"Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution". United States. https://www.osti.gov/servlets/purl/1531691.
@article{osti_1531691,
title = {Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution},
author = {Shu, Deming and Maser, Jorg M.},
abstractNote = {An enhanced mechanical design for laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution is provided. A multiple parallelogram weak-link structure includes a predefined pattern of a plurality of perpendicularly arranged groups of connecting links, each link having at least one pair of weak-link connections. Each of the plurality of perpendicularly arranged groups includes a terminal for mounting to a fixed base. The multiple parallelogram weak-link structure includes a moving part for mounting on a carriage, providing precisely controlled movement with stability in one direction. A two-dimensional (2D) ultra-precision scanning stages assembly for x-ray nanoprobe applications includes multiple redundantly constrained weak-link structures, a vertical ultra-precision positioning stage, and a horizontal ultra-precision positioning stage.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {8}
}