Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution

Shu, Deming; Maser, Jorg M.

Title: Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution

Abstract

An enhanced mechanical design for laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution is provided. A multiple parallelogram weak-link structure includes a predefined pattern of a plurality of perpendicularly arranged groups of connecting links, each link having at least one pair of weak-link connections. Each of the plurality of perpendicularly arranged groups includes a terminal for mounting to a fixed base. The multiple parallelogram weak-link structure includes a moving part for mounting on a carriage, providing precisely controlled movement with stability in one direction. A two-dimensional (2D) ultra-precision scanning stages assembly for x-ray nanoprobe applications includes multiple redundantly constrained weak-link structures, a vertical ultra-precision positioning stage, and a horizontal ultra-precision positioning stage.

Inventors:: Shu, Deming; Maser, Jorg M.

Issue Date:: 2011-08-09

Research Org.:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531691

Patent Number(s):: 7994688

Application Number:: 12/233,228

Assignee:: UChicago Argonne, LLC (Chicago, IL)

Patent Classifications (CPCs):: F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16H - GEARING

H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

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F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16H - GEARING
F16H21/04 - Guiding mechanisms, e.g. for straight-line guidance

H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
H02N2/04 - Constructional details

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/12326 - with provision for limited relative movement between components

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DOE Contract Number:: AC02-06CH11357; W-31-109-ENG-38

Resource Type:: Patent

Resource Relation:: Patent File Date: 2008-09-18

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Shu, Deming, and Maser, Jorg M. Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution.  United States: N. p., 2011. 
        Web.

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                    Shu, Deming, & Maser, Jorg M. Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution.  United States.

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                    Shu, Deming, and Maser, Jorg M. Tue .  
        "Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution".  United States.  https://www.osti.gov/servlets/purl/1531691.

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@article{osti_1531691,

  title        = {Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution},

  author       = {Shu, Deming and Maser, Jorg M.},

  abstractNote = {An enhanced mechanical design for laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution is provided. A multiple parallelogram weak-link structure includes a predefined pattern of a plurality of perpendicularly arranged groups of connecting links, each link having at least one pair of weak-link connections. Each of the plurality of perpendicularly arranged groups includes a terminal for mounting to a fixed base. The multiple parallelogram weak-link structure includes a moving part for mounting on a carriage, providing precisely controlled movement with stability in one direction. A two-dimensional (2D) ultra-precision scanning stages assembly for x-ray nanoprobe applications includes multiple redundantly constrained weak-link structures, a vertical ultra-precision positioning stage, and a horizontal ultra-precision positioning stage.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2011},

  month        = {8}

}

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Works referenced in this record:

Electrical to mechanical energy converter
patent, January 2011

Clingman, Dan; Gravatt, Lynn M.
US Patent Document 7,872,397
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7872397

Redundantly constrained laminar structure as weak-link mechanisms
patent, January 2006

Shu, Deming; Toellner, Thomas S.; Alp, E. Ercan
US Patent Document 6,984,335
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6984335

Piezoelectric actuator
patent, March 1987

Shibuya, Tsuyoshi
US Patent Document 4,647,808
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=4647808

Redundantly constrained laminar structure as weak-link mechanisms
patent, August 2003

Shu, Deming; Toellner, Thomas S.; Alp, E. Ercan
US Patent Document 6,607,840
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6607840

Scanning unit and scanning microscope having the same
patent, September 2003

Ando, Toshio; Toda, Akitoshi
US Patent Document 6,617,761
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6617761

Apparatus and process for optimizing work from a smart material actuator product
patent, July 2009

Moler, Jeff; Bugel, John A.; Thornhill, Keith A.
US Patent Document 7,564,171
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7564171

Microscopic area scanning apparatus
patent, August 2000

Honma, Katsunori; Muramatsu, Hiroshi; Chiba, Norio
US Patent Document 6,100,534
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6100534

Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument
patent, February 2008

Shu, Deming; Maser, Jorg M.; Lai, Barry
US Patent Document 7,331,714
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7331714

Works referencing / citing this record:

Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages
patent, February 2015

Shu, Deming; Kearney, Steven P.; Preissner, Curt A.
US Patent Document 8,957,567
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8957567

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Title: Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution

Abstract

Citation Formats

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