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Title: Method of making and structure of multilayer laue lens for focusing hard x-rays

Abstract

A zone plate multilayer structure includes a substrate carrying a plurality of alternating layers respectively formed of tungsten silicide (WSi2) and silicon (Si). The alternating layers are sequentially deposited precisely controlling a thickness of each layer from a minimum thickness of a first deposited layer adjacent the substrate to a maximum thickness of a last deposited layer. The first minimum thickness layer has a selected thickness of less than or equal to 5 nm with the thickness of the alternating layers monotonically increasing to provide a zone plate multilayer structure having a thickness of greater than 12 μm (microns). The x-rays are diffracted in Laue transmission geometry by the specific arrangement of silicon and tungsten silicide.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531570
Patent Number(s):
7440546
Application Number:
11/634,681
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Classifications (CPCs):
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
AC02-06CH11357; W-31-109-ENG-38
Resource Type:
Patent
Resource Relation:
Patent File Date: 2006-12-06
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Citation Formats

Liu, Chian Q., Conley, Raymond P., Macrander, Albert T., Kang, Hyon Chol, Stephenson, G. Brian, and Maser, Jorg. Method of making and structure of multilayer laue lens for focusing hard x-rays. United States: N. p., 2008. Web.
Liu, Chian Q., Conley, Raymond P., Macrander, Albert T., Kang, Hyon Chol, Stephenson, G. Brian, & Maser, Jorg. Method of making and structure of multilayer laue lens for focusing hard x-rays. United States.
Liu, Chian Q., Conley, Raymond P., Macrander, Albert T., Kang, Hyon Chol, Stephenson, G. Brian, and Maser, Jorg. Tue . "Method of making and structure of multilayer laue lens for focusing hard x-rays". United States. https://www.osti.gov/servlets/purl/1531570.
@article{osti_1531570,
title = {Method of making and structure of multilayer laue lens for focusing hard x-rays},
author = {Liu, Chian Q. and Conley, Raymond P. and Macrander, Albert T. and Kang, Hyon Chol and Stephenson, G. Brian and Maser, Jorg},
abstractNote = {A zone plate multilayer structure includes a substrate carrying a plurality of alternating layers respectively formed of tungsten silicide (WSi2) and silicon (Si). The alternating layers are sequentially deposited precisely controlling a thickness of each layer from a minimum thickness of a first deposited layer adjacent the substrate to a maximum thickness of a last deposited layer. The first minimum thickness layer has a selected thickness of less than or equal to 5 nm with the thickness of the alternating layers monotonically increasing to provide a zone plate multilayer structure having a thickness of greater than 12 μm (microns). The x-rays are diffracted in Laue transmission geometry by the specific arrangement of silicon and tungsten silicide.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {10}
}

Works referenced in this record:

Spherical mirror grazing incidence x-ray optics
patent, February 1997


Depth-graded multilayers for application in transmission geometry as linear zone plates
journal, December 2005


X-ray multilayer coatings for use at energies above 100 keV
conference, July 2000


Multilayer Laue lenses as high-resolution x-ray optics
conference, November 2004

  • Maser, Joerg; Stephenson, Gregory B.; Vogt, Stefan
  • Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings
  • https://doi.org/10.1117/12.560046

    Works referencing / citing this record:

    Method of producing a Fresnel Zone Plate for applications in high energy radiation
    patent, January 2018


    Compound X-ray lens having multiple aligned zone plates
    patent, September 2013


    Radiation beam collimation system and method
    patent, August 2015


    Multi-energy imaging system and method using optic devices
    patent, June 2010


    Compound x-ray lens having multiple aligned zone plates
    patent, May 2014