Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

Shu, Deming; Maser, Jorg M.; Lai, Barry; Vogt, Franz Stefan; Holt, Martin V.; Preissner, Curt A.; Winarski, Robert P.; Stephenson, Gregory B.

Title: Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

Abstract

A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.

Inventors:: Shu, Deming; Maser, Jorg M.; Lai, Barry; Vogt, Franz Stefan; Holt, Martin V.; Preissner, Curt A.; Winarski, Robert P.; Stephenson, Gregory B.

Issue Date:: 2008-02-19

Research Org.:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531548

Patent Number(s):: 7331714

Application Number:: 11/238,196

Assignee:: UChicago Argonne, LLC (Chicago, IL)

Patent Classifications (CPCs):: G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

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G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
G21K7/00 - Gamma- or X-ray microscopes

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N23/2252 - Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]

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DOE Contract Number:: W-31-109-ENG-38

Resource Type:: Patent

Resource Relation:: Patent File Date: 2005-09-29

Country of Publication:: United States

Language:: English

Citation Formats


                    Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., and Stephenson, Gregory B. Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument.  United States: N. p., 2008. 
        Web.

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                    Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., & Stephenson, Gregory B. Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument.  United States.

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                    Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., and Stephenson, Gregory B. Tue .  
        "Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument".  United States.  https://www.osti.gov/servlets/purl/1531548.

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@article{osti_1531548,

  title        = {Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument},

  author       = {Shu, Deming and Maser, Jorg M. and Lai, Barry and Vogt, Franz Stefan and Holt, Martin V. and Preissner, Curt A. and Winarski, Robert P. and Stephenson, Gregory B.},

  abstractNote = {A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2008},

  month        = {2}

}

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Works referenced in this record:

X-ray microscope
patent, September 1995

Iketaki, Yoshinori
US Patent Document 5,450,463
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5450463

Attachment of x-ray apparatus, high temperature attachment and x-ray apparatus
patent, June 2004

Dosho, Akihide
US Patent Document 6,748,048
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6748048

Nanometer focusing of hard x rays by phase zone plates
journal, May 1999

Yun, W.; Lai, B.; Cai, Z.
Review of Scientific Instruments, Vol. 70, Issue 5
https://doi.org/10.1063/1.1149744

Large stage system for scanning probe microscopes and other instruments
patent, September 1997

Park, Sang-Il; Smith, Ian R.; Kirk, Michael D.
US Patent Document 5,672,816
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5672816

Soft X-ray microscope
patent, July 1995

Nagai, Komei; Horikawa, Yoshiaki; Iketaki, Yoshinori
US Patent Document 5,434,901
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5434901

Combined x-ray analysis apparatus
patent, September 2004

Sato, Masao
US Patent Document 6,798,863
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6798863

Parallel x-ray nanotomography
patent, May 2002

Levine, Zachary H.; Turcu, I. Edmond
US Patent Document 6,389,101
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6389101

Development of x-ray nanodiffraction instrumentation for studies of individual nano-objects
journal, July 2005

Xiao, Yanan; Cai, Zhonghou; Lai, Barry
Nanotechnology, Vol. 16, Issue 9
https://doi.org/10.1088/0957-4484/16/9/057

X-ray microscope with zone plates
patent, December 2000

Schneider, Gerd
US Patent Document 6,167,112
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6167112

X-ray illumination optical system and x-ray reduction exposure apparatus
patent, January 2003

Miyake, Akira; Tsukamoto, Masami
US Patent Document 6,504,896
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6504896

Optical design for laser encoder resolution extension and angular measurement
patent, April 1999

Shu, Deming
US Patent Document 5,896,200
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5896200

Design for an X-ray Nanoprobe Prototype with a Sub-10-nm Positioning Requirement
conference, January 2004

Shu, D.
SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation, AIP Conference Proceedings
https://doi.org/10.1063/1.1758036

Diffraction-limited Microbeam with Fresnel Zone Plate Optics in Hard X-Ray Regions
journal, March 2001

Suzuki, Yoshio; Takeuchi, Akihisa; Takano, Hidekazu
Japanese Journal of Applied Physics, Vol. 40, Issue Part 1, No. 3A
https://doi.org/10.1143/JJAP.40.1508

Optical design for laser encoder resolution extension with three-dimensional motion decoupling
patent, November 2004

Shu, Deming
US Patent Document 6,822,733
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6822733

Robot-based automation system for cryogenic crystal sample mounting
patent-application, September 2004

Shu, Deming; Joachimiak, Andrzej
US Patent Application 10/807599; 20040187515
URL: http://appft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.html&r=1&f=G&l=50&s1=%2220040187515%22.PGNR.&OS=DN/20040187515&RS=DN/20040187515

Microscopic positioning device and tool position/orientation compensating method
patent, July 2005

Sawada, Kiyoshi; Ebihara, Kenzo; Sakaida, Yasuhiro
US Patent Document 6,920,696
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6920696

Redundantly constrained laminar structure as weak-link mechanisms
patent, August 2003

Shu, Deming; Toellner, Thomas S.; Alp, E. Ercan
US Patent Document 6,607,840
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6607840

X-ray optical apparatus
patent, June 1992

Nakamura, Hajime
US Patent Document 5,119,411
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5119411

Apparatus for measuring high frequency vibration, motion, or displacement
patent, February 1995

Wang, Charles P.
US Patent Document 5,394,233
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5394233

Works referencing / citing this record:

Optical module for X-ray microscope
patent, July 2015

Hwu, En-Te
US Patent Document 9,075,245
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=9075245

High precision detector robot arm system
patent, January 2017

Shu, Deming; Chu, Yong
US Patent Document 9,557,282
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=9557282

Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution
patent, August 2011

Shu, Deming; Maser, Jorg M.
US Patent Document 7,994,688
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7994688

Precision mechanical structure of an ultra-high-resolution spectrometer for inelastic X-ray scattering instrument
patent, April 2015

Shu, Deming; Shvydko, Yury; Stoupin, Stanislav A.
US Patent Document 9,008,272
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=9008272

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Similar Records

Title: Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

Abstract

Citation Formats

X-ray microscope patent, September 1995

Attachment of x-ray apparatus, high temperature attachment and x-ray apparatus patent, June 2004

Nanometer focusing of hard x rays by phase zone plates journal, May 1999

Large stage system for scanning probe microscopes and other instruments patent, September 1997

Soft X-ray microscope patent, July 1995

Combined x-ray analysis apparatus patent, September 2004

Parallel x-ray nanotomography patent, May 2002

Development of x-ray nanodiffraction instrumentation for studies of individual nano-objects journal, July 2005

X-ray microscope with zone plates patent, December 2000

X-ray illumination optical system and x-ray reduction exposure apparatus patent, January 2003

Optical design for laser encoder resolution extension and angular measurement patent, April 1999

Design for an X-ray Nanoprobe Prototype with a Sub-10-nm Positioning Requirement conference, January 2004

Diffraction-limited Microbeam with Fresnel Zone Plate Optics in Hard X-Ray Regions journal, March 2001

Optical design for laser encoder resolution extension with three-dimensional motion decoupling patent, November 2004

Robot-based automation system for cryogenic crystal sample mounting patent-application, September 2004

Microscopic positioning device and tool position/orientation compensating method patent, July 2005

Redundantly constrained laminar structure as weak-link mechanisms patent, August 2003

X-ray optical apparatus patent, June 1992

Apparatus for measuring high frequency vibration, motion, or displacement patent, February 1995

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patent, September 1995

Attachment of x-ray apparatus, high temperature attachment and x-ray apparatus
patent, June 2004

Nanometer focusing of hard x rays by phase zone plates
journal, May 1999

Large stage system for scanning probe microscopes and other instruments
patent, September 1997

Soft X-ray microscope
patent, July 1995

Combined x-ray analysis apparatus
patent, September 2004

Parallel x-ray nanotomography
patent, May 2002

Development of x-ray nanodiffraction instrumentation for studies of individual nano-objects
journal, July 2005

X-ray microscope with zone plates
patent, December 2000

X-ray illumination optical system and x-ray reduction exposure apparatus
patent, January 2003

Optical design for laser encoder resolution extension and angular measurement
patent, April 1999

Design for an X-ray Nanoprobe Prototype with a Sub-10-nm Positioning Requirement
conference, January 2004

Diffraction-limited Microbeam with Fresnel Zone Plate Optics in Hard X-Ray Regions
journal, March 2001

Optical design for laser encoder resolution extension with three-dimensional motion decoupling
patent, November 2004

Robot-based automation system for cryogenic crystal sample mounting
patent-application, September 2004

Microscopic positioning device and tool position/orientation compensating method
patent, July 2005

Redundantly constrained laminar structure as weak-link mechanisms
patent, August 2003

X-ray optical apparatus
patent, June 1992

Apparatus for measuring high frequency vibration, motion, or displacement
patent, February 1995

Optical module for X-ray microscope
patent, July 2015

High precision detector robot arm system
patent, January 2017

Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution
patent, August 2011

Precision mechanical structure of an ultra-high-resolution spectrometer for inelastic X-ray scattering instrument
patent, April 2015