Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument
Abstract
A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531548
- Patent Number(s):
- 7331714
- Application Number:
- 11/238,196
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- W-31-109-ENG-38
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2005-09-29
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., and Stephenson, Gregory B. Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument. United States: N. p., 2008.
Web.
Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., & Stephenson, Gregory B. Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument. United States.
Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., and Stephenson, Gregory B. Tue .
"Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument". United States. https://www.osti.gov/servlets/purl/1531548.
@article{osti_1531548,
title = {Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument},
author = {Shu, Deming and Maser, Jorg M. and Lai, Barry and Vogt, Franz Stefan and Holt, Martin V. and Preissner, Curt A. and Winarski, Robert P. and Stephenson, Gregory B.},
abstractNote = {A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {2}
}