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Title: Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

Abstract

A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
UChicago Argonne, LLC, Chicago, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531548
Patent Number(s):
7,331,714
Application Number:
11/238,196
Assignee:
UChicago Argonne, LLC (Chicago, IL)
DOE Contract Number:  
W-31-109-ENG-38
Resource Type:
Patent
Resource Relation:
Patent File Date: 2005-09-29
Country of Publication:
United States
Language:
English

Citation Formats

Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., and Stephenson, Gregory B. Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument. United States: N. p., 2008. Web.
Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., & Stephenson, Gregory B. Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument. United States.
Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., and Stephenson, Gregory B. Tue . "Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument". United States. https://www.osti.gov/servlets/purl/1531548.
@article{osti_1531548,
title = {Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument},
author = {Shu, Deming and Maser, Jorg M. and Lai, Barry and Vogt, Franz Stefan and Holt, Martin V. and Preissner, Curt A. and Winarski, Robert P. and Stephenson, Gregory B.},
abstractNote = {A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {2}
}

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Works referenced in this record:

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