Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

Title: Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

Abstract

A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.

Inventors:: Shu, Deming; Maser, Jorg M.; Lai, Barry; Vogt, Franz Stefan; Holt, Martin V.; Preissner, Curt A.; Winarski, Robert P.; Stephenson, Gregory B.

Issue Date:: 2008-02-19

Research Org.:: UChicago Argonne, LLC, Chicago, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531548

Patent Number(s):: 7,331,714

Application Number:: 11/238,196

Assignee:: UChicago Argonne, LLC (Chicago, IL)

DOE Contract Number:: W-31-109-ENG-38

Resource Type:: Patent

Resource Relation:: Patent File Date: 2005-09-29

Country of Publication:: United States

Language:: English

Citation Formats


                    Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., and Stephenson, Gregory B. Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument.  United States: N. p., 2008. 
        Web.

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                    Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., & Stephenson, Gregory B. Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument.  United States.

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                    Shu, Deming, Maser, Jorg M., Lai, Barry, Vogt, Franz Stefan, Holt, Martin V., Preissner, Curt A., Winarski, Robert P., and Stephenson, Gregory B. Tue .  
        "Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument".  United States.  https://www.osti.gov/servlets/purl/1531548.

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@article{osti_1531548,

  title        = {Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument},

  author       = {Shu, Deming and Maser, Jorg M. and Lai, Barry and Vogt, Franz Stefan and Holt, Martin V. and Preissner, Curt A. and Winarski, Robert P. and Stephenson, Gregory B.},

  abstractNote = {A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2008},

  month        = {2}

}

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Title: Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

Abstract

Citation Formats

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