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Title: Methods for forming composite coatings on MEMS devices

Abstract

The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.

Inventors:
Issue Date:
Research Org.:
MicroSurfaces, Inc., Minneapolis, MN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531525
Patent Number(s):
7201937
Application Number:
10/641,547
Assignee:
MicroSurfaces, Inc. (Minneapolis, MN)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B - PERFORMING OPERATIONS B05 - SPRAYING OR ATOMISING IN GENERAL B05D - PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
DOE Contract Number:  
BE-7471
Resource Type:
Patent
Resource Relation:
Patent File Date: 2003-08-15
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Zhu, Xiaoyang. Methods for forming composite coatings on MEMS devices. United States: N. p., 2007. Web.
Zhu, Xiaoyang. Methods for forming composite coatings on MEMS devices. United States.
Zhu, Xiaoyang. Tue . "Methods for forming composite coatings on MEMS devices". United States. https://www.osti.gov/servlets/purl/1531525.
@article{osti_1531525,
title = {Methods for forming composite coatings on MEMS devices},
author = {Zhu, Xiaoyang},
abstractNote = {The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {4}
}

Works referenced in this record:

Process for the photochemical vapor deposition of siloxane polymers
patent, November 1988


Method of applying a monolayer lubricant to micromachines
patent, April 1995


Methods of forming microstructure devices
patent, June 2003


Surface processes in MEMS technology
journal, January 1998


The Impact of Solution Agglomeration on the Deposition of Self-Assembled Monolayers
journal, October 2000


Adhesion hysteresis of silane coated microcantilevers
journal, December 2000