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Title: Methods for forming composite coatings on MEMS devices

Abstract

The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.

Inventors:
Issue Date:
Research Org.:
MicroSurfaces, Inc., Minneapolis, MN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531525
Patent Number(s):
7201937
Application Number:
10/641,547
Assignee:
MicroSurfaces, Inc. (Minneapolis, MN)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B05 - SPRAYING OR ATOMISING IN GENERAL B05D - PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
DOE Contract Number:  
BE-7471
Resource Type:
Patent
Resource Relation:
Patent File Date: 2003-08-15
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Zhu, Xiaoyang. Methods for forming composite coatings on MEMS devices. United States: N. p., 2007. Web.
Zhu, Xiaoyang. Methods for forming composite coatings on MEMS devices. United States.
Zhu, Xiaoyang. Tue . "Methods for forming composite coatings on MEMS devices". United States. https://www.osti.gov/servlets/purl/1531525.
@article{osti_1531525,
title = {Methods for forming composite coatings on MEMS devices},
author = {Zhu, Xiaoyang},
abstractNote = {The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {4}
}

Works referenced in this record:

Process for the photochemical vapor deposition of siloxane polymers
patent, November 1988


Method of applying a monolayer lubricant to micromachines
patent, April 1995


Method of coating micro-electromechanical devices
patent-application, February 2004


Methods of forming microstructure devices
patent, June 2003


The Impact of Solution Agglomeration on the Deposition of Self-Assembled Monolayers
journal, October 2000


Methods for forming coatings on MEMS devices
patent-application, April 2004


Adhesion hysteresis of silane coated microcantilevers
journal, December 2000


The influence of coating structure on micromachine stiction
journal, January 2001