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Title: Pulsed ion beam control of solid state features

Abstract

For controlling a physical dimension of a solid state structural feature, a solid state structure is provided, having a surface and having a structural feature. The structure is exposed to a first periodic flux of ions having a first exposure duty cycle characterized by a first ion exposure duration and a first nonexposure duration for the first duty cycle, and then at a second periodic flux of ions having a second exposure duty cycle characterized by a second ion exposure duration and a second nonexposure duration that is greater than the first nonexposure duration, for the second duty cycle, to cause transport, within the structure including the structure surface, of material of the structure to the structural feature in response to the ion flux exposure to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature.

Inventors:
; ;
Issue Date:
Research Org.:
Harvard Univ., Cambridge, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531515
Patent Number(s):
7118657
Application Number:
10/695,381
Assignee:
President and Fellows of Harvard College (Cambridge, MA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
F49620-01-1-0467; FG02-01ER45922; DMR-0073590
Resource Type:
Patent
Resource Relation:
Patent File Date: 2003-10-28
Country of Publication:
United States
Language:
English

Citation Formats

Golovchenko, Jene A., Stein, Derek M., and Li, Jiali. Pulsed ion beam control of solid state features. United States: N. p., 2006. Web.
Golovchenko, Jene A., Stein, Derek M., & Li, Jiali. Pulsed ion beam control of solid state features. United States.
Golovchenko, Jene A., Stein, Derek M., and Li, Jiali. Tue . "Pulsed ion beam control of solid state features". United States. https://www.osti.gov/servlets/purl/1531515.
@article{osti_1531515,
title = {Pulsed ion beam control of solid state features},
author = {Golovchenko, Jene A. and Stein, Derek M. and Li, Jiali},
abstractNote = {For controlling a physical dimension of a solid state structural feature, a solid state structure is provided, having a surface and having a structural feature. The structure is exposed to a first periodic flux of ions having a first exposure duty cycle characterized by a first ion exposure duration and a first nonexposure duration for the first duty cycle, and then at a second periodic flux of ions having a second exposure duty cycle characterized by a second ion exposure duration and a second nonexposure duration that is greater than the first nonexposure duration, for the second duty cycle, to cause transport, within the structure including the structure surface, of material of the structure to the structural feature in response to the ion flux exposure to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2006},
month = {10}
}

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  • Erlebacher, Jonah; Aziz, Michael J.; Chason, Eric
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 18, Issue 1
  • https://doi.org/10.1116/1.582127

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