Pulsed ion beam control of solid state features

Title: Pulsed ion beam control of solid state features

Abstract

For controlling a physical dimension of a solid state structural feature, a solid state structure is provided, having a surface and having a structural feature. The structure is exposed to a first periodic flux of ions having a first exposure duty cycle characterized by a first ion exposure duration and a first nonexposure duration for the first duty cycle, and then at a second periodic flux of ions having a second exposure duty cycle characterized by a second ion exposure duration and a second nonexposure duration that is greater than the first nonexposure duration, for the second duty cycle, to cause transport, within the structure including the structure surface, of material of the structure to the structural feature in response to the ion flux exposure to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature.

Inventors:: Golovchenko, Jene A.; Stein, Derek M.; Li, Jiali

Issue Date:: 2006-10-10

Research Org.:: Harvard College, Cambridge, MA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531515

Patent Number(s):: 7,118,657

Application Number:: 10/695,381

Assignee:: President and Fellows of Harvard College (Cambridge, MA)

DOE Contract Number:: F49620-01-1-0467; FG02-01ER45922; DMR-0073590

Resource Type:: Patent

Resource Relation:: Patent File Date: 2003-10-28

Country of Publication:: United States

Language:: English

Citation Formats


                    Golovchenko, Jene A., Stein, Derek M., and Li, Jiali. Pulsed ion beam control of solid state features.  United States: N. p., 2006. 
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                    Golovchenko, Jene A., Stein, Derek M., & Li, Jiali. Pulsed ion beam control of solid state features.  United States.

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                    Golovchenko, Jene A., Stein, Derek M., and Li, Jiali. Tue .  
        "Pulsed ion beam control of solid state features".  United States.  https://www.osti.gov/servlets/purl/1531515.

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@article{osti_1531515,

  title        = {Pulsed ion beam control of solid state features},

  author       = {Golovchenko, Jene A. and Stein, Derek M. and Li, Jiali},

  abstractNote = {For controlling a physical dimension of a solid state structural feature, a solid state structure is provided, having a surface and having a structural feature. The structure is exposed to a first periodic flux of ions having a first exposure duty cycle characterized by a first ion exposure duration and a first nonexposure duration for the first duty cycle, and then at a second periodic flux of ions having a second exposure duty cycle characterized by a second ion exposure duration and a second nonexposure duration that is greater than the first nonexposure duration, for the second duty cycle, to cause transport, within the structure including the structure surface, of material of the structure to the structural feature in response to the ion flux exposure to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2006},

  month        = {10}

}

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Dielectric high Q MEMS shell gyroscope structure
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URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=9599470

Method of fabrication an ultra-thin quartz resonator
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Chang, David T.; Kubena, Randall L.; Patterson, Pamela R.
US Patent Document 8,769,802
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8769802

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Title: Pulsed ion beam control of solid state features

Abstract

Citation Formats

Laser etching of semiconductors patent, January 1996

Self-assembled nanometer lithographic masks and templates and method for parallel fabrication of nanometer scale multi-device structures patent, March 1988

Method for determining etch depth patent, May 2002

Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same patent, June 1994

Use of focused ion and electron beams for fabricating a sensor on a probe tip used for scanning multiprobe microscopy and the like patent, November 1998

Molecular and atomic scale evaluation of biopolymers patent, September 2003

Microfabricated capsules for immunological isolation of cell transplants patent, April 1999

Subnanoscale composite, N2-permselective membrane for the separation of volatile organic compounds patent, August 1998

Sub-micron chemical imaging with near-field laser desorption patent, June 2000

Membrane filter and a method of manufacturing the same as well as a membrane patent, May 1998

Ellipsometric control of material growth patent, February 1992

Method of creating low resistance contacts in high aspect ratio openings by resputtering patent, August 2000

Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters patent, August 1998

Process for producing a structured mask patent, March 1999

Control of solid state dimensional features patent, October 2002

Control of solid state dimensional features patent, August 2004

Mask for ion, electron or X-ray lithography and method of making it patent, August 1989

Method for the manufacture of a membrane-containing microstructure patent, October 1999

Method of fabricatring sub-half-micron trenches and holes patent, May 1995

Measurement system and measurement method patent, December 1998

Si substrate and method of processing the same patent, February 1999

Dimension measurement of a semiconductor device patent, July 1998

Manufacturing unit for semiconductor devices patent, September 1993

Formation of a multi-nozzle ink jet patent, June 1984

Growth method by repeatedly measuring flux in MBE chamber patent, September 1996

Micromachined probes for nanometer scale measurements and methods of making such probes patent, October 1999

Method and apparatus for obtaining a precision thickness in semiconductor and other wafers patent, July 2002

Quartz-based nanoresonators and method of fabricating same patent, December 2008

Tagged-fragment map assembly patent, June 2013

Semiconductor manufacturing apparatus patent, November 2011

Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors patent, July 2018

Diamond nitrogen vacancy sensor with circuitry on diamond patent, November 2017

Magnetometer with a light emitting diode patent, November 2017

Resonator with a fluid cavity therein patent, November 2013

Method for fabricating quartz-based nanoresonators patent, July 2009

Multicapillary column for chromatography and sample preparation patent, June 2011

Rounded and curved integrated tethers for quartz resonators patent, June 2018

Thermal stress resistant resonator, and a method for fabricating same patent, December 2014

Apparatus and method for high sensitivity magnetometry measurement and signal processing in a magnetic detection system patent, January 2017

Multicapillary device for sample preparation patent, March 2015

Integrated quartz MEMS tuning fork resonator/oscillator patent, October 2018

Apparatus and method for hypersensitivity detection of magnetic field patent, November 2017

Energy efficient controlled magnetic field generator circuit patent, March 2017

Method for detecting defects in conductive materials based on differences in magnetic field characteristics measured along the conductive materials patent, October 2018

Devices and methods for determining the length of biopolymers and distances between probes bound thereto patent, January 2015

High bit-rate magnetic communication patent, December 2017

Diamond nitrogen vacancy sensed ferro-fluid hydrophone patent, October 2018

Assay methods using nicking endonucleases patent, September 2016

Material deposition techniques for control of solid state aperture surface properties patent, June 2012

Molecular characterization with carbon nanotube control patent, January 2012

Method for producing a disk resonator gyroscope patent, June 2015

Micro-scale piezoelectric resonating magnetometer patent, May 2018

Micro-vacancy center device patent, January 2019

Apparatus and method for recovery of three dimensional magnetic field from a magnetic detection system patent, December 2016

Devices and methods for determining the length of biopolymers and distances between probes bound thereto patent, August 2017

Magnetometer with light pipe patent, August 2017

Magnetometer with light pipe patent, November 2017

MEMS on-chip inertial navigation system with error correction patent, September 2013

Method for forming microscopic structures on a substrate patent, September 2012

Large area integration of quartz resonators with electronics patent, March 2012

Mapping and monitoring of hydraulic fractures using vector magnetometers patent, May 2017

Method of fabricating quartz resonators patent, May 2012

Apparatus and methods for analysis of biomolecules using high frequency alternating current excitation patent, March 2018

Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same patent, July 2014

Assay methods using nicking endonucleases patent, May 2014

Mapping and monitoring of hydraulic fractures using vector magnetometers patent, November 2017

Magnetic low-pass filter patent, July 2018

Magnetic navigation methods and systems utilizing power grid and communication network patent, November 2017

Resonator assembly comprising a silicon resonator and a quartz resonator patent, February 2016

Semiconductor device manufacturing method and ion implanter used therein patent, December 2009

DNV magnetic field detector patent, March 2018

DNV magnetic field detector patent, March 2018

Magnetometer with a light emitting diode patent, June 2018

Method of manufacturing MEMS based quartz hybrid filters patent, July 2014

Devices and methods for determining the length of biopolymers and distances between probes bound thereto patent, September 2012

Use of longitudinally displaced nanoscale electrodes for voltage sensing of biomolecules and other analytes in fluidic channels patent, November 2014

Device and method for manufacturing a particulate filter with regularly spaced micropores patent, March 2015

Laser etching of semiconductors
patent, January 1996

Self-assembled nanometer lithographic masks and templates and method for parallel fabrication of nanometer scale multi-device structures
patent, March 1988

Method for determining etch depth
patent, May 2002

Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same
patent, June 1994

Use of focused ion and electron beams for fabricating a sensor on a probe tip used for scanning multiprobe microscopy and the like
patent, November 1998

Molecular and atomic scale evaluation of biopolymers
patent, September 2003

Microfabricated capsules for immunological isolation of cell transplants
patent, April 1999

Subnanoscale composite, N2-permselective membrane for the separation of volatile organic compounds
patent, August 1998

Sub-micron chemical imaging with near-field laser desorption
patent, June 2000

Membrane filter and a method of manufacturing the same as well as a membrane
patent, May 1998

Ellipsometric control of material growth
patent, February 1992

Method of creating low resistance contacts in high aspect ratio openings by resputtering
patent, August 2000

Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
patent, August 1998

Process for producing a structured mask
patent, March 1999

Control of solid state dimensional features
patent, October 2002

Control of solid state dimensional features
patent, August 2004

Mask for ion, electron or X-ray lithography and method of making it
patent, August 1989

Method for the manufacture of a membrane-containing microstructure
patent, October 1999

Method of fabricatring sub-half-micron trenches and holes
patent, May 1995

Measurement system and measurement method
patent, December 1998

Si substrate and method of processing the same
patent, February 1999

Dimension measurement of a semiconductor device
patent, July 1998

Manufacturing unit for semiconductor devices
patent, September 1993

Formation of a multi-nozzle ink jet
patent, June 1984

Growth method by repeatedly measuring flux in MBE chamber
patent, September 1996

Micromachined probes for nanometer scale measurements and methods of making such probes
patent, October 1999

Method and apparatus for obtaining a precision thickness in semiconductor and other wafers
patent, July 2002

Quartz-based nanoresonators and method of fabricating same
patent, December 2008

Tagged-fragment map assembly
patent, June 2013

Semiconductor manufacturing apparatus
patent, November 2011

Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
patent, July 2018

Diamond nitrogen vacancy sensor with circuitry on diamond
patent, November 2017

Magnetometer with a light emitting diode
patent, November 2017

Resonator with a fluid cavity therein
patent, November 2013

Method for fabricating quartz-based nanoresonators
patent, July 2009

Multicapillary column for chromatography and sample preparation
patent, June 2011

Rounded and curved integrated tethers for quartz resonators
patent, June 2018

Thermal stress resistant resonator, and a method for fabricating same
patent, December 2014

Apparatus and method for high sensitivity magnetometry measurement and signal processing in a magnetic detection system
patent, January 2017

Multicapillary device for sample preparation
patent, March 2015

Integrated quartz MEMS tuning fork resonator/oscillator
patent, October 2018

Apparatus and method for hypersensitivity detection of magnetic field
patent, November 2017

Energy efficient controlled magnetic field generator circuit
patent, March 2017

Method for detecting defects in conductive materials based on differences in magnetic field characteristics measured along the conductive materials
patent, October 2018

Devices and methods for determining the length of biopolymers and distances between probes bound thereto
patent, January 2015

High bit-rate magnetic communication
patent, December 2017

Diamond nitrogen vacancy sensed ferro-fluid hydrophone
patent, October 2018

Assay methods using nicking endonucleases
patent, September 2016

Material deposition techniques for control of solid state aperture surface properties
patent, June 2012

Molecular characterization with carbon nanotube control
patent, January 2012

Method for producing a disk resonator gyroscope
patent, June 2015

Micro-scale piezoelectric resonating magnetometer
patent, May 2018

Micro-vacancy center device
patent, January 2019

Apparatus and method for recovery of three dimensional magnetic field from a magnetic detection system
patent, December 2016

Devices and methods for determining the length of biopolymers and distances between probes bound thereto
patent, August 2017

Magnetometer with light pipe
patent, August 2017

Magnetometer with light pipe
patent, November 2017

MEMS on-chip inertial navigation system with error correction
patent, September 2013

Method for forming microscopic structures on a substrate
patent, September 2012

Large area integration of quartz resonators with electronics
patent, March 2012

Mapping and monitoring of hydraulic fractures using vector magnetometers
patent, May 2017

Method of fabricating quartz resonators
patent, May 2012

Apparatus and methods for analysis of biomolecules using high frequency alternating current excitation
patent, March 2018

Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
patent, July 2014

Assay methods using nicking endonucleases
patent, May 2014

Mapping and monitoring of hydraulic fractures using vector magnetometers
patent, November 2017

Magnetic low-pass filter
patent, July 2018

Magnetic navigation methods and systems utilizing power grid and communication network
patent, November 2017

Resonator assembly comprising a silicon resonator and a quartz resonator
patent, February 2016

Semiconductor device manufacturing method and ion implanter used therein
patent, December 2009

DNV magnetic field detector
patent, March 2018

DNV magnetic field detector
patent, March 2018

Magnetometer with a light emitting diode
patent, June 2018

Method of manufacturing MEMS based quartz hybrid filters
patent, July 2014

Devices and methods for determining the length of biopolymers and distances between probes bound thereto
patent, September 2012

Use of longitudinally displaced nanoscale electrodes for voltage sensing of biomolecules and other analytes in fluidic channels
patent, November 2014

Device and method for manufacturing a particulate filter with regularly spaced micropores
patent, March 2015

Integrated quartz biological sensor and method
patent, February 2011

MEMS on-chip inertial navigation system with error correction
patent, April 2012

Higher magnetic sensitivity through fluorescence manipulation by phonon spectrum control
patent, December 2017