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Title: Control of solid state dimensional features

Abstract

A solid state structure having a surface is provided and exposed to a flux, F, of incident ions under conditions that are selected based on: ##EQU1## where C is concentration of mobile adatoms at structure surface, r is vector surface position, t is time, T.sub.1 is number of adatoms created per incident ion, D is adatom diffusivity, .tau..sub.trap is average lifetime of an adatom before adatom annihilation occurs at a structure surface defect characteristic of structure material, and .sigma..sub.C is cross-section for adatom annihilation by incident ions characteristic of selected ion exposure conditions. Ion exposure condition selection controls sputtering of the structure surface by incident ions to transport, within the structure including the structure surface, structure material to a feature location, in response to the ion flux exposure, to produce a feature substantially by locally adding structure material to the feature location.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Harvard Univ., Cambridge, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531479
Patent Number(s):
6783643
Application Number:
10/186,105
Assignee:
President and Fellows of Harvard College (Cambridge, MA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
FG02-01ER45922; FG02-89ER45401
Resource Type:
Patent
Resource Relation:
Patent File Date: 2002-06-27
Country of Publication:
United States
Language:
English

Citation Formats

Golovchenko, Jene A., Branton, Daniel, Aziz, Michael J., Li, Jiali, Stein, Derek M., and McMullan, Ciaran J. Control of solid state dimensional features. United States: N. p., 2004. Web.
Golovchenko, Jene A., Branton, Daniel, Aziz, Michael J., Li, Jiali, Stein, Derek M., & McMullan, Ciaran J. Control of solid state dimensional features. United States.
Golovchenko, Jene A., Branton, Daniel, Aziz, Michael J., Li, Jiali, Stein, Derek M., and McMullan, Ciaran J. Tue . "Control of solid state dimensional features". United States. https://www.osti.gov/servlets/purl/1531479.
@article{osti_1531479,
title = {Control of solid state dimensional features},
author = {Golovchenko, Jene A. and Branton, Daniel and Aziz, Michael J. and Li, Jiali and Stein, Derek M. and McMullan, Ciaran J.},
abstractNote = {A solid state structure having a surface is provided and exposed to a flux, F, of incident ions under conditions that are selected based on: ##EQU1## where C is concentration of mobile adatoms at structure surface, r is vector surface position, t is time, T.sub.1 is number of adatoms created per incident ion, D is adatom diffusivity, .tau..sub.trap is average lifetime of an adatom before adatom annihilation occurs at a structure surface defect characteristic of structure material, and .sigma..sub.C is cross-section for adatom annihilation by incident ions characteristic of selected ion exposure conditions. Ion exposure condition selection controls sputtering of the structure surface by incident ions to transport, within the structure including the structure surface, structure material to a feature location, in response to the ion flux exposure, to produce a feature substantially by locally adding structure material to the feature location.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {8}
}

Works referenced in this record:

Ion-beam sculpting at nanometre length scales
journal, July 2001


A new fabrication process for metallic point contacts
journal, February 1997


Nanofabrication using a stencil mask
journal, September 1999


Giant magnetoresistance of magnetic multilayer point contacts
journal, October 1999


Characterization of micromachined silicon membranes for immunoisolation and bioseparation applications
journal, July 1999


Fabrication of high aspect ratio structures for microchannel plates
journal, November 1995


Spontaneous Pattern Formation on Ion Bombarded Si(001)
journal, March 1999


Nonlinear amplitude evolution during spontaneous patterning of ion-bombarded Si(001)
journal, January 2000

  • Erlebacher, Jonah; Aziz, Michael J.; Chason, Eric
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 18, Issue 1
  • https://doi.org/10.1116/1.582127