Method for fabricating precision focusing X-ray collimators
Abstract
A method is provided for fabricating precision x-ray collimators including precision focusing x-ray collimators. Fabricating precision x-ray collimators includes the steps of using a substrate that is electrically conductive or coating a substrate with a layer of electrically conductive material, such as a metal. Then the substrate is coated with layer of x-ray resist. An intense radiation source, such as a synchrotron radiation source, is utilized for exposing the layer of x-ray resist with a pattern of x-ray. The pattern delineates a grid of apertures to collimate the x-rays. Exposed parts of the x-ray resist are removed. Regions of the removed x-ray resist are electroplated. Then remaining resist is optionally removed from the substrate. When exposing the layer of x-ray resist with a pattern of x-ray for non-focusing collimators, the substrate is maintained perpendicular to impinging x-rays from the synchrotron radiation source; and the substrate is scanned vertically. For precision focusing x-ray collimators, the substrate is scanned vertically in the z-direction while varying the angle of inclination of the substrate in a controlled way as a function of the position of the z-direction during the scan.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Chicago, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531447
- Patent Number(s):
- 6459771
- Application Number:
- 09/667,904
- Assignee:
- The University of Chicago (Chicago, IL)
- Patent Classifications (CPCs):
-
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
- DOE Contract Number:
- W-31-109-ENG-38
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2000-09-22
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 62 RADIOLOGY AND NUCLEAR MEDICINE; 42 ENGINEERING
Citation Formats
Mancini, Derrick C. Method for fabricating precision focusing X-ray collimators. United States: N. p., 2002.
Web.
Mancini, Derrick C. Method for fabricating precision focusing X-ray collimators. United States.
Mancini, Derrick C. Tue .
"Method for fabricating precision focusing X-ray collimators". United States. https://www.osti.gov/servlets/purl/1531447.
@article{osti_1531447,
title = {Method for fabricating precision focusing X-ray collimators},
author = {Mancini, Derrick C.},
abstractNote = {A method is provided for fabricating precision x-ray collimators including precision focusing x-ray collimators. Fabricating precision x-ray collimators includes the steps of using a substrate that is electrically conductive or coating a substrate with a layer of electrically conductive material, such as a metal. Then the substrate is coated with layer of x-ray resist. An intense radiation source, such as a synchrotron radiation source, is utilized for exposing the layer of x-ray resist with a pattern of x-ray. The pattern delineates a grid of apertures to collimate the x-rays. Exposed parts of the x-ray resist are removed. Regions of the removed x-ray resist are electroplated. Then remaining resist is optionally removed from the substrate. When exposing the layer of x-ray resist with a pattern of x-ray for non-focusing collimators, the substrate is maintained perpendicular to impinging x-rays from the synchrotron radiation source; and the substrate is scanned vertically. For precision focusing x-ray collimators, the substrate is scanned vertically in the z-direction while varying the angle of inclination of the substrate in a controlled way as a function of the position of the z-direction during the scan.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 01 00:00:00 EDT 2002},
month = {Tue Oct 01 00:00:00 EDT 2002}
}
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Works referencing / citing this record:
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- US Patent Document 6,987,836
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- Dobbs, John
- US Patent Document 6,807,252
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- US Patent Document 7,310,411
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patent, May 2008
- Souchay, Henri; Klausz, Remy; Bacher, Guillaume
- US Patent Document 7,368,151