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Title: Method for fabricating precision focusing X-ray collimators

Abstract

A method is provided for fabricating precision x-ray collimators including precision focusing x-ray collimators. Fabricating precision x-ray collimators includes the steps of using a substrate that is electrically conductive or coating a substrate with a layer of electrically conductive material, such as a metal. Then the substrate is coated with layer of x-ray resist. An intense radiation source, such as a synchrotron radiation source, is utilized for exposing the layer of x-ray resist with a pattern of x-ray. The pattern delineates a grid of apertures to collimate the x-rays. Exposed parts of the x-ray resist are removed. Regions of the removed x-ray resist are electroplated. Then remaining resist is optionally removed from the substrate. When exposing the layer of x-ray resist with a pattern of x-ray for non-focusing collimators, the substrate is maintained perpendicular to impinging x-rays from the synchrotron radiation source; and the substrate is scanned vertically. For precision focusing x-ray collimators, the substrate is scanned vertically in the z-direction while varying the angle of inclination of the substrate in a controlled way as a function of the position of the z-direction during the scan.

Inventors:
Issue Date:
Research Org.:
Univ. of Chicago, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531447
Patent Number(s):
6,459,771
Application Number:
09/667,904
Assignee:
The University of Chicago (Chicago, IL)
DOE Contract Number:  
W-31-109-ENG-38
Resource Type:
Patent
Resource Relation:
Patent File Date: 2000-09-22
Country of Publication:
United States
Language:
English
Subject:
62 RADIOLOGY AND NUCLEAR MEDICINE; 42 ENGINEERING

Citation Formats

Mancini, Derrick C. Method for fabricating precision focusing X-ray collimators. United States: N. p., 2002. Web.
Mancini, Derrick C. Method for fabricating precision focusing X-ray collimators. United States.
Mancini, Derrick C. Tue . "Method for fabricating precision focusing X-ray collimators". United States. https://www.osti.gov/servlets/purl/1531447.
@article{osti_1531447,
title = {Method for fabricating precision focusing X-ray collimators},
author = {Mancini, Derrick C.},
abstractNote = {A method is provided for fabricating precision x-ray collimators including precision focusing x-ray collimators. Fabricating precision x-ray collimators includes the steps of using a substrate that is electrically conductive or coating a substrate with a layer of electrically conductive material, such as a metal. Then the substrate is coated with layer of x-ray resist. An intense radiation source, such as a synchrotron radiation source, is utilized for exposing the layer of x-ray resist with a pattern of x-ray. The pattern delineates a grid of apertures to collimate the x-rays. Exposed parts of the x-ray resist are removed. Regions of the removed x-ray resist are electroplated. Then remaining resist is optionally removed from the substrate. When exposing the layer of x-ray resist with a pattern of x-ray for non-focusing collimators, the substrate is maintained perpendicular to impinging x-rays from the synchrotron radiation source; and the substrate is scanned vertically. For precision focusing x-ray collimators, the substrate is scanned vertically in the z-direction while varying the angle of inclination of the substrate in a controlled way as a function of the position of the z-direction during the scan.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {10}
}

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Works referenced in this record:

Laminate radiation collimator
patent, September 1981


X-ray collimator
patent, July 1993


Collimator and a method of producing a collimator for a scintillator
patent, March 1992


X-ray grid for medical radiography and method of making and using same
patent, August 1990


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    patent, December 2006


    Antiscattering grid and a method of manufacturing such a grid
    patent, May 2008