Off-line-locked laser diode species monitor system

Lee, Jamine; Goldstein, Neil; Richtsmeier, Steven; Bien, Fritz; Gersh, Michael

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Title: Off-line-locked laser diode species monitor system

Abstract

An off-line-locked laser diode species monitor system includes: reference means for including at least one known species having a first absorption wavelength; a laser source for irradiating the reference means and at least one sample species having a second absorption wavelength differing from the first absorption wavelength by a predetermined amount; means for locking the wavelength of the laser source to the first wavelength of the at least one known species in the reference means; a controller for defeating the means for locking and for displacing the laser source wavelength from said first absorption wavelength by said predetermined amount to the second absorption wavelength; and a sample detector device for determining laser radiation absorption at the second wavelength transmitted through the sample to detect the presence of the at least one sample species.

Inventors:: Lee, Jamine; Goldstein, Neil; Richtsmeier, Steven; Bien, Fritz; Gersh, Michael

Issue Date:: 1995-10-17

Research Org.:: Spectral Sciences Inc., Burlington, MA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531414

Patent Number(s):: 5459574

Application Number:: 08/324,101

Assignee:: Spectral Sciences, Inc. (Burlington, MA)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N2021/399 - {Diode laser}
G01N21/39 - using tunable lasers

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DOE Contract Number:: FG02-94ER81865

Resource Type:: Patent

Resource Relation:: Patent File Date: 1994-10-14

Country of Publication:: United States

Language:: English

Citation Formats


                    Lee, Jamine, Goldstein, Neil, Richtsmeier, Steven, Bien, Fritz, and Gersh, Michael. Off-line-locked laser diode species monitor system.  United States: N. p., 1995. 
        Web.

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                    Lee, Jamine, Goldstein, Neil, Richtsmeier, Steven, Bien, Fritz, & Gersh, Michael. Off-line-locked laser diode species monitor system.  United States.

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                    Lee, Jamine, Goldstein, Neil, Richtsmeier, Steven, Bien, Fritz, and Gersh, Michael. Tue .  
        "Off-line-locked laser diode species monitor system".  United States.  https://www.osti.gov/servlets/purl/1531414.

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@article{osti_1531414,

  title        = {Off-line-locked laser diode species monitor system},

  author       = {Lee, Jamine and Goldstein, Neil and Richtsmeier, Steven and Bien, Fritz and Gersh, Michael},

  abstractNote = {An off-line-locked laser diode species monitor system includes: reference means for including at least one known species having a first absorption wavelength; a laser source for irradiating the reference means and at least one sample species having a second absorption wavelength differing from the first absorption wavelength by a predetermined amount; means for locking the wavelength of the laser source to the first wavelength of the at least one known species in the reference means; a controller for defeating the means for locking and for displacing the laser source wavelength from said first absorption wavelength by said predetermined amount to the second absorption wavelength; and a sample detector device for determining laser radiation absorption at the second wavelength transmitted through the sample to detect the presence of the at least one sample species.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1995},

  month        = {10}

}

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Works referenced in this record:

System for measuring the concentration of a gaseous component by detecting positions of mode jumps in a laser diode
patent, April 1993

Koch, Edmund; Hagenah, Jens-Uwe; Maurer, Christoph
US Patent Document 5,202,560
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5202560

Gaseous species absorption monitor
patent, June 1991

Goldstein, Neil; Bien, Fritz; Bernstein, Lawrence S.
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Concentration detector
patent, September 1991

Wong, Jacob Y.
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Similar Records

Title: Off-line-locked laser diode species monitor system

Abstract

Citation Formats

System for measuring the concentration of a gaseous component by detecting positions of mode jumps in a laser diode patent, April 1993

Gaseous species absorption monitor patent, June 1991

Concentration detector patent, September 1991

Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use patent, October 1999

In-line cell for absorption spectroscopy patent, February 2001

Laser gas analyzer patent, June 2017

Method for stabilizing the wavelength in a laser spectrometer system patent, April 1998

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Method for measuring the concentration of a gas component in a measuring gas patent, January 2011

Remote gas detection apparatus having a microlaser patent, April 1999

Analytical system and method for analyzing nonlinear optical signals patent, June 2009

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Polygonal planar multipass cell, system and apparatus including same, and method of use patent, October 1998

Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use patent, November 2000

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Multi-harmonic inline reference cell for optical trace gas sensing patent, March 2015

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Method and system for sensitive detection of molecular species in a vacuum by harmonic detection spectroscopy patent, March 1999

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System for measuring the concentration of a gaseous component by detecting positions of mode jumps in a laser diode
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Gaseous species absorption monitor
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Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
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In-line cell for absorption spectroscopy
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Method for stabilizing the wavelength in a laser spectrometer system
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Method for measuring the concentration of a gas component in a measuring gas
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Remote gas detection apparatus having a microlaser
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Analytical system and method for analyzing nonlinear optical signals
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Apparatus for and method of analyzing carbon isotopes
patent, July 1999

Polygonal planar multipass cell, system and apparatus including same, and method of use
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Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
patent, November 2000

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Multi-harmonic inline reference cell for optical trace gas sensing
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