Compressive transmission microscopy
Abstract
Transmission microscopy imaging systems include a mask and/or other modulator situated to encode image beams, e.g., by deflecting the image beam with respect to the mask and/or sensor. The beam is modulated/masked either before or after transmission through a sample to induce a spatially and/or temporally encoded signal by modifying any of the beam/image components including the phase/coherence, intensity, or position of the beam at the sensor. For example, a mask can be placed/translated through the beam so that several masked beams are received by a sensor during a single sensor integration time. Images associated with multiple mask displacements are then used to reconstruct a video sequence using a compressive sensing method. Another example of masked modulation involves a mechanism for phase-retrieval, whereby the beam is modulated by a set of different masks in the image plane and each masked image is recorded in the diffraction plane.
- Inventors:
- Issue Date:
- Research Org.:
- Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1525019
- Patent Number(s):
- 10224175
- Application Number:
- 15/075,015
- Assignee:
- Battelle Memorial Institute (Richland, WA)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC05-76RL01830; FG02-03ER46057
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2016-03-18
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 42 ENGINEERING
Citation Formats
Stevens, Andrew J., Kovarik, Libor, Browning, Nigel D., Liyu, Andrey V., Yuan, Xin, and Carin, Lawrence. Compressive transmission microscopy. United States: N. p., 2019.
Web.
Stevens, Andrew J., Kovarik, Libor, Browning, Nigel D., Liyu, Andrey V., Yuan, Xin, & Carin, Lawrence. Compressive transmission microscopy. United States.
Stevens, Andrew J., Kovarik, Libor, Browning, Nigel D., Liyu, Andrey V., Yuan, Xin, and Carin, Lawrence. Tue .
"Compressive transmission microscopy". United States. https://www.osti.gov/servlets/purl/1525019.
@article{osti_1525019,
title = {Compressive transmission microscopy},
author = {Stevens, Andrew J. and Kovarik, Libor and Browning, Nigel D. and Liyu, Andrey V. and Yuan, Xin and Carin, Lawrence},
abstractNote = {Transmission microscopy imaging systems include a mask and/or other modulator situated to encode image beams, e.g., by deflecting the image beam with respect to the mask and/or sensor. The beam is modulated/masked either before or after transmission through a sample to induce a spatially and/or temporally encoded signal by modifying any of the beam/image components including the phase/coherence, intensity, or position of the beam at the sensor. For example, a mask can be placed/translated through the beam so that several masked beams are received by a sensor during a single sensor integration time. Images associated with multiple mask displacements are then used to reconstruct a video sequence using a compressive sensing method. Another example of masked modulation involves a mechanism for phase-retrieval, whereby the beam is modulated by a set of different masks in the image plane and each masked image is recorded in the diffraction plane.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {3}
}
Works referenced in this record:
Detector system for use with transmission electron microscope spectroscopy
patent, December 2012
- Luecken, Uwe; Schuurmans, Frank Jeroen Pieter; Kooijman, Cornelis Sander
- US Patent Document 8,334,512
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method
patent-application, May 2012
- Smilde, Hendrik; Bleeker, Arno; Warnaar, Patrick
- US Patent Application 13/294057; 20120123581
System for Improved Compressive Tomography and Method Therefor
patent-application, December 2015
- Brady, David Jones; Carin, Lawrence L.; Kaganovsky, Yan
- US Patent Application 14/764435; 20150351705
Methods and Devices for High Throughput Crystal Structure Analysis by Electron Diffraction
patent-application, September 2011
- Nicolopoulos, Stavros; Bultreys, Daniel; Rauch, Edgard
- US Patent Application 13/127455; 20110220796
Microfabricated High-Bandpass Foucault Aperture For Electron Microscopy
patent-application, April 2013
- Glaeser, Robert; Cambie, Rossana; Jin, Jian
- US Patent Application 13/708521; 20130099115
Phase-Shifting Mask of Method of Fabricating Same
patent-application, October 2008
- Lin, Cheng-Ming; Hsu, Boming
- US Patent Application 11/734163; 20080254376
Charging of a hole-free thin film phase plate
patent, July 2014
- Malac, Marek; Beleggia, Marco; Kawasaki, Masahiro
- US Patent Document 8,785,850
Calibration camera with spectral depth
patent, May 2012
- Meijer, Eduard Johannes; De Graaf, Jan; Verschuuren, Marcus Antonius
- US Patent Document 8,190,007
Scanning Transmission Electron Microscopy for Polymer Sequencing
patent-application, May 2013
- Own, Christopher; Andregg, William; Andregg, Michael
- US Patent Application 13/303121; 20130126729
Charged Particle Microscope With Special Aperture Plate
patent-application, April 2016
- Potocek, Pavel; van Laarhoven, Franciscus; Boughorbel, Faysal
- US Patent Application 14/884520; 20160111247
Phase plate and method of fabricating same
patent, September 2014
- Iijima, Hirofumi; Konyuba, Yuji
- US Patent Document 8,829,436
Device manufacture involving lithographic processing
patent, November 1993
- Berger, Steven; Gibson, John M.
- US Patent Document 5,258,246
Methods and apparatus to capture compressed images
patent, February 2012
- Dekel, Shai
- US Patent Document 8,125,549
Imaging a Sample in a TEM Equipped with a Phase Plate
patent-application, March 2014
- Buijsse, Bart; Moers, Marco Hugo Petrus; Danev, Radostin Stoyanov
- US Patent Application 14/015658; 20140061463
Method and apparatus for compressive domain filtering and interference cancellation
patent, May 2014
- Davenport, Mark A.; Boufounos, Petros; Baraniuk, Richard G.
- US Patent Document 8,725,784
TEM with Aberration Corrector and Phase Plate
patent-application, August 2009
- Tiemeijer, Peter Christian; De Jong, Alan Frank
- US Patent Application 12/370542; 20090200464
Scanning electron microscope
patent, May 2015
- Ogashiwa, Takeshi; Sato, Mitsugu; Konno, Mitsuru
- US Patent Document 9,040,911
Element mapping unit, scanning transmission electron microscope, and element mapping method
patent, April 2011
- Kaji, Kazutoshi; Ueda, Kazuhiro; Kimoto, Koji
- US Patent Document 7,928,376
Method for Compressive Sensing, Reconstruction, and Estimation of Ultra-Wideband Channels
patent-application, May 2014
- Muqaibel, Ali Hussein; Alkhodary, Mohammad Tamim
- US Patent Application 13/681340; 20140140375
Differential phase contrast scanning transmission electron microscope
patent, April 1991
- Tsuno, Katsushige; Inoue, Masao
- US Patent Document 5,004,918
Phase contrast electron microscope
patent-application, December 2007
- Benner, Gerd; Matijevic, Marko
- US Patent Application 11/717201; 20070284528
Beam Sensing
patent-application, July 2011
- Kyele, Nicholas Roberts; Van Silfhout, Roelof Gozewijn
- US Patent Application 13/003072; 20110168903
Method and Apparatus for Observing, Detecting and Correcting Periodic Structures in a Moving Web
patent, January 1972
- Langenbeck, Peter H.
- US Patent Document 3633037
Method of producing a stencil mask
patent, March 1995
- Hashimoto, Kazuhiko; Endo, Masayuki; Sasago, Masaru
- US Patent Document 5,401,932
Method of forming a semiconductor device utilizing lithographic mask and mask therefor
patent, September 2000
- Dauksher, William J.; Mangat, Pawitter; Huston, Roy Allen
- US Patent Document 6,124,063
Methods for Achieving High Resolution Microfluoroscopy
patent-application, October 2005
- Hirsch, Gregory
- US Patent Application 11/095085; 20050220266
Aberration-Correcting Dark-Field Electron Microscopy
patent-application, August 2011
- Own, Christopher Su-Yan; Dabrowski, Paul John
- US Patent Application 13/024961; 20110192976
Apparatus and method of pattern detection based on a scanning transmission electron microscope
patent, September 1991
- Koshishiba, Hiroya; Fushimi, Satoru; Nakagawa, Yasuo
- US Patent Document 5,051,585
Scanning interference electron microscopy
patent, March 1994
- Ichikawa, Masakazu; Yajima, Yusuke; Takeshita, Masatoshi
- US Patent Document 5,298,747
High-speed multiframe dynamic transmission electron microscope image acquisition system with arbitrary timing
patent, October 2015
- Reed, Bryan W.; DeHope, William J.; Huete, Glenn
- US Patent Document 9,165,743
Mathematical image assembly in a scanning-type microscope
patent, April 2017
- Poto{hacek over (c.)}ek, Pavel; Kooijman, Cornelis Sander; Slingerland, Hendrik Nicolaas
- US Patent Document 9,620,330
Mathmatical Image Assembly in a Scanning-Type Microscope
patent-application, December 2015
- Potocek, Pavel; Kooijman, Cornelis Sander; Slingerland, Hendrik Nicolaas
- US Patent Application 14/743780; 20150371815
Compressive sampling for multimedia coding
patent, October 2013
- Tian, Jun; Cao, Dong; Yu, Hong Heather
- US Patent Document 8,553,994
Test Method of Mask for Electron-Beam Exposure and Method of Electron-Beam Exposure
patent-application, December 2001
- Yamashita, Hiroshi
- US Patent Application 09/870219; 20010054697
Compressive Transmission Microscopy
patent-application, September 2016
- Stevens, Andrew J.; Kovarik, Libor; Browning, Nigel D.
- US Patent Application 15/075015; 20160276129
Testing method for semiconductor device, testing apparatus therefor, and semiconductor device suitable for the test
patent, December 2008
- Nishiumi, Toshiya; Ando, Koki
- US Patent Document 7,465,923
Phase Plate
patent-application, August 2013
- Blackburn, Arthur
- US Patent Application 13/726260; 20130193322
Transmission Electron Microscope Provided with Electronic Spectroscope
patent-application, August 2008
- Terada, Shohei; Taniguchi, Yoshifumi
- US Patent Application 12/024357; 20080203296
Ponderomotive phase plate for transmission electron microscopes
patent, July 2012
- Reed, Bryan W.
- US Patent Document 8,217,352
System and method for compressive scanning electron microscopy
patent, January 2015
- Reed, Bryan W.
- US Patent Document 8,933,401
On-Chip Thin Film Zernike Phase Plate and Applications Thereof
patent-application, June 2014
- Shiue, Yunn-Shin; Kuo, Pai-Chia; Chen, Chih-Ting
- US Patent Application 14/107162; 20140166880
Electron lithography using a photocathode
patent, March 1995
- Brandes, George R.; Platzman, Philip Moss
- US Patent Document 5,395,738
Projecting type charged particle microscope and projecting type substrate inspection system
patent, October 2001
- Todokoro, Hideo; Ishitani, Tohru; Usami, Yasutsugu
- US Patent Document 6,310,341
Electron beam drawing mask blank, electron beam drawing mask, and method of manufacturing the same
patent, November 2004
- Amemiya, Isao
- US Patent Document 6,812,473
Scanning Transmission Electron Microscope and Scanning Transmission Electron Microscopy
patent-application, October 2007
- Tsuneta, Ruriko; Koguchi, Masanari; Hashimoto, Takahito
- US Patent Application 11/806120; 20070228277
Phase Contrast Imaging Using Patterned Illumination/Detector and Phase Mask
patent-application, February 2015
- Holzner, Christian; Feser, Michael
- US Patent Application 14/464954; 20150055745
Apparatuses And Methods For Three-Dimensional Imaging Of An Object
patent-application, October 2016
- Shechtman, Yoav; Moerner, William
- US Patent Application 15/096122; 20160301915
Apparatus and method for acquiring light field data using variable modulator
patent, February 2014
- Kang, Joo-young; Ok, Hyun-wook; Lee, Seong-deok
- US Patent Document 8,648,955
Compressive sensor array system and method
patent, November 2010
- Dudgeon, Dan E.; Laska, Jason N.; Myers, Cory S.
- US Patent Document 7,834,795
TEM Phase Contrast Imaging With Image Plane Phase Grating
patent-application, January 2017
- Stevens, Andrew; Kovarik, Libor; Browning, Nigel
- US Patent Application 15/286502; 20170025247
Fast electron microscopy via compressive sensing
patent, December 2014
- Larson, Kurt W.; Anderson, Hyrum; Wheeler, Jason W.
- US Patent Document 8,907,280
Method, Device and System for Measuring Nanoscale Deformations
patent-application, October 2010
- Hytch, Martin; Houdellier, Florent; Hue, Florian
- US Patent Application 12/680078; 20100252735
Transmission Electron Microscope
patent-application, September 2011
- Benner, Gerd
- US Patent Application 13/036757; 20110210249
Temporal Compressive Sensing Systems
patent-application, May 2017
- Reed, Bryan
- US Patent Application 15/243235; 20170146787
Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus
patent, November 2010
- Yakushevska, Alevtyna; Sourty, Erwan; Luecken, Uwe
- US Patent Document 7,825,378
Incoherent transmission electron microscopy
patent, June 2014
- Own, Christopher Su-Yan; Bleloch, Andrew; Andregg, William
- US Patent Document 8,748,818
Method and Apparatus for Compressive Imaging Device
patent-application, October 2006
- Baraniuk, Richard G.; Baron, Dror Z.; Duarte, Marco F.
- US Patent Application 11/379688; 20060239336
Lens system for phase plate for transmission electron microscope and transmission electron microscope
patent-application, October 2002
- Hosokawa, Fumio; Nagayama, Kuniaki; Danev, Radostin
- US Patent Application 10/071881; 20020148962
Method of using a phase plate in a transmission electron microscope
patent, September 2015
- Buijsse, Bart; Danev, Radostin Stoyanov
- US Patent Document 9,129,774
Scanning interference electron microscope
patent, August 2008
- Matsumoto, Takao; Koguchi, Masanari
- US Patent Document 7,417,227
Sparse Sampling And Reconstruction For Electron And Scanning Probe Microscope Imaging
patent-application, March 2015
- Anderson, Hyrum; Helms, Jovana; Wheeler, Jason
- US Patent Application 14/482754; 20150069233
Detector System for Use with Transmission Electron Microscope Spectroscopy
patent-application, March 2012
- Luecken, Uwe; Kooijman, Cornelis; Schuurmans, Frank
- US Patent Application 13/217013; 20120049060
Phase Plate And Electron Microscope
patent-application, August 2014
- Tamaki, Hirokazu; Takahashi, Yoshio; Kasai, Hiroto
- US Patent Application 14/129261; 20140224988
Observation apparatus and observation method using an electron beam
patent-application, January 2003
- Koguchi, Masanari; Nakamura, Kuniyasu; Umemura, Kaoru
- US Patent Application 10/183157; 20030006373
Scanning Electron Microscope And Scanning Transmission Electron Microscope
patent-application, May 2014
- Inada, Hiromi; Nakamura, Kuniyasu
- US Patent Application 14/232526; 20140138542
Method Of Examining A Sample In A Charged-Particle Microscope
patent-application, August 2015
- Lazic, Ivan; Bosch, Eric; Boughorbel, Faysal
- US Patent Application 14/629387; 20150243474
High-resolution amplitude contrast imaging
patent, August 2016
- Van Dyck, Dirk; Lucken, Uwe; Stark, Holger
- US Patent Document 9,412,558