Method for fabricating superconducting devices using a focused ion beam

Title: Method for fabricating superconducting devices using a focused ion beam

Abstract

Nano-scale junctions, wires, and junction arrays are created by using a focused high-energy ion beam to direct-write insulating or poorly conducting barriers into thin films of materials that are sensitive to disorder, including superconductors, ferromagnetic materials and semiconductors.

Inventors:: Cybart, Shane A.; Cho, Ethan Y.; Dynes, Robert C.; Wong, Travis J.

Issue Date:: 2019-03-05

Research Org.:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1525016

Patent Number(s):: 10,224,475

Application Number:: 15/317,101

Assignee:: The Regents of the University of California (Oakland, CA)

DOE Contract Number:: AC02-05CH11231

Resource Type:: Patent

Resource Relation:: Patent File Date: 2015-06-11

Country of Publication:: United States

Language:: English

Subject:: 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 42 ENGINEERING

Citation Formats


                    Cybart, Shane A., Cho, Ethan Y., Dynes, Robert C., and Wong, Travis J. Method for fabricating superconducting devices using a focused ion beam.  United States: N. p., 2019. 
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                    Cybart, Shane A., Cho, Ethan Y., Dynes, Robert C., & Wong, Travis J. Method for fabricating superconducting devices using a focused ion beam.  United States.

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                    Cybart, Shane A., Cho, Ethan Y., Dynes, Robert C., and Wong, Travis J. Tue .  
        "Method for fabricating superconducting devices using a focused ion beam".  United States.  https://www.osti.gov/servlets/purl/1525016.

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@article{osti_1525016,

  title        = {Method for fabricating superconducting devices using a focused ion beam},

  author       = {Cybart, Shane A. and Cho, Ethan Y. and Dynes, Robert C. and Wong, Travis J.},

  abstractNote = {Nano-scale junctions, wires, and junction arrays are created by using a focused high-energy ion beam to direct-write insulating or poorly conducting barriers into thin films of materials that are sensitive to disorder, including superconductors, ferromagnetic materials and semiconductors.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {3}

}

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Similar Records

Title: Method for fabricating superconducting devices using a focused ion beam

Abstract

Citation Formats

Method for making a superconductor device patent, January 2006

Josephson junction patent, May 1995

Superconductor-insulator-superconductor Josephson tunnel junction and method therefor patent, September 1998

Method for fabrication of high aspect ratio trenches and formation of nanoscale features therefrom patent, May 2017

Superconducting device having an thin superconducting channel formed of oxide superconducting material patent, May 1995

Superconducting weak link device patent, April 1992

Ion beam lithography system patent, August 2005

Superconducting magnetoresistive element having a plurality of weak-coupling portions and a method of fabricating the same patent, August 1996

Method of reducing critical current density of oxide superconductors by radiation damage patent, October 1991

High temperature superconducting Josephson device and method for manufacturing the same patent, December 1998

Devices using high T.sub.c superconductors patent, June 1991

Method for forming Josephson junction devices by radiation patent, July 1993

Method for making a superconductor device
patent, January 2006

Josephson junction
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Superconductor-insulator-superconductor Josephson tunnel junction and method therefor
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Method for fabrication of high aspect ratio trenches and formation of nanoscale features therefrom
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Superconducting device having an thin superconducting channel formed of oxide superconducting material
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Superconducting weak link device
patent, April 1992

Ion beam lithography system
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Superconducting magnetoresistive element having a plurality of weak-coupling portions and a method of fabricating the same
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Method of reducing critical current density of oxide superconductors by radiation damage
patent, October 1991

High temperature superconducting Josephson device and method for manufacturing the same
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