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Title: Method for fabricating superconducting devices using a focused ion beam

Abstract

Nano-scale junctions, wires, and junction arrays are created by using a focused high-energy ion beam to direct-write insulating or poorly conducting barriers into thin films of materials that are sensitive to disorder, including superconductors, ferromagnetic materials and semiconductors.

Inventors:
; ; ;
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1525016
Patent Number(s):
10,224,475
Application Number:
15/317,101
Assignee:
The Regents of the University of California (Oakland, CA)
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015-06-11
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 42 ENGINEERING

Citation Formats

Cybart, Shane A., Cho, Ethan Y., Dynes, Robert C., and Wong, Travis J. Method for fabricating superconducting devices using a focused ion beam. United States: N. p., 2019. Web.
Cybart, Shane A., Cho, Ethan Y., Dynes, Robert C., & Wong, Travis J. Method for fabricating superconducting devices using a focused ion beam. United States.
Cybart, Shane A., Cho, Ethan Y., Dynes, Robert C., and Wong, Travis J. Tue . "Method for fabricating superconducting devices using a focused ion beam". United States. https://www.osti.gov/servlets/purl/1525016.
@article{osti_1525016,
title = {Method for fabricating superconducting devices using a focused ion beam},
author = {Cybart, Shane A. and Cho, Ethan Y. and Dynes, Robert C. and Wong, Travis J.},
abstractNote = {Nano-scale junctions, wires, and junction arrays are created by using a focused high-energy ion beam to direct-write insulating or poorly conducting barriers into thin films of materials that are sensitive to disorder, including superconductors, ferromagnetic materials and semiconductors.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {3}
}

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Works referenced in this record:

Method for making a superconductor device
patent, January 2006


Josephson junction
patent, May 1995


Superconducting weak link device
patent, April 1992


Ion beam lithography system
patent, August 2005


Devices using high T.sub.c superconductors
patent, June 1991


Method for forming Josephson junction devices by radiation
patent, July 1993