Electrodeposition processes for magnetostrictive resonators
Abstract
The present invention relates to magnetoelastic resonators, sensors, and tunable devices, as well as methods for making such components. The resonators can be used as tags and/or sensors. In general, the resonators include one or more micron-sized resonator portions affixed on a substrate. For use as a tag, each tag includes a plurality of resonator portions that allow for multiplexed coding, and methods for making tags and arrays of such tags include use of electrodeposition processes. In particular embodiments, these components include an electrodeposited material that exhibits magnetostrictive properties.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1524995
- Patent Number(s):
- 10215648
- Application Number:
- 15/996,147
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS
G - PHYSICS G01 - MEASURING G01K - MEASURING TEMPERATURE
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2018-06-01
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Citation Formats
Pillars, Jamin Ryan, Langlois, Eric, Arrington, Christian Lew, and Monson, Todd. Electrodeposition processes for magnetostrictive resonators. United States: N. p., 2019.
Web.
Pillars, Jamin Ryan, Langlois, Eric, Arrington, Christian Lew, & Monson, Todd. Electrodeposition processes for magnetostrictive resonators. United States.
Pillars, Jamin Ryan, Langlois, Eric, Arrington, Christian Lew, and Monson, Todd. Tue .
"Electrodeposition processes for magnetostrictive resonators". United States. https://www.osti.gov/servlets/purl/1524995.
@article{osti_1524995,
title = {Electrodeposition processes for magnetostrictive resonators},
author = {Pillars, Jamin Ryan and Langlois, Eric and Arrington, Christian Lew and Monson, Todd},
abstractNote = {The present invention relates to magnetoelastic resonators, sensors, and tunable devices, as well as methods for making such components. The resonators can be used as tags and/or sensors. In general, the resonators include one or more micron-sized resonator portions affixed on a substrate. For use as a tag, each tag includes a plurality of resonator portions that allow for multiplexed coding, and methods for making tags and arrays of such tags include use of electrodeposition processes. In particular embodiments, these components include an electrodeposited material that exhibits magnetostrictive properties.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {2}
}
Works referenced in this record:
Phase-Field Models for Microstructure Evolution
journal, August 2002
- Chen, Long-Qing
- Annual Review of Materials Research, Vol. 32, Issue 1
Electroless Cobalt Alloy Deposition Process
patent-application, July 2005
- Fang, Hongbin; Emami, Ramin; Weidman, Timothy
- US Patent Application 10/970839; 20050161338
Method and device in magnetostrictive motion systems
patent, May 1994
- Kiesewetter, Lothar; Olsson, Fredy; Tyren, Carl
- US Patent Document 5,317,223
Method and device for remote sensing of objects
patent, November 1996
- Tyren, Carl; Persson, Leif
- US Patent Document 5,576,693
Ultrasoft and High Magnetic Moment NiFe Film Electrodeposited From a Cu$^2+$Contained Solution
journal, October 2006
- Zong, B. Y.; Han, G. C.; Zheng, Y. K.
- IEEE Transactions on Magnetics, Vol. 42, Issue 10, p. 2775-2777
Electrodeposition and characterization of magnetostrictive galfenol (FeGa) thin films for use in microelectromechanical systems
journal, May 2013
- Estrine, Eliot C.; Robbins, William P.; Maqableh, Mazin M.
- Journal of Applied Physics, Vol. 113, Issue 17
Method for measuring position and angle
patent, September 1996
- Tyren, Carl; Persson, Leif
- US Patent Document 5,551,158
The effect of Fe3+ on magnetic moment of electrodeposited CoFe alloys—Experimental study and analytical model
journal, August 2008
- Brankovic, Stanko R.; Bae, Sang-Eun; Litvinov, Dmitri
- Electrochimica Acta, Vol. 53, Issue 20, p. 5934-5940
Time domain characterization of oscillating sensors: Application of frequency counting to resonance frequency determination
journal, December 2002
- Zeng, Kefeng; Ong, Keat G.; Mungle, Casey
- Review of Scientific Instruments, Vol. 73, Issue 12
The effect of magnetic fields on the electrodeposition of CoFe alloys
journal, January 2009
- Koza, J. A.; Uhlemann, M.; Gebert, A.
- Magnetohydrodynamics, Vol. 45, Issue 2
The effect of magnetic field on the electrodeposition of CoFe alloys
journal, July 2009
- Koza, Jakub Adam; Uhlemann, Margitta; Mickel, Christine
- Journal of Magnetism and Magnetic Materials, Vol. 321, Issue 14, p. 2265-2268
Anisotropy and Magnetostriction of Some Ferrites
journal, September 1955
- Bozorth, R. M.; Tilden, Elizabeth F.; Williams, Albert J.
- Physical Review, Vol. 99, Issue 6
Apparatus for detecting magnetostrictive resonator and traffic system
patent, August 2000
- Tanji, Yoshihiko; Yoshioka, Toshihiro
- US Patent Document 6,100,821
Giant magnetostrictive thin film materials and applications
journal, August 1997
- Quandt, E.
- Journal of Alloys and Compounds, Vol. 258, Issue 1-2, p. 126-132
Label including amorphous tape with improved properties
patent, November 1999
- Tyren, Carl
- US Patent Document 5,990,792
Electrodeposition of high moment cobalt iron
patent, July 1988
- Liao, Simon; Tolman, Charles H.
- US Patent Document 4,756,816
Method and device for coding electronic labels
patent, January 2000
- Tyren, Carl
- US Patent Document 6,018,297
Laminated Electronic Component and Method for Manufacturing the Same
patent-application, September 2010
- Kunishi, Tatsuo; Takano, Yoshihiko; Kuroda, Shigeyuki
- US Patent Application 12/796688; 20100243133
Theory, Instrumentation and Applications of Magnetoelastic Resonance Sensors: A Review
journal, March 2011
- Grimes, Craig A.; Roy, Somnath C.; Rani, Sanju
- Sensors, Vol. 11, Issue 3, p. 2809-2844
Optically transduced MEMS magnetometer
patent, March 2014
- Nielson, Gregory N.; Langlois, Eric
- US Patent Document 8,674,689
Piezomagnetic and elastic properties of metallic glass alloys Fe 6 7 CO 1 8 B 1 4 Si 1 and Fe 8 1 B 13.5 Si 3.5 C 2
journal, November 1983
- Meeks, Steven W.; Hill, J. Clifton
- Journal of Applied Physics, Vol. 54, Issue 11
The role of cobalt ferrite magnetic nanoparticles in medical science
journal, January 2013
- Amiri, S.; Shokrollahi, H.
- Materials Science and Engineering: C, Vol. 33, Issue 1, p. 1-8
Method for differentiation of substances
patent, April 2013
- Tyren, Carl; Ahlmen, Jarl
- US Patent Document 8,414,772
Micro-electromechanical voltage tunable capacitor and and filter devices
patent, April 2011
- Ayazi, Farrokh; Raieszadeh, Mina
- US Patent Document 7,933,112
MEMS-Based Variable Capacitor
patent-application, August 2004
- Huff, Michael A.
- US Patent Application 10/716866; 20040150939
Strain detector
patent, May 1994
- Hayashi, Kiyoshi; Ootera, Susumu; Sato, Hirosh
- US Patent Document 5,313,845
Wireless Magnetoelastic Resonance Sensors: A Critical Review
journal, July 2002
- Grimes, Craig; Mungle, Casey; Zeng, Kefeng
- Sensors, Vol. 2, Issue 7, p. 294-313
Magnetic devices
patent, October 1990
- Pettigrew, Robert M.; Chambers, Stephen; Davies, Dafydd G.
- US Patent Document 4,960,651
Selective Electrodeposition of Micropatterns on Predefined Surface Defects on p-Si(100)
journal, January 2001
- Schmuki, P.; Erickson, L. E.; Champion, G.
- Journal of The Electrochemical Society, Vol. 148, Issue 3
Electrodeposition of cobalt-iron alloys in pulsed current from electrolytes containing organic additives
journal, July 2005
- Lallemand, F.; Ricq, L.; Deschaseaux, E.
- Surface and Coatings Technology, Vol. 197, Issue 1, p. 10-17
Method and device for electronic identification
patent, September 1996
- Tyren, Carl; Persson, Leif
- US Patent Document 5,557,085
Magnetoelastic sensor for characterizing properties of thin-film/coatings
patent, February 2004
- Bachas, Leonidas G.; Barrett, Gary; Grimes, Craig A.
- US Patent Document 6,688,162
Continuously tunable RF MEMS capacitor with ultra-wide tuning range
patent, March 2008
- Hsu, Tsung-Yuan; Chang, David T.
- US Patent Document 7,345,866
Facile synthesis and electromagnetic wave absorption properties of magnetic carbon fiber coated with Fe–Co alloy by electroplating
journal, April 2011
- Wang, Lei; He, Fang; Wan, Yizao
- Journal of Alloys and Compounds, Vol. 509, Issue 14, p. 4726-4730
Multilayer Build Processes and Devices Thereof
patent-application, December 2013
- Sherrar, David
- US Patent Application 13/965524; 20130333820
Electrodeposition of a Magnetostrictive Magnetic Alloy Upon a Chain-Store Element
patent, August 1968
- Le Mehaute, Charles; Rocher, Edouard
- US Patent Document 3399122
Fabrication of patterned CdS/TiO2 heterojunction by wettability template-assisted electrodeposition
journal, June 2010
- Lai, Yuekun; Lin, Zequan; Chen, Zhong
- Materials Letters, Vol. 64, Issue 11, p. 1309-1312
Giant magnetostriction in annealed Co1−xFex thin-films
journal, September 2011
- Hunter, Dwight; Osborn, Will; Wang, Ke
- Nature Communications, Vol. 2, Issue 1
Mechanical resonator
patent, May 2007
- Kolosov, Oleg; Matsiev, Leonid; Padowitz, David
- US Patent Document 7,210,332
Micromachined force-balance feedback accelerometer with optical displacement detection
patent, July 2014
- Nielson, Gregory N.; Langlois, Eric; Baker, Michael
- US Patent Document 8,783,106
Sensor and method for remote detection of objects
patent, May 2001
- Tyren, Carl
- US Patent Document 6,232,879
Electrodeposition of soft, high moment Co–Fe–Ni thin films
journal, May 2000
- Liu, Xiaomin; Zangari, Giovanni; Shen, Liyong
- Journal of Applied Physics, Vol. 87, Issue 9
Electrodeposition and characterization of Fe80Ga20 alloy films
journal, May 2011
- Iselt, D.; Gaitzsch, U.; Oswald, S.
- Electrochimica Acta, Vol. 56, Issue 14, p. 5178-5183
Microstructure, magnetic and magnetoimpedance properties in electrodeposited NiFe/Cu and CoNiFe/Cu wire with thiourea additive in plating bath
journal, March 2012
- Mishra, Amaresh Chandra
- Physica B: Condensed Matter, Vol. 407, Issue 6, p. 923-934
Electrodeposition processes for magnetostrictive resonators
patent, November 2018
- Pillars, Jamin Ryan; Langlois, Eric; Arrington, Christian Lew
- US Patent Document 10,132,699
Turnable Capacitor and Switch Using MEMS with Phase Change Material
patent-application, February 2011
- Furukawa, Yukiko; Reimann, Klaus; Renders, Christian Adriana
- US Patent Application 12/988223; 2011/0038093
MEMS sprung cantilever tunable capacitors and methods
patent, October 2013
- DeReus, Dana
- US Patent Document 8,570,705
Oxide/hydroxide incorporation into electrodeposited CoFe alloys—Consequences for magnetic softness
journal, November 2013
- George, Jinnie; Elhalawaty, Shereen; Mardinly, A. John
- Electrochimica Acta, Vol. 110, p. 411-417
Effects of the structure of organic additives in the electrochemical preparation and characterization of CoFe film
journal, October 2002
- Lallemand, F.; Ricq, L.; Berçot, P.
- Electrochimica Acta, Vol. 47, Issue 26, p. 4149-4156
Improved manufacturability and characterization of a corrugated Parylene diaphragm pressure transducer
journal, June 2006
- Luharuka, Rajesh; Noh, Hongseok (Moses); Kim, Sang Kyung
- Journal of Micromechanics and Microengineering, Vol. 16, Issue 8
Oxygen Incorporation into Electrodeposited CoFe Films: Consequences for Structure and Magnetic Properties
journal, January 2011
- Elhalawaty, S.; Carpenter, R. W.; George, J.
- Journal of The Electrochemical Society, Vol. 158, Issue 11, p. D641-D646
Improved model for the magnetostrictive deflection of a clamped film–substrate system
journal, June 1999
- Iannotti, V.; Lanotte, L.
- Journal of Magnetism and Magnetic Materials, Vol. 202, Issue 1, p. 191-196
Optimized TERFENOL-D manufacturing processes
journal, August 1997
- Snodgrass, Jonathan D.; McMasters, O. D.
- Journal of Alloys and Compounds, Vol. 258, Issue 1-2, p. 24-29
Marker for remote detection of articles
patent, July 2006
- Tyren, Carl; Lunau, Helge
- US Patent Document 7,075,439
Extraordinary magnetoelasticity and lattice softening in bcc Fe-Ga alloys
journal, May 2003
- Clark, A. E.; Hathaway, K. B.; Wun-Fogle, M.
- Journal of Applied Physics, Vol. 93, Issue 10
Device for non-contact measuring of stresses in a bar-shaped body
patent, June 1991
- Hesthamer, Tore; Tyren, Carl
- US Patent Document 5,020,378
Stress in Electrodeposited High Moment CoFe Films
conference, January 2010
- Shao, Ingrid; Romankiw, Lubomyr T.; Bonhote, Christian
- 216th ECS Meeting, ECS Transactions
High moment CoFe thin films by electrodeposition
journal, September 1987
- Liao, S.
- IEEE Transactions on Magnetics, Vol. 23, Issue 5, p. 2981-2983
Electroplated CoFe thin films for electromagnetic microactuators
journal, April 2006
- Bedenbecker, Matthias; Gatzen, Hans H.
- Journal of Applied Physics, Vol. 99, Issue 8
Method of detecting labels with amorphous magneto-elastical tapes
patent, October 1999
- Tyren, Carl
- US Patent Document 5,969,610
Tubular filter with branched nanoporous membrane integrated with a support and method of producing same
patent-application, March 2003
- Grimes, Craig; Gong, Dawei
- US Patent Application 10/243303; 20030047505
Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode
patent, August 2014
- Resnick, Paul J.; Langlois, Eric
- US Patent Document 8,814,622
Scalable, high-performance magnetoelastic tags using frame-suspended hexagonal resonators
journal, April 2014
- Tang, Jun; Green, Scott R.; Gianchandani, Yogesh B.
- Journal of Micromechanics and Microengineering, Vol. 24, Issue 6
Device for improved response when measuring vibration frequency of a vibrating object
patent, October 2012
- Tyren, Carl
- US Patent Document 8,276,451
Method for excitation and detection of magnetic elements by a mechanical resonance
patent, June 1998
- Tyren, Carl
- US Patent Document 5,760,580
Electroplating of nickel, cobalt, nickel-cobalt, nickel-iron, cobalt-iron and nickel-iron-cobalt deposits
patent, October 1977
- McMullen, Warren H.; Mooney, Thomas J.
- US Patent Document 4,053,373
A High Moment CoFe Soft Magnetic Thin Film Prepared by Electrodeposition
journal, January 2003
- Osaka, Tetsuya; Yokoshima, Tokihiko; Shiga, Daizo
- Electrochemical and Solid-State Letters, Vol. 6, Issue 4
Electrodeposited Co-Fe and Co-Fe-Ni alloy films for magnetic recording write heads
journal, January 2000
- Xiaomin Liu, ; Evans, P.; Zangari, G.
- IEEE Transactions on Magnetics, Vol. 36, Issue 5
Kinetic and morphological investigation of CoFe alloy electrodeposition in the presence of organic additives
journal, February 2004
- Lallemand, F.; Ricq, L.; Wery, M.
- Surface and Coatings Technology, Vol. 179, Issue 2-3, p. 314-323
Electrochemical synthesis of nanocrystalline CuFe2O4 thin films from non-aqueous (ethylene glycol) medium
journal, April 2003
- Sartale, S. D.; Lokhande, C. D.; Muller, M.
- Materials Chemistry and Physics, Vol. 80, Issue 1, p. 120-128
Control of engineering processes using magnetostrictive alloy compositions
patent, February 2007
- Guruswamy, Sivaraman; Nguyen, Kevin; Mungsantisuk, Pinai
- US Patent Document 7,179,338
CoFe alloy film and process of making same
patent, February 2005
- Cooper, Emanuel I.; Dinan, Thomas Edward; Romankiw, Lubomyr T.
- US Patent Document 6,855,240
Microfabricated particle focusing device
patent, April 2013
- Ravula, Surendra K.; Arrington, Christian Lew; Sigman, Jennifer K.
- US Patent Document 8,425,749
Optically transduced MEMS gyro device
patent, May 2014
- Nielson, Gregory N.; Bogart, Gregory R.; Langlois, Eric
- US Patent Document 8,726,730
Lightweight torquemeter and torque-measuring method
patent, June 1985
- Barkhoudarian, Sarkis
- US Patent Document 4,523,482
Magnetostrictive resonance excitation
patent, September 1992
- Schwarz, Ricardo B.; Kuokkala, Veli-Tapani
- US Patent Document 5,150,617
Preparation and applications of magnetostrictive thin films
journal, November 1994
- Quandt, E.; Gerlach, B.; Seemann, K.
- Journal of Applied Physics, Vol. 76, Issue 10
Coded labels with amorphous magnetoelastic resonators
journal, September 2002
- Arndt, M.; Kiesewetter, L.
- IEEE Transactions on Magnetics, Vol. 38, Issue 5, p. 3374-3376
Sensor, a method and a system for remote detection of objects
patent, July 2002
- Tyren, Carl
- US Patent Document 6,417,771
High-yield synthesis of brookite TiO2 nanoparticles
patent, May 2011
- Huber, Dale L.; Monson, Todd
- US Patent Document 7,943,116
Structure, Composition, and Morphology of Electrodeposited Co[sub x]Fe[sub 1−x] Alloys
journal, January 1997
- Kakuno, E. M.
- Journal of The Electrochemical Society, Vol. 144, Issue 9
Multiferroic surface acoustic wave antenna
patent, May 2017
- Keller, Scott; Nordeen, Paul Killian; Wetzlar, Kyle Peter
- US Patent Document 9,660,349
Magnetoelastic stress sensor
patent, March 1994
- Tyren, Carl; Lord, Donald
- US Patent Document 5,297,439
Magnetostrictive Ligand Sensor
patent-application, April 2005
- Chin, Bryan A.; Cheng, Zhongyang; Vodyanoy, Vitaly J.
- US Patent Application 10/923414; 20050074904
Magnetic Field-Induced Martensitic Transformation and Giant Magnetostriction in Fe–Ni–Co–Ti and Ordered Fe<SUB>3</SUB>Pt Shape Memory Alloys
journal, January 2000
- Kakeshita, Tomoyuki; Takeuchi, Tetsuya; Fukuda, Takashi
- Materials Transactions, JIM, Vol. 41, Issue 8
Micropattern Formation for Magnetic Recording Head Using Electroless CoFeB Deposition
journal, January 2002
- Yokoshima, Tokihiko; Nakamura, Seiichi; Kaneko, Daiju
- Journal of The Electrochemical Society, Vol. 149, Issue 8
Magnetic materials for MEMS applications
journal, October 2004
- Gibbs, M. R. J.; Hill, E. W.; Wright, P. J.
- Journal of Physics D: Applied Physics, Vol. 37, Issue 22
Sensor for remote detection of objects
patent, May 2001
- Tyren, Carl; Quinones, Christian Oziel
- US Patent Document 6,225,905
A new high-precision optical technique to measure magnetostriction of a thin magnetic film deposited on a substrate
journal, May 1989
- Tam, A. C.; Schroeder, H.
- IEEE Transactions on Magnetics, Vol. 25, Issue 3
Label for marking and remote detection of objects
patent, April 2001
- Kiesewetter, Lothar; Zillessen, Harald; Tyren, Carl
- US Patent Document 6,218,944
Phase-field microelasticity theory and micromagnetic simulations of domain structures in giant magnetostrictive materials
journal, May 2005
- Zhang, J. X.; Chen, L. Q.
- Acta Materialia, Vol. 53, Issue 9
Method of plating an iron-cobalt alloy on a substrate
patent, June 1980
- Mitsumoto, Norio; Ichioka, Satoshi; Takeuchi, Shinjiro
- US Patent Document 4,208,254
Anti-theft device with a thermally controllable locking mechanism
patent, September 2001
- Tyren, Carl; Quinones, Christian Oziel
- US Patent Document 6,285,286
Nanostructures for magnetically triggered release of drugs and biomolecules
journal, October 2013
- Bonini, Massimo; Berti, Debora; Baglioni, Piero
- Current Opinion in Colloid & Interface Science, Vol. 18, Issue 5, p. 459-467
Process for fabricating improved iron-cobalt magnetostrictive alloy and article comprising alloy
patent, November 2000
- Chen, Li-Han; Jin, Sungho; Klemmer, Timothy J.
- US Patent Document 6,153,020
Magnetostriction and internal stresses in thin films: the cantilever method revisited
journal, September 1994
- du Trémolet de Lacheisserie, E.; Peuzin, J. C.
- Journal of Magnetism and Magnetic Materials, Vol. 136, Issue 1-2
Miniaturized magnetoelastic tags using frame-suspended hexagonal resonators
conference, January 2014
- Tang, Jun; Green, Scott R.; Gianchandani, Yogesh B.
- 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)