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Title: Stretchable form of single crystal silicon for high performance electronics on rubber substrates

Abstract

The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

Inventors:
; ; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1502818
Patent Number(s):
10204864
Application Number:
15/339,338
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Resource Relation:
Patent File Date: 2016 Oct 31
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Rogers, John A., Khang, Dahl-Young, Sun, Yugang, and Menard, Etienne. Stretchable form of single crystal silicon for high performance electronics on rubber substrates. United States: N. p., 2019. Web.
Rogers, John A., Khang, Dahl-Young, Sun, Yugang, & Menard, Etienne. Stretchable form of single crystal silicon for high performance electronics on rubber substrates. United States.
Rogers, John A., Khang, Dahl-Young, Sun, Yugang, and Menard, Etienne. Tue . "Stretchable form of single crystal silicon for high performance electronics on rubber substrates". United States. https://www.osti.gov/servlets/purl/1502818.
@article{osti_1502818,
title = {Stretchable form of single crystal silicon for high performance electronics on rubber substrates},
author = {Rogers, John A. and Khang, Dahl-Young and Sun, Yugang and Menard, Etienne},
abstractNote = {The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {2}
}

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An elastomeric conductor based on polyaniline prepared by mechanical mixing
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A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires
journal, January 1998


Printing Patterns of Proteins
journal, April 1998


Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
journal, July 2003


Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties
journal, December 2000


Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants
journal, January 1989


Amorphous Si TFTs on plastically deformed spherical domes
journal, April 2002


Field-Effect Transistors Based on Single Semiconducting Oxide Nanobelts
journal, January 2003


Stretchable and Foldable Electronic Devices
patent-application, July 2010


Mesoscale organization of metal nanocrystals
journal, January 2002


Single-crystal metallic nanowires and metal/semiconductor nanowire heterostructures
journal, July 2004


Novel Nanostructures of Functional Oxides Synthesized by Thermal Evaporation
journal, January 2003


Graded base GaAsSb for high speed GaAs HBT
patent, August 2004


Invention of the integrated circuit
journal, July 1976


Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts
journal, February 2004


Process to pattern thick TiW metal layers using uniform and selective etching
patent-application, September 2004


High Resolution Printing of Charge
patent-application, July 2011


Manufacturing method for electric device
patent-application, April 2004


Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors
journal, August 2004


Laser-lithography on non-planar surfaces
journal, January 2007


Thin-Film Transistors
book, February 2003


Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths
journal, October 1998


A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems
journal, October 2005


Stretchable interconnects using stress gradient films
patent-application, July 2002


Direct Observation of Vapor−Liquid−Solid Nanowire Growth
journal, April 2001


Controlled Synthesis and Photoluminescence Properties of ZnS Nanowires and Nanoribbons
journal, March 2005


The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives
journal, July 1998


Functional Pixel Circuits for Elastic AMOLED Displays
journal, July 2005


Contact Electrification and Adhesion Between Dissimilar Materials
journal, April 1992


Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)
journal, June 2002


Finer features for functional microdevices
journal, August 2001


Highly Emissive Self-assembled Organic Nanoparticles having Dual Color Capacity for Targeted Immunofluorescence Labeling
journal, March 2008


Shaped Films of Ionotropic Hydrogels Fabricated Using Templates of Patterned Paper
journal, January 2009


Method of selective removal of SiGe alloys
patent, May 2005


Method of manufacturing semiconductor device
patent-application, November 2005


Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species
journal, August 2001


Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates
journal, October 2005


Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
journal, October 1998


Waterproof stretchable optoelectronics
patent-application, June 2012


High-Efficiency Multijunction Solar Cells
journal, March 2007


Electronic materials: Buckling down for flexible electronics
journal, December 2006


Testing integrated circuit dice
patent, April 2002


Universal description of channel conductivity for nanotube and nanowire transistors
journal, August 2003


Displays combining active and non-active inks
patent, October 2002


Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers
journal, November 2000


Methods to fabricate thin film transistors and circuits
patent, May 2001


Injectable and Implantable Ceullar-scale Electronic Devices
patent-application, March 2016


Heat spreader and semiconductor device and package using the same
patent, June 2006


Release Strategies For Making Transferable Semiconductor Structures, Devices And Device Components
patent-application, May 2008


Non-Contact Transfer Printing
patent-application, February 2013


Elastically relaxed free-standing strained-silicon nanomembranes
journal, April 2006


The rise of graphene
journal, March 2007


Amorphous silicon technology for large area digital X-ray and optical imaging
journal, April 2002


Implantable biomedical devices on bioresorbable substrates
patent, March 2014


Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
journal, August 2004


Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing
journal, February 2003


Apparatuses and methods used in forming assemblies
patent, August 2001


Surface-functionalized inorganic semiconductor particles as electrical semiconductors for microelectronics applications
patent-application, December 2003


InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications
journal, March 1991


Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
journal, June 1994


Methods for forming assemblies
patent, August 2001


Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry
journal, April 2002


Mechanics of rollable and foldable film-on-foil electronics
journal, February 1999


Unconventional Methods for Fabricating and Patterning Nanostructures
journal, May 1999


Magnetic trapping and self-assembly of multicomponent nanowires
journal, May 2002


Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates
journal, April 2005


Methods and apparatus for fluidic self assembly
patent, September 2003


Molecule-Mimetic Chemistry and Mesoscale Self-Assembly
journal, December 2000


GaN: Processing, defects, and devices
journal, July 1999


Compliant substrate technology: Integration of mismatched materials for opto-electronic applications
journal, January 2000


High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors
journal, March 2004


High-Mobility Poly-Si Thin Film Transistors Fabricated on Stainless-Steel Foils by Low-Temperature Processes Using Sputter-Depositions
journal, May 2000


Template Synthesis of Electronically Conductive Polymer Nanostructures
journal, February 1995


Free standing single-crystal silicon microstructures
journal, March 1995


Carbon Nanotube Inter- and Intramolecular Logic Gates
journal, September 2001


Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes
journal, June 2000


Macroelectronics
journal, June 2006


Organic single-crystal field-effect transistors
journal, May 2004


Method of making thin silicon sheets for solar cells
patent, January 2007


Correlation of buffer strain relaxation modes with transport properties of two‐dimensional electron gases
journal, December 1996


Light emitting diode and process for fabricating the same
patent, February 1996


Optical Component Array Having Adjustable Curvature
patent-application, October 2012


Protective diamond-like carbon coatings for future optical storage disks
journal, March 2005


Single-crystalline gallium nitride nanobelts
journal, July 2002


Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing
journal, October 2004


Luminescence Photophysics in Semiconductor Nanocrystals
journal, November 1998


Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions
journal, March 1994


Semiconductor nanotube formation by a two-step template process
journal, October 1996


High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
journal, September 2002

  • Loo, Yueh-Lin; Hsu, Julia W. P.; Willett, Robert L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2853-2856
  • https://doi.org/10.1116/1.1523405

Temperature coefficient of the surface resistivity of two-dimensional island gold films
journal, September 2000


Composite patterning devices for soft lithography
patent, March 2007


Mechanical properties of silicones for MEMS
journal, April 2008


Medical device applications of nanostructured surfaces
patent-application, February 2005


Arrays of ultrathin silicon solar microcells
patent, March 2014


Semiconductor wafer having a thin die and tethers and methods of making the same
patent, August 2003


A Rubberlike Stretchable Active Matrix Using Elastic Conductors
journal, September 2008


Nanoimprint lithography
patent, June 1998


Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements
journal, October 2009


Nanotube Molecular Wires as Chemical Sensors
journal, January 2000


Architectonic Quantum Dot Solids
journal, January 1999


Optical systems fabricated by printing-based assembly
patent, March 2017


Method for fabricating self-assembling microstructures
patent, August 1996


Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping
journal, March 2000


Printable semiconductor structures and related methods of making and assembling
patent, September 2010


Organ Mounted Electronics
patent-application, May 2015


Stretchable semiconductor elements and stretchable electrical circuits
patent, July 2009


The formation of controlled-porosity membranes from anodically oxidized aluminium
journal, January 1989


High electron mobility transistor based on a GaN‐AlxGa 1−xN heterojunction
journal, August 1993


Electro-optical response of a single-crystal diamond ultraviolet photoconductor in transverse configuration
journal, May 2005


A hemispherical electronic eye camera based on compressible silicon optoelectronics
journal, August 2008


Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher
journal, January 1999


Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems
journal, March 2007


Heat-transfer-stamp process for thermal imprint lithography
patent, September 2005


Transient Electronic Devices Comprising Inorganic Or Hybrid Inorganic And Organic Substrates And Encapsulates
patent-application, October 2014


Self-Catalysis and Phase Transformation in the Formation of CdSe Nanosaws
journal, October 2004


Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric
journal, June 2001


Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures
journal, November 2004


Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes
journal, August 2005


From Si Source Gas Directly to Positioned, Electrically Contacted Si Nanowires: The Self-Assembling “Grow-in-Place” Approach
journal, November 2004


Alpha-particle protection of semiconductor devices
patent, August 1988


Colloidal Two-Dimensional Systems: CdSe Quantum Shells and Wells
journal, October 2003


Organic electronics on paper
journal, April 2004


Magnetic self-assembly of three-dimensional surfaces from planar sheets
journal, March 2005


Finite deformation mechanics in buckled thin films on compliant supports
journal, September 2007


Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
journal, April 2000

  • Yang, C.-S.; Smith, L. L.; Arthur, C. B.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2, p. 683-689
  • https://doi.org/10.1116/1.591259

The Chemistry and Physics of Semiconductor Nanowires
journal, February 2005


Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates
journal, March 2005


Microporous materials: Electrochemically grown photonic crystals
journal, December 1999


Gallium Oxide Nanoribbons and Nanosheets
journal, February 2002


Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors
journal, August 2005


Device Transfer Method and Display Apparatus
patent-application, October 2005


Chemical Etching Characteristics of (001)GaAs
journal, January 1983


Ordering of microwrinkle patterns by compressive strain
journal, April 2004


Diamond heat spreading and cooling technique for integrated circuits
patent, December 2003


Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics
journal, July 2002


Printable semiconductor structures and related methods of making and assembling
patent, March 2013


Self-aligned patterning in dual damascene process
patent-application, August 2003


Chemistry and Physics in One Dimension: Synthesis and Properties of Nanowires and Nanotubes
journal, February 1999


Low-Temperature Materials and Thin Film Transistors for Flexible Electronics
journal, August 2005


Creating micro- and nanostructures on tubular and spherical surfaces
journal, December 2007

  • Lima, O.; Tan, L.; Goel, A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6, p. 2412-2418
  • https://doi.org/10.1116/1.2804428

Mixed Mode Cracking in Layered Materials
book, January 1991


Growth and properties of nanocrystalline diamond films
journal, October 2006


High-performance organic thin-film transistors with metal oxide/metal bilayer electrode
journal, November 2005


High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes
journal, March 2007


Materials, Electronic Systems And Modes For Active And Passive Transience
patent-application, October 2014


Thermal interface with silver-filled carbon nanotubes
patent, December 2006


Wafer-level in-registry microstamping
journal, March 1999


Looking at Rubber Adhesion
journal, March 1979


High on-state breakdown heterojunction bipolar transistor
patent-application, March 2006


Aluminum metallization—Advantages and limitations for integrated circuit applications
journal, January 1969


Direct synthesis and characterization of CdS nanobelts
journal, July 2006


Processing Techniques for Silicon-Based Transient Devices
patent-application, January 2016


Printing meets lithography: Soft approaches to high-resolution patterning
journal, September 2001


Preparation of Ceramic Inks for Solid Freeforming Using a Continuous Jet Printer
journal, November 1999


Curved CCD detector devices and arrays for multispectral astrophysical applications and terrestrial stereo panoramic cameras
conference, September 2004


Molecular control over Au/GaAs diodes
journal, March 2000


Thermal transport and grain boundary conductance in ultrananocrystalline diamond thin films
journal, June 2006


Non-contact transfer printing
patent, January 2017


Apparatuses and methods for forming electronic assemblies
patent, March 2005


High-Performance Flexible Hybrid Field-Effect Transistors Based on Cellulose Fiber Paper
journal, September 2008


Diamond-structured photonic crystals
journal, September 2004


Ambipolar Pentacene Field-Effect Transistors and Inverters
journal, February 2000


Web fabrication of devices
patent, January 2004


Flexible and Stretchable Electronic Systems for Epidermal Electronics
patent-application, February 2013


Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates
journal, June 1998


Printable semiconductor structures and related methods of making and assembling
patent, October 2011


High resolution electrohydrodynamic jet printing for manufacturing systems
patent, November 2016


Flexible membrane pressure sensor
journal, April 2005


p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks
journal, October 2004


RFID Tag and RF Structures on a Paper Substrate Using Inkjet-Printing Technology
journal, December 2007


Lateral polysilicon p+–p–n+ and p+–n–n+ diodes
journal, April 2003


Methods and devices for fabricating and assembling printable semiconductor elements
patent, July 2011


Structural forms of single crystal semiconductor nanoribbons for high-performance stretchable electronics
journal, January 2007


Organic Transistors: Two-Dimensional Transport and Improved Electrical Characteristics
journal, April 1995


Organic light-emitting diodes formed by soft contact lamination
journal, January 2004


Over 30% efficient InGaP/GaAs tandem solar cells
journal, January 1997


Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics
journal, July 2005


Gallium Arsenide Transistors: Realization Through a Molecularly Designed Insulator
journal, March 1994


A New Etching Solution System, H3 PO4- H2O2- H2O, for GaAs and Its Kinetics
journal, January 1978


A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications
journal, June 2004


Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires
journal, October 2003


From Micro- to Nanofabrication with Soft Materials
journal, November 2000


Semiconductor Wires and Ribbons for High‐ Performance Flexible Electronics
journal, July 2008


The Characteristic Improvement of Si(111) Metal–Oxide–Semiconductor Field-Effect Transistor by Long-Time Hydrogen Annealing
journal, October 2004


Polymer-Polymer Phase Behavior
journal, February 1991


Methods and devices for fabricating and assembling printable semiconductor elements
patent, May 2013


Organic species that facilitate charge transfer to or from nanostructures
patent-application, September 2004


Bendable GaAs metal-semiconductor field-effect transistors formed with printed GaAs wire arrays on plastic substrates
journal, August 2005


Adherence, friction and wear of rubber-like materials
journal, October 1992


Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp
patent, May 2011


Conformable Actively Multiplexed High-Density Surface Electrode Array for Brain Interfacing
patent-application, March 2015


Processes and apparatus for lift-off and bonding of materials and devices
patent, November 1995


Double-metal background driven displays
patent, July 2003


Individually Suspended Single-Walled Carbon Nanotubes in Various Surfactants
journal, October 2003


Method for fabricating self-assembling microstructures
patent, July 1998


Composite patterning devices for soft lithography
patent-application, October 2005


Controlled growth of tetrapod-branched inorganic nanocrystals
journal, May 2003


Toward the Ultimate Tribological Interface: Surface Chemistry and Nanotribology of Ultrananocrystalline Diamond
journal, April 2005


High-Performance n- and p-Type Single-Crystal Organic Transistors with Free-Space Gate Dielectrics
journal, December 2004


Diffusion of Alkanethiols in PDMS and Its Implications on Microcontact Printing (μCP)
journal, January 2005


Silicon nanowire devices
journal, April 2000


Planar nanowire based sensor elements, devices, systems and methods for using and making same
patent-application, July 2004


Quantifying distortions in soft lithography
journal, June 1998

  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 88-97
  • https://doi.org/10.1116/1.589841

High efficiency GaAs thin film solar cells by peeled film technology
journal, December 1978


Direct printing of polymer microstructures on flat and spherical surfaces using a letterpress technique
journal, September 2002

  • Miller, Scott M.; Troian, Sandra M.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2320-2327
  • https://doi.org/10.1116/1.1520554

Electric microcontact printing method and apparatus
patent-application, September 2003


Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing
journal, August 2004


Plastic transistors in active-matrix displays
journal, December 2001


High-Resolution Inkjet Printing of All-Polymer Transistor Circuits
journal, December 2000


Hole mobility in organic single crystals measured by a “flip-crystal” field-effect technique
journal, August 2004


Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
journal, June 1998

  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 59-68
  • https://doi.org/10.1116/1.589836

High-Field Electrical Transport in Single-Wall Carbon Nanotubes
journal, March 2000


Nanotechnology: Thin solid films roll up into nanotubes
journal, March 2001


Stretchable wavy metal interconnects
journal, July 2004

  • Jones, Joyelle; Lacour, Stephanie P.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 22, Issue 4, p. 1723-1725
  • https://doi.org/10.1116/1.1756879

Radio frequency analog electronics based on carbon nanotube transistors
journal, January 2008


Printing-Based Assembly of Multi-Junction, Multi-Terminal Photovoltaic Devices and Related Methods
patent-application, July 2015


Supercritical Fluid–Liquid–Solid Synthesis of Gallium Arsenide Nanowires Seeded by Alkanethiol-Stabilized Gold Nanocrystals
journal, April 2004


Patterning of Thin-Film Microstructures on Non-Planar Substrate Surfaces Using Decal Transfer Lithography
journal, August 2004


Anomalous Coiling of SiGe/Si and SiGe/Si/Cr Helical Nanobelts
journal, July 2006


Three-Dimensional Nanofabrication with Rubber Stamps and Conformable Photomasks
journal, August 2004


Surface Modification of Sylgard-184 Poly(dimethyl siloxane) Networks by Ultraviolet and Ultraviolet/Ozone Treatment
journal, October 2002


Disposing method for semiconductor elements
patent, April 2004


Structure and photoluminescence of ZnSe nanoribbons grown by metal organic chemical vapor deposition
journal, April 2004


Nanomaterial transfer using hot embossing for flexible electronic devices
journal, February 2006


Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates
journal, February 2002


Fabrication of Metal Nanowires Using Microcontact Printing
journal, July 2003


Nonlinear analyses of wrinkles in a film bonded to a compliant substrate
journal, September 2005


Flexible active-matrix displays and shift registers based on solution-processed organic transistors
journal, January 2004


Self-aligned self-assembly process for fabricating organic thin-film transistors
journal, September 2004


Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching
journal, February 1999


Heterogeneous materials integration: compliant substrates to active device and materials packaging
journal, December 2001


All-Polymer Field-Effect Transistor Realized by Printing Techniques
journal, September 1994


New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region
journal, July 1996


AlGaN/GaN HEMTs-an overview of device operation and applications
journal, June 2002


Two-versus three-dimensional quantum confinement in indium phosphide wires and dots
journal, July 2003


Fabrication of solid-state nanopores with single-nanometre precision
journal, July 2003


Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements
patent-application, March 2010


Backplanes for display applications, and components for use therein
patent, October 2006


Printed Assemblies of Ultrathin, Microscale Inorganic Light Emitting Diodes for Deformable and Semitransparent Displays
patent-application, December 2010


Bipolar transistor with lattice matched base layer
patent, March 2007


A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques
journal, October 2006


Method for reproduction of a component with a micro-joint and component produced by said method
patent-application, March 2006


Mechanically Strained Strained-Si NMOSFETs
journal, January 2004


Nanoscale Hydrophobic Recovery: A Chemical Force Microscopy Study of UV/Ozone-Treated Cross-Linked Poly(dimethylsiloxane)
journal, February 2004


High resolution printing of charge
patent, June 2015


Air-Stable All-Inorganic Nanocrystal Solar Cells Processed from Solution
journal, October 2005


Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors
journal, October 1997


Electric Field Effect in Atomically Thin Carbon Films
journal, October 2004


Devices and methods for pattern generation by ink lithography
patent-application, March 2008


GaAs Readied for High-Speed Microcircuits
journal, January 1983


Fully elastic interconnects on nanopatterned elastomeric substrates
journal, August 2006


Apparatuses and methods for flexible displays
patent, February 2005


Controlled Buckling Structures in Semiconductor Interconnects and Nanomembranes for Stretchable Electronics
patent-application, December 2016


Nanoscale Science and Technology: Building a Big Future from Small Things
journal, July 2003


Stars and stripes. Nanoscale misfit dislocation patterns on surfaces
journal, January 2002


Patterning Spherical Surfaces at the Two-Hundred-Nanometer Scale Using Soft Lithography
journal, April 2003


A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates
journal, January 2006


Block-by-Block Growth of Single-Crystalline Si/SiGe Superlattice Nanowires
journal, February 2002


Colloidal Inks for Directed Assembly of 3-D Periodic Structures
journal, July 2002


Semiconductor device and manufacturing method thereof
patent-application, March 2003


Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment
journal, April 2006


A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions
journal, December 2003


Structures of indium oxide nanobelts
journal, October 2003


Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors
journal, November 2005


Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification
journal, August 1998


Tailored Micropatterns through Weak Polyelectrolyte Stamping
journal, March 2003


Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
journal, May 1997


Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps
journal, October 2004


Methods for fabricating a multiple modular assembly
patent, November 2001


Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites
patent-application, June 2004


Patterning of diamond microstructures on Si substrate by bulk and surface micromachining
journal, January 2003


Ink-Jet Printing of Binders for Ceramic Components
journal, April 2002


Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates
patent-application, April 2013


Flat Panel Display Module and Method of Manufacturing the Same
patent-application, July 2003


An Elastically Stretchable TFT Circuit
journal, December 2004


Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors
journal, November 2005


Pattern Transfer Printing by Kinetic Control of Adhesion to an Elastomeric Stamp
patent-application, August 2009


Stretchable and elastic interconnects
patent-application, September 2004


Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution
journal, August 2004