skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Formation of superhydrophobic surfaces

Abstract

Technologies are described for methods and systems effective for etching nanostructures in a substrate. The methods may comprise depositing a patterned block copolymer on the substrate. The methods may comprise applying a precursor to the patterned block copolymer to generate an infiltrated block copolymer. The precursor may infiltrate into the first polymer block domain and generate a material. The methods may comprise applying a removal agent effective to remove the polymer block domains to the infiltrated block copolymer to generate a pattern of the material. The methods may comprise etching the substrate. The pattern of the material may mask the substrate to pattern the etching. The etching may be performed under conditions to produce nanostructures in the substrate. The methods may comprise removing the pattern of the material and coating the nanostructures and the surface of the substrate with a hydrophobic coating.

Inventors:
; ; ;
Issue Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1500088
Patent Number(s):
10189704
Application Number:
14/897,441
Assignee:
Brookhaven Science Associates, LLC (Upton, NY)
Patent Classifications (CPCs):
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC02-98CH10886
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Jun 13
Country of Publication:
United States
Language:
English

Citation Formats

Checco, Antonio, Black, Charles T., Rahman, Atikur, and Ocko, Benjamin M.. Formation of superhydrophobic surfaces. United States: N. p., 2019. Web.
Checco, Antonio, Black, Charles T., Rahman, Atikur, & Ocko, Benjamin M.. Formation of superhydrophobic surfaces. United States.
Checco, Antonio, Black, Charles T., Rahman, Atikur, and Ocko, Benjamin M.. Tue . "Formation of superhydrophobic surfaces". United States. https://www.osti.gov/servlets/purl/1500088.
@article{osti_1500088,
title = {Formation of superhydrophobic surfaces},
author = {Checco, Antonio and Black, Charles T. and Rahman, Atikur and Ocko, Benjamin M.},
abstractNote = {Technologies are described for methods and systems effective for etching nanostructures in a substrate. The methods may comprise depositing a patterned block copolymer on the substrate. The methods may comprise applying a precursor to the patterned block copolymer to generate an infiltrated block copolymer. The precursor may infiltrate into the first polymer block domain and generate a material. The methods may comprise applying a removal agent effective to remove the polymer block domains to the infiltrated block copolymer to generate a pattern of the material. The methods may comprise etching the substrate. The pattern of the material may mask the substrate to pattern the etching. The etching may be performed under conditions to produce nanostructures in the substrate. The methods may comprise removing the pattern of the material and coating the nanostructures and the surface of the substrate with a hydrophobic coating.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {1}
}

Patent:

Save / Share:

Works referenced in this record:

Anti-reflective coatings: A critical, in-depth review
journal, January 2011


Fabrication of Broadband Antireflective Plasmonic Gold Nanocone Arrays on Flexible Polymer Films
journal, November 2013


Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
journal, May 1997


Ultimate Top-down Etching Processes for Future Nanoscale Devices: Advanced Neutral-Beam Etching
journal, April 2006


A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
journal, May 2011


Effect of Cl 2 - and HBr-based inductively coupled plasma etching on InP surface composition analyzed using in situ x-ray photoelectron spectroscopy
journal, May 2012

  • Bouchoule, S.; Vallier, L.; Patriarche, G.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 3
  • https://doi.org/10.1116/1.3692751

Superhydrophobicity and Superhydrophilicity of Regular Nanopatterns
journal, October 2005


Superhydrophobic Transparent Surface of Nanostructured Poly(Methyl Methacrylate) Enhanced by a Hydrolysis Reaction
journal, April 2013


Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
journal, July 2011


Fabrication of Size-Tunable Large-Area Periodic Silicon Nanopillar Arrays with Sub-10-nm Resolution
journal, September 2003