Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices
Abstract
A polymer-hybrid electro-optic device is fabricated by providing a semiconductor substrate, depositing a metal electrode layer on the semiconductor substrate, depositing a dielectric barrier core layer within a gap of the metal electrode layer, patterning a polymer layer to cover the dielectric barrier core layer and partially covering the metal electrode layer, infiltrating the polymer layer with an inorganic component to form a hybrid oxide-polymer layer, and removing excess inorganic component from the semiconductor substrate and metal electrode layer.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1497869
- Patent Number(s):
- 10164188
- Application Number:
- 15/433,659
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2017 Feb 15
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Ocola, Leonidas E., Gosztola, David J., and Yanguas-Gil, Angel. Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices. United States: N. p., 2018.
Web.
Ocola, Leonidas E., Gosztola, David J., & Yanguas-Gil, Angel. Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices. United States.
Ocola, Leonidas E., Gosztola, David J., and Yanguas-Gil, Angel. Tue .
"Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices". United States. https://www.osti.gov/servlets/purl/1497869.
@article{osti_1497869,
title = {Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices},
author = {Ocola, Leonidas E. and Gosztola, David J. and Yanguas-Gil, Angel},
abstractNote = {A polymer-hybrid electro-optic device is fabricated by providing a semiconductor substrate, depositing a metal electrode layer on the semiconductor substrate, depositing a dielectric barrier core layer within a gap of the metal electrode layer, patterning a polymer layer to cover the dielectric barrier core layer and partially covering the metal electrode layer, infiltrating the polymer layer with an inorganic component to form a hybrid oxide-polymer layer, and removing excess inorganic component from the semiconductor substrate and metal electrode layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {12}
}
Works referenced in this record:
High-performance metal–semiconductor–metal UV photodetector based on spray deposited ZnO thin films
journal, May 2014
- Inamdar, S. I.; Rajpure, K. Y.
- Journal of Alloys and Compounds, Vol. 595
Inductively coupled plasma reactive ion etching of ZnO films in HBr/Ar plasma
journal, April 2008
- Min, Su Ryun; Cho, Han Na; Li, Yue Long
- Thin Solid Films, Vol. 516, Issue 11
Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
journal, September 2010
- Peng, Qing; Tseng, Yu-Chih; Darling, Seth B.
- Advanced Materials, Vol. 22, Issue 45, p. 5129-5133
Sequential infiltration synthesis for advanced lithography
patent, March 2015
- Darling, Seth B.; Elam, Jeffrey W.; Tseng, Yu-Chih
- US Patent Document 8,980,418
Low-temperature fabrication of single-crystal ZnO nanopillar photonic bandgap structures
journal, March 2007
- Cui, Jingbiao; Gibson, Ursula
- Nanotechnology, Vol. 18, Issue 15
Electrical and structural properties of ZnO synthesized via infiltration of lithographically defined polymer templates
journal, November 2015
- Nam, Chang-Yong; Stein, Aaron; Kisslinger, Kim
- Applied Physics Letters, Vol. 107, Issue 20
Electroluminescence from Localized Defects in Zinc Oxide: Toward Electrically Driven Single Photon Sources at Room Temperature
journal, March 2015
- Choi, Sumin; Berhane, Amanuel M.; Gentle, Angus
- ACS Applied Materials & Interfaces, Vol. 7, Issue 10
Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
journal, July 2011
- Tseng, Yu-Chih; Peng, Qing; Ocola, Leonidas E.
- The Journal of Physical Chemistry C, Vol. 115, Issue 36, p. 17725-17729
Sequential Vapor Infiltration of Metal Oxides into Sacrificial Polyester Fibers: Shape Replication and Controlled Porosity of Microporous/Mesoporous Oxide Monoliths
journal, August 2011
- Gong, Bo; Peng, Qing; Jur, Jesse S.
- Chemistry of Materials, Vol. 23, Issue 15
Low-Temperature Growth of SnO 2 Nanorod Arrays and Tunable n-p-n Sensing Response of a ZnO/SnO 2 Heterojunction for Exclusive Hydrogen Sensors
journal, May 2011
- Huang, Hui; Gong, Hua; Chow, Chee Lap
- Advanced Functional Materials, Vol. 21, Issue 14
ZnO-based resonant cavity enhanced metal–semiconductor–metal ultraviolet photodetectors
journal, January 2013
- Lee, Hsin-Ying; Hsu, Yu-Ting; Lee, Ching-Ting
- Solid-State Electronics, Vol. 79
Effects of continuous annealing on the performance of ZnO based metal-semiconductor-metal ultraviolet photodetectors
journal, May 2014
- Tian, Chunguang; Jiang, Dayong; Zhao, Yajun
- Materials Science and Engineering: B, Vol. 184