Precision surface measurement in a vacuum
Abstract
Methods and related equipment for dynamic on-axis in-situ interferometry where the reference surface is positioned in an vacuum chamber. The systems use a wavelength shifting, or a phase shifting interferometer that allows the freedom to eliminate the need to step the cavity length physically with the reference surface, allowing the reference surface to be placed inside the vacuum chamber.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1497691
- Patent Number(s):
- 10151574
- Application Number:
- 15/648,154
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2017 Jul 12
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Conley, Raymond P., Qian, Jun, Erdmann, Mark J., Kasman, Elina, Assoufid, Lahsen, and Izzo, Scott J. Precision surface measurement in a vacuum. United States: N. p., 2018.
Web.
Conley, Raymond P., Qian, Jun, Erdmann, Mark J., Kasman, Elina, Assoufid, Lahsen, & Izzo, Scott J. Precision surface measurement in a vacuum. United States.
Conley, Raymond P., Qian, Jun, Erdmann, Mark J., Kasman, Elina, Assoufid, Lahsen, and Izzo, Scott J. Tue .
"Precision surface measurement in a vacuum". United States. https://www.osti.gov/servlets/purl/1497691.
@article{osti_1497691,
title = {Precision surface measurement in a vacuum},
author = {Conley, Raymond P. and Qian, Jun and Erdmann, Mark J. and Kasman, Elina and Assoufid, Lahsen and Izzo, Scott J.},
abstractNote = {Methods and related equipment for dynamic on-axis in-situ interferometry where the reference surface is positioned in an vacuum chamber. The systems use a wavelength shifting, or a phase shifting interferometer that allows the freedom to eliminate the need to step the cavity length physically with the reference surface, allowing the reference surface to be placed inside the vacuum chamber.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 11 00:00:00 EST 2018},
month = {Tue Dec 11 00:00:00 EST 2018}
}
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