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Title: Precision surface measurement in a vacuum

Abstract

Methods and related equipment for dynamic on-axis in-situ interferometry where the reference surface is positioned in an vacuum chamber. The systems use a wavelength shifting, or a phase shifting interferometer that allows the freedom to eliminate the need to step the cavity length physically with the reference surface, allowing the reference surface to be placed inside the vacuum chamber.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1497691
Patent Number(s):
10,151,574
Application Number:
15/648,154
Assignee:
UChicago Argonne, LLC (Chicago, IL) ANL
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2017 Jul 12
Country of Publication:
United States
Language:
English

Citation Formats

Conley, Raymond P., Qian, Jun, Erdmann, Mark J., Kasman, Elina, Assoufid, Lahsen, and Izzo, Scott J. Precision surface measurement in a vacuum. United States: N. p., 2018. Web.
Conley, Raymond P., Qian, Jun, Erdmann, Mark J., Kasman, Elina, Assoufid, Lahsen, & Izzo, Scott J. Precision surface measurement in a vacuum. United States.
Conley, Raymond P., Qian, Jun, Erdmann, Mark J., Kasman, Elina, Assoufid, Lahsen, and Izzo, Scott J. Tue . "Precision surface measurement in a vacuum". United States. https://www.osti.gov/servlets/purl/1497691.
@article{osti_1497691,
title = {Precision surface measurement in a vacuum},
author = {Conley, Raymond P. and Qian, Jun and Erdmann, Mark J. and Kasman, Elina and Assoufid, Lahsen and Izzo, Scott J.},
abstractNote = {Methods and related equipment for dynamic on-axis in-situ interferometry where the reference surface is positioned in an vacuum chamber. The systems use a wavelength shifting, or a phase shifting interferometer that allows the freedom to eliminate the need to step the cavity length physically with the reference surface, allowing the reference surface to be placed inside the vacuum chamber.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {12}
}

Patent:

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