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Title: Trimming method for microresonators and microresonators made thereby

Abstract

A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material deposited on a facial surface of the element. In one instance, the resonance of the element can be adjusting by using a feedback loop to control annealing of the deposited film.

Inventors:
; ; ;
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1496207
Patent Number(s):
10148244
Application Number:
15/265,340
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2016 Sep 14
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Henry, Michael David, Nguyen, Janet, Eichenfield, Matt, and Olsson, Roy H. Trimming method for microresonators and microresonators made thereby. United States: N. p., 2018. Web.
Henry, Michael David, Nguyen, Janet, Eichenfield, Matt, & Olsson, Roy H. Trimming method for microresonators and microresonators made thereby. United States.
Henry, Michael David, Nguyen, Janet, Eichenfield, Matt, and Olsson, Roy H. Tue . "Trimming method for microresonators and microresonators made thereby". United States. https://www.osti.gov/servlets/purl/1496207.
@article{osti_1496207,
title = {Trimming method for microresonators and microresonators made thereby},
author = {Henry, Michael David and Nguyen, Janet and Eichenfield, Matt and Olsson, Roy H.},
abstractNote = {A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material deposited on a facial surface of the element. In one instance, the resonance of the element can be adjusting by using a feedback loop to control annealing of the deposited film.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {12}
}

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Works referenced in this record:

High-Q mechanical tuning of MEMS resonators using a metal deposition - annealing technique
conference, January 2005

  • Courcimault, C. G.; Allen, M. G.
  • The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
  • https://doi.org/10.1109/SENSOR.2005.1496557

Wafer-level packaging of aluminum nitride RF MEMS filters
conference, May 2015


Frequency Tuning of $\hbox{VO}_{2}$ -Coated Buckled Microbridges
journal, June 2011


Resonant Frequency Behavior of Silicon Cantilevers Coated With Nanostructured and Microcrystalline VO $_2$ Films
journal, May 2010


Frequency Trimming of Aluminum Nitride Microresonators Using Rapid Thermal Annealing
journal, June 2014


Thermomechanical properties and mechanical stresses of Ge2Sb2Te5 films in phase-change random access memory
journal, November 2008