Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals

Nordquist, Christopher; Griffin, Benjamin; Dyck, Christopher; Eichenfield, Matt; Wojciechowski, Kenneth; Olsson, Roy H.; Siddiqui, Aleem; Henry, Michael David

Title: Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals

Abstract

A radio frequency (RF) receiver comprises a passive impedance transforming voltage amplifier and a resonant, latching micromechanical switch having a deflectable bridge, an RF actuation electrode receivingly connected to the amplifier, and a DC bias electrode positioned to latch the switch in a closed position by electrostatic attraction when energized by a suitable voltage. The bridge is configured with a mechanical mode of vibration that periodically urges the switch toward the closed position.

Inventors:: Nordquist, Christopher; Griffin, Benjamin; Dyck, Christopher; Eichenfield, Matt; Wojciechowski, Kenneth; Olsson, Roy H.; Siddiqui, Aleem; Henry, Michael David

Issue Date:: 2018-11-27

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1495210

Patent Number(s):: 10141495

Application Number:: 15/843,355

Assignee:: National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01H - ELECTRIC SWITCHES

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01H - ELECTRIC SWITCHES
H01H2001/0063 - {having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force}
H01H2059/0036 - {Movable armature with higher resonant frequency for faster switching}
H01H3/32 - Driving mechanisms, i.e. for transmitting driving force to the contacts
H01H59/0009 - {making use of micromechanics}

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
H03H2009/155 - {using MEMS techniques}
H03H9/0004 - {Impedance-matching networks
H03H9/0009 - {using surface acoustic wave devices}
H03H9/02259 - {Driving or detection means}
H03H9/02275 - {Comb electrodes}

H - ELECTRICITY H04 - ELECTRIC COMMUNICATION TECHNIQUE H04B - TRANSMISSION
H04B1/1615 - {Switching on

Show less

DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 0017 Dec 15

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION

Citation Formats


                    Nordquist, Christopher, Griffin, Benjamin, Dyck, Christopher, Eichenfield, Matt, Wojciechowski, Kenneth, Olsson, Roy H., Siddiqui, Aleem, and Henry, Michael David. Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals.  United States: N. p., 2018. 
        Web.

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                    Nordquist, Christopher, Griffin, Benjamin, Dyck, Christopher, Eichenfield, Matt, Wojciechowski, Kenneth, Olsson, Roy H., Siddiqui, Aleem, & Henry, Michael David. Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals.  United States.

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                    Nordquist, Christopher, Griffin, Benjamin, Dyck, Christopher, Eichenfield, Matt, Wojciechowski, Kenneth, Olsson, Roy H., Siddiqui, Aleem, and Henry, Michael David. Tue .  
        "Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals".  United States.  https://www.osti.gov/servlets/purl/1495210.

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@article{osti_1495210,

  title        = {Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals},

  author       = {Nordquist, Christopher and Griffin, Benjamin and Dyck, Christopher and Eichenfield, Matt and Wojciechowski, Kenneth and Olsson, Roy H. and Siddiqui, Aleem and Henry, Michael David},

  abstractNote = {A radio frequency (RF) receiver comprises a passive impedance transforming voltage amplifier and a resonant, latching micromechanical switch having a deflectable bridge, an RF actuation electrode receivingly connected to the amplifier, and a DC bias electrode positioned to latch the switch in a closed position by electrostatic attraction when energized by a suitable voltage. The bridge is configured with a mechanical mode of vibration that periodically urges the switch toward the closed position.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2018},

  month        = {11}

}

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Title: Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals

Abstract

Citation Formats

Metal micromechanical filter-power amplifier utilizing a displacement-amplifying resonant switch conference, June 2013

Dependence of the resonant frequency of micromachined gold microbeams on polarisation voltage journal, August 1998

Single-ended-to-differential and differential-to-differential channel-select filters based on piezoelectric AlN contour-mode MEMS resonators conference, June 2010

A DC to 10-GHz 6-b RF MEMS time delay circuit journal, May 2006

Variable capacitance device and portable phone patent, May 2011

Method of transmission and device to carry out said method patent, September 2003

Near-kT switching-energy lateral NEMS switch conference, January 2010

Piezoelectric RF resonant voltage amplifiers for IoT applications conference, May 2016

Analysis of resonant pull-in of micro-electromechanical oscillators journal, August 2015

Fabrication and characterization of ohmic contacting RF MEMS switches conference, January 2004

Microresonant impedance transformers conference, September 2009

Thin-Film Piezoelectric-on-Silicon Resonant Transformers journal, December 2013

Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators journal, October 2007

Dispersive antenna for RFID tags patent, September 2012

A nanomechanical switch for integration with CMOS logic journal, July 2009

RFID MEMS Sensor Concept Based on Intermodulation Distortion journal, December 2009

RF MEMS Switches With $\hbox{RuO}_{2}$ –$\hbox{Au}$ Contacts Cycled to 10 Billion Cycles journal, June 2013

Dynamic Pull-In of Parallel-Plate and Torsional Electrostatic MEMS Actuators journal, August 2006

Zero quiescent power VLF mechanical communication receiver conference, June 2015

RF actuation of capacitive MEMS switches conference, January 2003

Design, fabrication, and measurement of RF IDTs for efficient coupling to wavelength-scale structures in thin piezoelectric films conference, July 2013

Sensor Assemblies patent-application, September 2005

Self-limiting filters for band-selective interferer rejection or cognitive receiver protection patent, March 2017

RF Passive Components Based on Aluminum Nitride Cross-Sectional Lamé-Mode MEMS Resonators journal, January 2017

Resonant Pull-in for a variable gap lateral contact RF MEMS switch conference, January 2010

Dynamic Pull-In and Switching for Sub-Pull-In Voltage Electrostatic Actuation conference, June 2007

A high FoM lithium niobate resonant transformer for passive voltage amplification conference, June 2017

Zero power radio frequency receiver patent, October 2017

Metal micromechanical filter-power amplifier utilizing a displacement-amplifying resonant switch
conference, June 2013

Dependence of the resonant frequency of micromachined gold microbeams on polarisation voltage
journal, August 1998

Single-ended-to-differential and differential-to-differential channel-select filters based on piezoelectric AlN contour-mode MEMS resonators
conference, June 2010

A DC to 10-GHz 6-b RF MEMS time delay circuit
journal, May 2006

Variable capacitance device and portable phone
patent, May 2011

Method of transmission and device to carry out said method
patent, September 2003

Near-kT switching-energy lateral NEMS switch
conference, January 2010

Piezoelectric RF resonant voltage amplifiers for IoT applications
conference, May 2016

Analysis of resonant pull-in of micro-electromechanical oscillators
journal, August 2015

Fabrication and characterization of ohmic contacting RF MEMS switches
conference, January 2004

Microresonant impedance transformers
conference, September 2009

Thin-Film Piezoelectric-on-Silicon Resonant Transformers
journal, December 2013

Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators
journal, October 2007

Dispersive antenna for RFID tags
patent, September 2012

A nanomechanical switch for integration with CMOS logic
journal, July 2009

RFID MEMS Sensor Concept Based on Intermodulation Distortion
journal, December 2009

RF MEMS Switches With $\hbox{RuO}_{2}$ –$\hbox{Au}$ Contacts Cycled to 10 Billion Cycles
journal, June 2013

Dynamic Pull-In of Parallel-Plate and Torsional Electrostatic MEMS Actuators
journal, August 2006

Zero quiescent power VLF mechanical communication receiver
conference, June 2015

RF actuation of capacitive MEMS switches
conference, January 2003

Design, fabrication, and measurement of RF IDTs for efficient coupling to wavelength-scale structures in thin piezoelectric films
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Sensor Assemblies
patent-application, September 2005

Self-limiting filters for band-selective interferer rejection or cognitive receiver protection
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RF Passive Components Based on Aluminum Nitride Cross-Sectional Lamé-Mode MEMS Resonators
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conference, January 2010

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A high FoM lithium niobate resonant transformer for passive voltage amplification
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