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Title: Digital electron amplifier with anode readout devices and methods of fabrication

Abstract

Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition ("ALD") fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.

Inventors:
;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1493339
Patent Number(s):
10,121,642
Application Number:
15/952,973
Assignee:
UChicago Argonne, LLC (Chicago, IL) ANL
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2018 Apr 13
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Mane, Anil U., and Elam, Jeffrey W. Digital electron amplifier with anode readout devices and methods of fabrication. United States: N. p., 2018. Web.
Mane, Anil U., & Elam, Jeffrey W. Digital electron amplifier with anode readout devices and methods of fabrication. United States.
Mane, Anil U., and Elam, Jeffrey W. Tue . "Digital electron amplifier with anode readout devices and methods of fabrication". United States. https://www.osti.gov/servlets/purl/1493339.
@article{osti_1493339,
title = {Digital electron amplifier with anode readout devices and methods of fabrication},
author = {Mane, Anil U. and Elam, Jeffrey W.},
abstractNote = {Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition ("ALD") fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {11}
}

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