Method and system for preparing polycrystalline group III metal nitride
Abstract
A process of preparing polycrystalline group III nitride chunks comprising the steps of (a) placing a group III metal inside a source chamber; (b) flowing a halogen-containing gas over the group III metal to form a group III metal halide; (c) contacting the group III metal halide with a nitrogen-containing gas in a deposition chamber containing a foil, the foil comprising at least one of Mo, W, Ta, Pd, Pt, Ir, or Re; (d) forming a polycrystalline group III nitride layer on the foil within the deposition chamber; (e) removing the polycrystalline group III nitride layer from the foil; and (f) comminuting the polycrystalline group III nitride layer to form the polycrystalline group III nitride chunks, wherein the removing and the comminuting are performed in any order or simultaneously.
- Inventors:
- Issue Date:
- Research Org.:
- SLT TECHNOLOGIES, INC., Los Angeles, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1485293
- Patent Number(s):
- 10094017
- Application Number:
- 15/011,266
- Assignee:
- SLT TECHNOLOGIES, INC. (Los Angeles, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS
C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01P - INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- DOE Contract Number:
- AR0000020
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2016 Jan 29
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 36 MATERIALS SCIENCE
Citation Formats
Pocius, Douglas W., Kamber, Derrick S., D'Evelyn, Mark P., and Cook, Jonathan D. Method and system for preparing polycrystalline group III metal nitride. United States: N. p., 2018.
Web.
Pocius, Douglas W., Kamber, Derrick S., D'Evelyn, Mark P., & Cook, Jonathan D. Method and system for preparing polycrystalline group III metal nitride. United States.
Pocius, Douglas W., Kamber, Derrick S., D'Evelyn, Mark P., and Cook, Jonathan D. Tue .
"Method and system for preparing polycrystalline group III metal nitride". United States. https://www.osti.gov/servlets/purl/1485293.
@article{osti_1485293,
title = {Method and system for preparing polycrystalline group III metal nitride},
author = {Pocius, Douglas W. and Kamber, Derrick S. and D'Evelyn, Mark P. and Cook, Jonathan D.},
abstractNote = {A process of preparing polycrystalline group III nitride chunks comprising the steps of (a) placing a group III metal inside a source chamber; (b) flowing a halogen-containing gas over the group III metal to form a group III metal halide; (c) contacting the group III metal halide with a nitrogen-containing gas in a deposition chamber containing a foil, the foil comprising at least one of Mo, W, Ta, Pd, Pt, Ir, or Re; (d) forming a polycrystalline group III nitride layer on the foil within the deposition chamber; (e) removing the polycrystalline group III nitride layer from the foil; and (f) comminuting the polycrystalline group III nitride layer to form the polycrystalline group III nitride chunks, wherein the removing and the comminuting are performed in any order or simultaneously.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {10}
}
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