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Title: Stretchable and foldable electronic devices

Abstract

Disclosed herein are stretchable, foldable and optionally printable, processes for making devices and devices such as semiconductors, electronic circuits and components thereof that are capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Strain isolation layers provide good strain isolation to functional device layers. Multilayer devices are constructed to position a neutral mechanical surface coincident or proximate to a functional layer having a material that is susceptible to strain-induced failure. Neutral mechanical surfaces are positioned by one or more layers having a property that is spatially inhomogeneous, such as by patterning any of the layers of the multilayer device.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1478755
Patent Number(s):
10064269
Application Number:
14/521,319
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B33 - ADDITIVE MANUFACTURING TECHNOLOGY B33Y - ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
FG02-91ER45439; FG02-07ER46471; FG02-07ER46453
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Oct 22
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats

Rogers, John A., Huang, Yonggang, Ko, Heung Cho, Stoykovich, Mark, Choi, Won Mook, Song, Jizhou, Ahn, Jong Hyun, and Kim, Dae Hyeong. Stretchable and foldable electronic devices. United States: N. p., 2018. Web.
Rogers, John A., Huang, Yonggang, Ko, Heung Cho, Stoykovich, Mark, Choi, Won Mook, Song, Jizhou, Ahn, Jong Hyun, & Kim, Dae Hyeong. Stretchable and foldable electronic devices. United States.
Rogers, John A., Huang, Yonggang, Ko, Heung Cho, Stoykovich, Mark, Choi, Won Mook, Song, Jizhou, Ahn, Jong Hyun, and Kim, Dae Hyeong. Tue . "Stretchable and foldable electronic devices". United States. https://www.osti.gov/servlets/purl/1478755.
@article{osti_1478755,
title = {Stretchable and foldable electronic devices},
author = {Rogers, John A. and Huang, Yonggang and Ko, Heung Cho and Stoykovich, Mark and Choi, Won Mook and Song, Jizhou and Ahn, Jong Hyun and Kim, Dae Hyeong},
abstractNote = {Disclosed herein are stretchable, foldable and optionally printable, processes for making devices and devices such as semiconductors, electronic circuits and components thereof that are capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Strain isolation layers provide good strain isolation to functional device layers. Multilayer devices are constructed to position a neutral mechanical surface coincident or proximate to a functional layer having a material that is susceptible to strain-induced failure. Neutral mechanical surfaces are positioned by one or more layers having a property that is spatially inhomogeneous, such as by patterning any of the layers of the multilayer device.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {8}
}

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patent, April 2004


Structure and photoluminescence of ZnSe nanoribbons grown by metal organic chemical vapor deposition
journal, April 2004


Nanomaterial transfer using hot embossing for flexible electronic devices
journal, February 2006


Embedded thermal conductors for semiconductor chips
patent, September 1999


Ordered Mesoporous Polymers of Tunable Pore Size from Colloidal Silica Templates
journal, February 1999


Formation and characterization of silicon films on flexible polymer substrates
journal, April 2005


High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond
journal, September 2002


Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates
journal, February 2002


Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements
patent-application, December 2009


Synthesis and Optical Properties of CdS Nanoribbons
journal, October 2005


Fabrication of Metal Nanowires Using Microcontact Printing
journal, July 2003


Low emitter resistance contacts to GaAs high speed HBT
patent, December 2003


Nonlinear analyses of wrinkles in a film bonded to a compliant substrate
journal, September 2005


Flexible active-matrix displays and shift registers based on solution-processed organic transistors
journal, January 2004


Self-aligned self-assembly process for fabricating organic thin-film transistors
journal, September 2004


Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing
journal, September 2003


Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching
journal, February 1999


Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
journal, November 2004


Design and Performance of Thin Metal Film Interconnects for Skin-Like Electronic Circuits
journal, April 2004


High-speed strained-single-crystal-silicon thin-film transistors on flexible polymers
journal, July 2006


Method of utilizing a contact printing stamp
patent, May 2008


High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates
journal, November 2003


PbSe Nanocrystal Solids for n- and p-Channel Thin Film Field-Effect Transistors
journal, October 2005


Heterogeneous Three-Dimensional Electronics by Use of Printed Semiconductor Nanomaterials
journal, December 2006


Heterogeneous materials integration: compliant substrates to active device and materials packaging
journal, December 2001


Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design
journal, February 1998


Elastomeric Transistor Stamps: Reversible Probing of Charge Transport in Organic Crystals
journal, March 2004


All-Polymer Field-Effect Transistor Realized by Printing Techniques
journal, September 1994


Cooling system for a semiconductor device and method of fabricating same
patent, January 2007


New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region
journal, July 1996


All-Inorganic Field Effect Transistors Fabricated by Printing
journal, October 1999


A buckling-based metrology for measuring the elastic moduli of polymeric thin films
journal, July 2004


Crystallographic alignment of high-density gallium nitride nanowire arrays
journal, July 2004


AlGaN/GaN HEMTs-an overview of device operation and applications
journal, June 2002


Two-versus three-dimensional quantum confinement in indium phosphide wires and dots
journal, July 2003


Fabrication of solid-state nanopores with single-nanometre precision
journal, July 2003


An Orientation-Controlled Pentacene Film Aligned by Photoaligned Polyimide for Organic Thin-Film Transistor Applications
journal, August 2004


Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology
journal, December 2003


Backplanes for display applications, and components for use therein
patent, October 2006


Recent Advances in Semiconductor Performance and Printing Processes for Organic Transistor-Based Electronics
journal, October 2004


Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates
journal, September 2005


Microsolidics: Fabrication of Three-Dimensional Metallic Microstructures in Poly(dimethylsiloxane)
journal, March 2007


Bipolar transistor with lattice matched base layer
patent, March 2007


A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques
journal, October 2006


Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n–GaN
journal, August 2002


Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport
journal, January 2003


Colloidal nanocrystal synthesis and the organic–inorganic interface
journal, September 2005


Mechanically Strained Strained-Si NMOSFETs
journal, January 2004


Nanoscale Hydrophobic Recovery: A Chemical Force Microscopy Study of UV/Ozone-Treated Cross-Linked Poly(dimethylsiloxane)
journal, February 2004


One-Dimensional Assemblies of Nanoparticles: Preparation, Properties, and Promise
journal, April 2005


Active matrix type display device and method of manufacturing the same
patent-application, April 2006


Air-Stable All-Inorganic Nanocrystal Solar Cells Processed from Solution
journal, October 2005


Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors
journal, October 1997


Electric Field Effect in Atomically Thin Carbon Films
journal, October 2004


Devices and methods for pattern generation by ink lithography
patent-application, March 2008


GaAs Readied for High-Speed Microcircuits
journal, January 1983


Complementary carbon nanotube-gated carbon nanotube thin-film transistor
journal, February 2006


Fully elastic interconnects on nanopatterned elastomeric substrates
journal, August 2006


Apparatuses and methods for flexible displays
patent, February 2005


Guided molecular self-assembly: a review of recent efforts
journal, March 2003


Method and apparatus for fabricating self-assembling microstructures
patent, October 1998


Dependence of Interface State Density on Silicon Thermal Oxidation Process Variables
journal, January 1979


Shape-and-solder-directed self-assembly to package semiconductor device segments
journal, October 2004


Inkjet Printing of Polymers: State of the Art and Future Developments
journal, February 2004


Nanoscale Science and Technology: Building a Big Future from Small Things
journal, July 2003


Stars and stripes. Nanoscale misfit dislocation patterns on surfaces
journal, January 2002


Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap
journal, June 2003


Methods and apparatuses for improved flow in performing fluidic self assembly
patent, March 2003


High-Performance Plastic Transistors Fabricated by Printing Techniques
journal, June 1997


Cathodoluminescence Properties of Undoped and Zn-Doped AlxGa1-xN Grown by Metalorganic Vapor Phase Epitaxy
journal, August 1991


Methods of forming two-sided HDMI interconnect structures
patent, November 1997


Patterning Spherical Surfaces at the Two-Hundred-Nanometer Scale Using Soft Lithography
journal, April 2003


A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates
journal, January 2006


Block-by-Block Growth of Single-Crystalline Si/SiGe Superlattice Nanowires
journal, February 2002


Colloidal Inks for Directed Assembly of 3-D Periodic Structures
journal, July 2002


Mechanical resistance of a single-crystal silicon wafer
patent, June 2003


Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films
journal, September 2004


Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment
journal, April 2006


Solution–Liquid–Solid Growth of Soluble GaAs Nanowires
journal, March 2003


High pressure–high temperature growth of diamond crystals using split sphere apparatus
journal, November 2005


A study on formation of Al and Al2O3 on the porous paper by DC magnetron sputtering
journal, July 2003


On the relationship between the temperature coefficient of resistance and the thermal conductance of integrated metal resistors
journal, October 2004


A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions
journal, December 2003


Structures of indium oxide nanobelts
journal, October 2003


Screen printed organic thin film transistors (OTFTs) on a flexible substrate
conference, December 2001


Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors
journal, November 2005


Morphology of nanostructured materials
journal, January 2002


Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification
journal, August 1998


Tailored Micropatterns through Weak Polyelectrolyte Stamping
journal, March 2003


Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
journal, May 1997


Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy
journal, December 2002


Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps
journal, October 2004


Vertical Etching of Silicon at very High Aspect Ratios
journal, August 1979


Methods for fabricating a multiple modular assembly
patent, November 2001


Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate
journal, March 2006


Flexible displays
patent, October 2003


Patterning of diamond microstructures on Si substrate by bulk and surface micromachining
journal, January 2003


Ink-Jet Printing of Binders for Ceramic Components
journal, April 2002


Systems, Methods, and Devices Using Stretchable or Flexible Electronics for Medical Applications
patent-application, November 2010


Nanotubes of the disulfides of groups 4 and 5 metals
journal, January 2002


Thin-film GaAs epitaxial lift-off solar cells for space applications
journal, April 2005

  • Schermer, J. J.; Mulder, P.; Bauhuis, G. J.
  • Progress in Photovoltaics: Research and Applications, Vol. 13, Issue 7, p. 587-596
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An Elastically Stretchable TFT Circuit
journal, December 2004


Bendable single crystal silicon thin film transistors formed by printing on plastic substrates
journal, February 2005


Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors
journal, November 2005


CMOL FPGA: a reconfigurable architecture for hybrid digital circuits with two-terminal nanodevices
journal, April 2005


Colloidal nanocrystal heterostructures with linear and branched topology
journal, July 2004


Strained semiconductor by full wafer bonding
patent-application, November 2006


Synthetic Control of the Diameter and Length of Single Crystal Semiconductor Nanowires
journal, May 2001


Stretchable and elastic interconnects
patent-application, September 2004


Electric-field assisted assembly and alignment of metallic nanowires
journal, August 2000


Surface mount and flip chip technology for total integrated circuit isolation
patent, May 1998


Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution
journal, August 2004


Scalable Interconnection and Integration of Nanowire Devices without Registration
journal, May 2004


Stretchable Interconnects for Elastic Electronic Surfaces
journal, August 2005


Mechanism for stamp collapse in soft lithography
journal, December 2005


Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon
journal, January 2002


Nanotechnology: High-speed integrated nanowire circuits
journal, April 2005


Free-standing Single Crystal Silicon Nanoribbons
journal, November 2001


Toward Paperlike Displays
journal, February 2001


Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
journal, July 2002


Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation
journal, October 2002


Method and apparatus for transferring blocks
patent, May 2004


III–nitrides: Growth, characterization, and properties
journal, February 2000


Measurement of nanomechanical resonant structures in single-crystal silicon
journal, December 1998

  • Carr, D. W.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 6, p. 3821-3824
  • https://doi.org/10.1116/1.590416

Functional nanoparticle architectures for sensoric, optoelectronic, and bioelectronic applications
journal, January 2002


Sequential shape-and-solder-directed self-assembly of functional microsystems
journal, August 2004


Flexible a-Si:H Position-Sensitive Detectors
journal, July 2005


Atomic-Step-Templated Formation of Single Wall Carbon Nanotube Patterns
journal, November 2004


Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography
journal, April 2000


Interfacial Chemistries for Nanoscale Transfer Printing
journal, July 2002


High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates
journal, July 2005


Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements
patent-application, July 2014


Polymer-controlled growth of Sb2Se3 nanoribbons via a hydrothermal process
journal, May 2003


Ultrathin Silicon Circuits With Strain-Isolation Layers and Mesh Layouts for High-Performance Electronics on Fabric, Vinyl, Leather, and Paper
journal, September 2009


Buckled and Wavy Ribbons of GaAs for High-Performance Electronics on Elastomeric Substrates
journal, November 2006


Vapor-liquid-solid mechanism of single crystal growth
journal, March 1964


Conformable Actively Multiplexed High-Density Surface Electrode Array for Brain Interfacing
patent-application, March 2013


Design and Performance of Inkjet Print Heads for Non-Graphic-Arts Applications
journal, November 2003


Inkjet Printing of Functional Materials
journal, November 2003


One-Dimensional Nanostructures: Synthesis, Characterization, and Applications
journal, March 2003


Deformable organic devices
patent-application, October 2005


High-mobility polymer gate dielectric pentacene thin film transistors
journal, November 2002


Controlled Growth of Large-Area, Uniform, Vertically Aligned Arrays of α-Fe2O3 Nanobelts and Nanowires
journal, January 2005


Photon confinement in high-efficiency, thin-film III–V solar cells obtained by epitaxial lift-off
journal, July 2006


Holographic photonic crystals with diamond symmetry
journal, November 2003


Application of carbon nanotubes to field emission displays
journal, February 2001


A Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates
patent-application, December 2006


Analog and digital circuits using organic thin-film transistors on polyester substrates
journal, November 2000


3-D ICs: a novel chip design for improving deep-submicrometer interconnect performance and systems-on-chip integration
journal, May 2001


High-κ dielectrics for advanced carbon-nanotube transistors and logic gates
journal, November 2002


One-dimensional hole gas in germanium/silicon nanowire heterostructures
journal, July 2005


A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell
journal, January 2004


Deformable Silicon Electronics Using Segmentation and Flexible Interconnect
conference, May 2007


Extraordinary Mobility in Semiconducting Carbon Nanotubes
journal, January 2004


Collapse of stamps for soft lithography due to interfacial adhesion
journal, April 2005


Stretchable interconnects using stress gradient films
patent, June 2004


Printed plastic electronics and paperlike displays
journal, August 2002


Solution-Liquid-Solid Growth of Crystalline III-V Semiconductors: An Analogy to Vapor-Liquid-Solid Growth
journal, December 1995


Stretchable and Foldable Silicon Integrated Circuits
journal, April 2008


Room-Temperature Ultraviolet Nanowire Nanolasers
journal, June 2001


Thermal interface material with carbon nanotubes
patent, August 2007


Low-Temperature Growth and Photoluminescence Property of ZnS Nanoribbons
journal, October 2005