Digital electron amplifier with anode readout devices and methods of fabrication

Title: Digital electron amplifier with anode readout devices and methods of fabrication

Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition ("ALD") fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.

Inventors:: Mane, Anil U.; Elam, Jeffrey W.

Issue Date:: 2018-08-28

OSTI Identifier:: 1478753

Assignee:: UChicago Argonne, LLC (Chicago, IL) ANL

Patent Number(s):: 10,062,555

Application Number:: 14/694,935

Contract Number:: AC02-06CH11357

Resource Relation:: Patent File Date: 2015 Apr 23

Research Org:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

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Use of flat panel microchannel photomultipliers in sampling calorimeters with timing
patent, December 2013

Frisch, Henry; Genat, Jean-Francois; Grabas, Herve
US Patent Document 8,604,440
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8604440

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