Digital electron amplifier with anode readout devices and methods of fabrication
Abstract
Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition ("ALD") fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1478753
- Patent Number(s):
- 10,062,555
- Application Number:
- 14/694,935
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Apr 23
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Mane, Anil U., and Elam, Jeffrey W. Digital electron amplifier with anode readout devices and methods of fabrication. United States: N. p., 2018.
Web.
Mane, Anil U., & Elam, Jeffrey W. Digital electron amplifier with anode readout devices and methods of fabrication. United States.
Mane, Anil U., and Elam, Jeffrey W. Tue .
"Digital electron amplifier with anode readout devices and methods of fabrication". United States. https://www.osti.gov/servlets/purl/1478753.
@article{osti_1478753,
title = {Digital electron amplifier with anode readout devices and methods of fabrication},
author = {Mane, Anil U. and Elam, Jeffrey W.},
abstractNote = {Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition ("ALD") fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {8}
}
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