Digital electron amplifier with anode readout devices and methods of fabrication
Abstract
Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition ("ALD") fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1478753
- Patent Number(s):
- 10062555
- Application Number:
- 14/694,935
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Apr 23
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Mane, Anil U., and Elam, Jeffrey W. Digital electron amplifier with anode readout devices and methods of fabrication. United States: N. p., 2018.
Web.
Mane, Anil U., & Elam, Jeffrey W. Digital electron amplifier with anode readout devices and methods of fabrication. United States.
Mane, Anil U., and Elam, Jeffrey W. Tue .
"Digital electron amplifier with anode readout devices and methods of fabrication". United States. https://www.osti.gov/servlets/purl/1478753.
@article{osti_1478753,
title = {Digital electron amplifier with anode readout devices and methods of fabrication},
author = {Mane, Anil U. and Elam, Jeffrey W.},
abstractNote = {Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition ("ALD") fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {8}
}
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Works referenced in this record:
Multilayer microelectronic photomultiplier device with a stacked series of dynode and insulating layers
patent, April 1994
- Shimabukuro, Randy L.; Russell, Stephen D.
- US Patent Document 5,306,904
Micro-fabricated electron multipliers
patent, October 1996
- Then, Alan M.; Snider, Gregory L.; Soave, Robert J.
- US Patent Document 5,568,013
Micro-dynode integrated electron multiplier
patent, May 2002
- Beetz, Charles Pershing; Steinbeck, John; Boertsler, Robert W.
- US Patent Document 6,384,519
Fully-integrated in-plane micro-photomultiplier
patent, May 2006
- Goodberlet, James G.; Moorthy, Vemura H. S.
- US Patent Document 7,049,747
Micro-engineered electron multipliers
patent, November 2007
- Syms, Richard
- US Patent Document 7,294,954
Use of flat panel microchannel photomultipliers in sampling calorimeters with timing
patent, December 2013
- Frisch, Henry J.; Genat, Jean-Francois; Grabas, Herve
- US Patent Document 8,604,440
Microchannel plate and its manufacturing method
patent, May 2014
- Jarron, Pierre; Wyrsch, Nicolas
- US Patent Document 8,729,447
Tunable resistance coatings
patent, December 2014
- Elam, Jeffrey W.; Mane, Anil U.
- US Patent Document 8,921,799
Microchannel plate detector and methods for their fabrication
patent, March 2015
- Elam, Jeffrey W.; Mane, Anil U.; Peng, Qing
- US Patent Document 8,969,823
Large area detectors and displays
patent-application, January 2007
- Stevens, Robert; Grayer, Geoffrey Howard; Tulloch, Andrew
- US Patent Application 10/551646; 20070007462
Microchannel Plate Detector and Methods for Their Fabrication
patent-application, July 2012
- Elam, Jeffrey W.; Mane, Anil U.; Peng, Qing
- US Patent Application 13/011645; 20120187305
Tunable Resistance Coatings
patent-application, October 2013
- Elam, Jeffrey W.; Mane, Anil U.
- US Patent Application 13/804660; 20130280546