Digital electron amplifier with anode readout devices and methods of fabrication

Title: Digital electron amplifier with anode readout devices and methods of fabrication

Abstract

Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition ("ALD") fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.

Inventors:: Mane, Anil U.; Elam, Jeffrey W.

Issue Date:: 2018-08-28

Research Org.:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1478753

Patent Number(s):: 10062555

Application Number:: 14/694,935

Assignee:: UChicago Argonne, LLC (Chicago, IL)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J43/246 - {Microchannel plates [MCP]

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DOE Contract Number:: AC02-06CH11357

Resource Type:: Patent

Resource Relation:: Patent File Date: 2015 Apr 23

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Mane, Anil U., and Elam, Jeffrey W. Digital electron amplifier with anode readout devices and methods of fabrication.  United States: N. p., 2018. 
        Web.

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                    Mane, Anil U., & Elam, Jeffrey W. Digital electron amplifier with anode readout devices and methods of fabrication.  United States.

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                    Mane, Anil U., and Elam, Jeffrey W. Tue .  
        "Digital electron amplifier with anode readout devices and methods of fabrication".  United States.  https://www.osti.gov/servlets/purl/1478753.

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@article{osti_1478753,

  title        = {Digital electron amplifier with anode readout devices and methods of fabrication},

  author       = {Mane, Anil U. and Elam, Jeffrey W.},

  abstractNote = {Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition ("ALD") fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2018},

  month        = {8}

}

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Works referenced in this record:

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patent, April 1994

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Title: Digital electron amplifier with anode readout devices and methods of fabrication

Abstract

Citation Formats

Multilayer microelectronic photomultiplier device with a stacked series of dynode and insulating layers patent, April 1994

Micro-fabricated electron multipliers patent, October 1996

Micro-dynode integrated electron multiplier patent, May 2002

Fully-integrated in-plane micro-photomultiplier patent, May 2006

Micro-engineered electron multipliers patent, November 2007

Use of flat panel microchannel photomultipliers in sampling calorimeters with timing patent, December 2013

Microchannel plate and its manufacturing method patent, May 2014

Tunable resistance coatings patent, December 2014

Microchannel plate detector and methods for their fabrication patent, March 2015

Large area detectors and displays patent-application, January 2007

Tunable Resistance Coatings patent-application, October 2013

Multilayer microelectronic photomultiplier device with a stacked series of dynode and insulating layers
patent, April 1994

Micro-fabricated electron multipliers
patent, October 1996

Micro-dynode integrated electron multiplier
patent, May 2002

Fully-integrated in-plane micro-photomultiplier
patent, May 2006

Micro-engineered electron multipliers
patent, November 2007

Use of flat panel microchannel photomultipliers in sampling calorimeters with timing
patent, December 2013

Microchannel plate and its manufacturing method
patent, May 2014

Tunable resistance coatings
patent, December 2014

Microchannel plate detector and methods for their fabrication
patent, March 2015

Large area detectors and displays
patent-application, January 2007

Tunable Resistance Coatings
patent-application, October 2013