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Title: Digital electron amplifier with anode readout devices and methods of fabrication

Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition ("ALD") fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.
Inventors:
;
Issue Date:
OSTI Identifier:
1478753
Assignee:
UChicago Argonne, LLC (Chicago, IL) ANL
Patent Number(s):
10,062,555
Application Number:
14/694,935
Contract Number:
AC02-06CH11357
Resource Relation:
Patent File Date: 2015 Apr 23
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE