Process for large-scale ammonothermal manufacturing of gallium nitride boules

Title: Process for large-scale ammonothermal manufacturing of gallium nitride boules

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Large-scale manufacturing of gallium nitride boules using m-plane or wedge-shaped seed crystals can be accomplished using ammonothermal growth methods. Large-area single crystal seed plates are suspended in a rack, placed in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and crystals are grown ammonothermally. The orientation of the m-plane or wedge-shaped seed crystals are chosen to provide efficient utilization of the seed plates and of the volume inside the autoclave or high pressure apparatus.

Inventors:: D'Evelyn, Mark P.; Ehrentraut, Dirk; Kamber, Derrick S.; Downey, Bradley C.

Issue Date:: 2018-07-31

OSTI Identifier:: 1465761

Assignee:: SLT TECHNOLOGIES, INC. (Los Angeles, CA) CHO

Patent Number(s):: 10,036,099

Application Number:: 14/599,335

Contract Number:: SC0006168

Resource Relation:: Patent File Date: 2015 Jan 16

Research Org:: SLT TECHNOLOGIES, INC., Los Angeles, CA (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

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