Process for large-scale ammonothermal manufacturing of gallium nitride boules

Title: Process for large-scale ammonothermal manufacturing of gallium nitride boules

Abstract

Large-scale manufacturing of gallium nitride boules using m-plane or wedge-shaped seed crystals can be accomplished using ammonothermal growth methods. Large-area single crystal seed plates are suspended in a rack, placed in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and crystals are grown ammonothermally. The orientation of the m-plane or wedge-shaped seed crystals are chosen to provide efficient utilization of the seed plates and of the volume inside the autoclave or high pressure apparatus.

Inventors:: D'Evelyn, Mark P.; Ehrentraut, Dirk; Kamber, Derrick S.; Downey, Bradley C.

Issue Date:: 2018-07-31

Research Org.:: SLT TECHNOLOGIES, INC., Los Angeles, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1465761

Patent Number(s):: 10,036,099

Application Number:: 14/599,335

Assignee:: SLT TECHNOLOGIES, INC. (Los Angeles, CA)

DOE Contract Number:: SC0006168

Resource Type:: Patent

Resource Relation:: Patent File Date: 2015 Jan 16

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    D'Evelyn, Mark P., Ehrentraut, Dirk, Kamber, Derrick S., and Downey, Bradley C. Process for large-scale ammonothermal manufacturing of gallium nitride boules.  United States: N. p., 2018. 
        Web.

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                    D'Evelyn, Mark P., Ehrentraut, Dirk, Kamber, Derrick S., & Downey, Bradley C. Process for large-scale ammonothermal manufacturing of gallium nitride boules.  United States.

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                    D'Evelyn, Mark P., Ehrentraut, Dirk, Kamber, Derrick S., and Downey, Bradley C. Tue .  
        "Process for large-scale ammonothermal manufacturing of gallium nitride boules".  United States.  https://www.osti.gov/servlets/purl/1465761.

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@article{osti_1465761,

  title        = {Process for large-scale ammonothermal manufacturing of gallium nitride boules},

  author       = {D'Evelyn, Mark P. and Ehrentraut, Dirk and Kamber, Derrick S. and Downey, Bradley C.},

  abstractNote = {Large-scale manufacturing of gallium nitride boules using m-plane or wedge-shaped seed crystals can be accomplished using ammonothermal growth methods. Large-area single crystal seed plates are suspended in a rack, placed in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and crystals are grown ammonothermally. The orientation of the m-plane or wedge-shaped seed crystals are chosen to provide efficient utilization of the seed plates and of the volume inside the autoclave or high pressure apparatus.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2018},

  month        = {7}

}

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Flip-chip light emitting diode
patent, October 2006

Stokes, Edward; D'Evelyn, Mark; Weaver, Stanton
US Patent Document 7,119,372
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Monolithic light emitting devices based on wide bandgap semiconductor nanostructures and methods for making same
patent, October 2006

Alizadeh, Azar; Sharma, Pradeep; LeBoeuf, Steven
US Patent Document 7,122,827
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7122827

High temperature high pressure capsule for processing materials in supercritical fluids
patent, October 2006

D'Evelyn, Mark; Narang, Kristi; Giddings, Robert
US Patent Document 7,125,453
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Process and apparatus for obtaining bulk monocrystalline gallium-containing nitride
patent, January 2007

Dwili ski, Robert; Doradzi ski, Roman; Garczy ski, Jerzy
US Patent Document 7,160,388
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Process for the continuous production of aligned carbon nanotubes
patent, January 2007

Jacques, David; Andrews, Rodney
US Patent Document 7,160,531
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7160531

Semi-insulating GaN and method of making the same
patent, January 2007

Vaudo, Robert; Xu, Xueping; Brandes, George
US Patent Document 7,170,095
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7170095

Method for reducing defect concentrations in crystals
patent, February 2007

D'Evelyn, Mark; Anthony, Thomas; Arthur, Stephen
US Patent Document 7,175,704
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7175704

Layered substrates for epitaxial processing, and device
patent, April 2007

Ueda, Tetsuzo
US Patent Document 7,198,671
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7198671

Growth of planar reduced dislocation density m-plane gallium nitride by hydride vapor phase epitaxy
patent, April 2007

Haskell, Benjamin; McLaurin, Melvin; DenBaars, Steven
US Patent Document 7,208,393
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7208393

Growth of reduced dislocation density non-polar gallium nitride by hydride vapor phase epitaxy
patent, May 2007

Haskell, Benjamin; Craven, Michael; Fini, Paul
US Patent Document 7,220,658
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7220658

Process and apparatus for obtaining bulk monocrystalline gallium-containing nitride
patent, August 2007

Dwilinski, Robert; Doradzinski, Roman; Sierzfutowski, Leszek
US Patent Document 7,252,712
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7252712

Method and apparatus for zinc oxide single crystal boule growth
patent, October 2007

Wang, Shaoping
US Patent Document 7,279,040
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7279040

LED with series-connected monolithically integrated mesas
patent, October 2007

Eliashevich, Ivan; Bohler, Chris; Shelton, Bryan
US Patent Document 7,285,801
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7285801

Homoepitaxial gallium nitride based photodetector and method of producing
patent, November 2007

D'Evelyn, Mark; Evers, Nicole; Chu, Kanin
US Patent Document 7,291,544
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7291544

Crystals for a semiconductor radiation detector and method for making the crystals
patent, January 2008

D'Evelyn, Mark; Park, Dong-Sil; Leman, John
US Patent Document 7,316,746
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7316746

Red phosphor for LED based lighting
patent, February 2008

Setlur, Anant; Srivastava, Alok; Comanzo, Holly
US Patent Document 7,329,371
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7329371

Apparatus for obtaining a bulk single crystal using supercritical ammonia
patent, February 2008

Dwilinski, Robert; Doradzinski, Roman; Garczynski, Jerzy
US Patent Document 7,335,262
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7335262

Growth of planar non-polar {1 -1 0 0} m-plane gallium nitride with metalorganic chemical vapor deposition (MOCVD)
patent, March 2008

Imer, Bilge; Speck, James; DenBaars, Steven
US Patent Document 7,338,828
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Red emitting phosphor materials for use in LED and LCD applications
patent, April 2008

Radkov, Emil; Setlur, Anant; Srivastava, Alok
US Patent Document 7,358,542
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7358542

Process for obtaining of bulk monocrystalline gallium-containing nitride
patent, April 2008

Dwilinski, Robert; Doradzinski, Roman; Garczynski, Jerzy
US Patent Document 7,364,619
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7364619

Apparatus for producing single crystal and quasi-single crystal, and associated method
patent, May 2008

D'Evelyn, Mark; Park, Dong-Sil; Lou, Victor
US Patent Document 7,368,015
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7368015

Method of making Group III nitrides
patent, June 2008

Spencer, Michael; DiSalvo, Francis; Wu, Huaqiang
US Patent Document 7,381,391
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7381391

Bulk nitride mono-crystal including substrate for epitaxy
patent, September 2008

Dwili ski, Robert; Doradzi ski, Roman; Garczynski, Jerzy
US Patent Document 7,420,261
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7420261

Group III nitride compositions
patent, August 2009

Spencer, Michael; DiSalvo, Francis; Wu, Huaqiang
US Patent Document 7,569,206
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7569206

System and method for producing solar grade silicon
patent, August 2009

McNulty, Thomas; Norman, Bruce; D'Evelyn, Mark
US Patent Document 7,572,425
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7572425

High temperature high pressure capsule for processing materials in supercritical fluids
patent, December 2009

D'Evelyn, Mark; Narang, Kristi; Giddings, Robert
US Patent Document 7,625,446
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7625446

Method for forming nitride crystals
patent, January 2010

Tysoe, Steven; Park, Dong-Sil; Leman, John
US Patent Document 7,642,122
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7642122

Apparatus for processing materials in supercritical fluids and methods thereof
patent, April 2010

D'Evelyn, Mark; Giddings, Robert; Sharifi, Fred
US Patent Document 7,704,324
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7704324

Heater, apparatus, and associated method
patent, April 2010

Giddings, Robert; D'Evelyn, Mark; Dey, Subhrajit
US Patent Document 7,705,276
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7705276

Oxidized low density lipoprotein sensing device for gallium nitride process
patent, July 2010

Chiu, Hsien-Chin; Lai, Chao-Sung; Hong, Bing-Shan
US Patent Document 7,759,710
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7759710

Light emitting element with a plurality of cells bonded, method of manufacturing the same, and light emitting device using the same
patent, January 2011

Lee, Chung-Hoon; Lee, Keon-Young; Yves, Lacroix
US Patent Document 7,871,839
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7871839

Large-area seed for ammonothermal growth of bulk gallium nitride and method of manufacture
patent, July 2011

Poblenz, Christiane; Speck, James; Kamber, Derrick
US Patent Document 7,976,630
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F7976630

Process and apparatus for large-scale manufacturing of bulk monocrystalline gallium-containing nitride
patent, September 2011

D'Evelyn, Mark
US Patent Document 8,021,481
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8021481

Large-area bulk gallium nitride wafer and method of manufacture
patent, November 2011

Poblenz, Christiane; Schmidt, Mathew; Kamber, Derrick
US Patent Document 8,048,225
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8048225

Heat-conducting thermoplastic compounds and uses thereof
patent, November 2011

Greiner, Robert; Ochsenkuhn, Manfred; Schon, Lothar
US Patent Document 8,062,726
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8062726

High pressure apparatus and method for nitride crystal growth
patent, January 2012

D'Evelyn, Mark
US Patent Document 8,097,081
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8097081

Nitride crystal with removable surface layer and methods of manufacture
patent, April 2012

D'Evelyn, Mark
US Patent Document 8,148,801
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8148801

Light-emitting device and method for manufacturing the same including a light-emitting device and a protection device electrically connected by a connecting line
patent, May 2012

Lee, Sang Youl
US Patent Document 8,188,504
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8188504

Light emitting element with a plurality of cells bonded, method of manufacturing the same, and light emitting device using the same
patent, June 2012

Lee, Chung-Hoon; Lee, Keon-Young; Yves, Lacroix
US Patent Document 8,198,643
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8198643

Semiconductor light emitting device, light emitting module, lighting apparatus, display element and manufacturing method of semiconductor light emitting device
patent, June 2012

Nagai, Hideo
US Patent Document 8,207,548
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8207548

Substrate for the epitaxial growth of gallium nitride
patent, October 2012

Mattmann, Eric; Reutler, Pascal; Lienhart, Fabien
US Patent Document 8,278,656
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Solid state laser device using a selected crystal orientation in non-polar or semi-polar GaN containing materials and methods
patent, October 2012

Sharma, Rajat; Hall, Eric; Poblenz, Christiane
US Patent Document 8,284,810
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8284810

Polarized white light devices using non-polar or semipolar gallium containing materials and transparent phosphors
patent, October 2012

D'Evelyn, Mark; Sharma, Rajat; Hall, Eric
US Patent Document 8,299,473
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8299473

High pressure apparatus and method for nitride crystal growth
patent, November 2012

D'Evelyn, Mark
US Patent Document 8,303,710
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8303710

High indium containing InGaN substrates for long wavelength optical devices
patent, November 2012

Schmidt, Mathew; D'Evelyn, Mark
US Patent Document 8,306,081
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8306081

Process and apparatus for growing a crystalline gallium-containing nitride using an azide mineralizer
patent, December 2012

D'Evelyn, Mark
US Patent Document 8,323,405
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8323405

Nitride crystal with removable surface layer and methods of manufacture
patent, December 2012

D'Evelyn, Mark
US Patent Document 8,329,511
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8329511

Microcavity light emitting diode method of manufacture
patent, January 2013

D'Evelyn, Mark; Sharma, Rajat
US Patent Document 8,354,679
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN%2F8354679

Apparatus and method for seed crystal utilization in large-scale manufacturing of gallium nitride
patent, April 2013

D'Evelyn, Mark
US Patent Document 8,430,958
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High pressure apparatus with stackable rings
patent, May 2013

D'Evelyn, Mark; Kapp, Joseph; Lawrenson, John
US Patent Document 8,435,347
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Process and apparatus for large-scale manufacturing of bulk monocrystalline gallium-containing nitride
patent, May 2013

D'Evelyn, Mark
US Patent Document 8,444,765
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Polycrystalline group III metal nitride with getter and method of making
patent, June 2013

D'Evelyn, Mark
US Patent Document 8,461,071
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Ammonothermal method for growth of bulk gallium nitride
patent, June 2013

Poblenz, Christiane; Speck, James; Kamber, Derrick
US Patent Document 8,465,588
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Method for growth of indium-containing nitride films
patent, July 2013

D'Evelyn, Mark; Poblenz, Christiane; Krames, Michael
US Patent Document 8,482,104
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Large area nonpolar or semipolar gallium and nitrogen containing substrate and resulting devices
patent, July 2013

D'Evelyn, Mark; Speck, James; Houck, William
US Patent Document 8,492,185
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