Title: Process for large-scale ammonothermal manufacturing of gallium nitride boules

Abstract

Large-scale manufacturing of gallium nitride boules using m-plane or wedge-shaped seed crystals can be accomplished using ammonothermal growth methods. Large-area single crystal seed plates are suspended in a rack, placed in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and crystals are grown ammonothermally. The orientation of the m-plane or wedge-shaped seed crystals are chosen to provide efficient utilization of the seed plates and of the volume inside the autoclave or high pressure apparatus.

Inventors:

D'Evelyn, Mark P.; Ehrentraut, Dirk; Kamber, Derrick S.; Downey, Bradley C.

Issue Date:

2018-07-31

Research Org.:

SLT Technologies, Inc., Los Angeles, CA (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1465761

Patent Number(s):

10036099

Application Number:

14/599,335

Assignee:

SLT Technologies, Inc. (Los Angeles, CA)

Patent Classifications (CPCs):

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH

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B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY

B01J3/042 - {in the form of a tube}

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH

C30B29/406 - {Gallium nitride}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY

B01J3/008 - {Processes carried out under supercritical conditions}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L21/02389 - {Nitrides}
H01L21/02035 - {Shaping}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY

B01J3/065 - {Presses for the formation of diamonds or boronitrides}

B - PERFORMING OPERATIONS B30 - PRESSES B30B - PRESSES IN GENERAL

B30B11/002 - {Isostatic press chambers

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH

C30B7/105 - {using ammonia as solvent, i.e. ammonothermal processes}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY

B01J2203/068 - Crystal growth
B01J2203/0665 - Gallium nitrides

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DOE Contract Number:  

SC0006168

Resource Type:

Patent

Resource Relation:

Patent File Date: 2015 Jan 16

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE