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Title: Optomechanical force sensors, cantilevers, and systems thereof

An optomechanical force sensor includes a substrate, a cantilevered beam anchored to the substrate, and a probe tip positioned near an end of the cantilevered beam distal to the substrate. A suspended waveguide is disposed on the cantilevered beam and is optically continuous with an input/output waveguiding structure. An optical cavity is defined within the suspended waveguide.
Inventors:
; ; ; ; ;
Issue Date:
OSTI Identifier:
1464130
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM) SNL-A
Patent Number(s):
10,031,158
Application Number:
15/378,900
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2016 Dec 14
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

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