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Title: Optomechanical force sensors, cantilevers, and systems thereof

Abstract

An optomechanical force sensor includes a substrate, a cantilevered beam anchored to the substrate, and a probe tip positioned near an end of the cantilevered beam distal to the substrate. A suspended waveguide is disposed on the cantilevered beam and is optically continuous with an input/output waveguiding structure. An optical cavity is defined within the suspended waveguide.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1464130
Patent Number(s):
10,031,158
Application Number:
15/378,900
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2016 Dec 14
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Douglas, Erica Ann, Eichenfield, Matt, Jones, Adam, Camacho, Ryan, Henry, Michael David, and Douglas, James Kenneth. Optomechanical force sensors, cantilevers, and systems thereof. United States: N. p., 2018. Web.
Douglas, Erica Ann, Eichenfield, Matt, Jones, Adam, Camacho, Ryan, Henry, Michael David, & Douglas, James Kenneth. Optomechanical force sensors, cantilevers, and systems thereof. United States.
Douglas, Erica Ann, Eichenfield, Matt, Jones, Adam, Camacho, Ryan, Henry, Michael David, and Douglas, James Kenneth. Tue . "Optomechanical force sensors, cantilevers, and systems thereof". United States. https://www.osti.gov/servlets/purl/1464130.
@article{osti_1464130,
title = {Optomechanical force sensors, cantilevers, and systems thereof},
author = {Douglas, Erica Ann and Eichenfield, Matt and Jones, Adam and Camacho, Ryan and Henry, Michael David and Douglas, James Kenneth},
abstractNote = {An optomechanical force sensor includes a substrate, a cantilevered beam anchored to the substrate, and a probe tip positioned near an end of the cantilevered beam distal to the substrate. A suspended waveguide is disposed on the cantilevered beam and is optically continuous with an input/output waveguiding structure. An optical cavity is defined within the suspended waveguide.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {7}
}

Patent:

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