Methods for suppressing spurious modes in microresonators

Branch, Darren W.; Olsson, Roy H.

Title: Methods for suppressing spurious modes in microresonators

Abstract

The present invention relates to methods for suppressing spurious modes in microresonators. In particular embodiments, such spurious modes can be reduced by providing one or more structural components that effectively reduce the acoustic velocity in the transducer domain. Additional methods and microresonators are described herein.

Inventors:: Branch, Darren W.; Olsson, Roy H.

Issue Date:: 2018-06-26

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1459556

Patent Number(s):: 10009002

Application Number:: 15/239,662

Assignee:: National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

Patent Classifications (CPCs):: H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS

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H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
H03H2003/027 - {the resonators or networks being of the microelectro-mechanical [MEMS] type}
H03H2009/02503 - {Breath-like, e.g. Lam? mode, wine-glass mode}
H03H2009/155 - {using MEMS techniques}
H03H3/007 - for the manufacture of electromechanical resonators or networks
H03H3/02 - for the manufacture of piezo-electric or electrostrictive resonators or networks
H03H3/08 - for the manufacture of resonators or networks using surface acoustic waves
H03H9/02086 - {Means for compensation or elimination of undesirable effects}
H03H9/02228 - {Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer}
H03H9/02818 - {Means for compensation or elimination of undesirable effects}

Show less

DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 2016 Aug 17

Country of Publication:: United States

Language:: English

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                    Branch, Darren W., and Olsson, Roy H.. Methods for suppressing spurious modes in microresonators.  United States: N. p., 2018. 
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                    Branch, Darren W., & Olsson, Roy H.. Methods for suppressing spurious modes in microresonators.  United States.

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                    Branch, Darren W., and Olsson, Roy H.. Tue .  
        "Methods for suppressing spurious modes in microresonators".  United States.  https://www.osti.gov/servlets/purl/1459556.

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@article{osti_1459556,

  title        = {Methods for suppressing spurious modes in microresonators},

  author       = {Branch, Darren W. and Olsson, Roy H.},

  abstractNote = {The present invention relates to methods for suppressing spurious modes in microresonators. In particular embodiments, such spurious modes can be reduced by providing one or more structural components that effectively reduce the acoustic velocity in the transducer domain. Additional methods and microresonators are described herein.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2018},

  month        = {6}

}

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Title: Methods for suppressing spurious modes in microresonators

Abstract

Citation Formats

Microelectromechanical resonator and method for fabrication patent, January 2010

Active micromixer using surface acoustic wave streaming patent, May 2011

Two-Dimensional Coupling-of-Modes Analysis in Surface Acoustic Wave Device Performed by COMSOL Multiphysics journal, July 2011

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Microfabricated ion frequency standard patent, December 2010

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6D-5 A 2D P-Matrix Model for the Simulation of Waveguiding and Diffraction in SAW Components (Invited) conference, October 2006

Neural interface methods and apparatus to provide artificial sensory capabilities to a subject patent, January 2017

Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors conference, May 2007

High Coupling, Low Loss PBAW Device and Associated Method patent-application, December 2013

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Review of models for low-loss filter design and applications conference, January 1994

Thin Fiim Acoustic Surface Waveguides on Anisotropic Media journal, March 1975

Suppressing Fine-frequency modes in Aluminum Nitride microresonators conference, September 2014

Microfabricated bulk wave acoustic bandgap device patent, November 2010

General Green's functions for SAW device analysis journal, September 1999

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Apparatuses and methods for tuning center frequencies patent, February 2016

Shear horizontal surface acoustic wave microsensor for Class A viral and bacterial detection. report, October 2008

Analysis of SAW grating waveguides using 2-D coupling-of-modes equations conference, January 2001

Single phase undirectional surface acoustic wave transducer and improved reflectors patent, February 2007

Origins and mitigation of spurious modes in aluminum nitride microresonators conference, October 2010

Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators patent, July 2013

Piezoelectric aluminum nitride thin films for microelectromechanical systems journal, November 2012

SAW transversely guided mode spurious elimination by optimization of conversion efficiency using W/W0 electrode structure conference, January 1998

Method for fabricating a microelectromechanical resonator patent, February 2013

Transformation of surface acoustic waves into boundary waves in Piezoelectric/Metal/Dielectric structures conference, September 2009

Elucidating the origin of spurious modes in aluminum nitride microresonators using a 2-D finite-element model journal, May 2014

Multimode SAW Resonators - A Method to Study the Optimum Resonator Design conference, January 1976

Low phase noise MEMS-based oscillator with bifurcation and parametric noise squeezing patent, June 2013

Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material patent, September 2013

Contour mode resonators with acoustic reflectors patent, June 2008

Microfabricated bulk wave acoustic bandgap device patent, June 2010

Microsystem for determining clotting time of blood and low-cost, single-use device for use therein patent, November 2007

Phononic crystal devices patent, January 2012

Second harmonic generation in resonant optical structures patent, January 2018

A robust formulation of SAW Green's functions for arbitrarily thick multilayers at high frequencies journal, July 2002

Transverse Mode Spurious Resonance Suppression in Lamb Wave MEMS Resonators: Theory, Modeling, and Experiment journal, September 2015

Microelectromechanical resonator and method for fabrication patent, November 2009

Coupling-Of-Modes Analysis Of SAW Devices journal, December 2000

A generalised P-matrix model for SAW filters conference, January 2003

Microfabricated particle focusing device patent, April 2013

Synthetic thermoelectric materials comprising phononic crystals patent, August 2013

Group single-phase unidirectional transducers with 3/8.lambda.and 5/8.lambda. sampling patent, December 1991

Suppression mechanism of transverse-mode spurious responses in SAW resonators on a SiO2/Al/LiNbO3 structure conference, October 2011

Shear Horizontal Surface Acoustic Wave (Sh-Saw) Resonators and Arrays Thereof patent-application, February 2017

AlN Microresonator-Based Filters With Multiple Bandwidths at Low Intermediate Frequencies journal, August 2013

Suppression of transverse-mode spurious responses in thin film lamb wave resonators by bandgap engineering conference, September 2014

Surface wave converter with optimized reflection patent, August 2004

Elucidating the origin of spurious modes in aluminum nitride microresonators using a 2-D finite-element model journal, May 2014

Multilayered Structure as a Novel Material for Surface Acoustic Wave Devices: Physical Insight book, November 2011

Acoustic Wave Device patent-application, December 2012

Single crystal micromechanical resonator and fabrication methods thereof patent, December 2016

Simultaneous sample manipulation and sensing using surface acoustic waves patent, February 2011

Ovenized microelectromechanical system (MEMS) resonator patent, March 2014

Two-Dimensional Coupling-of-Modes Analysis in Surface Acoustic Wave Device Performed by COMSOL Multiphysics journal, July 2011

Microresonator electrode design patent, May 2016

Thermally-isolated silicon-based integrated circuits and related methods patent, May 2017

Nano-optomechanical transducer patent, December 2013

Lamb wave type high frequency device patent, May 2009

Suppression of transverse-mode spurious responses for saw resonators on SiO2/Al/LiNbO3 structure by selective removal of SiO2 journal, October 2011

MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads patent, December 2013

Detection of bioagents using a shear horizontal surface acoustic wave biosensor patent, April 2014

Methods for dry etching semiconductor devices patent, November 2016

Tratamento homeopático da papilomatose bovina journal, August 2017

Method of making thermally-isolated silicon-based integrated circuits patent, November 2017

Acoustic wave device patent, July 2015

High-frequency shear-horizontal surface acoustic wave sensor patent, May 2013

4D-4 Love Wave Acoustic Array Biosensor Platform for Autonomous Detection conference, October 2007

Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS journal, May 2007

Microelectromechanical resonator and method for fabrication
patent, January 2010

Active micromixer using surface acoustic wave streaming
patent, May 2011

Two-Dimensional Coupling-of-Modes Analysis in Surface Acoustic Wave Device Performed by COMSOL Multiphysics
journal, July 2011

Tuning method for microresonators and microresonators made thereby
patent, December 2015

Single crystal micromechanical resonator
patent, May 2017

Microfluidic device for acoustic cell lysis
patent, August 2015

Miniature acoustic wave lysis system and uses thereof
patent, December 2016

Modes in SAW grating resonators
journal, December 1977

Microfabricated ion frequency standard
patent, December 2010

Programmable electroacoustic filter apparatus and method for its manufacture
patent, March 2016

Microfluidic package and method of making the same
patent-application, August 2017

6D-5 A 2D P-Matrix Model for the Simulation of Waveguiding and Diffraction in SAW Components (Invited)
conference, October 2006

Neural interface methods and apparatus to provide artificial sensory capabilities to a subject
patent, January 2017

Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors
conference, May 2007

High Coupling, Low Loss PBAW Device and Associated Method
patent-application, December 2013

Fast evaluation of lamb wave scattering by time harmonic FEM simulation
conference, September 2009

Review of models for low-loss filter design and applications
conference, January 1994

Thin Fiim Acoustic Surface Waveguides on Anisotropic Media
journal, March 1975

Suppressing Fine-frequency modes in Aluminum Nitride microresonators
conference, September 2014

Microfabricated bulk wave acoustic bandgap device
patent, November 2010

General Green's functions for SAW device analysis
journal, September 1999

High-frequency shear-horizontal surface acoustic wave sensor
patent, March 2014

Apparatuses and methods for tuning center frequencies
patent, February 2016

Shear horizontal surface acoustic wave microsensor for Class A viral and bacterial detection.
report, October 2008

Analysis of SAW grating waveguides using 2-D coupling-of-modes equations
conference, January 2001

Single phase undirectional surface acoustic wave transducer and improved reflectors
patent, February 2007

Origins and mitigation of spurious modes in aluminum nitride microresonators
conference, October 2010

Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators
patent, July 2013

Piezoelectric aluminum nitride thin films for microelectromechanical systems
journal, November 2012

SAW transversely guided mode spurious elimination by optimization of conversion efficiency using W/W0 electrode structure
conference, January 1998

Method for fabricating a microelectromechanical resonator
patent, February 2013

Transformation of surface acoustic waves into boundary waves in Piezoelectric/Metal/Dielectric structures
conference, September 2009

Elucidating the origin of spurious modes in aluminum nitride microresonators using a 2-D finite-element model
journal, May 2014

Multimode SAW Resonators - A Method to Study the Optimum Resonator Design
conference, January 1976

Low phase noise MEMS-based oscillator with bifurcation and parametric noise squeezing
patent, June 2013

Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material
patent, September 2013

Contour mode resonators with acoustic reflectors
patent, June 2008

Microfabricated bulk wave acoustic bandgap device
patent, June 2010

Microsystem for determining clotting time of blood and low-cost, single-use device for use therein
patent, November 2007

Phononic crystal devices
patent, January 2012

Second harmonic generation in resonant optical structures
patent, January 2018

A robust formulation of SAW Green's functions for arbitrarily thick multilayers at high frequencies
journal, July 2002

Transverse Mode Spurious Resonance Suppression in Lamb Wave MEMS Resonators: Theory, Modeling, and Experiment
journal, September 2015

Microelectromechanical resonator and method for fabrication
patent, November 2009

Coupling-Of-Modes Analysis Of SAW Devices
journal, December 2000

A generalised P-matrix model for SAW filters
conference, January 2003

Microfabricated particle focusing device
patent, April 2013

Synthetic thermoelectric materials comprising phononic crystals
patent, August 2013

Group single-phase unidirectional transducers with 3/8.lambda.and 5/8.lambda. sampling
patent, December 1991

Suppression mechanism of transverse-mode spurious responses in SAW resonators on a SiO₂/Al/LiNbO₃ structure
conference, October 2011

Shear Horizontal Surface Acoustic Wave (Sh-Saw) Resonators and Arrays Thereof
patent-application, February 2017

AlN Microresonator-Based Filters With Multiple Bandwidths at Low Intermediate Frequencies
journal, August 2013

Suppression of transverse-mode spurious responses in thin film lamb wave resonators by bandgap engineering
conference, September 2014

Surface wave converter with optimized reflection
patent, August 2004

Elucidating the origin of spurious modes in aluminum nitride microresonators using a 2-D finite-element model
journal, May 2014

Multilayered Structure as a Novel Material for Surface Acoustic Wave Devices: Physical Insight
book, November 2011

Acoustic Wave Device
patent-application, December 2012

Single crystal micromechanical resonator and fabrication methods thereof
patent, December 2016

Simultaneous sample manipulation and sensing using surface acoustic waves
patent, February 2011

Ovenized microelectromechanical system (MEMS) resonator
patent, March 2014

Two-Dimensional Coupling-of-Modes Analysis in Surface Acoustic Wave Device Performed by COMSOL Multiphysics
journal, July 2011

Microresonator electrode design
patent, May 2016

Thermally-isolated silicon-based integrated circuits and related methods
patent, May 2017

Nano-optomechanical transducer
patent, December 2013

Lamb wave type high frequency device
patent, May 2009

Suppression of transverse-mode spurious responses for saw resonators on SiO₂/Al/LiNbO₃ structure by selective removal of SiO₂
journal, October 2011

MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads
patent, December 2013

Detection of bioagents using a shear horizontal surface acoustic wave biosensor
patent, April 2014

Methods for dry etching semiconductor devices
patent, November 2016

Tratamento homeopático da papilomatose bovina
journal, August 2017

Method of making thermally-isolated silicon-based integrated circuits
patent, November 2017

Acoustic wave device
patent, July 2015

High-frequency shear-horizontal surface acoustic wave sensor
patent, May 2013

4D-4 Love Wave Acoustic Array Biosensor Platform for Autonomous Detection
conference, October 2007

Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS
journal, May 2007