On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer

Han, Seunghoon; Horie, Yu; Faraon, Andrei; Arbabi, Amir

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Title: On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer

Abstract

An on-chip optical filter having Fabri-Perot resonators and a spectrometer may include a first sub-wavelength grating (SWG) reflecting layer and a second SWG reflecting layer facing each other. A plurality of Fabri-Perot resonators are formed by the first SWG reflecting layer and the second SWG reflecting layer facing each other. Each of the Fabri-Perot resonators may transmit light corresponding to a resonance wavelength of the Fabri-Perot resonator. The resonance wavelengths of the Fabri-Perot resonators may be determined according to duty cycles of grating patterns.

Inventors:: Han, Seunghoon; Horie, Yu; Faraon, Andrei; Arbabi, Amir

Issue Date:: 2018-04-10

Research Org.:: AMSUNG ELECTRONICS CO., LTD. (Suwon-Si, KR); California Institute of Technology (CalTech), Pasadena, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1433857

Patent Number(s):: 9939587

Application Number:: 15/249,608; DE-SC0001293

Assignee:: SAMSUNG ELECTRONICS CO., LTD. (Suwon-Si, KR); CALIFORNIA INSTITUTE OF TECHNOLOGY (Pasadena, CA)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
G01J2003/2826 - {Multispectral imaging, e.g. filter imaging}
G01J3/18 - using diffraction elements, e.g. grating
G01J3/1895 - {using fiber Bragg gratings or gratings integrated in a waveguide}
G01J3/26 - using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B5/1809 - {with pitch less than or comparable to the wavelength}
G02B5/201 - {in the form of arrays}
G02B5/281 - {designed for the infra-red light}
G02B5/288 - {comprising at least one thin film resonant cavity, e.g. in bandpass filters}
G02B6/29325 - {of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
G02B6/29356 - {Interference cavity within a single light guide, e.g. between two fibre gratings

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Resource Type:: Patent

Resource Relation:: Patent File Date: 2016 Aug 29

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Han, Seunghoon, Horie, Yu, Faraon, Andrei, and Arbabi, Amir. On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer.  United States: N. p., 2018. 
        Web.

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                    Han, Seunghoon, Horie, Yu, Faraon, Andrei, & Arbabi, Amir. On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer.  United States.

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                    Han, Seunghoon, Horie, Yu, Faraon, Andrei, and Arbabi, Amir. Tue .  
        "On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer".  United States.  https://www.osti.gov/servlets/purl/1433857.

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@article{osti_1433857,

  title        = {On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer},

  author       = {Han, Seunghoon and Horie, Yu and Faraon, Andrei and Arbabi, Amir},

  abstractNote = {An on-chip optical filter having Fabri-Perot resonators and a spectrometer may include a first sub-wavelength grating (SWG) reflecting layer and a second SWG reflecting layer facing each other. A plurality of Fabri-Perot resonators are formed by the first SWG reflecting layer and the second SWG reflecting layer facing each other. Each of the Fabri-Perot resonators may transmit light corresponding to a resonance wavelength of the Fabri-Perot resonator. The resonance wavelengths of the Fabri-Perot resonators may be determined according to duty cycles of grating patterns.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2018},

  month        = {4}

}

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Similar Records

Title: On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer

Abstract

Citation Formats

Guided-mode-resonance transmission color filters for color generation in CMOS image sensors patent, December 2010

Sub-wavelength grating integrated VCSEL patent, May 2012

Scanning spectroscopy modulation for frequency domain spectral analysis patent, July 2012

Spectro-sensor and spectrometer employing the same patent, June 2017

Methods for screening cells and antibodies patent-application, July 2007

Highly efficient optical gratings with reduced thickness requirements and impedance- matching layers patent-application, May 2009

Tunable Multi-Wavelength Semiconductor Laser Array For Optical Communications Based On Wavelength Division Multiplexing patent-application, December 2011

Optical Devices Based On Non-Periodic Sub-Wavelength Gratings patent-application, April 2012

Silicon-On-Insulator Platform for Integration of Tunable Laser Arrays patent-application, July 2014

Grating Based Optical Coupler patent-application, April 2015

Optical Filter and Spectrometer patent-application, August 2015

Spectro-Sensor And Spectrometer Employing The Same patent-application, November 2015

Silicon nanophotonic devices for integrated sensing journal, January 2009

A high-resolution spectrometer based on a compact planar two dimensional photonic crystal cavity array journal, June 2012

High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers journal, October 2013

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Broadband Mirrors in the Near-Infrared Based on Subwavelength Gratings in SOI journal, October 2010

Design of Fano Broadband Reflectors on SOI journal, August 2010

Guided-mode-resonance transmission color filters for color generation in CMOS image sensors
patent, December 2010

Sub-wavelength grating integrated VCSEL
patent, May 2012

Scanning spectroscopy modulation for frequency domain spectral analysis
patent, July 2012

Spectro-sensor and spectrometer employing the same
patent, June 2017

Methods for screening cells and antibodies
patent-application, July 2007

Highly efficient optical gratings with reduced thickness requirements and impedance- matching layers
patent-application, May 2009

Tunable Multi-Wavelength Semiconductor Laser Array For Optical Communications Based On Wavelength Division Multiplexing
patent-application, December 2011

Optical Devices Based On Non-Periodic Sub-Wavelength Gratings
patent-application, April 2012

Silicon-On-Insulator Platform for Integration of Tunable Laser Arrays
patent-application, July 2014

Grating Based Optical Coupler
patent-application, April 2015

Optical Filter and Spectrometer
patent-application, August 2015

Spectro-Sensor And Spectrometer Employing The Same
patent-application, November 2015

Silicon nanophotonic devices for integrated sensing
journal, January 2009

A high-resolution spectrometer based on a compact planar two dimensional photonic crystal cavity array
journal, June 2012

High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers
journal, October 2013

Fabrication of CMOS-compatible optical filter arrays using gray-scale lithography
journal, January 2012

Flat dielectric grating reflectors with focusing abilities
journal, May 2010

Ultrabroadband Mirror Using Low-Index Cladded Subwavelength Grating
journal, February 2004

Theoretical analysis of subwavelength high contrast grating reflectors
journal, January 2010

Physics of near-wavelength high contrast gratings
journal, January 2012

S⁴ : A free electromagnetic solver for layered periodic structures
journal, October 2012

Broadband Mirrors in the Near-Infrared Based on Subwavelength Gratings in SOI
journal, October 2010

Design of Fano Broadband Reflectors on SOI
journal, August 2010