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Title: On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer

An on-chip optical filter having Fabri-Perot resonators and a spectrometer may include a first sub-wavelength grating (SWG) reflecting layer and a second SWG reflecting layer facing each other. A plurality of Fabri-Perot resonators are formed by the first SWG reflecting layer and the second SWG reflecting layer facing each other. Each of the Fabri-Perot resonators may transmit light corresponding to a resonance wavelength of the Fabri-Perot resonator. The resonance wavelengths of the Fabri-Perot resonators may be determined according to duty cycles of grating patterns.
Inventors:
; ; ;
Issue Date:
OSTI Identifier:
1433857
Assignee:
SAMSUNG ELECTRONICS CO., LTD. (Suwon-Si, KR); CALIFORNIA INSTITUTE OF TECHNOLOGY (Pasadena, CA) ARPA-E
Patent Number(s):
9,939,587
Application Number:
15/249,608; DE-SC0001293
Resource Relation:
Patent File Date: 2016 Aug 29
Research Org:
AMSUNG ELECTRONICS CO., LTD. (Suwon-Si, KR); CALIFORNIA INSTITUTE OF TECHNOLOGY, Pasadena, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

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